Multiple cross contamination prevention pulse laser deposition system scanning target table

Abstract

The utility model relates to a multiple cross contamination prevention pulse laser deposition system scanning target table which comprises a three-dimensional target table structure used for controlling three-dimensional operation of a target holder structure. The target holder structure comprises a target holder table, a shielding cover, a plurality of target materials and a plurality of conical target holders, the target holder table is arranged at the end of the three-dimensional target holder structure in a pluggable mode, the plurality of target materials are arranged on the side face of the target holder table at intervals in the circumferential direction, and the plurality of conical target holders cover the peripheral sides of the plurality of target materials in a one-to-one correspondence mode; the shielding cover covers the outer sides of the multiple conical target holders and is connected with the outer side face of the three-dimensional target table structure, a laser through hole is formed in the side face of the shielding cover, and the laser through hole can correspond to one target material in position; and the rotary feed-through module is arranged at one end of the three-dimensional target table structure and is used for driving the target holder structure to switch the target body. According to the utility model, double antifouling is realized, and the mutual pollution between targets is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of physical vapor deposition, and particularly relates to a scanning target table of a multi-prevention cross-contamination pulsed laser deposition system. Background Art

[0002] In a pulsed laser deposition system, general target materials are involved in a scenario where multiple targets are loaded and used simultaneously, so that different materials can be prepared during a single growth preparation process, artificial material structures such as multi-layer films, superlattices, and heterojunctions can be designed and constructed, and advanced functions can be realized. If there is a target table with multiple targets, the material switching is achieved by moving the required target to the pulsed laser optical path through vacuum movement to realize the laser bombardment deposition of the required material.

[0003] The plume generated by laser bombardment of the target diffuses forward in a vacuum. However, due to the presence of background gas, the plasma in the plume will be scattered, so the plume will have effects such as backscattering or lateral diffusion. Therefore, in addition to most of the forward diffusion, some of the materials ejected and peeled off will also diffuse laterally and reversely. If other targets are not well protected, these laterally and reversely diffused materials will have a probability of depositing on these targets, resulting in the contamination of other targets by the target material being used. When preparing a multi-layer film, the target grown first contaminates the target grown later. When growing the material of the contaminated target, impurities will appear in the grown film, greatly reducing the quality of the film.

[0004] In the prior art, there are mainly two target table structures for pulsed laser deposition systems, one is a revolving and rotating target structure, and the other is a linear scanning target table structure. Each has its own method to prevent cross-contamination of the targets. For the linear scanning target table structure, the current anti-cross-contamination structure between the targets cannot achieve a perfect effect. For example, the structure that only places a partition between the targets to prevent contamination will still have the plume contaminating other targets through backscattering. Conventional scanning targets are difficult to completely wrap other targets, and cross-contamination is inevitable. Summary of the Utility Model

[0005] To solve the problems in the background art, the utility model proposes a scanning target table of a multi-prevention cross-contamination pulsed laser deposition system. The utility model realizes double anti-contamination and reduces the mutual contamination between the targets.

[0006] To solve the above problems, the present utility model adopts the following technical solutions: A scanning target stage for a multi-prevention cross-contamination pulsed laser deposition system, including a three-dimensional target stage structure for controlling the three-dimensional operation of the target holder structure; a target holder structure, including a target holder table, a shielding cover, a plurality of target materials, and a plurality of conical target holders. The target holder table is detachably arranged at the end of the three-dimensional target stage structure. The plurality of target materials are circumferentially spaced and arranged on the side surface of the target holder table. The plurality of conical target holders are respectively arranged outside the plurality of target materials in a one-to-one correspondence. The shielding cover is arranged outside the plurality of conical target holders and is connected to the outer side surface of the three-dimensional target stage structure. A laser through hole is formed on the side surface of the shielding cover, and the laser through hole can correspond to the position of one of the target materials; a rotary feedthrough module is arranged at one end of the three-dimensional target stage structure for driving the target holder structure to switch the target body.

[0007] Further, the rotary feedthrough module includes a rotary feedthrough body, a hollow fixed shaft, and a rotary shaft. The rotary feedthrough body is arranged at the end of the three-dimensional target stage structure. One end of the rotary shaft is rotatably arranged on the rotary feedthrough body. The hollow fixed shaft is sleeved on the rotary shaft. The other end of the rotary shaft is detachably connected to the target holder table.

[0008] Further, the target holder structure further includes a slot seat arranged at the end of the target holder table. A guide shaft is arranged at the top of the slot seat. A guide hole cooperating with the guide shaft is formed at the bottom of the target holder table. The slot seat is rotatably connected to the shielding cover through a bearing. A connecting blind hole is formed at the bottom of the slot seat. A connecting through hole is formed on the inner top surface of the connecting blind hole. The top of the hollow fixed shaft is inserted and matched with the connecting blind hole. The rotary shaft is connected to the connecting through hole.

[0009] Still further, a pressing spring piece is further arranged at the top of the slot seat. The bottom of the pressing spring piece is used for pressing and connecting with the top surface of the target holder table.

[0010] Further, the target holder table includes a fixed base, a mounting top seat, and a plurality of connecting bushings. The guide hole is formed on the fixed base. One end of the pressing spring piece is arranged on the top surface of the slot seat. The other end of the pressing spring piece is pressed and connected with the top surface of the fixed base. The mounting top seat is connected above the fixed base. The plurality of connecting bushings are evenly spaced along the circumference of the mounting top seat. The plurality of target materials are respectively detachably connected to the plurality of connecting bushings in a one-to-one correspondence.

[0011] Further, the shielding cover includes a cover body and a sealing plate. An installation opening is arranged on the side surface of the cover body. The sealing plate is rotatably installed at the installation opening of the cover body. The laser through hole is formed on the cover body.

[0012] Advantages of the present utility model: The present utility model controls the three-dimensional movement of the target holder structure through a three-dimensional target table structure. The rotary feedthrough module is used to control the revolution of the target holder structure to realize the switching of target materials. When the laser hits the target material, the generated plume is scattered by the collision of gas molecules in the vacuum chamber. Due to the setting of the conical target holder, the conical surface structure of the conical target holder can limit the propagation angle of the plume and reduce the lateral and reverse diffusion of the plume. Since only a laser through-hole is opened on the shielding cover, the plume generated by the laser hitting the target material through the laser through-hole can be prevented from entering other target materials and causing pollution under the blocking effect of the shielding cover. Compared with the defect that the traditional anti-pollution laser target table cannot effectively prevent pollution, the present utility model effectively reduces the mutual pollution between target materials through a double anti-pollution structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present utility model will be further described below with reference to the drawings and embodiments.

[0014] Figure 1 is a schematic structural diagram of the present utility model;

[0015] Figure 2 is a schematic internal structure diagram of the target holder structure;

[0016] Figure 3 is a schematic structural diagram of the slot seat;

[0017] Figure 4 is a schematic structural diagram of the target holder table;

[0018] Figure 5 is a schematic structural diagram of the shielding cover.

[0019] 1. Three-dimensional target table structure; 2. Target holder structure; 3. Target holder table; 4. Shielding cover; 5. Target material; 6. Conical target holder; 7. Laser through-hole; 8. Rotary feedthrough module; 9. Rotary feedthrough body; 10. Hollow fixed shaft; 11. Rotary shaft; 12. Slot seat; 13. Guide shaft; 14. Guide hole; 15. Compression spring piece; 16. Fixed base; 17. Installation top seat; 18. Connecting shaft sleeve; 19. Cover body; 20. Sealing plate; 21. Installation port. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts shall fall within the protection scope of the present utility model.

[0021] The present utility model controls the three-dimensional movement of the target holder structure 2 through the three-dimensional target table structure 1. The rotary feedthrough module 8 is used to control the revolution of the target holder structure 2 to realize the switching of the target material 5. When the laser hits the target material 5, the generated plume is scattered by the collision of gas molecules in the vacuum chamber. Due to the setting of the conical target holder 6, the conical surface structure of the conical target holder 6 can limit the propagation angle of the plume and reduce the lateral and reverse diffusion of the plume. Since only the laser through-hole 7 is opened on the shielding cover 4, the plume generated by the laser hitting the target material 5 through the laser through-hole 7 can be prevented from entering other target materials 5 to cause pollution under the blocking effect of the shielding cover 4. Compared with the defect that the traditional anti-pollution laser target table cannot effectively prevent pollution, the present utility model effectively reduces the mutual pollution between the target materials 5 through a double anti-pollution structure.

[0022] Specifically, as Figures 1 to 5 shown, a scanning target table of a multi-prevention cross-contamination pulsed laser deposition system includes a three-dimensional target table structure 1 for controlling the three-dimensional movement of the target holder structure 2; a target holder structure 2 including a target holder table 3, a shielding cover 4, a plurality of target materials 5 and a plurality of conical target holders 6. The target holder table 3 is detachably arranged at the end of the three-dimensional target table structure 1. A plurality of the target materials 5 are arranged at intervals in the circumferential direction on the side surface of the target holder table 3. A plurality of the conical target holders 6 are respectively sleeved on the outer peripheral sides of a plurality of the target materials 5. The shielding cover 4 is sleeved on the outer sides of a plurality of the conical target holders 6 and is connected to the outer side surface of the three-dimensional target table structure 1. A laser through-hole 7 is opened on the side surface of the shielding cover 4, and the laser through-hole 7 can correspond to the position of one of the target materials 5; a rotary feedthrough module 8 is arranged at one end of the three-dimensional target table structure 1 for driving the target holder structure 2 to switch the target body.

[0023] Furthermore, the rotary feedthrough module 8 includes a rotary feedthrough body 9, a hollow fixed shaft 10 and a rotary shaft 11. The rotary feedthrough body 9 is arranged at the end of the three-dimensional target table structure 1. One end of the rotary shaft 11 is rotatably arranged on the rotary feedthrough body 9. The hollow fixed shaft 10 is sleeved on the rotary shaft 11. The other end of the rotary shaft 11 is detachably connected to the target holder table 3.

[0024] Furthermore, the target holder structure 2 further includes a slot seat 12 arranged at the end of the target holder table 3. A guide shaft 13 is arranged at the top of the slot seat 12. A guide hole 14 matching with the guide shaft 13 is opened at the bottom of the target holder table 3. The slot seat 12 is rotatably connected with the shielding cover 4 through a bearing. A connecting blind hole is opened at the bottom of the slot seat 12. A connecting through-hole is opened on the inner top surface of the connecting blind hole. The top of the hollow fixed shaft 10 is inserted and matched with the connecting blind hole. The rotary shaft 11 is connected with the connecting through-hole.

[0025] Furthermore, a pressing elastic piece 15 is further arranged on the top of the slot base 12, and the bottom of the pressing elastic piece 15 is used for tightly connecting with the top surface of the target support table 3.

[0026] Further, the target support table 3 includes a fixed base 16, a mounting top base 17 and a plurality of connecting bushings 18. The guiding hole 14 is formed in the fixed base 16. One end of the pressing elastic piece 15 is arranged on the top surface of the slot base 12, and the other end of the pressing elastic piece 15 is tightly connected with the top surface of the fixed base 16. The mounting top base 17 is connected above the fixed base 16. The plurality of connecting bushings 18 are evenly arranged at intervals along the circumferential direction of the mounting top base 17, and the plurality of target materials 5 are detachably connected with the plurality of connecting bushings 18 in one-to-one correspondence.

[0027] Further, the shielding cover 4 includes a cover body 19 and a sealing plate 20. An installation opening 21 is arranged on the side surface of the cover body 19, and the sealing plate 20 is rotatably installed at the installation opening 21 of the cover body 19. The laser through hole 7 is formed in the cover body 19.

[0028] When the utility model is in use, the three-dimensional operation of the target support structure 2 is controlled by the three-dimensional target table structure 1. The rotary feedthrough module 8 is used to control the revolution of the target support structure 2 to realize the switching of the target material 5. When the laser hits the target material 5, the generated plume is scattered by the collision of gas molecules in the vacuum cavity. Due to the arrangement of the conical target support 6, the conical surface structure of the conical target support 6 can limit the propagation angle of the plume and reduce the lateral and reverse diffusion of the plume. Since only the laser through hole 7 is formed in the shielding cover 4, the plume generated by the laser hitting the target material 5 through the laser through hole 7 can be prevented from entering other target materials 5 to cause pollution under the blocking action of the shielding cover 4. Compared with the defect that the traditional anti-pollution laser target table cannot effectively prevent pollution, the utility model effectively reduces the mutual pollution between the target materials 5 through a double anti-pollution structure.

[0029] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A multi-anti-cross-contamination pulsed laser deposition system scanning target stage, characterized in that: include: A three-dimensional target platform structure (1) is used to control the three-dimensional operation of a target support structure (2); A target support structure (2), comprising a target support platform (3), a shielding cover (4), a plurality of target materials (5) and a plurality of conical target supports (6), wherein the target support platform (3) is pluggably arranged at the end of the three-dimensional target platform structure (1), the plurality of target materials (5) are arranged on the side of the target support platform (3) at intervals along the circumferential direction, the plurality of conical target supports (6) are arranged one by one on the outer peripheral side of the plurality of target materials (5), the shielding cover (4) is arranged on the outer side of the plurality of conical target supports (6) and is connected to the outer side of the three-dimensional target platform structure (1), and a laser through hole (7) is opened on the side of the shielding cover (4), and the laser through hole (7) can correspond to the position of one of the target materials (5); A rotary feedthrough module (8) is arranged at one end of the three-dimensional target platform structure (1) and is used to drive the target support structure (2) to switch the target body.

2. The scanning target stage of a multiple anti-cross-contamination pulsed laser deposition system according to claim 1, characterized in that: The rotary feedthrough module (8) comprises a rotary feedthrough body (9), a hollow fixed shaft (10) and a rotary shaft (11); the rotary feedthrough body (9) is arranged at the end of the three-dimensional target platform structure (1); one end of the rotary shaft (11) is rotatably arranged on the rotary feedthrough body (9); the hollow fixed shaft (10) is sleeved on the rotary shaft (11); and the other end of the rotary shaft (11) is pluggably connected to the target support platform (3).

3. The scanning target stage of a multiple anti-cross-contamination pulsed laser deposition system according to claim 2, characterized in that: The target support structure (2) also includes a slot seat (12) arranged at the end of the target support platform (3), the top of the slot seat (12) is provided with a guide shaft (13), the bottom of the target support platform (3) is provided with a guide hole (14) that cooperates with the guide shaft (13), the slot seat (12) and the shielding cover (4) are rotatably connected through a bearing, the bottom of the slot seat (12) is provided with a connecting blind hole, the inner top surface of the connecting blind hole is provided with a connecting through hole, the top of the hollow fixed shaft (10) is plugged into the connecting blind hole, and the rotating shaft (11) is connected to the connecting through hole.

4. The scanning target stage of a multiple anti-cross-contamination pulsed laser deposition system according to claim 3, characterized in that: A pressing spring sheet (15) is also provided on the top of the slot seat (12), and the bottom of the pressing spring sheet (15) is used to be pressed and connected with the top surface of the target support platform (3).

5. The scanning target stage of a multiple anti-cross-contamination pulsed laser deposition system according to claim 4, characterized in that: The target support platform (3) comprises a fixed base (16), a mounting top seat (17) and a plurality of connecting sleeves (18); the fixed base (16) is provided with the guide hole (14); one end of the clamping spring (15) is arranged on the top surface of the slot seat (12); the other end of the clamping spring (15) is clamped and connected to the top surface of the fixed base (16); the mounting top seat (17) is connected to the top of the fixed base (16); a plurality of connecting sleeves (18) are evenly spaced along the circumference of the mounting top seat (17); and a plurality of target materials (5) are detachably connected to the plurality of connecting sleeves (18) in a one-to-one correspondence.

6. The scanning target stage of a multiple anti-cross-contamination pulsed laser deposition system according to claim 1, characterized in that: The shielding cover (4) comprises a cover body (19) and a sealing plate (20); a mounting opening (21) is arranged on the side of the cover body (19); the sealing plate (20) is rotatably mounted at the mounting opening (21) of the cover body (19); and the laser through hole (7) is provided on the cover body (19).

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