Heating device and mass flow controller

Abstract

The utility model discloses a heating device and a mass flow controller. The heating device comprises a heating module arranged on the mass flow controller. The mass flow controller is provided with a plurality of functional units distributed in a plurality of functional areas, the heating module comprises a plurality of heating units arranged on the functional areas respectively, and the heating units are used for independently heating the functional units in the corresponding functional areas. Therefore, the temperature of each partition of the mass flow controller is accurately controlled in real time, and the purposes of keeping the process stable, prolonging the service life of the mass flow controller, reducing the replacement frequency of the mass flow controller and reducing the leakage risk of special gas are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor integrated circuit processing, in particular to a novel heating device for heating a mass flow controller and a mass flow controller containing the heating device. Background Art

[0002] During the dry etching process, the flow rate and pressure of the etching gas required are key parameters for the quality of the etching process. If the flow rate and pressure of the etching gas change, it will seriously affect the stability of the etching process.

[0003] Generally, the flow rate and pressure of the etching gas are controlled by a mass flow controller (MFC) and a pressure regulating valve respectively. Among them, as a precision instrument, the mass flow controller is a key component for controlling the flow rate of the etching gas. For some special gases that are liquid at room temperature, such as boron trichloride and silicon tetrachloride, a heating device needs to be provided on the mass flow controller responsible for controlling the flow rate of these special gases.

[0004] However, the design of the existing heating device can only heat some areas inside the mass flow controller and cannot adjust and control the heating temperature. Therefore, it is difficult to achieve precise heating, resulting in uneven heating inside the mass flow controller, causing the above-mentioned special gases to liquefy in the internal pipeline of the mass flow controller, which will further cause zero drift of the mass flow controller. In severe cases, it will even cause blockage and damage to the internal pipeline of the mass flow controller, thus greatly affecting the service life of the mass flow controller. In addition, since the mass flow controller is expensive, being forced to replace the mass flow controller due to the above-mentioned blockage or damage will result in an additional increase in the use cost, and there is also a risk of special gas leakage during replacement.

[0005] Therefore, it is necessary to provide a novel mass flow controller heating technology to solve the above problems existing in the prior art, so as to achieve the purpose of maintaining process stability, improving the service life of components, reducing the replacement times, and reducing the risk of special gas leakage. Summary of the Utility Model

[0006] The purpose of the utility model is to overcome the above defects existing in the prior art and provide a heating device and a mass flow controller.

[0007] To achieve the above purpose, the technical solution of the utility model is as follows:

[0008] The utility model provides a heating device, including a heating module arranged on the mass flow controller;

[0009] The mass flow controller is provided with a plurality of functional units distributed in a plurality of functional regions. The heating module includes a plurality of heating units respectively arranged on each of the functional regions. Each of the heating units is used to independently heat the functional units in the corresponding functional region.

[0010] Furthermore, each of the heating units is located on the same side inside the mass flow controller and faces each of the functional units, and / or any two adjacent heating units are close to each other.

[0011] Furthermore, a temperature measurement module is further included. The temperature measurement module includes a plurality of temperature measurement units respectively arranged on each of the functional regions. Each of the temperature measurement units is used to independently detect the temperature of the functional units in the corresponding functional region, so as to control the heating temperature of the heating units in the corresponding functional region through feedback.

[0012] Furthermore, a control module is further included, which is used to perform feedback control on the heating power of the heating units in the corresponding functional region according to the temperature detection signal output by the temperature measurement unit.

[0013] Furthermore, the plurality of functional regions include an input region, a flow sensing region, a flow control region, an output region, and a circuit region. The plurality of functional units include an input pipeline unit located in the input region, a flow sensing unit located in the flow sensing region, a flow control valve unit located in the flow control region, an output pipeline unit located in the output region, and a circuit board unit located in the circuit region. Each of the temperature measurement units is respectively arranged on the input pipeline unit, the flow sensing unit, the flow control valve unit, the output pipeline unit, and the circuit board unit.

[0014] Furthermore, the control module includes a thermostat, the temperature measurement unit includes a temperature sensor, and the heating unit includes a heater. The thermostat is respectively signal-connected to the temperature sensor and the heater.

[0015] Furthermore, a sensor output port is provided on the mass flow controller. A first signal line is respectively connected between the temperature sensor and the sensor output port, and between the sensor output port and the thermostat.

[0016] Furthermore, a temperature signal input port is provided on the mass flow controller. A second signal line is respectively connected between the heater and the temperature signal input port, and between the temperature signal input port and the thermostat.

[0017] Furthermore, a power input port is further provided on the mass flow controller. A third signal line is connected between the power input port and the heater.

[0018] The present utility model also provides a mass flow controller, which includes the above-mentioned heating device.

[0019] As can be seen from the above technical solution, by arranging a plurality of heating units corresponding to different functional areas inside the mass flow controller, the present utility model can independently heat different functional units located in each functional area, so as to realize the real-time and precise control of the temperature of each partition of the mass flow controller, achieve the purpose of maintaining process stability, prolonging the service life of the mass flow controller, reducing its replacement times, and reducing the risk of special gas leakage. Description of the Drawings

[0020] Figure 1 It is a schematic diagram of the internal structure of a conventional mass flow controller.

[0021] Figure 2 It is a schematic diagram of the setting structure of a heating device of an existing mass flow controller.

[0022] Figure 3 It is a schematic diagram of the setting structure of the heating module of a heating device inside the mass flow controller according to a preferred embodiment of the present utility model.

[0023] Figure 4 It is a schematic diagram of the setting structure of the temperature measurement module of a heating device inside the mass flow controller according to a preferred embodiment of the present utility model. Detailed Embodiments

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art in the field to which the present utility model belongs. The words such as "including" used herein mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0025] Refer to Figure 1。The housing 6 of a conventional mass flow controller is internally provided with a plurality of functional units, including an input pipeline unit 31, a flow sensing unit 21, a flow control valve unit 41, an output pipeline unit 51, and a circuit board unit. Among them, the input pipeline unit 31 includes an input pipeline 311 (including an air inlet 312), the output pipeline unit 51 includes an output pipeline 511 (including an air outlet 512), and the input pipeline 311 is connected to the output pipeline 511; the flow sensing unit 21 includes a diverter pipeline 211 and a flow sensor, and both ends of the diverter pipeline 211 are connected to the input pipeline 311; the flow control valve unit 41 includes a piezoelectric actuator 411, a valve 412, and a metal diaphragm 413, and the valve 412 is arranged on the output pipeline 511. Thus, a plurality of functionally distributed regions are formed naturally inside the mass flow controller ( Figure 1 schematically shown as the space divided by dotted lines), including an input region 3 for accommodating the input pipeline unit 31, a flow sensing region 2 for accommodating the flow sensing unit 21, a flow control region 4 for accommodating the flow control valve unit 41, an output region 5 for accommodating the output pipeline unit 51, and a circuit region 1 for accommodating the circuit board unit.

[0026] After the gas flows into the input pipeline 311 from the air inlet 312, the flow sensor monitors the inlet flow rate (such as 60 sccm) through the diverter pipeline 211, and inputs the monitored flow rate (such as 60 sccm) to the control system by outputting a flow signal. When there is a difference between the set flow rate and the monitored flow rate (such as the set flow rate is 55 sccm), the control system inputs a flow control signal to the flow control valve unit 41, and then controls the actual output of the gas at the air outlet 512 of the output pipeline 511 to match the set flow rate (that is, reach 55 sccm) through the valve 412.

[0027] Reference Figure 2 。The heating device 7 of the existing mass flow controller is usually only arranged in the flow sensing region 2, the flow control region 4 and a part of the circuit region 1 inside the above-mentioned mass flow controller. Therefore, heating "blank" areas are generated in other regions that occupy a large space, so it can only heat part of the area inside the mass flow controller. Moreover, the existing heating device 7 is a whole design, and the heating temperature is usually set to a constant value, and the heating temperature of each functional region cannot be adjusted separately, so it cannot interact with the actual temperature inside, and it is difficult to achieve precise heating. These problems often cause uneven heating inside the mass flow controller, resulting in liquefaction of special gases (such as boron trichloride, silicon tetrachloride, etc.) in the internal pipelines of the mass flow controller, leading to zero drift of the mass flow controller, and even causing blockage and damage of the internal pipelines of the mass flow controller. And the unplanned replacement of the mass flow controller will cause an additional increase in the use cost, and there is also a risk of special gas leakage during replacement.

[0028] In view of the above problems, the present utility model can independently heat the functional units in each functional area by respectively arranging heating units in each of the above functional areas (input area 3, flow sensing area 2, flow control area 4, output area 5, and circuit area 1), so as to accurately control the temperature of each partition of the mass flow controller in real time, achieve the purpose of maintaining process stability, prolonging the service life of the mass flow controller, reducing its replacement times, and reducing the risk of special gas leakage. Thus, the above problems existing in the prior art are effectively solved.

[0029] The following further elaborates on the specific implementation manners of the present utility model in conjunction with the accompanying drawings.

[0030] Reference Figure 1 、 Figure 3 and Figure 4 . A heating device of the present utility model includes a heating module disposed on the mass flow controller.

[0031] Among them, multiple functional areas are distributed on the mass flow controller, and functional units are respectively provided in each functional area.

[0032] In some embodiments, there are 5 functional areas distributed inside the mass flow controller, and functional units are respectively provided in each functional area. Among them, the 5 functional areas specifically include an input area 3 and an output area 5 located at the bottom of the mass flow controller, a flow sensing area 2 located above the input area 3, a flow control area 4 located above the output area 5, and a circuit area 1 located above the flow sensing area 2 and the flow control area 4. Each functional unit includes an input pipeline unit 31 (including an input pipeline 311 containing an air inlet 312) located in the input area 3, a flow sensing unit 21 (including a shunt pipeline 211 and a flow sensor) located in the flow sensing area 2, a flow control valve unit 41 (including a piezoelectric actuator 411, a valve 412, and a metal diaphragm 413) located in the flow control area 4, an output pipeline unit 51 (including an output pipeline 511 containing an air outlet 512) located in the output area 5, and a circuit board unit (including a circuit board) located in the circuit area 1. However, it can be understood that the setting of the functional units and the division of the functional areas are not limited to the above forms. When the number of functional units increases, decreases, merges, and the positions change with the technological update of the mass flow controller, the division and positions of the functional areas will also change accordingly.

[0033] The heating module of the present utility model includes a plurality of heating units. Among them, each heating unit is respectively arranged on each of the above-mentioned functional areas. Each heating unit is used to independently heat the functional units in the corresponding functional area. For example, the first heating unit 12 corresponding to the circuit area 1 is used to independently heat the circuit board unit; the second heating unit 22 corresponding to the flow sensing area 2 is used to independently heat the flow sensing unit 21; the third heating unit 32 corresponding to the input area 3 is used to independently heat the input pipeline unit 31; the fourth heating unit 42 corresponding to the flow control area 4 is used to independently heat the flow control valve unit 41; the fifth heating unit 52 corresponding to the output area 5 is used to independently heat the output pipeline unit 51.

[0034] In some embodiments, the above-mentioned heating units are located on the same side inside the mass flow controller. For example, the first heating unit 12, the second heating unit 22, the third heating unit 32, the fourth heating unit 42, and the fifth heating unit 52 are located on the working side inside the mass flow controller and are respectively arranged facing the circuit board unit, the flow sensing unit 21, the input pipeline unit 31, the flow control valve unit 41, and the output pipeline unit 51.

[0035] In some embodiments, the heating units are located on the same side inside the mass flow controller, and any two adjacent heating units are close to each other. For example, the lower boundary of the first heating unit 12 is close to the upper boundaries of the second heating unit 22 and the fourth heating unit 42; the right boundary of the second heating unit 22 is close to the left boundary of the fourth heating unit 42; the lower boundary of the second heating unit 22 is close to the upper boundary of the third heating unit 32; the lower boundary of the fourth heating unit 42 is close to the upper boundary of the fifth heating unit 52; the right boundary of the third heating unit 32 is close to the left boundary of the fifth heating unit 52. This ensures the accuracy during zone temperature control.

[0036] In some embodiments, the heating units are joined together by their mutual boundaries, and the outer boundaries of the heating units basically extend to the boundaries inside the mass flow controller. This ensures that there is no heating "blank" area inside the mass flow controller.

[0037] In some embodiments, according to the planar distribution characteristics of each functional unit, each functional area is correspondingly divided into relatively regular shapes. For example, according to the linear planar distribution characteristics of the input pipeline unit 31 and the output pipeline unit 51, the input area 3 and the output area 5 can be correspondingly divided into strip shapes; according to the block-shaped planar distribution characteristics of the flow sensing unit 21 and the flow control valve unit 41, the flow sensing area 2 and the flow control area 4 can be correspondingly divided into rectangular shapes; and according to the top height difference characteristics between the flow sensing area 2 and the flow control area 4 (the top height of the flow sensing area 2 is lower than the top height of the flow control area 4), the circuit area 1 is correspondingly divided into a combined shape of a rectangle and a strip, as Figure 4 shown. Thus, the shapes of the first heating unit 12, the second heating unit 22, the third heating unit 32, the fourth heating unit 42, and the fifth heating unit 52 are also determined, that is, they respectively correspond to the shapes of the above-mentioned circuit area 1, flow sensing area 2, input area 3, flow control area 4, and output area 5, as Figure 3 shown.

[0038] Refer to Figure 3 and Figure 4 . In some embodiments, the heating device of the present utility model further includes a temperature measurement module; the temperature measurement module is arranged inside the mass flow controller. Among them, the temperature measurement module includes a plurality of temperature measurement units respectively arranged on each functional area. For example, the temperature measurement module includes a first temperature measurement unit 13 arranged on the circuit area 1, a second temperature measurement unit 23 arranged on the flow sensing area 2, a third temperature measurement unit 33 arranged on the input area 3, a fourth temperature measurement unit 43 arranged on the flow control area 4, and a fifth temperature measurement unit 53 arranged on the output area 5.

[0039] The above-mentioned first temperature measurement unit 13, second temperature measurement unit 23, third temperature measurement unit 33, fourth temperature measurement unit 43, and fifth temperature measurement unit 53 are respectively used to independently detect the temperatures of the circuit area 1, flow sensing area 2, input area 3, flow control area 4, and output area 5. Specifically, they are respectively used to independently detect the temperatures of the circuit board unit, flow sensing unit 21, input pipeline unit 31, flow control valve unit 41, and output pipeline unit 51, so as to perform closed-loop control on the heating temperature of the heating unit in the corresponding functional area through the temperature detection signals fed back by each temperature measurement unit.

[0040] In some embodiments, the first temperature measurement unit 13 is arranged on the circuit board, the second temperature measurement unit 23 is arranged on the shunt pipeline 211, the third temperature measurement unit 33 is arranged on the input pipeline 311, the fourth temperature measurement unit 43 is arranged on the flow control valve unit 41, and the fifth temperature measurement unit 53 is arranged on the output pipeline 511.

[0041] In some embodiments, the heating device of the present utility model further includes a control module. Among them, the control module is used to perform feedback control on the heating power of the heating unit in the corresponding functional area according to the temperature detection signals output by each temperature measurement unit, so that the temperature in the corresponding functional area (the detected temperature of the temperature measurement unit) is maintained at its respective target temperature.

[0042] In some embodiments, the control module includes a temperature controller. The temperature controller can be a PLC controller.

[0043] In some embodiments, the temperature measurement unit includes a temperature sensor. The temperature sensor can be a thermal resistance temperature sensor, a thermocouple temperature sensor, a pressure temperature sensor, a radiation thermal temperature sensor, etc.

[0044] In some embodiments, the heating unit includes a heater. The heater can be a resistance heater, a lamp tube or a lamp bead heater, etc.

[0045] In some embodiments, the temperature controller is respectively signal-connected to the temperature sensor and the heater.

[0046] In some embodiments, a sensor output port 10 is provided on the mass flow controller. For example, the sensor output port 10 is provided on the top of the housing 6 of the mass flow controller. Between the temperature sensor and the sensor output port 10, and between the sensor output port 10 and the temperature controller are respectively connected by a first signal line.

[0047] In some embodiments, a temperature signal input port 8 is provided on the mass flow controller. For example, the temperature signal input port 8 is provided on the top of the housing 6 of the mass flow controller. Between the heater and the temperature signal input port 8, and between the temperature signal input port 8 and the temperature controller are respectively connected by a second signal line.

[0048] In some embodiments, a power input port 9 is further provided on the mass flow controller. For example, the power input port 9 is provided on the top of the housing 6 of the mass flow controller. The power input port 9 is connected to the heater by a third signal line. The power input port 9 is connected to the power supply through a power cord.

[0049] In some embodiments, the control module is provided in the upper computer and / or the lower computer. Or, the control module can be the upper computer and / or the lower computer.

[0050] A mass flow controller of the present utility model includes the heating device of the present utility model as described above, such as Figures 3 - 4As shown. The mass flow controller of the present utility model can be used to control the flow rate of some special gases that are liquid at room temperature, such as boron trichloride or silicon tetrachloride, etc. When the special gas flows through the mass flow controller, the above-mentioned heating units are controlled to independently heat the functional units in the corresponding functional areas. Therefore, it can prevent the liquefaction of the special gas in the internal pipeline of the mass flow controller, avoid the zero drift of the mass flow controller, and avoid the blockage and damage of the internal pipeline of the mass flow controller, thereby improving the service life of the mass flow controller. At the same time, it can also avoid the potential risk of special gas leakage when the mass flow controller is forced to be replaced due to blockage or damage.

[0051] In summary, by arranging a plurality of heating units corresponding to different functional areas inside the mass flow controller, the present utility model can independently heat different functional units located in each functional area, so as to realize the real-time and precise control of the temperature of each partition of the mass flow controller, achieve the purpose of maintaining process stability, improving the service life of the mass flow controller, reducing the replacement times, and reducing the risk of special gas leakage.

[0052] Although the embodiments of the present utility model have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present utility model described in the claims. Moreover, the present utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A heating device, characterized in that: It includes a heating module disposed on the mass flow controller; The mass flow controller is provided with a plurality of functional units distributed in a plurality of functional areas, and the heating module comprises a plurality of heating units separately arranged in each of the functional areas, and each of the heating units is used to independently heat the functional unit in the corresponding functional area.

2. The heating device according to claim 1, characterized in that Each of the heating units is located at the same side inside the mass flow controller and faces each of the functional units, and / or any two adjacent heating units are close to each other.

3. The heating device according to claim 1, characterized in that: It also includes a temperature measuring module, which includes a plurality of temperature measuring units respectively arranged on each of the functional areas, and each of the temperature measuring units is used to independently detect the temperature of the functional unit of the corresponding functional area, so as to control the heating temperature of the heating unit of the corresponding functional area through feedback.

4. The heating device according to claim 3, characterized in that: It also includes a control module for performing feedback control on the heating power of the heating unit of the corresponding functional area according to the temperature detection signal output by the temperature measuring unit.

5. The heating device according to claim 4, characterized in that: The multiple functional areas include an input area, a flow sensing area, a flow control area, an output area and a circuit area. The multiple functional units include an input pipeline unit located in the input area, a flow sensing unit located in the flow sensing area, a flow control valve unit located in the flow control area, an output pipeline unit located in the output area, and a circuit board unit located in the circuit area. The temperature measuring units are separately arranged on the input pipeline unit, the flow sensing unit, the flow control valve unit, the output pipeline unit and the circuit board unit.

6. The heating device according to claim 4, characterized in that: The control module includes a temperature controller, the temperature measuring unit includes a temperature sensor, the heating unit includes a heater, and the temperature controller is signal-connected to the temperature sensor and the heater, respectively.

7. The heating device according to claim 6, characterized in that: The mass flow controller is provided with a sensor output port, and first signal lines are respectively connected between the temperature sensor and the sensor output port, and between the sensor output port and the temperature controller.

8. The heating device according to claim 6, characterized in that The mass flow controller is provided with a temperature signal input port, and a second signal line is connected between the heater and the temperature signal input port, and between the temperature signal input port and the temperature controller, respectively.

9. The heating device according to claim 8, characterized in that: The mass flow controller is also provided with a power input port, and a third signal line is connected between the power input port and the heater.

10. A mass flow controller, comprising the heating device according to any one of claims 1 to 9.

Images