Vacuum pump cooling system

Abstract

The utility model relates to the technical field of vacuum pumps, and provides a vacuum pump cooling system for solving the problem that heat dissipation of a vacuum pump has defects. The vacuum pump cooling system comprises a vacuum pump, a cooling device, a first pipe set and a second pipe set, the vacuum pump comprises a shell and a rotor, the shell comprises an outer side wall and an inner side wall, a first cooling cavity and a second cooling cavity are formed between the outer side wall and the inner side wall, and an inner cavity is formed in the inner side wall; the first cooling cavity and the second cooling cavity surround the inner cavity and are arranged at intervals in the axial direction of the rotor, an inlet of the first cooling cavity and an outlet of the second cooling cavity are formed in the first side of the vacuum pump, and an outlet of the first cooling cavity and an inlet of the second cooling cavity are formed in the second side of the vacuum pump. The cold supply device is used for providing a refrigerant, and an inlet of the first cooling cavity and an inlet of the second cooling cavity are both directly or indirectly connected with an outlet of the cold supply device. According to the vacuum pump cooling system, the two sides of the vacuum pump can be cooled, and the service life of the vacuum pump can be prolonged.

Description

Technical Field

[0001] This application relates to the technical field of vacuum pumps, and particularly to a vacuum pump cooling system. Background Art

[0002] When a vacuum pump is operating, it generates a large amount of heat, causing the temperature of the internal parts to continuously rise, which easily leads to deformation and damage of the parts. To ensure the stable operation of the vacuum pump, in the prior art, a cooling system is usually used to inject refrigerant into the housing of the vacuum pump to dissipate heat from the vacuum pump, so as to reduce the temperature during the operation of the vacuum pump. However, the current cooling solution has defects in dissipating heat from the vacuum pump, resulting in certain thermal stress still existing during the operation of the vacuum pump, thus affecting the service life of the vacuum pump. Utility Model Content

[0003] This application provides a vacuum pump cooling system, aiming to solve the technical problem that the existing cooling system has defects in dissipating heat from the vacuum pump.

[0004] In some embodiments of this application, a vacuum pump cooling system is provided, including:

[0005] A vacuum pump, including a housing and a rotor. The housing includes an outer wall and an inner wall. A first cooling chamber and a second cooling chamber are formed between the outer wall and the inner wall. The inner wall is provided with an inner cavity for accommodating the rotor. The first cooling chamber surrounds the inner cavity, and the second cooling chamber surrounds the inner cavity. And the first cooling chamber and the second cooling chamber are arranged at intervals along the axial direction of the rotor. The inlet of the first cooling chamber and the outlet of the second cooling chamber are arranged on the first side of the vacuum pump, and the outlet of the first cooling chamber and the inlet of the second cooling chamber are arranged on the second side of the vacuum pump; and,

[0006] A cooling supply device for providing refrigerant; the inlets of the first cooling chamber and the second cooling chamber are both directly or indirectly connected to the outlet of the cooling supply device.

[0007] In some embodiments, the outlets of the first cooling chamber and the second cooling chamber are both directly or indirectly connected to the inlet of the cooling supply device.

[0008] In some embodiments, a third cooling chamber is further formed between the outer wall and the inner wall;

[0009] The third cooling chamber surrounds the inner cavity. The inlet of the third cooling chamber is arranged on the first side of the vacuum pump, and the outlet of the third cooling chamber is arranged on the second side of the vacuum pump; the inlet of the third cooling chamber is directly or indirectly connected to the outlet of the cooling supply device.

[0010] In some embodiments, along the axial direction of the rotor, the second cooling cavity is located between the first cooling cavity and the third cooling cavity.

[0011] In some embodiments, the outlet of the third cooling cavity is directly or indirectly connected to the inlet of the cooling device.

[0012] In some embodiments, a fourth cooling cavity is further formed between the outer wall and the inner wall;

[0013] The fourth cooling cavity surrounds the inner cavity, the inlet of the fourth cooling cavity is arranged on the second side of the vacuum pump, and the outlet of the fourth cooling cavity is arranged on the first side of the vacuum pump; the inlet of the fourth cooling cavity is directly or indirectly connected to the outlet of the cooling device.

[0014] In some embodiments, along the axial direction of the rotor, the third cooling cavity is located between the second cooling cavity and the fourth cooling cavity.

[0015] In some embodiments, the outlet of the fourth cooling cavity is directly or indirectly connected to the inlet of the cooling device.

[0016] In some embodiments, the first cooling cavity and the second cooling cavity have the same structure;

[0017] Alternatively, a third cooling cavity is further formed between the outer wall and the inner wall, and the first cooling cavity, the second cooling cavity and the third cooling cavity have the same structure;

[0018] Alternatively, a third cooling cavity and a fourth cooling cavity are further formed between the outer wall and the inner wall, and the first cooling cavity, the second cooling cavity, the third cooling cavity and the fourth cooling cavity have the same structure.

[0019] In some embodiments, the vacuum pump cooling system further includes a first pipe group, the first pipe group has a plurality of outlets, and the outlet of the cooling device is directly or indirectly connected to the inlet of the first pipe group;

[0020] The inlet of the first cooling cavity is directly or indirectly connected to the outlet of the first pipe group, and the inlet of the second cooling cavity is directly or indirectly connected to the outlet of the first pipe group;

[0021] Alternatively, a third cooling cavity is further formed between the outer wall and the inner wall, the inlet of the first cooling cavity is directly or indirectly connected to the outlet of the first pipe group, the inlet of the second cooling cavity is directly or indirectly connected to the outlet of the first pipe group, and the inlet of the third cooling cavity is directly or indirectly connected to the outlet of the first pipe group;

[0022] Alternatively, a third cooling chamber and a fourth cooling chamber are further formed between the outer sidewall and the inner sidewall. The inlet of the first cooling chamber is directly or indirectly connected to the outlet of the first tube group. The inlet of the second cooling chamber is directly or indirectly connected to the outlet of the first tube group. The inlet of the third cooling chamber is directly or indirectly connected to the outlet of the first tube group. The inlet of the fourth cooling chamber is directly or indirectly connected to the outlet of the first tube group.

[0023] In some embodiments, the vacuum pump cooling system further includes a second tube group having a plurality of inlets. The inlet of the cooling device is directly or indirectly connected to the outlet of the second tube group.

[0024] The outlet of the first cooling chamber is directly or indirectly connected to the inlet of the second tube group. The outlet of the second cooling chamber is directly or indirectly connected to the inlet of the second tube group.

[0025] Alternatively, a third cooling chamber is further formed between the outer sidewall and the inner sidewall. The outlet of the first cooling chamber is directly or indirectly connected to the inlet of the second tube group. The outlet of the second cooling chamber is directly or indirectly connected to the inlet of the second tube group. The outlet of the third cooling chamber is directly or indirectly connected to the inlet of the second tube group.

[0026] Alternatively, a third cooling chamber and a fourth cooling chamber are further formed between the outer sidewall and the inner sidewall. The outlet of the first cooling chamber is directly or indirectly connected to the inlet of the second tube group. The outlet of the second cooling chamber is directly or indirectly connected to the inlet of the second tube group. The outlet of the third cooling chamber is directly or indirectly connected to the inlet of the second tube group. The outlet of the fourth cooling chamber is directly or indirectly connected to the inlet of the second tube group.

[0027] In some embodiments, the vacuum pump cooling system further includes a control valve and a temperature sensor. The control valve is electrically connected to the temperature sensor.

[0028] The temperature sensors are installed at the outlets of the first cooling chamber and the second cooling chamber for detecting the temperature of the refrigerant when it flows out. The control valves are installed between the inlet of the first cooling chamber and the outlet of the cooling device, and between the inlet of the second cooling chamber and the outlet of the cooling device. The control valves are used to control the flow rate of the refrigerant according to the temperature change.

[0029] Alternatively, a third cooling cavity is further formed between the outer wall and the inner wall, and temperature sensors are installed at the outlets of the first cooling cavity, the second cooling cavity, and the third cooling cavity to detect the temperature of the refrigerant when it flows out; a control valve is installed between the inlet of the first cooling cavity and the outlet of the cooling device, a control valve is installed between the inlet of the second cooling cavity and the outlet of the cooling device, a control valve is installed between the inlet of the third cooling cavity and the outlet of the cooling device, and the control valve is used to control the flow rate of the refrigerant according to the temperature change;

[0030] Alternatively, a third cooling cavity and a fourth cooling cavity are further formed between the outer wall and the inner wall, and temperature sensors are installed at the outlets of the first cooling cavity, the second cooling cavity, the third cooling cavity, and the fourth cooling cavity to detect the temperature of the refrigerant when it flows out; a control valve is installed between the inlet of the first cooling cavity and the outlet of the cooling device, a control valve is installed between the inlet of the second cooling cavity and the outlet of the cooling device, a control valve is installed between the inlet of the third cooling cavity and the outlet of the cooling device, a control valve is installed between the inlet of the fourth cooling cavity and the outlet of the cooling device, and the control valve is used to control the flow rate of the refrigerant according to the temperature change.

[0031] According to the vacuum pump cooling system in the above embodiments, when the vacuum pump is running, due to the high temperature of the housing, the housing heats the refrigerant, resulting in the temperature of the refrigerant when it flows out of the cooling cavity being higher than the temperature when it flows into the cooling cavity. Therefore, the traditional cooling system cannot balance the temperatures on both sides of the vacuum pump, resulting in thermal stress still existing on both sides of the vacuum pump, ultimately affecting the service life of the vacuum pump.

[0032] In this application, by setting the inlet of the first cooling cavity on the first side of the vacuum pump and the outlet of the first cooling cavity on the second side of the vacuum pump, the refrigerant can flow into the first cooling cavity from the first side and flow out of the first cooling cavity from the second side. The outlet of the second cooling cavity is set on the first side of the vacuum pump, and the inlet of the second cooling cavity is set on the second side of the vacuum pump, so that the refrigerant can flow into the second cooling cavity from the second side and flow out of the second cooling cavity from the first side. In this way, the low temperature when the refrigerant flows in can be used to cool both sides of the vacuum pump simultaneously, so that the cooling temperatures on both sides of the vacuum pump are the same, avoiding the problem of unbalanced cooling temperatures on both sides of the vacuum pump caused by setting the inlet end of the refrigerant on the same side of the vacuum pump and the outlet end of the refrigerant on the other side of the vacuum pump. Thus, the vacuum pump cooling system of this application can not only dissipate heat from the vacuum pump, but also help maintain the thermal balance on both sides of the vacuum pump, thereby minimizing the thermal stress generated during the operation of the vacuum pump to the greatest extent and being beneficial to extending the service life of the vacuum pump.

[0033] In addition, the vacuum pump cooling system provided by the present application can be applied to screw vacuum pumps, roots vacuum pumps, and other types of rotary vane vacuum pumps. When the first cooling chamber and the second cooling chamber introduce refrigerant on both sides of the screw vacuum pump or the roots vacuum pump respectively, the two sides of the vacuum pump can be cooled simultaneously at the inflow temperature of the refrigerant. Therefore, the vacuum pump cooling system provided by the present application has a wider scope of application. Description of the Drawings

[0034] Figure 1 It is a schematic structural diagram of the vacuum pump cooling system in an embodiment of the present application;

[0035] Figure 2 is Figure 1 a schematic cross-sectional structural diagram of the vacuum pump in

[0036] Figure 3 is Figure 1 a schematic top view structural diagram of the vacuum pump in

[0037] Figure 4 is Figure 3 a schematic cross-sectional structural diagram of the A-A section of the vacuum pump in

[0038] Figure 5 is Figure 3 a schematic cross-sectional structural diagram of the B-B section of the vacuum pump in

[0039] Figure 6 is Figure 1 a schematic cross-sectional structural diagram of another embodiment of the vacuum pump in

[0040] Wherein:

[0041] 1 - Vacuum pump; 11 - Housing; 111 - Outer side wall; 112 - Inner side wall; 113 - Cooling chamber; 113a - First cooling chamber; 113b - Second cooling chamber; 113c - Third cooling chamber; 113d - Fourth cooling chamber; 114 - Inner cavity; 12 - Rotor; 121 - First screw; 122 - Second screw; C1 - First side; C2 - Second side; D1 - First end; D2 - Second end; 21 - Cooling device; 22 - First pipe group; 221 - First main pipe; 222 - First branch pipe; 23 - Second pipe group; 231 - Second main pipe; 232 - Second branch pipe; 241 - Solenoid valve; 242 - Throttle valve; 243 - Check valve; 25 - Temperature sensor. Specific Embodiment

[0042] The present application will be further described in detail below through specific embodiments in conjunction with the accompanying drawings. Similar elements in different embodiments are denoted by related similar element numbers. In the following embodiments, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification, which is to avoid overwhelming the core part of the present application with excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and the general technical knowledge in the art.

[0043] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various embodiments, and the operation steps involved in each embodiment can also be reordered or adjusted in a manner obvious to those skilled in the art. Therefore, the specification and the drawings are only for clearly describing a certain embodiment, and do not mean that they are essential components and / or sequences.

[0044] The serial numbers assigned to the components in this article, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meanings. And the "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connections (couplings).

[0045] When a vacuum pump is operating, a large amount of heat is generated. Taking a screw vacuum pump as an example, the two screws mesh with each other and can rotate relative to each other to achieve the function of vacuum pumping. When the two screws rotate, the gas is compressed, causing the temperature of the screws to rise. Since there is no medium in the vacuum to conduct heat, the high-temperature screws mainly transfer heat to the pump body in the form of thermal radiation, resulting in an increase in the temperature of the pump body. If the pump body cannot be cooled in time, the parts inside the pump body will be deformed by heat at high temperatures, ultimately affecting the operating stability of the screw vacuum pump. For a roots vacuum pump, the two impellers mesh and rotate to compress the gas and do work, which will also cause the temperature of the pump body to rise.

[0046] To reduce the temperature of the pump body during operation, the present application provides a vacuum pump cooling system, as Figures 1 to 3As shown, the vacuum pump cooling system may include a vacuum pump 1 and a cooling device 21. The vacuum pump 1 may include a housing 11 and a rotor 12. The housing 11 may include an outer wall 111 and an inner wall 112. A first cooling chamber 113a and a second cooling chamber 113b are formed between the outer wall 111 and the inner wall 112. The inner wall 112 is provided with an inner cavity 114 for accommodating the rotor 12. The first cooling chamber 113a is arranged around the inner cavity 114, and the second cooling chamber 113b is arranged around the inner cavity 114. The first cooling chamber 113a and the second cooling chamber 113b are arranged at intervals along the axial direction (a-a axis direction) of the rotor 12. The inlet of the first cooling chamber 113a and the outlet of the second cooling chamber 113b are arranged on the first side C1 of the vacuum pump 1, and the outlet of the first cooling chamber 113a and the inlet of the second cooling chamber 113b are arranged on the second side C2 of the vacuum pump 1. The cooling device 21 can be used to provide refrigerant. The inlets of the first cooling chamber 113a and the second cooling chamber 113b are both directly or indirectly connected to the outlet of the cooling device 21.

[0047] When the vacuum pump 1 is running, due to the high temperature of the housing 11, the housing 11 has a heating effect on the refrigerant, resulting in the temperature of the refrigerant flowing out of the housing 11 being higher than the temperature of the refrigerant flowing into the housing 11. Therefore, the traditional cooling system cannot balance the temperatures on both sides of the vacuum pump 1, resulting in thermal stress still existing on both sides of the vacuum pump 1, and ultimately affecting the service life of the vacuum pump 1.

[0048] In this application, by arranging the inlet of the first cooling chamber 113a on the first side C1 of the vacuum pump 1 and the outlet of the first cooling chamber 113a on the second side C2 of the vacuum pump 1, as Figure 4 shown, the refrigerant can flow into the first cooling chamber 113a from the first side C1 and flow out of the first cooling chamber 113a from the second side C2. By arranging the outlet of the second cooling chamber 113b on the first side C1 of the vacuum pump 1 and the inlet of the second cooling chamber 113b on the second side C2 of the vacuum pump 1, as Figure 5 shown, the refrigerant can flow into the second cooling chamber 113b from the second side C2 and flow out of the second cooling chamber 113b from the first side C1. In this way, the low temperature when the refrigerant flows in can be used to cool both sides of the vacuum pump 1 simultaneously, so that the cooling temperatures on both sides of the vacuum pump 1 are the same, avoiding the problem of unbalanced cooling temperatures on both sides of the vacuum pump 1 caused by setting the inlet end of the refrigerant on the same side of the vacuum pump 1 and the outlet end of the refrigerant on the other side of the vacuum pump 1. Thus, the vacuum pump cooling system of this application can not only dissipate heat from the vacuum pump 1, but also help maintain the thermal balance on both sides of the vacuum pump 1, thereby minimizing the thermal stress generated during the operation of the vacuum pump 1 to the greatest extent and being beneficial to extending the service life of the vacuum pump 1.

[0049] In addition, the vacuum pump cooling system provided by the present application can be applicable to screw vacuum pumps, roots vacuum pumps, and other types of rotary vane vacuum pumps. When the first cooling chamber 113a and the second cooling chamber 113b introduce refrigerant on both sides of the screw vacuum pump or the roots vacuum pump respectively, the two sides of the vacuum pump 1 can be cooled simultaneously at the inflow temperature of the refrigerant. Therefore, the vacuum pump cooling system provided by the present application has a wider scope of application.

[0050] Among them, the shapes and sizes of the first cooling chamber 113a and the second cooling chamber 113b can be the same or different. The main difference between the first cooling chamber 113a and the second cooling chamber 113b lies in the different positions of the refrigerant inlet end and the outlet end. The present application does not impose special restrictions on the specific shapes and sizes of the first cooling chamber 113a and the second cooling chamber 113b. In addition, the first side C1 of the vacuum pump 1 can be on the left side of the a-a axis, and the second side C2 of the vacuum pump 1 can be on the right side of the a-a axis. The position where the refrigerant flows into the housing 11 can be the top of the housing 11, or the side or bottom of the housing 11. The refrigerant can be water or other cooling media such as carbon dioxide. The present application does not impose special restrictions on the specific type of the refrigerant and the specific position where the refrigerant flows into the housing 11.

[0051] In the following embodiments, for hollow components such as cavities and holes in the drawings, a marked lead wire with an arrow will be used for marking, and for the remaining components, a marked lead wire without an arrow will be used for marking. For example, the marked lead wire shown in the inner cavity 114 in the figure will not be described in detail below.

[0052] In some embodiments, as Figures 1 to 3 shown, the outlets of the first cooling chamber 113a and the second cooling chamber 113b can be directly or indirectly connected to the inlet of the cooling supply device 21.

[0053] Thus, the refrigerant in the first cooling chamber 113a can flow back to the cooling supply device 21 on the second side C2, and the refrigerant in the second cooling chamber 113b can flow back to the cooling supply device 21 on the first side C1. After flowing back to the cooling supply device 21, the refrigerant can be cooled by the cooling supply device 21 and then respectively transported to both sides of the vacuum pump 1, thereby realizing the recycling of the refrigerant to save refrigerant resources.

[0054] In some embodiments, as Figures 1 to 3 shown, a third cooling chamber 113c is further formed between the outer wall 111 and the inner wall 112; the third cooling chamber 113c surrounds the inner cavity 114, the inlet of the third cooling chamber 113c is arranged on the first side C1 of the vacuum pump 1, and the outlet of the third cooling chamber 113c is arranged on the second side C2 of the vacuum pump 1; the inlet of the third cooling chamber 113c is directly or indirectly connected to the outlet of the cooling supply device 21.

[0055] In this way, the vacuum pump 1 can have a plurality of cooling chambers 113 with inlets on the first side C1, thereby enhancing the cooling effect of the vacuum pump 1 on the first side C1. Among them, the shapes and sizes of the first cooling chamber 113a and the third cooling chamber 113c can be the same or different, and the present application does not impose special restrictions on the specific shapes and sizes of the third cooling chamber 113c.

[0056] In some embodiments, as Figures 1 to 3 shown, along the axial direction (a-a axis direction) of the rotor 12, the second cooling chamber 113b is located between the first cooling chamber 113a and the third cooling chamber 113c.

[0057] Thus, the inlets of the cooling chamber 113 can be arranged at intervals and alternately on the first side C1 of the vacuum pump 1. Since the temperature of the refrigerant at the inlet of the cooling chamber 113 is relatively low and the temperature of the refrigerant at the outlet of the cooling chamber 113 is relatively high, by alternately arranging the inlets of the cooling chamber 113 on the first side C1 of the vacuum pump 1, the cooling temperatures on both sides of the vacuum pump 1 can be evenly distributed along the axial direction of the rotor 12, which is conducive to maintaining the uniformity of the cooling temperatures on both sides of the vacuum pump 1.

[0058] In some embodiments, as Figures 1 to 3 shown, the outlet of the third cooling chamber 113c can be directly or indirectly connected to the inlet of the cooling supply device 21.

[0059] Similarly, the refrigerant in the third cooling chamber 113c can flow back to the cooling supply device 21 on the second side C2, and then be cooled by the cooling supply device 21 and transported to the inlet of the third cooling chamber 113c, thereby realizing the recycling of the refrigerant to save refrigerant resources.

[0060] In some embodiments, as Figures 1 to 3 shown, a fourth cooling chamber 113d is further formed between the outer wall 111 and the inner wall 112; the fourth cooling chamber 113d surrounds the inner cavity 114, the inlet of the fourth cooling chamber 113d is arranged on the second side C2 of the vacuum pump 1, and the outlet of the fourth cooling chamber 113d is arranged on the first side C1 of the vacuum pump 1; the inlet of the fourth cooling chamber 113d is directly or indirectly connected to the outlet of the cooling supply device 21.

[0061] In this way, the vacuum pump 1 can also have a plurality of cooling chambers 113 with inlets on the second side C2, thereby enhancing the cooling effect of the vacuum pump 1 on the second side C2. Among them, the shapes and sizes of the second cooling chamber 113b and the fourth cooling chamber 113d can be the same or different, and the present application does not impose special restrictions on the specific shapes and sizes of the fourth cooling chamber 113d.

[0062] In some embodiments, as Figures 1 to 3As shown, along the axial direction of the rotor 12 (the direction of the a-a axis), the third cooling chamber 113c is located between the second cooling chamber 113b and the fourth cooling chamber 113d.

[0063] Thus, the inlets of the cooling chambers 113 can also be alternately arranged at the second side C2 of the vacuum pump 1. Since the temperature of the refrigerant at the inlets of the cooling chambers 113 is relatively low and the temperature of the refrigerant at the outlets of the cooling chambers 113 is relatively high, by alternately arranging the inlets of the cooling chambers 113 at the second side C2 of the vacuum pump 1, the cooling temperatures on both sides of the vacuum pump 1 can be evenly distributed along the axial direction of the rotor 12, which is beneficial to maintaining the uniformity of the cooling temperatures on both sides of the vacuum pump 1.

[0064] In some embodiments, as Figures 1 to 3 shown, the outlet of the fourth cooling chamber 113d can be directly or indirectly connected to the inlet of the cooling device 21.

[0065] Similarly, the refrigerant in the fourth cooling chamber 113d can flow back to the cooling device 21 on the first side C1, and then be cooled by the cooling device 21 and transported to the inlet of the fourth cooling chamber 113d, so as to realize the recycling of the refrigerant and save refrigerant resources.

[0066] In some embodiments, the first cooling chamber 113a and the second cooling chamber 113b have the same structure; or, a third cooling chamber 113c is further formed between the outer wall 111 and the inner wall 112, and the first cooling chamber 113a, the second cooling chamber 113b and the third cooling chamber 113c have the same structure; or, a third cooling chamber 113c and a fourth cooling chamber 113d are further formed between the outer wall 111 and the inner wall 112, and the first cooling chamber 113a, the second cooling chamber 113b, the third cooling chamber 113c and the fourth cooling chamber 113d have the same structure.

[0067] The channels of the cooling chambers 113 are arranged around the inner cavity 114, so that the refrigerant can comprehensively cool the housing 11 along the outer periphery of the inner cavity 114 to improve the coverage rate of the housing 11 cooling. As Figure 6 shown, the cooling chamber 113 can have at least one inlet and at least one outlet. By arranging a plurality of inlets and a plurality of outlets on the cooling chamber 113, the channel path of the cooling chamber 113 can be shortened, thereby minimizing the problem that the refrigerant affects the heat dissipation of the housing 11 due to temperature rise. Among them, at least one of the first cooling chamber 113a, the second cooling chamber 113b, the third cooling chamber 113c and the fourth cooling chamber 113d can have a plurality of outlets and / or a plurality of inlets. The structures of the first cooling chamber 113a, the second cooling chamber 113b, the third cooling chamber 113c and the fourth cooling chamber 113d can be all the same, or some of them can be the same, or all of them can be different. The present application does not impose special restrictions on the specific structure of the cooling chamber 113.

[0068] In addition, along the axial direction of the rotor 12 (the direction of the a-a axis), a plurality of first cooling chambers 113a, second cooling chambers 113b, third cooling chambers 113c, and fourth cooling chambers 113d may be provided in the housing 11 of the vacuum pump 1. The present application does not impose any special restrictions on the specific number of the cooling chambers 113 provided in the housing 11 of the vacuum pump 1.

[0069] In some embodiments, as Figures 1 to 3 shown, the vacuum pump cooling system may further include a first pipe group 22. The first pipe group 22 may have a plurality of outlets. The outlet of the cooling medium supply device 21 is directly or indirectly connected to the inlet of the first pipe group 22. The inlet of the first cooling chamber 113a is directly or indirectly connected to the outlet of the first pipe group 22, and the inlet of the second cooling chamber 113b is directly or indirectly connected to the outlet of the first pipe group 22. Alternatively, a third cooling chamber 113c is further formed between the outer sidewall 111 and the inner sidewall 112. The inlet of the first cooling chamber 113a is directly or indirectly connected to the outlet of the first pipe group 22, the inlet of the second cooling chamber 113b is directly or indirectly connected to the outlet of the first pipe group 22, and the inlet of the third cooling chamber 113c is directly or indirectly connected to the outlet of the first pipe group 22. Alternatively, a third cooling chamber 113c and a fourth cooling chamber 113d are further formed between the outer sidewall 111 and the inner sidewall 112. The inlet of the first cooling chamber 113a is directly or indirectly connected to the outlet of the first pipe group 22, the inlet of the second cooling chamber 113b is directly or indirectly connected to the outlet of the first pipe group 22, the inlet of the third cooling chamber 113c is directly or indirectly connected to the outlet of the first pipe group 22, and the inlet of the fourth cooling chamber 113d is directly or indirectly connected to the outlet of the first pipe group 22.

[0070] Specifically, the first pipe group 22 may include a first main pipe 221 and a plurality of first branch pipes 222. The inlet of the first main pipe 221 is communicated with the outlet of the cooling medium supply device 21. The plurality of first branch pipes 222 are respectively communicated with the first main pipe 221. The outlets of the plurality of first branch pipes 222 are respectively communicated with the inlets of the first cooling chamber 113a, the second cooling chamber 113b, the third cooling chamber 113c, and the fourth cooling chamber 113d. Thus, the cooling medium supply device 21 can respectively transport the refrigerant to the plurality of first branch pipes 222 through the first main pipe 221, and the first branch pipes 222 then respectively transport the refrigerant into the cooling chambers 113, so that the refrigerant can cover the housing 11 along the axial direction of the rotor 12 on both sides of the vacuum pump 1 for cooling, thereby improving the cooling efficiency of the vacuum pump 1.

[0071] Wherein, each cooling chamber 113 may be connected with one or more first branch pipes 222. The number of the first branch pipes 222 on both sides of the vacuum pump 1 may be equal to ensure the balance of the cooling temperatures on both sides of the vacuum pump 1. Of course, the number of the first branch pipes 222 on both sides of the vacuum pump 1 may also be unequal. This application does not impose special restrictions on the number of the first branch pipes 222 connected to the cooling chamber 113.

[0072] In some embodiments, as Figures 1 to 3 shown, the vacuum pump cooling system may further include a second pipe group 23. The second pipe group 23 may have several inlets; the inlet of the cooling device 21 is directly or indirectly connected to the outlet of the second pipe group 23; the outlet of the first cooling chamber 113a is directly or indirectly connected to the inlet of the second pipe group 23, and the outlet of the second cooling chamber 113b is directly or indirectly connected to the inlet of the second pipe group 23; or, a third cooling chamber 113c is further formed between the outer wall 111 and the inner wall 112. The outlet of the first cooling chamber 113a is directly or indirectly connected to the inlet of the second pipe group 23, the outlet of the second cooling chamber 113b is directly or indirectly connected to the inlet of the second pipe group 23, and the outlet of the third cooling chamber 113c is directly or indirectly connected to the inlet of the second pipe group 23; or, a third cooling chamber 113c and a fourth cooling chamber 113d are further formed between the outer wall 111 and the inner wall 112. The outlet of the first cooling chamber 113a is directly or indirectly connected to the inlet of the second pipe group 23, the outlet of the second cooling chamber 113b is directly or indirectly connected to the inlet of the second pipe group 23, the outlet of the third cooling chamber 113c is directly or indirectly connected to the inlet of the second pipe group 23, and the outlet of the fourth cooling chamber 113d is directly or indirectly connected to the inlet of the second pipe group 23.

[0073] Specifically, the second pipe group 23 may include a second main pipe 231 and a plurality of second branch pipes 232. The outlet of the second main pipe 231 is communicated with the inlet of the cooling device 21, the plurality of second branch pipes 232 are respectively communicated with the second main pipe 231, and the inlets of the plurality of second branch pipes 232 are respectively communicated with the outlets of the first cooling chamber 113a, the second cooling chamber 113b, the third cooling chamber 113c and the fourth cooling chamber 113d. Thus, the refrigerant in the plurality of cooling chambers 113 can flow from both sides of the vacuum pump 1 to the second main pipe 231 through the second branch pipes 232, and then finally flow back into the cooling device 21 through the second main pipe 231 for cooling, so as to realize the recycling of the refrigerant.

[0074] Wherein, each cooling chamber 113 may be connected with one or more second branch pipes 232. The number of the second branch pipes 232 on both sides of the vacuum pump 1 may be equal or unequal. This application does not impose special restrictions on the number of the second branch pipes 232 connected to the cooling chamber 113.

[0075] In other embodiments, the second pipe group 23 may also not be connected to the cooling device 21, but to a heat exchanger or other equipment, so as to make full use of the heat of the refrigerant after being heated by the vacuum pump 1. This application does not impose special restrictions on whether the second pipe group 23 is connected to the cooling device 21.

[0076] In some embodiments, as Figure 1 shown, the vacuum pump cooling system may further include a control valve and a temperature sensor 25; the control valve is electrically connected to the temperature sensor 25; temperature sensors 25 are installed at the outlets of the first cooling chamber 113a and the second cooling chamber 113b for detecting the temperature of the refrigerant when flowing out; a control valve is installed between the inlet of the first cooling chamber 113a and the outlet of the cooling device 21, and a control valve is installed between the inlet of the second cooling chamber 113b and the outlet of the cooling device 21, and the control valve is used to control the flow rate of the refrigerant according to the temperature change; or, a third cooling chamber 113c is further formed between the outer wall 111 and the inner wall 112, and temperature sensors 25 are installed at the outlets of the first cooling chamber 113a, the second cooling chamber 113b and the third cooling chamber 113c for detecting the temperature of the refrigerant when flowing out; a control valve is installed between the inlet of the first cooling chamber 113a and the outlet of the cooling device 21, a control valve is installed between the inlet of the second cooling chamber 113b and the outlet of the cooling device 21, and a control valve is installed between the inlet of the third cooling chamber 113c and the outlet of the cooling device 21, and the control valve is used to control the flow rate of the refrigerant according to the temperature change; or, a third cooling chamber 113c and a fourth cooling chamber 113d are further formed between the outer wall 111 and the inner wall 112, and temperature sensors 25 are installed at the outlets of the first cooling chamber 113a, the second cooling chamber 113b, the third cooling chamber 113c and the fourth cooling chamber 113d for detecting the temperature of the refrigerant when flowing out; a control valve is installed between the inlet of the first cooling chamber 113a and the outlet of the cooling device 21, a control valve is installed between the inlet of the second cooling chamber 113b and the outlet of the cooling device 21, a control valve is installed between the inlet of the third cooling chamber 113c and the outlet of the cooling device 21, and a control valve is installed between the inlet of the fourth cooling chamber 113d and the outlet of the cooling device 21, and the control valve is used to control the flow rate of the refrigerant according to the temperature change.

[0077] For example, the control valve may include a solenoid valve 241, a throttle valve 242, and a check valve 243. The solenoid valve 241 and the throttle valve 242 may be disposed on the first branch pipe 222. The solenoid valve 241 can control the on / off of the refrigerant, and the throttle valve 242 can control the flow rate of the refrigerant. The check valve 243 may be disposed on the second branch pipe 232 to allow the refrigerant to flow back to the cooling device 21 unidirectionally. Among them, the temperature sensor 25 may be electrically connected to the throttle valve 242. According to the temperature of the vacuum pump 1 measured by the temperature sensor 25, the opening degree of the throttle valve 242 can be adjusted, thereby controlling the refrigerant flow rate of different branches on the first branch pipe 222. In addition, the solenoid valve 241 and the check valve 243 may also be electrically connected to the temperature sensor 25 respectively, and the opening or closing states of the solenoid valve 241 and the check valve 243 can be controlled according to the temperature of the vacuum pump 1 measured by the temperature sensor 25. Since there is no heat conduction medium in the vacuum, the temperature sensor 25 may be an infrared temperature sensor to accurately measure the temperature inside the vacuum pump 1.

[0078] In some embodiments, as Figures 1 to 3 shown, the vacuum pump 1 may be a variable pitch screw vacuum pump. The rotor 12 may include a first screw 121 and a second screw 122 installed in the housing 11. The first screw 121 and the second screw 122 may mesh with each other and rotate relative to each other. The variable pitch screw vacuum pump has a first end D1 and a second end D2 along the axial direction (a-a axis direction) of the rotor 12. The pitch of the first end D1 is greater than the pitch of the second end D2. The refrigerant flow rate near the first end D1 may be less than the refrigerant flow rate near the second end D2, and the refrigerant inlet temperature near the first end D1 may be higher than the refrigerant inlet temperature near the second end D2.

[0079] When the variable pitch screw vacuum pump operates, gas may be inhaled from the first end D1. Through the meshing rotation of the first screw 121 and the second screw 122, the gas is compressed and delivered to the second end D2 for discharge. During the compression process, the volume of the gas decreases, the density and pressure increase, and the flow rate of the gas is relatively fast, and the flow state is relatively disordered. Therefore, heat is continuously released during the compression process of the gas, making the temperature of the second end D2 higher than the temperature of the first end D1.

[0080] According to the above embodiments, by controlling the opening degree of the throttle valve 242, the refrigerant flow rate near the first end D1 can be relatively small, and the refrigerant flow rate near the second end D2 can be relatively large. In this way, the housing 11 near the second end D2 can quickly remove heat through the relatively large refrigerant flow rate, thereby quickly reducing the temperature of the second end D2 of the housing 11. In addition, the relatively low refrigerant inlet temperature near the second end D2 is also beneficial to reducing the temperature of the second end D2 of the housing 11.

[0081] Wherein, when there are multiple cooling chambers 113 provided in the housing 11, in the direction from the first end D1 to the second end D2, the flow rate of the refrigerant can gradually increase, and the inlet temperature of the refrigerant can gradually decrease. For example, the length of the first branch pipe 222 close to the second end D2 can be relatively short, and the length of the first branch pipe 222 close to the first end D1 can be relatively long. That is, by increasing or decreasing the refrigerant delivery distance, the inlet temperature of the refrigerant can be controlled. Of course, each first branch pipe 222 can also be connected to different cooling devices 21, and the present application does not impose special restrictions on the control method of the refrigerant inlet temperature.

[0082] In the present application, different refrigerant flow rates and inlet temperatures are set for different positions of the variable pitch screw vacuum pump, so that the function of segmental and regional heat dissipation of the vacuum pump 1 can be realized. Thus, the temperature of the vacuum pump 1 can be controlled within the range of room temperature or slightly higher than room temperature, which is beneficial to reducing the thermal deformation of the components of the vacuum pump 1 and improving the service life of the equipment.

[0083] The above uses specific examples to elaborate on the present utility model, which is only used to help understand the present utility model and is not intended to limit the present utility model. For those skilled in the technical field to which the present utility model belongs, according to the idea of the present utility model, several simple deductions, deformations or substitutions can also be made.

Claims

1. A vacuum pump cooling system, characterized in that: include: A vacuum pump, comprising a housing and a rotor, the housing comprising an outer wall and an inner wall, a first cooling cavity and a second cooling cavity being formed between the outer wall and the inner wall, the inner wall being provided with an inner cavity for accommodating the rotor, the first cooling cavity being provided around the inner cavity, the second cooling cavity being provided around the inner cavity, and the first cooling cavity and the second cooling cavity being provided at intervals along the axial direction of the rotor, an inlet of the first cooling cavity and an outlet of the second cooling cavity being provided on a first side of the vacuum pump, and the outlet of the first cooling cavity and the inlet of the second cooling cavity being provided on a second side of the vacuum pump; as well as, A cooling device is used to provide cooling medium; the inlet of the first cooling chamber and the inlet of the second cooling chamber are directly or indirectly connected to the outlet of the cooling device.

2. The vacuum pump cooling system according to claim 1, characterized in that: The outlet of the first cooling chamber and the outlet of the second cooling chamber are both directly or indirectly connected to the inlet of the cooling device.

3. The vacuum pump cooling system according to claim 1, characterized in that: A third cooling cavity is also formed between the outer wall and the inner wall; The third cooling cavity is arranged around the inner cavity, the inlet of the third cooling cavity is arranged on the first side of the vacuum pump, and the outlet of the third cooling cavity is arranged on the second side of the vacuum pump; the inlet of the third cooling cavity is directly or indirectly connected to the outlet of the cooling device.

4. The vacuum pump cooling system according to claim 3, characterized in that: Along the axial direction of the rotor, the second cooling cavity is located between the first cooling cavity and the third cooling cavity.

5. The vacuum pump cooling system according to claim 3, characterized in that: The outlet of the third cooling chamber is directly or indirectly connected to the inlet of the cooling device.

6. The vacuum pump cooling system according to claim 3, characterized in that: A fourth cooling cavity is also formed between the outer wall and the inner wall; The fourth cooling cavity is arranged around the inner cavity, the inlet of the fourth cooling cavity is arranged on the second side of the vacuum pump, and the outlet of the fourth cooling cavity is arranged on the first side of the vacuum pump; the inlet of the fourth cooling cavity is directly or indirectly connected to the outlet of the cooling device.

7. The vacuum pump cooling system according to claim 6, characterized in that: Along the axial direction of the rotor, the third cooling cavity is located between the second cooling cavity and the fourth cooling cavity.

8. The vacuum pump cooling system according to claim 6, characterized in that: The outlet of the fourth cooling chamber is directly or indirectly connected to the inlet of the cooling device.

9. The vacuum pump cooling system according to any one of claims 1 to 8, characterized in that: The first cooling chamber and the second cooling chamber have the same structure; Alternatively, a third cooling cavity is further formed between the outer wall and the inner wall, and the first cooling cavity, the second cooling cavity and the third cooling cavity have the same structure; Alternatively, a third cooling cavity and a fourth cooling cavity are further formed between the outer wall and the inner wall, and the first cooling cavity, the second cooling cavity, the third cooling cavity and the fourth cooling cavity have the same structure.

10. The vacuum pump cooling system according to any one of claims 1 to 8, characterized in that: The vacuum pump cooling system further comprises a first tube group, the first tube group having a plurality of outlets, the outlet of the cooling device being directly or indirectly connected to the inlet of the first tube group; The inlet of the first cooling chamber is directly or indirectly connected to the outlet of the first tube group, and the inlet of the second cooling chamber is directly or indirectly connected to the outlet of the first tube group; Alternatively, a third cooling cavity is further formed between the outer wall and the inner wall, the inlet of the first cooling cavity is directly or indirectly connected to the outlet of the first tube group, the inlet of the second cooling cavity is directly or indirectly connected to the outlet of the first tube group, and the inlet of the third cooling cavity is directly or indirectly connected to the outlet of the first tube group; Alternatively, a third cooling chamber and a fourth cooling chamber are further formed between the outer wall and the inner wall, the inlet of the first cooling chamber is directly or indirectly connected to the outlet of the first tube group, the inlet of the second cooling chamber is directly or indirectly connected to the outlet of the first tube group, the inlet of the third cooling chamber is directly or indirectly connected to the outlet of the first tube group, and the inlet of the fourth cooling chamber is directly or indirectly connected to the outlet of the first tube group.

11. The vacuum pump cooling system according to claim 10, characterized in that: The vacuum pump cooling system further comprises a second tube group, the second tube group having a plurality of inlets, the inlet of the cooling device being directly or indirectly connected to the outlet of the second tube group; The outlet of the first cooling chamber is directly or indirectly connected to the inlet of the second tube group, and the outlet of the second cooling chamber is directly or indirectly connected to the inlet of the second tube group; Alternatively, a third cooling cavity is further formed between the outer wall and the inner wall, the outlet of the first cooling cavity is directly or indirectly connected to the inlet of the second tube group, the outlet of the second cooling cavity is directly or indirectly connected to the inlet of the second tube group, and the outlet of the third cooling cavity is directly or indirectly connected to the inlet of the second tube group; Alternatively, a third cooling chamber and a fourth cooling chamber are further formed between the outer wall and the inner wall, the outlet of the first cooling chamber is directly or indirectly connected to the inlet of the second tube group, the outlet of the second cooling chamber is directly or indirectly connected to the inlet of the second tube group, the outlet of the third cooling chamber is directly or indirectly connected to the inlet of the second tube group, and the outlet of the fourth cooling chamber is directly or indirectly connected to the inlet of the second tube group.

12. The vacuum pump cooling system according to any one of claims 1 to 8, characterized in that: The vacuum pump cooling system further comprises a control valve and a temperature sensor, wherein the control valve is electrically connected to the temperature sensor; The temperature sensor is installed at the outlet of the first cooling chamber and the outlet of the second cooling chamber to detect the temperature of the refrigerant when it flows out; the control valve is installed between the inlet of the first cooling chamber and the outlet of the cooling device, and the control valve is installed between the inlet of the second cooling chamber and the outlet of the cooling device, and the control valve is used to control the flow rate of the refrigerant according to temperature changes; Alternatively, a third cooling chamber is further formed between the outer wall and the inner wall, and the temperature sensors are installed at the outlets of the first cooling chamber, the second cooling chamber and the third cooling chamber for detecting the temperature of the refrigerant when it flows out; the control valve is installed between the inlet of the first cooling chamber and the outlet of the cooling device, the control valve is installed between the inlet of the second cooling chamber and the outlet of the cooling device, and the control valve is installed between the inlet of the third cooling chamber and the outlet of the cooling device, and the control valve is used to control the flow rate of the refrigerant according to temperature changes; Alternatively, a third cooling chamber and a fourth cooling chamber are further formed between the outer wall and the inner wall, and the temperature sensors are installed at the outlets of the first cooling chamber, the second cooling chamber, the third cooling chamber and the fourth cooling chamber for detecting the temperature of the refrigerant when it flows out; the control valve is installed between the inlet of the first cooling chamber and the outlet of the cooling device, the control valve is installed between the inlet of the second cooling chamber and the outlet of the cooling device, the control valve is installed between the inlet of the third cooling chamber and the outlet of the cooling device, and the control valve is installed between the inlet of the fourth cooling chamber and the outlet of the cooling device, and the control valve is used to control the flow rate of the refrigerant according to temperature changes.

Images