Vacuum pressure sintering furnace

By designing a vacuum pressure sintering furnace, including a crimp station, a first transmission mechanism and multiple plug-in valves, the problem of existing equipment not being suitable for large pressure is solved and high-pressure chip processing is realized.

CN222964383UActive Publication Date: 2025-06-10ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD
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Patent Information

Application Number
CN202421167111.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-27
Publication Date
2025-06-10
Estimated Expiration
2034-05-27

AI Technical Summary

Technical Problem

Existing chip hot pressing and sintering equipment is not suitable for large pressures and is difficult to meet the needs of high-pressure processing.

Method used

A vacuum pressure sintering furnace is designed, including a crimping station, a first transmission mechanism and a plurality of plug-in valves, a sealing cavity is formed by a hydraulic mechanism and a head mechanism, and a lifting and regulating mechanism of the first transmission mechanism is used to adapt to large pressure.

Benefits of technology

It realizes that the chip crimping can withstand large pressure without damaging the transmission mechanism, solving the problem that existing equipment cannot be applied to large pressure.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of chip processing equipment, and provides a vacuum pressure sintering furnace which comprises a crimping station, a first transmission mechanism, a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, a preheating station and a cooling station, the inlet end of the preheating station is provided with the first gate valve, the outlet end of the preheating station is provided with the second gate valve, the inlet end of the crimping station is provided with the second gate valve, the outlet end of the crimping station is provided with the third gate valve, the inlet end of the cooling station is provided with the third gate valve, and the outlet end of the cooling station is provided with the third gate valve. The outlet end of the cooling station is provided with the fourth gate valve, and the two sides of the crimping station are provided with the first transmission mechanisms. A workpiece is placed on the heating plate, crimping is carried out under the condition that a transmission mechanism is not damaged, and large pressure can be borne.
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Description

Technical Field

[0001] The utility model relates to the technical field of chip processing equipment, in particular to a vacuum pressure sintering furnace. Background Art

[0002] At present, the methods for hot pressing and sintering of nano silver or nano copper in chip hot pressing and sintering are mostly integral crimping or split crimping (distributed on the same plane). The workpiece to be processed is placed on the lower crimping platform, and the workpiece to be processed located between the two crimping heads is completed by the mutual approach and separation of the two crimping heads. Existing crimping equipment is not suitable for large pressures. Summary of the Invention

[0003] The utility model provides a vacuum pressure sintering furnace to solve the problem that existing crimping equipment is not suitable for large pressures.

[0004] A vacuum pressure sintering furnace includes a crimping station, a first transmission mechanism, a first flap valve, a second flap valve, a third flap valve, a fourth flap valve, a preheating station and a cooling station; the first flap valve is arranged at the inlet end of the preheating station, the second flap valve is arranged at the outlet end of the preheating station, the second flap valve is arranged at the inlet end of the crimping station, the third flap valve is arranged at the outlet end of the crimping station, the third flap valve is arranged at the inlet end of the cooling station, the fourth flap valve is arranged at the outlet end of the cooling station, and the first transmission mechanism is arranged on both sides of the crimping station.

[0005] According to the vacuum pressure sintering furnace of the utility model, the crimping station includes a crimping cavity, a hydraulic mechanism and a crimping head mechanism; one end of the crimping head of the crimping head mechanism is arranged in the crimping cavity, the hydraulic mechanism applies pressure to the other end of the crimping head mechanism away from the crimping head, and the crimping head mechanism and the crimping cavity form a sealed cavity.

[0006] According to the vacuum pressure sintering furnace of the utility model, the first transmission mechanism is arranged on both sides of the crimping cavity.

[0007] According to the vacuum pressure sintering furnace of the utility model, the first transmission mechanism includes a first lifting mechanism, a mounting bracket, a driving wheel and a guiding wheel; the first lifting mechanism is arranged below the mounting bracket, the driving wheel is arranged on the side of the mounting bracket, and the guiding wheel is arranged above the mounting bracket.

[0008] According to the vacuum pressure sintering furnace of the utility model, the first transmission mechanism further includes a first adjusting mechanism, a driving mechanism and a second adjusting mechanism; the driving mechanism drives the driving wheel, the first adjusting mechanism adjusts the chain on one side of the driving mechanism, and the second adjusting mechanism adjusts the chain on the other side of the driving mechanism.

[0009] According to the vacuum pressure sintering furnace of the present utility model, the first adjusting mechanism and the second adjusting mechanism are telescopic mechanisms, and the telescopic mechanism is elastically telescopic.

[0010] According to the vacuum pressure sintering furnace of the present utility model, the crimping cavity further includes a cavity frame and a heating plate, and the heating plate is arranged inside the cavity frame.

[0011] According to the vacuum pressure sintering furnace of the present utility model, it further includes a second lifting mechanism, and the second lifting mechanism is arranged below the preheating station and the cooling station.

[0012] According to the vacuum pressure sintering furnace of the present utility model, it further includes a second transmission mechanism, and the second transmission mechanism is arranged on both sides of the preheating station and the cooling station.

[0013] According to the vacuum pressure sintering furnace of the present utility model, the preheating station is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0014] The crimping station is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0015] The cooling station is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage.

[0016] The present utility model realizes the lifting of the first transmission mechanism. When the workpiece is transported into the crimping station, the first transmission mechanism descends, and the workpiece is placed on the heating plate, and crimping can be carried out without damaging the transmission mechanism and can withstand large pressures. When the first transmission mechanism lifts and lowers, it drives the first adjusting mechanism and the second adjusting mechanism to adjust the chain. Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0018] Figure 1 It is a schematic three-dimensional structure diagram of a vacuum pressure sintering furnace;

[0019] Figure 2 It is a schematic front view structure diagram of a vacuum pressure sintering furnace;

[0020] Figure 3 It is a schematic three-dimensional structure diagram of a crimping station;

[0021] Figure 4 Schematic diagram of the three-dimensional structure of the crimping cavity Figure 1 ;

[0022] Figure 5 Schematic diagram of the three-dimensional structure of the crimping cavity Figure 2 ;

[0023] Figure 6 Schematic enlarged view of part A;

[0024] Figure 7 Schematic diagram of the structure of the first transmission mechanism;

[0025] Reference numerals: 1, first plug valve; 2, second plug valve; 3, third plug valve; 4, fourth plug valve; 5, preheating station; 6, crimping station; 7, cooling station; 8, second lifting mechanism; 61, hydraulic mechanism; 62, press head mechanism; 63, crimping cavity; 631, cavity frame; 632, heating plate; 633, driving mechanism; 634, first transmission mechanism; 6341, first lifting mechanism; 6342, mounting bracket; 6343, driving wheel; 6344, guide wheel; 6345, first adjusting mechanism; 6346, second adjusting mechanism. Detailed implementation manners

[0026] The following further describes in detail the implementation manners of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0027] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0028] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0029] In the embodiments of the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the horizontal height of the first feature is less than that of the second feature.

[0030] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or at least one embodiment or example. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0031] The following is combined with Figure 1-7 Describe a vacuum pressure sintering furnace according to an embodiment of the present utility model, including a crimping station 6, a first transmission mechanism 634, a first flap valve 1, a second flap valve 2, a third flap valve 3, a fourth flap valve 4, a preheating station 5, and a cooling station 7; a first flap valve 1 is arranged at the inlet end of the preheating station 5, a second flap valve 2 is arranged at the outlet end of the preheating station 5, a second flap valve 2 is arranged at the inlet end of the crimping station 6, a third flap valve 3 is arranged at the outlet end of the crimping station 6, a third flap valve 3 is arranged at the inlet end of the cooling station 7, a fourth flap valve 4 is arranged at the outlet end of the cooling station 7, and a first transmission mechanism 634 is arranged on both sides of the crimping station 6.

[0032] In some embodiments, the crimping station 6 includes a crimping cavity 63, a hydraulic mechanism 61, and a punch mechanism 62; one end of the punch of the punch mechanism 62 is arranged in the crimping cavity 63, the hydraulic mechanism 61 applies pressure to the other end of the punch mechanism 62 away from the punch, and the punch mechanism 62 and the crimping cavity 63 form a sealed cavity.

[0033] In some embodiments, a first transmission mechanism 634 is arranged on both sides of the crimping cavity 63.

[0034] In some embodiments, the first transmission mechanism 634 includes a first lifting mechanism 6341, a mounting bracket 6342, a driving wheel 6343, and a guiding wheel 6344; the first lifting mechanism 6341 is disposed below the mounting bracket 6342, the driving wheel 6343 is disposed on the side of the mounting bracket 6342, and the guiding wheel 6344 is disposed above the mounting bracket 6342. The jig is transmitted by the driving wheel 6343, and the guiding wheel 6344 guides the jig.

[0035] In some embodiments, the first transmission mechanism 634 further includes a first adjusting mechanism 6345, a driving mechanism 633, and a second adjusting mechanism 6346; the driving mechanism 633 drives the driving wheel 6343, the first adjusting mechanism 6345 adjusts the chain on one side of the driving mechanism 633, and the second adjusting mechanism 6346 adjusts the chain on the other side of the driving mechanism 633.

[0036] In some embodiments, the first adjusting mechanism 6345 and the second adjusting mechanism 6346 are telescopic mechanisms, and the telescopic mechanisms are elastically telescopic. That is to say, when the first lifting mechanism 6341 moves up and down, the first adjusting mechanism 6345 and the second adjusting mechanism 6346 perform telescopic adjustment. The jig is directly placed on the heating plate 632, avoiding being placed on the driving wheel 6343, so that a large pressure can be applied. It also avoids setting a lifting mechanism below the heating plate 632 and using the lifting mechanism below to lift and press the heating plate 632, which is not suitable for a large pressure.

[0037] In some embodiments, the crimping cavity 63 further includes a cavity frame 631 and a heating plate 632, and the heating plate 632 is disposed inside the cavity frame 631. That is to say, the heating plate 632 is fixedly disposed on the cavity frame 631.

[0038] In some embodiments, a second lifting mechanism 8 is further included, and the second lifting mechanism 8 is disposed below the preheating station 5 and the cooling station 7.

[0039] In some embodiments, a second transmission mechanism is further included, and the second transmission mechanism is disposed on both sides of the preheating station 5 and the cooling station 7. The second transmission mechanism is a non-lifting transmission mechanism.

[0040] In some embodiments, the preheating station 5 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage;

[0041] The crimping station 6 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage;

[0042] The cooling station 7 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece welding stage.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum pressure sintering furnace, characterized in that: It includes a crimping station, a first transmission mechanism, a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, a preheating station and a cooling station; the first gate valve is arranged at the inlet end of the preheating station, the second gate valve is arranged at the outlet end of the preheating station, the second gate valve is arranged at the inlet end of the crimping station, the third gate valve is arranged at the outlet end of the crimping station, the third gate valve is arranged at the inlet end of the cooling station, the fourth gate valve is arranged at the outlet end of the cooling station, and the first transmission mechanism is arranged on both sides of the crimping station.

2. The vacuum pressure sintering furnace according to claim 1, characterized in that: The crimping station includes a crimping cavity, a hydraulic mechanism and a crimping head mechanism; one end of the crimping head of the crimping head mechanism is arranged in the crimping cavity, the hydraulic mechanism applies pressure to the other end of the crimping head mechanism away from the crimping head, and the crimping head mechanism and the crimping cavity form a sealed cavity.

3. The vacuum pressure sintering furnace according to claim 2, characterized in that: The first transmission mechanism is arranged on both sides of the crimping cavity.

4. The vacuum pressure sintering furnace according to claim 3, characterized in that: The first transmission mechanism includes a first lifting mechanism, a mounting bracket, a power wheel and a guide wheel; the first lifting mechanism is arranged below the mounting bracket, the power wheel is arranged on the side of the mounting bracket, and the guide wheel is arranged above the mounting bracket.

5. The vacuum pressure sintering furnace according to claim 4, characterized in that: The first transmission mechanism further includes a first adjusting mechanism, a driving mechanism and a second adjusting mechanism; the driving mechanism drives the power wheel, the first adjusting mechanism adjusts the chain on one side of the driving mechanism, and the second adjusting mechanism adjusts the chain on the other side of the driving mechanism.

6. The vacuum pressure sintering furnace according to claim 5, characterized in that: The first adjustment mechanism and the second adjustment mechanism are telescopic mechanisms, and the telescopic mechanisms are elastically telescopic.

7. The vacuum pressure sintering furnace according to claim 2, characterized in that: The crimping cavity further comprises a cavity frame and a heating plate, and the heating plate is arranged inside the cavity frame.

8. The vacuum pressure sintering furnace according to claim 2, characterized in that: It also includes a second lifting mechanism, which is arranged below the preheating station and the cooling station.

9. The vacuum pressure sintering furnace according to claim 1, characterized in that: It also includes a second transmission mechanism, which is arranged on both sides of the preheating station and the cooling station.

10. The vacuum pressure sintering furnace according to claim 1, characterized in that: The preheating station is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The crimping station is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The cooling station is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage.