Cathode mounting structure for vacuum coating equipment and vacuum coating device

Abstract

The utility model discloses a cathode mounting structure for vacuum coating equipment and a vacuum coating device, the cathode mounting structure for the vacuum coating equipment comprises a base, a cathode module and an adapter plate, the cathode module is mounted on the adapter plate, and the adapter plate is detachably mounted on the base. The vacuum coating device comprises a vacuum coating chamber, wherein the vacuum coating chamber is provided with the cathode mounting structure for the vacuum coating equipment. The device has the advantages of being capable of reducing cost, simplifying operation, improving replacement and adjustment efficiency and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, and particularly relates to a cathode mounting structure for a vacuum coating device and a vacuum coating device. Background Art

[0002] The cathode module is composed of a cathode, a power supply, etc., and is a necessary functional device in a vacuum coating device. For the convenience of manufacturing, assembling and maintaining, in the prior art, an opening is provided on the side wall of the vacuum coating chamber, and a base (usually called a cathode door) for sealing the opening is installed by bolts. An installation structure for mating and installing the cathode module is provided on the inner side surface of the base facing the vacuum coating chamber, and the cathode module is installed on this installation structure. However, in actual manufacturing and production, it is often necessary to replace different cathode modules according to actual needs and adjust the position of the cathode module extending into the vacuum coating chamber (adjust the sputtering coating distance). However, the installation structure for installing the cathode module on the base is fixed, and it is difficult to replace different cathode modules and adjust the position of the cathode module extending into the vacuum coating chamber without changing the base structure. At this time, the cathode module and the base need to be replaced as a whole, resulting in problems such as the non-universality of the base, complex operation, high cost, inconvenient replacement and adjustment, and low flexibility. Summary of the Utility Model

[0003] The technical problem to be solved by the utility model is to overcome the deficiencies existing in the prior art and provide a cathode mounting structure for a vacuum coating device that can reduce costs, simplify operations, and improve the replacement and adjustment efficiency.

[0004] To solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A cathode mounting structure for a vacuum coating device includes a base and a cathode module, and further includes an adapter plate. The cathode module is installed on the adapter plate, and the adapter plate is installed on the base in a detachable manner.

[0006] As a further improvement of the above technical solution:

[0007] The base is provided with an installation through hole penetrating the inner and outer sides. The adapter plate is installed on the base in a detachable manner through a sealing connection mechanism and seals the installation through hole. The adapter plate has a connection portion and can be selectively connected and installed on the inner side surface or the outer side surface of the base through the connection portion.

[0008] The base is provided with a plurality of installation through holes, and an adapter plate with a cathode module is respectively installed at each installation through hole.

[0009] An anti-misinstallation connection component that is matched and connected when the adapter plate is installed at the corresponding installation through hole and is not matched and connected when the adapter plate is installed at a non-corresponding installation through hole is provided between each adapter plate and the base.

[0010] The anti-misassembly connection component includes a plurality of plugging mechanisms. Each plugging mechanism includes a positioning pin and a positioning hole that are plugged and matched with each other. One of the positioning pin and the positioning hole is arranged on the adapter plate, and the other is arranged on the base. The positions of at least one plugging mechanism of each adapter plate and any other adapter plate are different.

[0011] The cathode module is detachably mounted on the adapter plate.

[0012] The sealing connection mechanism includes a sealing ring pressed between the adapter plate and the base, and a plurality of connecting bolts for connecting and fixing the adapter plate and the base. The plurality of connecting bolts are arranged at intervals around the mounting through hole.

[0013] The sealing ring is a replaceable sealing ring for changing the distance between the adapter plate and the base.

[0014] A vacuum coating device includes a vacuum coating chamber, and the vacuum coating chamber has the above-mentioned cathode mounting structure for a vacuum coating equipment.

[0015] Compared with the prior art, the advantages of the present utility model are as follows:

[0016] For the cathode mounting structure of the present utility model for a vacuum coating equipment, the cathode module is mounted on the adapter plate, and the adapter plate is detachably mounted on the base. When it is necessary to replace the cathode module or adjust the position of the cathode module extending into the vacuum coating chamber, only the cathode module and the adapter plate need to be replaced, instead of replacing the base as a whole, which is convenient for the replacement and adjustment of the cathode module, can reduce costs, simplify operations, and improve the replacement and adjustment efficiency.

[0017] Since the vacuum coating device of the present utility model adopts the cathode mounting structure of the present utility model for a vacuum coating equipment, it also has the advantages of the cathode mounting structure for a vacuum coating equipment. Description of the Drawings

[0018] Figure 1 It is a schematic top cross-sectional view of the cathode mounting structure.

[0019] Figure 2 It is a schematic three-dimensional view of the cathode mounting structure.

[0020] Figure 3 It is a schematic front view of the cathode mounting structure.

[0021] Legend:

[0022] 1. Base; 11. Mounting through hole; 2. Cathode module; 3. Adapter plate; 31. Connecting part. Detailed Embodiments

[0023] The present utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Embodiment 1:

[0025] As Figure 1 and Figure 2 shown, the cathode mounting structure for a vacuum coating apparatus in this embodiment includes a base 1 and a cathode module 2, and further includes an adapter plate 3. The cathode module 2 is mounted on the adapter plate 3, and the adapter plate 3 is detachably mounted on the base 1. For this cathode mounting structure for a vacuum coating apparatus, the cathode module 2 is mounted on the adapter plate 3, and the adapter plate 3 is detachably mounted on the base 1. When it is necessary to replace the cathode module 2 or adjust the position of the cathode module 2 extending into the vacuum coating chamber, only the cathode module 2 and the adapter plate 3 need to be replaced, rather than replacing the entire base 1, which facilitates the replacement and adjustment of the cathode module 2, can reduce costs, simplify operations, and improve the replacement and adjustment efficiency.

[0026] In this embodiment, the base 1 is provided with an installation through-hole 11 penetrating the inner and outer sides. The adapter plate 3 is detachably mounted on the base 1 through a sealing connection mechanism and seals the installation through-hole 11. The adapter plate 3 has a connection portion 31 and can be selectively connected and mounted on the inner side or the outer side of the base 1 through the connection portion 31. When the mounting position of the cathode module 2 on the base 1 is fixed, the length of the cathode module 2 extending into the vacuum coating chamber can be adjusted by selectively connecting and mounting the connection portion 31 of the adapter plate 3 on the inner side or the outer side of the base 1, increasing the adjustable range of the length of the cathode module 2 extending into the vacuum coating chamber, and the adjustment is simple, convenient, and highly flexible.

[0027] In this embodiment, the base 1 is provided with a plurality of installation through-holes 11, and an adapter plate 3 with a cathode module 2 is respectively mounted at each installation through-hole 11, which can meet the requirement that the base 1 needs to mount a plurality of cathode modules 2.

[0028] In this embodiment, an anti-misassembly connection component that is matched and connected when the adapter plate 3 is mounted at the corresponding installation through-hole 11 and is not matched and connected when the adapter plate 3 is mounted at a non-corresponding installation through-hole 11 is provided between each adapter plate 3 and the base 1. It is ensured that each adapter plate 3 can only be mounted at the corresponding installation through-hole 11, which can avoid misassembly and improve the installation simplicity.

[0029] In this embodiment, the anti-misassembly connection component includes a plurality of plugging mechanisms. Each plugging mechanism includes a positioning pin and a positioning hole that are plugged and matched with each other. One of the positioning pin and the positioning hole is provided on the adapter plate 3, and the other is provided on the base 1. The positions of at least one plugging mechanism of each adapter plate 3 and any other adapter plate 3 are different. Since the positions of at least one plugging mechanism of each adapter plate 3 and any other adapter plate 3 are different, each adapter plate 3 can only be installed at the corresponding installation through hole 11 to make the positioning pins and positioning holes of the plurality of plugging mechanisms plug and match with each other at the same time. Therefore, it is possible to prevent the adapter plate 3 from being installed at a non-corresponding installation through hole 11. This anti-misassembly connection mechanism has the advantages of simple structure, low cost, and convenient loading and unloading.

[0030] In this embodiment, the cathode module 2 is detachably installed on the adapter plate 3, and the cathode module 2 can also be replaced and the position of the cathode module 2 extending into the vacuum coating chamber can be adjusted by only replacing different adapter plates 3.

[0031] In this embodiment, the sealing connection mechanism includes a sealing ring pressed between the adapter plate 3 and the base 1 and a plurality of connecting bolts for connecting and fixing the adapter plate 3 and the base 1. The plurality of connecting bolts are arranged at intervals around the installation through hole 11, which can ensure the sealing performance and the installation is stable and reliable.

[0032] In this embodiment, the sealing ring is a replaceable sealing ring for changing the distance between the adapter plate 3 and the base 1. Sealing rings with different thicknesses can be used according to needs, so as to adjust the distance between the adapter plate 3 and the base 1, that is, adjust the length of the cathode module 2 extending into the vacuum coating.

[0033] When the cathode installation structure for the vacuum coating equipment in this embodiment is specifically used, first, according to the required length of the cathode module 2 extending into the vacuum coating, based on the principle of using the sealing ring with the smallest thickness, choose to make the adapter plate 3 fit on the inner side or the outer side of the base 1, which can realize adjusting the length of the cathode module 2 extending into the vacuum coating to the required length as much as possible under the condition of using the sealing ring with a smaller thickness as much as possible, so as to achieve the purpose of saving materials, cost and improving the installation strength, stability and sealing performance.

[0034] Embodiment 2:

[0035] A vacuum coating device includes a vacuum coating chamber, and the vacuum coating chamber has the cathode installation structure for the vacuum coating equipment in Embodiment 1. Since this vacuum coating device adopts the cathode installation structure for the vacuum coating equipment in Embodiment 1, it also has the advantages of the cathode installation structure for the vacuum coating equipment.

[0036] The above are only the preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. For those skilled in the art of this technology, the improvements and transformations obtained without departing from the technical concept of the present utility model should also be regarded as the protection scope of the present utility model.

Claims

1. A cathode mounting structure for vacuum coating equipment, comprising a base (1) and a cathode module (2), characterized in that: It also comprises an adapter plate (3), the cathode module (2) is mounted on the adapter plate (3), and the adapter plate (3) is detachably mounted on the base (1).

2. The cathode mounting structure for vacuum coating equipment according to claim 1, characterized in that: The base (1) is provided with a mounting through hole (11) that passes through the inner and outer sides; the adapter plate (3) is detachably mounted on the base (1) via a sealing connection mechanism and seals and closes the mounting through hole (11); the adapter plate (3) has a connecting portion (31) and is selectively connected and mounted on the inner side or the outer side of the base (1) via the connecting portion (31).

3. The cathode mounting structure for vacuum coating equipment according to claim 2, characterized in that: The base (1) is provided with a plurality of mounting through holes (11), and a transfer plate (3) with a cathode module (2) is correspondingly mounted at each mounting through hole (11).

4. The cathode mounting structure for vacuum coating equipment according to claim 3, characterized in that: An anti-mis-installation connection component is provided between each adapter plate (3) and the base (1), which is matched and connected when the adapter plate (3) is installed at a corresponding installation through hole (11), and is not matched and connected when the adapter plate (3) is installed at a non-corresponding installation through hole (11).

5. The cathode mounting structure for vacuum coating equipment according to claim 4, characterized in that: The anti-mis-assembly connection assembly comprises a plurality of plug-in mechanisms, the plug-in mechanisms comprising mutually pluggable positioning pins and positioning holes, one of the positioning pins and positioning holes being arranged on the adapter plate (3), the other of the positioning pins and positioning holes being arranged on the base (1), and each adapter plate (3) having at least one plug-in mechanism having a different position from any other adapter plate (3).

6. The cathode mounting structure for vacuum coating equipment according to claim 1, characterized in that: The cathode module (2) is detachably mounted on the adapter plate (3).

7. The cathode mounting structure for vacuum coating equipment according to any one of claims 2 to 5, characterized in that: The sealing connection mechanism comprises a sealing ring pressed between the adapter plate (3) and the base (1) and a plurality of connection bolts connecting and fixing the adapter plate (3) and the base (1), wherein the plurality of connection bolts are arranged at intervals around the mounting through hole (11).

8. The cathode mounting structure for vacuum coating equipment according to claim 7, characterized in that: The sealing ring is replaceable to change the distance between the adapter plate (3) and the base (1).

9. A vacuum coating device, comprising a vacuum coating chamber, characterized in that: The vacuum coating chamber has the cathode mounting structure for vacuum coating equipment according to any one of claims 1 to 8.

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