Graphite boat and coating device

Abstract

The utility model relates to a graphite boat and a coating device, the graphite boat comprises a boat body, a cover body and a plurality of air inlet mechanisms, the boat body is internally provided with a plurality of cavities, and each cavity is provided with an opening for silicon wafers to enter and exit. The cover body covers the boat body in an opening and closing mode and is used for sealing all the openings. The multiple gas inlet mechanisms are arranged on the cover body at intervals, the gas inlet mechanisms and the cavities are arranged in a one-to-one correspondence mode, and the gas inlet mechanisms are used for conveying special gas to the corresponding cavities. The graphite boat can improve the uniformity of silicon wafer coating and also can improve the utilization rate of special gas.

Description

Technical Field

[0001] The present application relates to the technical field of solar cell production equipment, and particularly to a graphite boat and a coating device. Background Art

[0002] As conventional fossil fuels are increasingly depleted, among existing sustainable energy sources, solar energy is undoubtedly the cleanest, most common, and most potential alternative energy source. In the process of manufacturing solar cells, the wafers need to go through processes such as cleaning, PECVD (Plasma Enhanced Chemical Vapor Deposition) coating, PVD (Physical Vapor Deposition) coating, and screen printing.

[0003] In the PECVD coating process, generally, a graphite boat is first used as a carrier to send the silicon wafers into the furnace tube, and then special gases are introduced into the furnace tube from one end of the furnace tube. Under the action of an electric field, the special gases in contact with the graphite boat will be ionized and converted into an ionic state, and the ions will deposit on the surface of the silicon wafers to form a film layer. However, in the coating devices of related technologies, problems such as uneven coating of silicon wafers and low utilization rate of special gases are likely to occur. Summary of the Utility Model

[0004] Based on this, in view of how to improve the uniformity of silicon wafer coating, it is necessary to provide a graphite boat and a coating device.

[0005] On the one hand, the present application provides a graphite boat, including:

[0006] A boat body, with a plurality of chambers provided inside the boat body, and each chamber has an opening for the silicon wafers to enter and exit.

[0007] A cover body, which is detachably covered on the boat body and is used to close all the openings.

[0008] A plurality of air inlet mechanisms, which are arranged on the cover body at intervals, and each air inlet mechanism is arranged in one-to-one correspondence with each chamber, and the air inlet mechanism is used to convey special gases to the corresponding chamber.

[0009] The technical solutions are further described below:

[0010] In one embodiment, the cover body includes a cover plate and a folded edge. The cover plate is detachably covered on the boat body and is used to close all the openings. The folded edge is arranged along the edge of the cover plate and protrudes from the side of the cover plate close to the boat body.

[0011] In one embodiment, the cover plate includes a plurality of plate bodies connected to each other. The plurality of plate bodies are used to close the respective openings one by one, and each intake mechanism is provided on each of the plate bodies correspondingly.

[0012] In one embodiment, a first partition is provided between two adjacent chambers, and a second partition is provided between two adjacent plate bodies. The first partition and the second partition are arranged correspondingly and fit tightly.

[0013] In one embodiment, one of the first partition and the second partition is provided with an embedding groove for the other to be embedded.

[0014] In one embodiment, the boat body includes a plurality of boat pages arranged in parallel and at intervals;

[0015] The plurality of first partitions are distributed at intervals along the length direction of the boat body and intersect with the boat pages, so as to divide the interior of the boat body into the plurality of chambers; alternatively, the plurality of first partitions are distributed at intervals along the width direction of the boat body and are arranged parallel to the boat pages, so as to divide the interior of the boat body into the plurality of chambers.

[0016] In one embodiment, the intake mechanism includes a gas storage container and a valve. The gas storage container is arranged on the cover body and is used to store the special gas. The gas storage container has an air outlet facing the chamber, and the valve is arranged at the air outlet. The valve is used to open or close the air outlet.

[0017] In one embodiment, the graphite boat further includes a first electrode and a second electrode. The first electrode is arranged at one end of the boat body, and the second electrode is arranged at the other end of the boat body.

[0018] On the other hand, the present application also provides a coating device, including a furnace tube, a robotic arm, and the above-mentioned graphite boat. The furnace tube is provided with a coating chamber for accommodating the graphite boat, and the robotic arm is used to cover the cover body on the boat body or remove the cover body from the boat body.

[0019] In one embodiment, the robotic arm includes:

[0020] A clamping component, which is used to clamp or release the cover body;

[0021] A telescopic arm, which is connected to the clamping component, and the telescopic arm is used to drive the clamping component to perform a lifting motion.

[0022] In the above-mentioned graphite boat, by dividing the interior of the boat body into multiple chambers, adding a cover body for closing the openings of the chambers, and arranging multiple gas inlet mechanisms on the cover body so that the gas inlet mechanisms are arranged in one-to-one correspondence with the chambers, special gases can be directly introduced into the corresponding chambers through the gas inlet mechanisms for use in silicon wafer coating. Compared with the traditional coating device that introduces special gases from one end of the furnace tube, the present application can directly introduce special gases into the interior of the graphite boat by using the gas inlet mechanisms on the cover body, avoiding the problem that the special gases that do not enter the graphite boat in the furnace tube cannot be fully utilized and improving the utilization rate of special gases. At the same time, by first dividing the interior of the boat body into multiple chambers and then using multiple gas inlet mechanisms to introduce special gases into different chambers of the boat body respectively, it is ensured that the distribution of special gases in each area of the graphite boat is more uniform, so as to ensure that the thickness of the film layers deposited on the silicon wafers in each chamber is also more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings forming a part of this application are used to provide a further understanding of this application. The schematic embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation to this application.

[0024] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0025] In addition, the drawings are not drawn to a scale of 1:1, and the relative sizes of the respective elements are only drawn exemplarily in the drawings and not necessarily to the actual scale. In the drawings:

[0026] Figure 1 It is a schematic structural diagram of a graphite boat in an embodiment.

[0027] Figure 2 It is a schematic structural diagram of a graphite boat in another embodiment.

[0028] Description of the reference numerals:

[0029] 10. Graphite boat; 11. Boat body; 111. Chamber; 112. First partition; 113. Boat page; 114. First electrode; 115. Second electrode; 12. Cover body; 121. Cover plate; 122. Flange; 123. Second partition; 13. Gas inlet mechanism; 20. Robot arm; 21. Telescopic arm; 22. Clamping assembly; 221. First mounting plate; 222. Pneumatic gripper; 23. Second mounting plate; 24. Screw telescopic member. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] To make the above objects, features, and advantages of the present application more apparent and understandable, the following provides a detailed description of the specific embodiments of the present application with reference to the accompanying drawings. Many specific details are set forth in the following description to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that if terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0032] In addition, if terms such as "first" and "second" appear, these terms are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0033] In the present application, unless otherwise clearly defined and limited, if terms such as "install", "connect", "couple", "fix", etc. appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0034] In this application, unless otherwise clearly specified and defined, when a first feature is described as being "on" or "under" a second feature or the like, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature may mean that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0035] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element at the same time. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in this application are only for the purpose of illustration and do not represent the only implementation.

[0036] As described in the background art, in a traditional coating device, it is easy to have problems such as uneven coating of silicon wafers and low utilization rate of special gases. The inventor has found through research that the reason is as follows: In the coating device of the prior art, special gases are usually introduced into the furnace tube from one end of the furnace tube. As a result, the distribution of special gases in the furnace tube is uneven, leading to differences in the uniformity of the distribution of the special gases ionized into a plasma state in the graphite boat. This causes different special gas ion concentrations at different positions in the graphite boat. Therefore, when the ions are deposited into a film, the film layer at the position with a high ion concentration grows faster, and the film layer at the position with a low ion concentration grows slower. After the same process time, there will be differences in the film layer thicknesses at different positions on a silicon wafer. At this time, the coating uniformity is poor, which will ultimately affect the quality of solar cells. At the same time, after introducing special gases into the furnace tube from one end of the furnace tube, the special gases need to fill the furnace tube before they can enter the graphite boat, and then they can be ionized and utilized. Many special gases that do not enter the graphite boat 10 are not utilized, resulting in waste of resources.

[0037] Based on this, this application provides a graphite boat 10 that can improve the coating uniformity of silicon wafers and the utilization rate of special gases. Specifically, see Figure 1, A graphite boat 10 of an embodiment includes a boat body 11, a cover body 12, and a plurality of gas inlet mechanisms 13. The interior of the boat body 11 is provided with a plurality of chambers 111, and each chamber 111 has an opening for wafers to enter and exit. The cover body 12 is covered on the boat body 11 and is used to close all the openings. The plurality of gas inlet mechanisms 13 are arranged on the cover body 12 at intervals, and each gas inlet mechanism 13 is arranged corresponding to each chamber 111 one by one. The gas inlet mechanism 13 is used to transport special gases to the corresponding chamber 111. The special gases refer to various special gases used for film coating.

[0038] Further, during film coating, first place the wafers to be coated into each chamber 111, then cover the cover plate 121 on the graphite boat 10 to make the cover plate 121 close the openings of each chamber 111, and make the gas inlet mechanisms 13 on the cover plate 121 correspond to each chamber 111 one by one. Then send the graphite boat 10 into the furnace tube, start heating the furnace tube and energize the graphite boat 10, and the gas inlet mechanism 13 then introduces special gases into the corresponding chamber 111, and the wafers in the chamber 111 can be film-coated.

[0039] In the above-mentioned graphite boat 10, by dividing the interior of the boat body 11 into a plurality of chambers 111, adding a cover body 12 for closing the openings of the chambers 111, and arranging a plurality of gas inlet mechanisms 13 on the cover body 12 so that the gas inlet mechanisms 13 are arranged corresponding to the chambers 111 one by one, the special gases can be directly introduced into the corresponding chamber 111 through the gas inlet mechanism 13 for wafer film coating. Compared with the traditional film coating device that introduces special gases from one end of the furnace tube, the present application can directly introduce special gases into the interior of the graphite boat 10 by using the gas inlet mechanisms 13 on the cover body 12, avoiding the problem that the special gases that do not enter the graphite boat 10 in the furnace tube cannot be utilized, and improving the utilization rate of special gases. At the same time, by first dividing the interior of the boat body 11 into a plurality of chambers 111 and then using a plurality of gas inlet mechanisms 13 to introduce special gases into different chambers 111 of the boat body 11 respectively, it is ensured that the distribution of special gases in each area of the graphite boat 10 is more uniform, so that the thickness of the film layers deposited on the wafers in each chamber 111 is also more uniform.

[0040] See Figure 1 , In an embodiment, the cover body 12 includes a cover plate 121 and a folded edge 122. The cover plate 121 is covered on the boat body 11 and is used to close all the openings. The folded edge 122 is arranged along the edge of the cover plate 121 and protrudes from the side of the cover plate 121 close to the boat body 11. Specifically, when the cover body 12 is covered on the boat body 11, the cover plate 121 can cover the boat body 11 to close all the openings, and the folded edge 122 can surround the periphery of the boat body 11, thereby improving the closing effect of the cover body 12 on the openings and strengthening the stability of the cover body 12 to prevent the cover body 12 from falling off the boat body 11.

[0041] Optionally, in one embodiment, the cover plate 121 includes a plurality of connected plate bodies. The plurality of plate bodies are used to seal each opening one by one, and each gas inlet mechanism 13 is correspondingly arranged on each plate body. In this way, each opening is sealed by each plate body one by one, and then special gas is introduced into the corresponding chamber 111 through the gas inlet mechanism 13 on each plate body, which can ensure that the special gas distribution in each chamber 111 is more uniform, and further ensure the uniformity of the silicon wafer coating in each chamber 111.

[0042] See Figure 1 , optionally, in one embodiment, a first partition 112 is provided between two adjacent chambers 111, and a second partition 123 is provided between two adjacent plate bodies. The first partition 112 and the second partition 123 are correspondingly arranged and closely matched. In this way, each chamber 111 can be effectively isolated, preventing the special gas concentration at the junction of two adjacent chambers 111 from being too high, and further ensuring the uniformity of the special gas distribution in each chamber 111.

[0043] Further, in one embodiment, the first partition 112 is provided with an embedding groove (not shown) for the second partition 123 to be embedded. In this way, when the cover body 12 is covered on the boat body 11, by embedding the second partition 123 into the embedding groove of the first partition 112, the isolation effect between two adjacent chambers 111 can be further improved. It can be understood that in other embodiments, it can also be that the second partition 123 is provided with an embedding groove, and the first partition 112 is embedded in the embedding groove, so that the isolation effect between two adjacent chambers 111 can also be improved.

[0044] See Figure 1 , optionally, in one embodiment, the boat body 11 includes a plurality of boat pages 113 arranged in parallel and at intervals. The plurality of first partitions 112 are spaced apart along the length direction of the boat body 11 and intersect with the boat pages 113 to divide the interior of the boat body 11 into a plurality of chambers 111. Further, a plurality of avoidance grooves (not shown) are penetratingly provided on the first partition 112. The avoidance grooves are correspondingly arranged with the boat pages 113 for the boat pages 113 to pass through the first partition 112 to prevent interference between the boat pages 113 and the first partition 112. Further, each gas inlet mechanism 13 is arranged at the middle position of the plate body to ensure the uniform distribution of the special gas in each chamber 111.

[0045] Specifically, in Figure 1In the illustrated embodiment, there are two first partitions 112 spaced along the length direction of the boat body 11 inside the boat body 11, and the two first partitions 112 divide the interior of the boat body 11 into three chambers 111. Each chamber 111 is divided into multiple compartments by the boat pages 113, and silicon wafers can be placed in the compartments, so as to ensure that both sides of each boat page 113 face the boat page 113, and further ensure that the two sides of the silicon wafers are evenly coated. It should be noted that in other embodiments, the number of the first partitions 112 can also be one, three, four or more, which is not limited herein.

[0046] See Figure 2 , in another embodiment, the boat body 11 also includes a plurality of boat pages 113 arranged in parallel and at intervals. Different from Figure 1 the illustrated embodiment, the plurality of first partitions 112 are spaced along the width direction of the boat body 11 and are all arranged parallel to the boat pages 113. In this way, the interior of the boat body 11 can also be divided to form a plurality of chambers 111. In this embodiment, each chamber 111 is also divided into multiple compartments by the boat pages 113, and silicon wafers can be placed in the compartments, so as to ensure that both sides of each boat page 113 face the boat page 113, and further ensure that the two sides of the silicon wafers are evenly coated.

[0047] Specifically, in one embodiment, the gas inlet mechanism 13 includes a gas storage container (not shown) and a valve (not shown). The gas storage container is arranged on the cover body 12 and is used to store special gas. The gas storage container has an air outlet facing the chamber 111, and the valve is arranged at the air outlet, and the valve is used to open or close the air outlet. The special gas required for coating is stored in the gas storage container. When the coating starts, the valve opens the air outlet, and the special gas in the gas storage container can directly enter the boat body 11 through the air outlet to realize coating the silicon wafers. It can be understood that in other embodiments, the gas inlet mechanism 13 can also include a gas delivery pipe connected to an external gas source, and the special gas in the external gas source can also be directly delivered to the boat body 11 through the gas delivery pipe.

[0048] See Figure 1 , in one embodiment, the graphite boat 10 further includes a first electrode 114 and a second electrode 115. The first electrode 114 is arranged at one end of the boat body 11, and the second electrode 115 is arranged at the other end of the boat body 11. In this way, after the graphite boat 10 is sent into the furnace tube, by connecting the positive electrode and the negative electrode of the power supply to the first electrode 114 and the second electrode 115 respectively, an electric field can be generated in the graphite boat 10 to ionize the special gas in the graphite boat 10 into an ionic state, and the ions can be deposited on the surface of the silicon wafer to form a film layer.

[0049] An embodiment of the present application further provides a coating device. Specifically, the coating device of an embodiment includes a furnace tube (not shown), a robotic arm 20, and the graphite boat 10 of any of the above embodiments. The furnace tube is provided with a coating cavity for accommodating the graphite boat 10, and the furnace tube is used to heat and supply power to the graphite boat 10. The robotic arm 20 is used to cover the cover body 12 on the boat body 11 or remove the cover body 12 from the boat body 11. Specifically, in one embodiment, the robotic arm 20 is arranged outside the furnace tube. Before the graphite boat 10 is loaded with silicon wafers and enters the furnace tube, the robotic arm 20 can cover the cover body 12 on the boat body 11. After the coating is completed and the graphite boat 10 is sent out of the furnace tube, the robotic arm 20 can also remove the cover body 12 from the boat body 11.

[0050] Further, referring to Figure 1 , in one embodiment, the robotic arm 20 includes a clamping assembly 22 and a telescopic arm 21. The clamping assembly 22 is used to clamp or release the cover body 12. The telescopic arm 21 is connected to the clamping assembly 22, and the telescopic arm 21 is used to drive the clamping assembly 22 to move up and down, so as to cover the cover body 12 on the boat body 11 or remove the cover body 12 from the boat body 11.

[0051] Further, the clamping assembly 22 may include a first mounting plate 221 and two pneumatic grippers 222 respectively arranged on both sides of the first mounting plate 221. By driving the two pneumatic grippers 222 to move towards or away from each other through a cylinder, clamping or releasing the cover body 12 can be achieved.

[0052] Continuing to refer to Figure 1 , the robotic arm 20 may further include a second mounting plate 23 and a screw telescopic member 24. The second mounting plate 23 is connected to the telescopic arm 21, and the screw telescopic member 24 is arranged between the first mounting plate 221 and the second mounting plate 23. After the telescopic arm 21 lifts the clamping assembly 22 to the appropriate position, the screw telescopic member 24 can finely adjust the height of the clamping assembly 22, so that the clamping assembly can accurately clamp or release the cover body 12 and prevent the cover body 12 from falling and being damaged.

[0053] In the above-mentioned coating device, by dividing the interior of the boat body 11 into multiple chambers 111, a cover body 12 for closing the openings of the chambers 111 is arranged on the boat body 11, and a plurality of gas inlet mechanisms 13 are arranged on the cover body 12, such that the gas inlet mechanisms 13 are arranged in one-to-one correspondence with the chambers 111. In this way, special gases can be directly introduced into the corresponding chambers 111 through the gas inlet mechanisms 13 for use in silicon wafer coating. Compared with the traditional coating device that introduces special gases from one end of the furnace tube, the present application can directly introduce special gases into the interior of the graphite boat 10 by using the gas inlet mechanisms 13 on the cover body 12, avoiding the problem that the special gases that do not enter the graphite boat 10 in the furnace tube cannot be fully utilized and improving the utilization rate of special gases. At the same time, by first dividing the interior of the boat body 11 into multiple chambers 111 and then using a plurality of gas inlet mechanisms 13 to introduce special gases into different chambers 111 of the boat body 11 respectively, it is ensured that the distribution of special gases in each area of the graphite boat 10 is more uniform, thereby ensuring that the thickness of the film layers deposited on the silicon wafers in each chamber 111 is also more uniform.

[0054] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0055] The above-described embodiments only represent several implementation manners of the present application, and the description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A graphite boat, characterized in that: include: A boat body (11), wherein a plurality of chambers (111) are provided inside the boat body (11), and each of the chambers (111) has an opening for allowing silicon wafers to enter and exit; A cover body (12), the cover body (12) being arranged on the boat body (11) and used to close all the openings; A plurality of air intake mechanisms (13), wherein the plurality of air intake mechanisms (13) are arranged on the cover body (12) at intervals, and each of the air intake mechanisms (13) is arranged in a one-to-one correspondence with each of the chambers (111), and the air intake mechanisms (13) are used to transport the special gas to the corresponding chamber (111).

2. The graphite boat according to claim 1, characterized in that: The cover body (12) comprises a cover plate (121) and a folded edge (122); the cover plate (121) is arranged on the boat body (11) and is used to close all the openings; the folded edge (122) is arranged along the edge of the cover plate (121) and protrudes from a side of the cover plate (121) close to the boat body (11).

3. The graphite boat according to claim 2, characterized in that: The cover plate (121) comprises a plurality of connected plate bodies, the plurality of plate bodies being used to seal the openings in a one-to-one correspondence, and the air intake mechanisms (13) are arranged on the plate bodies in a one-to-one correspondence.

4. The graphite boat according to claim 3, characterized in that: A first partition (112) is provided between two adjacent chambers (111), and a second partition (123) is provided between two adjacent plate bodies; the first partition (112) and the second partition (123) are arranged in one-to-one correspondence and fit tightly together.

5. The graphite boat according to claim 4, characterized in that: One of the first partition plate (112) and the second partition plate (123) is provided with an embedding groove for the other to embed.

6. The graphite boat according to claim 4, characterized in that: The boat body (11) comprises a plurality of boat leaves (113) arranged in parallel and at intervals; A plurality of first partitions (112) are spaced apart along the length direction of the boat body (11) and are arranged to intersect with the boat leaf (113) so as to divide the interior of the boat body (11) into the plurality of chambers (111); or a plurality of first partitions (112) are spaced apart along the width direction of the boat body (11) and are arranged parallel to the boat leaf (113) so as to divide the interior of the boat body (11) into the plurality of chambers (111).

7. The graphite boat according to claim 1, characterized in that: The air intake mechanism (13) comprises a gas storage container and a valve. The gas storage container is arranged on the cover body (12) and is used to store the special gas. The gas storage container has a gas outlet facing the chamber (111). The valve is arranged at the gas outlet and is used to open or close the gas outlet.

8. The graphite boat according to any one of claims 1 to 7, characterized in that: The graphite boat further comprises a first electrode (114) and a second electrode (115), wherein the first electrode (114) is arranged at one end of the boat body (11), and the second electrode (115) is arranged at the other end of the boat body (11).

9. A film coating device, characterized in that: It comprises a furnace tube, a robotic arm (20), and a graphite boat (10) according to any one of claims 1 to 8, wherein the furnace tube is provided with a coating cavity for accommodating the graphite boat, and the robotic arm (20) is used to cover the cover body (12) on the boat body (11) or remove the cover body (12) from the boat body (11).

10. The coating device according to claim 9, characterized in that: The mechanical arm (20) comprises: A clamping assembly (22), the clamping assembly (22) being used to clamp or release the cover body (12); A telescopic arm (21), the telescopic arm (21) being connected to the clamping assembly (22), the telescopic arm (21) being used to drive the clamping assembly (22) to perform lifting motion.

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