Integrated degumming frame for degumming

Abstract

The utility model discloses an integrated degumming frame for degumming, which comprises a degumming tool support frame, side stop levers are symmetrically arranged in the degumming tool support frame, the side stop levers clamp a crystal bar, black rubber tubes are symmetrically arranged in the degumming tool support frame, the black rubber tubes hold the crystal bar from below, sliding guide rails are fixedly arranged at two ends of the degumming tool support frame, and the sliding guide rails are fixedly arranged on the degumming tool support frame. A degumming frame connecting rod mechanism is connected to the sliding guide rail in a sliding mode and comprises an upper sliding plate, a lower sliding plate, a sliding base and a positioning plate, the sliding base is fixedly connected with the supporting rod top plate, the sliding base is connected with the sliding guide rail in a sliding mode and further fixedly connected with the lower sliding plate, and a spring inserting and clamping structure is arranged between the sliding base and the degumming tool supporting frame. First inclined grooves for the black rubber pipe to slide are formed in the two end faces of the degumming tool supporting frame, the degumming frame connecting rod mechanism is used for driving the side stop rods and the black rubber pipe to clamp the crystal bar, the automation degree of degumming and clamping of the crystal bar is high, the clamping speed is high, and the degumming efficiency of the crystal bar is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor automatic production equipment, and particularly relates to a degumming integrated degumming rack. Background Technique

[0002] Since the current degumming tooling meets the function of automatic blanking tray, it cannot meet the requirements of automatic production. The weight of the tray is relatively high, and the production efficiency cannot be satisfied, so it cannot achieve the effect of saving time and effort. Once the weight is too high and the production efficiency is increased, a large amount of manpower will be consumed.

[0003] Therefore, we propose a degumming integrated degumming rack to solve the problems raised above. Content of the Utility Model

[0004] The purpose of the utility model is to provide a degumming integrated degumming rack to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: a degumming integrated degumming rack, comprising: a degumming tooling support frame, side baffle rods are symmetrically arranged inside the degumming tooling support frame, the side baffle rods clamp the ingot, black rubber tubes are symmetrically arranged inside the degumming tooling support frame, and the black rubber tubes hold the ingot from below;

[0006] Sliding rails are fixedly arranged at both ends of the degumming tooling support frame, and a degumming rack link mechanism is slidably connected to the sliding rails;

[0007] The degumming rack link mechanism includes an upper slide plate, a lower slide plate, a slide seat and a positioning plate. The slide seat is fixedly connected to the top plate of the support rod, the slide seat is slidably connected to the sliding rail, the slide seat is also fixedly connected to the lower slide plate, and a spring snap structure is arranged between the slide seat and the degumming tooling support frame;

[0008] First inclined grooves for the black rubber tubes to slide are formed on both end faces of the degumming tooling support frame.

[0009] Preferably, a degumming tooling slide rail is fixedly installed above the degumming tooling support frame, and a sticky plate is fixedly installed on the lower surface of the degumming tooling slide rail. The sticky plate, the side baffle rods and the black rubber tubes cooperate to clamp the ingot.

[0010] Preferably, positioning pads are arranged at both ends of the degumming tooling to position the degumming tooling.

[0011] Preferably, two positioning plates are symmetrically arranged at each end of the degumming tooling support frame. Transverse V-shaped sliding grooves are formed on the positioning plates, second inclined grooves are formed on the upper slide plate, and the ends of the side baffle rods are slidably connected to the V-shaped sliding grooves and the second inclined grooves at the same time. The upper slide plate is slidably connected to the sliding rail, and the upper slide plate is fixedly connected to the slide seat.

[0012] Preferably, two first inclined grooves are symmetrically arranged on each end face and are arranged in a V-shaped pattern.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0014] When the ingot enters the debonding rack, the frame for transferring the ingot presses against the top plate of the support rod to make it rise, the upper slide plate and the lower slide plate displace, and through the combined action of the first inclined groove, the second inclined groove and the V-shaped sliding groove, the side stop rod and the black rubber tube gather, and cooperate with the bonding plate to complete the clamping of the ingot, so that the degree of automation of ingot debonding and clamping is high, the clamping speed is fast, and the debonding efficiency of the ingot is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic structural diagram of the present utility model;

[0016] Figure 2 is a front view of the present utility model;

[0017] Figure 3 is a side view of the present utility model.

[0018] In the figure: 1, debonding tooling support frame; 11, first inclined groove; 2, side stop rod; 3, ingot; 4, sliding guide rail; 5, debonding rack linkage mechanism; 51, upper slide plate; 511, second inclined groove; 52, lower slide plate; 53, sliding seat; 54, positioning plate; 6, top plate of the support rod; 7, debonding tooling slide rail; 8, positioning cushion block; 9, black rubber tube. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0020] Please refer to Figures 1-3 , the present utility model provides a technical solution: a debonding integrated debonding rack, including: a debonding tooling support frame 1, side stop rods 2 are symmetrically arranged inside the debonding tooling support frame 1, the side stop rods 2 clamp the ingot 3, black rubber tubes 9 are symmetrically arranged inside the debonding tooling support frame 1, and the black rubber tubes 9 hold the ingot 3 from below;

[0021] A debonding tooling slide rail 78 is fixedly installed above the debonding tooling support frame 1, and a bonding plate is fixedly installed on the lower surface of the debonding tooling slide rail 78. The bonding plate, the side stop rod 2 and the black rubber tube 9 cooperate to clamp the ingot 3;

[0022] Both ends of the degumming tooling support frame 1 are fixedly provided with sliding guide rails 4, and a degumming frame link mechanism 5 is slidably connected to the sliding guide rails 4;

[0023] The degumming frame link mechanism 5 includes an upper slide plate 51, a lower slide plate 52, a slide seat 53 and a positioning plate 54. The slide seat 53 is fixedly connected to the rod support top plate 6. The slide seat 53 is slidably connected to the sliding guide rail 4. The slide seat 53 is also fixedly connected to the lower slide plate 52. When the rod support top plate 6 moves upward, the lower slide plate 52 is driven by the slide seat 53 to move upward. A spring snap structure is provided between the slide seat 53 and the degumming tooling support frame 1. When the slide seat 53 moves upward for the first time to a certain position, it is relatively fixed to the degumming tooling support frame 1. When moving upward again, the slide seat 53 is disengaged from the degumming tooling support frame 1 and can move downward smoothly;

[0024] First diagonal slots 11 for the sliding of the black rubber tubes 9 are provided on both end faces of the degumming tooling support frame 1. Two first diagonal slots 11 are symmetrically provided on each end face and are arranged in a spread shape. When the first diagonal slots 11 move upward, the black rubber tubes 9 are driven to gather upward to hold the ingot 3. When the slide seat 53 moves upward again to release the card, the black rubber tubes 9 can slide downward smoothly under their own weight to disengage from the ingot 3;

[0025] Two positioning plates 54 are symmetrically provided at each end of the degumming tooling support frame 1. Transverse V-shaped sliding slots are provided on the positioning plates 54. Second diagonal slots 511 are provided on the upper slide plate 51. The ends of the side stop rods 2 are slidably connected to the V-shaped sliding slots and the second diagonal slots 511 at the same time. The upper slide plate 51 is slidably connected to the sliding guide rail 4, and the upper slide plate 51 is fixedly connected to the slide seat 53. When the slide seat 53 moves upward, the upper slide plate 51 is driven to move upward. Through the V-shaped sliding slots and the second diagonal slots 511, the side stop rods 2 are driven to approach and clamp the ingot 3;

[0026] The side stop rods 2 clamp the ingot 3 from both sides, and the black rubber tubes 9 slide obliquely upward from below the ingot 3 to hold the ingot 3, completing the overall clamping action on the ingot 3;

[0027] Positioning pads 8 are provided at both ends of the degumming tooling 7, and the positioning pads 8 position the degumming tooling 7;

[0028] Working principle: When the ingot 3 enters the degumming frame, the frame for transferring the ingot 3 presses against the rod support top plate 6 to make it rise. The upper slide plate 51 and the lower slide plate 52 are displaced. With the combined action of the first diagonal slots 11, the second diagonal slots 511 and the V-shaped sliding slots, the side stop rods 2 and the black rubber tubes 9 gather, and cooperate with the bonding plate to complete the clamping of the ingot 3;

[0029] The card is released through the slide seat 53 and the spring snap structure, and the side stop rods 2 and the black rubber tubes 9 are reset, making the automation degree of the degumming clamping of the ingot 3 high, the clamping speed fast, and improving the degumming efficiency of the ingot 3.

[0030] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0031] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A degumming integrated degumming rack, comprising: The degumming tool support frame (1) is characterized in that side blocking rods (2) are symmetrically arranged in the degumming tool support frame (1), the side blocking rods (2) clamp the crystal rod (3), and black rubber tubes (9) are symmetrically arranged in the degumming tool support frame (1), and the black rubber tubes (9) hold the crystal rod (3) from below; Sliding guide rails (4) are fixedly arranged at both ends of the degumming tool support frame (1), and the degumming frame connecting rod mechanism (5) is slidably connected to the sliding guide rails (4); The degumming frame connecting rod mechanism (5) comprises an upper slide plate (51), a lower slide plate (52), a slide seat (53) and a positioning plate (54); the slide seat (53) is fixedly connected to the support rod top plate (6); the slide seat (53) is slidably connected to the sliding guide rail (4); the slide seat (53) is also fixedly connected to the lower slide plate (52); and a spring plug-in structure is provided between the slide seat (53) and the degumming tool support frame (1); The two end surfaces of the degumming tool support frame (1) are provided with first oblique grooves (11) for the black rubber tube (9) to slide.

2. The integrated degumming rack according to claim 1, characterized in that: A degumming tooling slide rail (78) is fixedly installed above the degumming tooling support frame (1), and a sticking plate is fixedly installed on the lower surface of the degumming tooling slide rail (78). The sticking plate, the side blocking rod (2) and the black rubber tube (9) cooperate to clamp the crystal rod (3).

3. The integrated degumming rack according to claim 1, characterized in that: Positioning pads (8) are provided at both ends of the degumming tool (7), and the positioning pads (8) are used to position the degumming tool (7).

4. The integrated degumming rack according to claim 1, characterized in that: The positioning plates (54) are symmetrically arranged at each end of the degumming tooling support frame (1), a transverse V-shaped slide groove is provided on the positioning plate (54), a second oblique groove (511) is provided on the upper slide plate (51), the end of the side guard rod (2) is slidably connected to the V-shaped slide groove and the second oblique groove (511) at the same time, the upper slide plate (51) is slidably connected to the sliding guide rail (4), and the upper slide plate (51) is fixedly connected to the slide seat (53).

5. The integrated degumming rack according to claim 4, characterized in that: Two first oblique grooves (11) are symmetrically arranged on each end surface and are arranged in an eight-shaped shape.

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