Safety system of online vacuum sintering furnace

Abstract

The utility model relates to the technical field of sintering furnaces, and provides a safety system of an online vacuum sintering furnace, which comprises a display screen electrically connected with a computer control center and used for displaying temperature states and formic acid leakage states of vacuum cavities of a preheating area, a welding area and a cooling area and vacuum values of the vacuum cavities of the preheating area, the welding area and the cooling area; the at least three temperature sensors are connected with the vacuum cavities of the preheating area, the welding area and the cooling area, and the temperature sensors are used for detecting the temperature in the cavities; the formic acid detection sensor is used for detecting the concentration of formic acid; and the at least three vacuum gauges are connected with the vacuum cavities of the preheating area, the welding area and the cooling area and are used for detecting the vacuum values of the vacuum cavities of the preheating area, the welding area and the cooling area, so that the safety risk of formic acid leakage and overhigh temperature of the cavities is reduced, and the troubleshooting time is shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering furnaces, in particular to a safety system for an on-line vacuum sintering furnace. Background Art

[0002] When semiconductor chips are encapsulated, it needs to be carried out in a vacuum environment, which can generally be achieved in the form of a vacuum furnace. The vacuum furnace in the prior art is provided with multiple preheating zones, a vacuum zone and multiple cooling zones. Among them, the preheating zones are protected by nitrogen, and it is not a completely low-oxygen environment; the welding zone is a vacuum environment. After the chip is welded, the door connecting the welding zone and the cooling zone is opened, and the chip enters the cooling zone from the welding zone. At the same time, the door connecting the welding zone and the preheating zone is opened, and the preheated chip is sent into the welding zone for welding. In this way, during the completion of one welding process and the start of the next welding process, the front and rear doors of the welding zone need to be opened simultaneously, and the vacuum environment of the welding zone will be damaged by the cooling zone and the preheating zone; there is no formic acid leakage alarm and alarm for too high or too low cavity temperature in the prior art, which increases the safety risk and troubleshooting time. Summary of the Invention

[0003] The utility model provides a safety system for an on-line vacuum sintering furnace, which is used to solve the problems in the prior art that there is no formic acid leakage alarm and alarm for too high or too low cavity temperature, which increases the safety risk of formic acid leakage and abnormal cavity temperature and the troubleshooting time.

[0004] A safety system for an on-line vacuum sintering furnace includes:

[0005] A display screen, electrically connected to a computer control center, for displaying the temperature status, formic acid leakage status and vacuum value of the vacuum cavities in the preheating zone, the welding zone and the cooling zone;

[0006] At least three temperature sensors, connected to the vacuum cavities in the preheating zone, the welding zone and the cooling zone, and the temperature sensors are used to detect the temperature in the vacuum cavities in the preheating zone, the welding zone and the cooling zone;

[0007] At least one first formic acid detection sensor, which is used to detect the formic acid concentration outside the vacuum cavities in the preheating zone, the welding zone and the cooling zone;

[0008] At least three vacuum gauges, connected to the vacuum cavities in the preheating zone, the welding zone and the cooling zone, for detecting the vacuum value of the vacuum cavities in the preheating zone, the welding zone and the cooling zone;

[0009] A computer control center is used to receive data signals from temperature sensors connected to the preheating zone and the welding zone and compare them with a low temperature threshold or a high temperature threshold. If the temperature is less than the low temperature threshold, an alarm is issued. If the temperature is greater than the high temperature threshold, an alarm is also issued. It is used to receive data signals from temperature sensors connected to the cooling zone and compare them with a cooling threshold. If the temperature is less than the cooling threshold, the flap valve is opened. It is used to receive data signals from the first formic acid detection sensor and compare them with a formic acid concentration threshold. If the concentration is greater than the formic acid concentration threshold, an alarm is issued. It is used to receive data signals from a vacuum gauge and compare them with a vacuum threshold. If the vacuum value is greater than the vacuum threshold, an alarm is issued.

[0010] An alarm is electrically connected to the computer control center, and the computer control center controls the alarm to issue an alarm.

[0011] The safety system of the online vacuum sintering furnace according to the present invention further includes a formic acid pressure sensor and a nitrogen pressure sensor. The formic acid pressure sensor is connected to a formic acid barrel and is used to detect the pressure of the formic acid barrel. The nitrogen pressure sensor is connected to a nitrogen tank and is used to detect the pressure of the nitrogen tank.

[0012] The computer control center of the safety system of the online vacuum sintering furnace according to the present invention is further used to receive data signals from the formic acid pressure sensor and compare them with a formic acid barrel pressure threshold. If the pressure is less than the formic acid barrel pressure threshold, an alarm is issued. It is used to receive data signals from the nitrogen pressure sensor and compare them with a nitrogen tank pressure threshold. If the pressure is less than the nitrogen tank pressure threshold, an alarm is issued.

[0013] The display screen of the safety system of the online vacuum sintering furnace according to the present invention is further used to display the formic acid barrel pressure value and the nitrogen pressure value.

[0014] The safety system of the online vacuum sintering furnace according to the present invention further includes a plurality of second formic acid detection sensors, which are connected to the vacuum cavities of the preheating zone, the welding zone, and the cooling zone and are used to detect the formic acid concentration in the vacuum cavities of the preheating zone, the welding zone, and the cooling zone.

[0015] The computer control center of the safety system of the online vacuum sintering furnace according to the present invention is further used to receive data signals from the second formic acid detection sensors and compare them with a cavity formic acid threshold. If the concentration is greater than the cavity formic acid threshold, the flap valve is kept closed.

[0016] The display screen of the safety system of the online vacuum sintering furnace according to the present invention is further used to display the formic acid concentration values in the cavities of the preheating zone, the welding zone, and the cooling zone.

[0017] The safety system of the online vacuum sintering furnace according to the present utility model further includes a height detection sensor for detecting the height of the workpiece. The computer control center is further configured to receive the data signal from the height detection sensor and compare it with a height threshold value, and alarm if it is greater than the height threshold value.

[0018] For the safety system of the online vacuum sintering furnace according to the present utility model, the display screen is further configured to display the height value of the workpiece.

[0019] The safety system of the online vacuum sintering furnace according to the present utility model further includes at least one plug valve in-place detection sensor for detecting whether the plug valve is closed in place, and alarming if it is not closed in place.

[0020] The present utility model detects formic acid leakage, temperature in the cavity, etc. If the formic acid detection sensor detects formic acid leakage, the formic acid leakage will be displayed in red on the display screen and an alarm will be given. If abnormal temperatures in the cavities of the preheating zone and the welding zone are detected, the cavity temperature will be displayed in red on the display screen and an alarm will be given to prevent safety risks caused by too high cavity temperatures. Formic acid is a corrosive gas with safety risks, ensuring the safety of personnel. If the water flow in the cold water pipes of the cooling plate of the vacuum sintering furnace and the cold water pipes outside multiple cavities is abnormal, an alarm for abnormal water flow will be given. At the same time, the troubleshooting time is reduced. The plug valve is opened only when the temperature in the cooling zone reaches the cooling threshold value, preventing oxidation and improving product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for describing the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0022] Figure 1 It is a schematic structural diagram of the safety system of the online vacuum sintering furnace. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The following will further describe in detail the embodiments of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0024] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0025] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0026] In the embodiments of the present utility model, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower horizontal height than the second feature.

[0027] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0028] The following is combined with Figure 1 Describe a safety system of an online vacuum sintering furnace according to an embodiment of the present utility model, including:

[0029] A display screen, electrically connected to a computer control center, for displaying the temperature status, formic acid leakage status, and vacuum value of the vacuum chambers in the preheating zone, welding zone, and cooling zone;

[0030] At least three temperature sensors, connected to the vacuum chambers in the preheating zone, welding zone, and cooling zone, the temperature sensors being used to detect the temperature inside the vacuum chambers in the preheating zone, welding zone, and cooling zone;

[0031] At least one first formic acid detection sensor, the first formic acid detection sensor being used to detect the formic acid concentration outside the vacuum chambers in the preheating zone, welding zone, and cooling zone;

[0032] At least three vacuum gauges, connected to the vacuum chambers in the preheating zone, welding zone, and cooling zone, for detecting the vacuum value of the vacuum chambers in the preheating zone, welding zone, and cooling zone;

[0033] A computer control center, for receiving the data signals of the temperature sensors connected to the preheating zone and the welding zone and comparing them with a low temperature threshold or a high temperature threshold, and alarming if less than the low temperature threshold or greater than the high temperature threshold; for receiving the data signals of the temperature sensors connected to the cooling zone and comparing them with a cooling threshold, and opening a gate valve if less than the cooling threshold; for receiving the data signals of the first formic acid detection sensor and comparing them with a formic acid concentration threshold, and alarming if greater than the formic acid concentration threshold; for receiving the data signals of the vacuum gauges and comparing them with a vacuum threshold, and alarming if greater than the vacuum threshold;

[0034] An alarm, electrically connected to the computer control center, the computer control center controlling the alarm to give an alarm.

[0035] The gate valves seal the preheating zone, welding zone, and cooling zone. According to the working process, for the preheating zone, welding zone, and cooling zone, a gate valve is provided at the inlet end of the preheating zone, a gate valve is provided at the outlet end of the preheating zone, a gate valve is provided at the inlet end of the welding zone, a gate valve is provided at the outlet end of the welding zone, a gate valve is provided at the inlet end of the cooling zone, and a gate valve is provided at the outlet end of the cooling zone.

[0036] In some embodiments, it further includes a formic acid pressure sensor and a nitrogen pressure sensor; the formic acid pressure sensor is connected to a formic acid barrel, for detecting the pressure of the formic acid barrel; the nitrogen pressure sensor is connected to a nitrogen tank, for detecting the pressure of the nitrogen tank. The formic acid barrel stores a mixed gas of nitrogen, formic acid, and the gas volatilized from formic acid. Nitrogen and formic acid are filled into the formic acid barrel, and the flowing out is a mixed gas of nitrogen and formic acid gas, and the mixed gas is filled into the vacuum chambers in the preheating zone, welding zone, and cooling zone of the vacuum sintering furnace.

[0037] In some embodiments, the computer control center is further configured to receive the data signal from the formic acid pressure sensor and compare it with the formic acid barrel pressure threshold. If it is less than the formic acid barrel pressure threshold, an alarm is issued. It is also configured to receive the data signal from the nitrogen pressure sensor and compare it with the nitrogen tank pressure threshold. If it is less than the nitrogen tank pressure threshold, an alarm is issued. The formic acid barrel and the nitrogen tank may be provided with safety valves, which automatically release the valve when the pressure exceeds a certain value.

[0038] In some embodiments, there is also at least one heating tube current sensor, which is electrically connected to the heating tube one by one correspondingly, and is used to detect the current of the heating tube. It is also used to receive the data signal from the heating tube current sensor and compare it with the current threshold. If it is less than the current threshold, an alarm is issued.

[0039] In some embodiments, there is also at least one heating tube power sensor, which is electrically connected to the heating tube one by one correspondingly, and is used to detect the power of the heating tube. It is used to receive the data signal from the heating tube power sensor and compare it with the power threshold. If it is less than the power threshold, an alarm is issued.

[0040] In some embodiments, the display screen is further configured to display the formic acid barrel pressure value and the nitrogen pressure value. During operation, operations can be performed according to the pressure values on the display screen. The display screen has three colors: green, yellow, and red. Green indicates the safe area, yellow indicates the early warning area, and red indicates the dangerous area. The maximum pressure values of the formic acid barrel and the nitrogen tank are in the yellow area.

[0041] In some embodiments, there are also multiple second formic acid detection sensors, which are connected to the vacuum cavities in the preheating zone, the welding zone, and the cooling zone, and are used to detect the formic acid concentration in the vacuum cavities in the preheating zone, the welding zone, and the cooling zone.

[0042] In some embodiments, the computer control center is further configured to receive the data signal from the second formic acid detection sensor and compare it with the formic acid threshold for detecting the vacuum cavities in the preheating zone, the welding zone, and the cooling zone. If it is greater than the cavity formic acid threshold, the gate valve is kept closed. The cavity is prohibited from opening the gate valve in an environment with formic acid.

[0043] In some embodiments, the display screen is further configured to display the cavity formic acid concentration values in the preheating zone, the welding zone, and the cooling zone.

[0044] In some embodiments, there is also a cavity pressure sensor, which is connected to the vacuum cavities in the preheating zone, the welding zone, and the cooling zone, and is used to detect the pressure in the vacuum cavities in the preheating zone, the welding zone, and the cooling zone.

[0045] In some embodiments, the computer control center is further configured to receive the data signal from the cavity pressure sensor and compare it with the cavity pressure threshold. If it is greater than the cavity pressure threshold, an alarm is issued.

[0046] In some embodiments, the display screen is further configured to display the cavity pressure values in the preheating zone, the welding zone, and the cooling zone.

[0047] In some embodiments, it further includes a position detection sensor, which is arranged at the outlet ends of the preheating zone, the welding zone, and the cooling zone and is used to detect whether the workpiece is in place. The flap valve that is closed after detecting the workpiece in place cannot be opened again.

[0048] In some embodiments, the computer control center is further configured to receive the data signal of the position detection sensor in the preheating zone. If the workpiece is in place, the inlet flap valve of the inlet preheating zone cannot be opened.

[0049] In some embodiments, it further includes a flowmeter, which is connected to the cooling water pipe of the vacuum sintering furnace and is used to detect the flow rate of the cooling water.

[0050] In some embodiments, the computer control center is further configured to receive the data signal of the flowmeter and compare it with the water flow threshold. If it is less than the water flow threshold, an alarm will be issued. Because if the flow rate of the cooling water is relatively small, it is easy to cause the workpiece to not be cooled in time when in the cooling zone of the vacuum sintering furnace, resulting in poor product quality. The cooling plate has a cooling water pipe, and there are also cooling water pipes on the outer sides of the cavities in the preheating zone, the welding zone, and the cooling zone of the vacuum sintering furnace.

[0051] In some embodiments, the display screen is further configured to display the flow rate value of the cooling water.

[0052] In some embodiments, a height detection sensor is used to detect the height of the workpiece. The computer control center is further configured to receive the data signal of the height detection sensor and compare it with the height threshold. If it is greater than the height threshold, an alarm will be issued. The height threshold is the entry height of the cavity to prevent the height of the workpiece from being greater than the entry height of the cavity.

[0053] In some embodiments, the display screen is further configured to display the height value of the workpiece. The height detection sensor is preferably a laser sensor to prevent poor pick-up or chip placement due to incorrect height.

[0054] In some embodiments, it further includes at least one flap valve position detection sensor, which is used to detect whether the flap valve is closed in place. If it is not closed in place, an alarm will be issued. The flap valve is used to close the cavity. If the flap valve is not closed in place, it will affect the vacuum of the cavity, thereby affecting the encapsulation and welding quality.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A safety system for an online vacuum sintering furnace, characterized in that: include: A display screen, electrically connected to the computer control center, for displaying the temperature status of the vacuum chambers in the preheating zone, welding zone and cooling zone, the formic acid leakage status and the vacuum value; At least three temperature sensors are connected to the vacuum chambers of the preheating zone, the welding zone and the cooling zone, and the temperature sensors are used to detect the temperature in the vacuum chambers of the preheating zone, the welding zone and the cooling zone; at least one first formic acid detection sensor, the first formic acid detection sensor being used to detect formic acid concentration outside the vacuum cavity of the preheating zone, the welding zone and the cooling zone; At least three vacuum gauges are connected to the vacuum chambers of the preheating zone, the welding zone and the cooling zone to detect vacuum values ​​of the vacuum chambers of the preheating zone, the welding zone and the cooling zone; The computer control center is used to receive the data signal of the temperature sensor connected to the preheating zone and the welding zone and compare it with the low temperature threshold or the high temperature threshold. If the temperature is less than the low temperature threshold, an alarm is given; if the temperature is greater than the high temperature threshold, an alarm is given; it is used to receive the data signal of the temperature sensor connected to the cooling zone and compare it with the cooling threshold. If the temperature is less than the cooling threshold, the gate valve is opened; it is used to receive the data signal of the first formic acid detection sensor and compare it with the formic acid concentration threshold. If the temperature is greater than the formic acid concentration threshold, an alarm is given; it is used to receive the data signal of the vacuum gauge and compare it with the vacuum threshold. If the temperature is greater than the vacuum threshold, an alarm is given; The alarm is electrically connected to the computer control center, and the computer control center controls the alarm to sound an alarm.

2. The safety system of the online vacuum sintering furnace according to claim 1, characterized in that: It also includes a formic acid pressure sensor and a nitrogen pressure sensor; the formic acid pressure sensor is connected to the formic acid barrel to detect the pressure of the formic acid barrel; the nitrogen pressure sensor is connected to the nitrogen tank to detect the pressure of the nitrogen tank.

3. The safety system of the online vacuum sintering furnace according to claim 2, characterized in that: The computer control center is also used to receive the data signal of the formic acid pressure sensor and compare it with the formic acid barrel pressure threshold, and alarm if it is less than the formic acid barrel pressure threshold; and to receive the data signal of the nitrogen pressure sensor and compare it with the nitrogen tank pressure threshold, and alarm if it is less than the nitrogen tank pressure threshold.

4. The safety system for an online vacuum sintering furnace according to claim 2, characterized in that: The display screen is also used to display the formic acid barrel pressure value and the nitrogen pressure value.

5. The safety system for an online vacuum sintering furnace according to claim 1, characterized in that: It also includes a plurality of second formic acid detection sensors connected to the vacuum chambers of the preheating zone, the welding zone and the cooling zone to detect the formic acid concentration in the vacuum chambers of the preheating zone, the welding zone and the cooling zone.

6. The safety system for an online vacuum sintering furnace according to claim 5, characterized in that: The computer control center is also used to receive the data signal of the second formic acid detection sensor and compare it with the cavity formic acid threshold value. If it is greater than the cavity formic acid threshold value, the gate valve is kept normally closed.

7. The safety system for an online vacuum sintering furnace according to claim 6, characterized in that: The display screen is also used to display the formic acid concentration values ​​of the cavities in the preheating zone, the welding zone and the cooling zone.

8. The safety system for an online vacuum sintering furnace according to claim 1, characterized in that: It also includes a height detection sensor, which is used to detect the height of the workpiece. The computer control center is also used to receive the data signal of the height detection sensor and compare it with the height threshold. If the height is greater than the threshold, an alarm is triggered.

9. The safety system for an online vacuum sintering furnace according to claim 8, characterized in that: The display screen is also used to display the height value of the workpiece.

10. The safety system for an online vacuum sintering furnace according to claim 1, characterized in that: The invention also comprises at least one gate valve in-place detection sensor, wherein the gate valve in-place detection sensor is used to detect whether the gate valve is in-place closed, and alarms if the gate valve is not in-place closed.

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