Wafer appearance defect detection device with automatic feeding function

Abstract

The utility model provides a wafer appearance defect detection device with an automatic feeding function, which relates to the technical field of wafer detection devices and comprises a box body, a box door mounted on the box body, a detector mounted at the upper end in the box body, a transverse plate fixedly mounted in the box body, a turntable arranged at the upper end of the transverse plate and a driving mechanism arranged on the transverse plate. The driving mechanism is connected with the rotating disc and used for driving the rotating disc to rotate, the rotating disc is provided with a plurality of grooves distributed in a circumferential array mode, the grooves penetrate through the rotating disc, and the grooves are each provided with a sliding base in a sliding mode. The sliding seat and the top plate move synchronously, the disc and the top plate move synchronously, the wafer on the disc can move to the position below the detector for appearance defect detection, and feeding and detection work of the wafer can be automatically carried out.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection devices, and particularly relates to a wafer appearance defect detection device with an automatic feeding function. Background Technique

[0002] A wafer appearance defect detection device is a device used to detect surface and internal defects of wafers. These defects may include impurities, cracks, defect points, etc., which will affect the quality of semiconductor chips. Wafer appearance defect detection devices usually use technical means such as optics, electricity, and acoustics for detection. Among them, optical detection is one of the most commonly used methods, which uses the characteristics of light reflection, transmission, scattering, etc. to observe the defects on the wafer surface.

[0003] For example, a wafer appearance defect rapid detection device with the publication number of CN217059905U specifically discloses including a machine base, a frame, and a wafer seat. The machine base is provided with a lamp slot and a control panel. An LED lamp group is arranged in the lamp slot. The frame and the wafer seat are respectively installed on the machine base. A detection lens and an XY moving axis are arranged on the frame. The detection lens is installed on the XY moving axis. The wafer seat is arranged above the LED lamp group and below the detection lens. The wafer seat is provided with two slide rails, two connecting seats, and two clamping seats. The two slide rails are arranged on the machine base on both sides of the lamp slot. The two connecting seats are connected to the two slide rails. The two clamping seats are respectively arranged on the two connecting seats for fixing the wafer board. The wafer to be detected is arranged on the wafer board. By using the detection lens instead of the human eye, the appearance of the wafer can be rapidly detected.

[0004] Since the existing wafer appearance defect detection devices do not have an automatic feeding function, manual feeding is required. This not only increases the labor cost but also may cause time delays in the production process, thereby reducing the overall production efficiency. Therefore, we propose a wafer appearance defect detection device with an automatic feeding function. Content of the Utility Model

[0005] Aiming at the deficiencies of the prior art, the utility model provides a wafer appearance defect detection device with an automatic feeding function, which solves the problems raised in the above background technique.

[0006] To achieve the above object, the present utility model is realized through the following technical solutions: A wafer appearance defect detection device with an automatic feeding function, comprising a box body, a box door is installed on the box body, a detector is installed at the upper end inside the box body, a horizontal plate is fixedly installed inside the box body, a turntable is arranged at the upper end of the horizontal plate, a driving mechanism is arranged on the horizontal plate, the driving mechanism is connected to the turntable and is used to drive the turntable to rotate, a plurality of grooves arranged in a circumferential array are formed on the turntable, the grooves penetrate through the turntable, sliding seats are slidably arranged in the grooves, inner rods penetrate through the sliding seats, both ends of the inner rods are respectively fixedly connected to the inner sides of the grooves, top plates are fixedly installed at the upper ends of the sliding seats, discs can be rotatably installed on the top plates, linear motors are installed in the grooves, and the sliding blocks of the linear motors are fixedly connected to the sliding seats.

[0007] As a further technical solution of the present utility model, a storage cabinet is arranged at the lower end of the box body.

[0008] As a further technical solution of the present utility model, the driving mechanism includes a support ring, the support ring can be rotatably installed on the horizontal plate, and the upper end of the support ring is fixedly connected to the center of the bottom of the turntable.

[0009] As a further technical solution of the present utility model, a gear ring is sleeved and fixedly connected on the support ring, a first motor is fixedly installed on the horizontal plate, a driving wheel is fixedly installed at the output shaft end of the first motor, and the driving wheel meshes with the gear ring.

[0010] As a further technical solution of the present utility model, a protective cover is installed on the first motor.

[0011] As a further technical solution of the present utility model, connecting shafts are fixedly installed at the bottoms of the discs, friction wheels are fixedly installed at the lower ends of the connecting shafts, a second motor is arranged inside the support ring, the second motor is fixedly installed on the horizontal plate, a central shaft is fixedly installed at the output shaft end of the second motor, the central shaft penetrates through the turntable and is rotatably connected to the turntable, the top of the central shaft can contact the bottom of the friction wheel, and anti-slip patterns are arranged on the contact surfaces of the central shaft and the friction wheel.

[0012] As a further technical solution of the present utility model, a plurality of limiting rings with different diameters are connected to the tops of the discs by screws.

[0013] The present utility model provides a wafer appearance defect detection device with an automatic feeding function, and compared with the prior art, it has the following beneficial effects:

[0014] 1. A wafer appearance defect detection device with an automatic feeding function in this design drives a slide along the direction of an inner rod through a linear motor, causing the slide and the top plate to move synchronously, the disc and the top plate to move synchronously, and the wafer on the disc can be moved under the detector for appearance defect detection, and the wafer feeding and detection work can be automatically carried out.

[0015] 2. A wafer appearance defect detection device with an automatic feeding function in this design can ensure that the lens or sensor of the detector can capture each area and detail on the surface of the wafer by adjusting the detection angle and position of the wafer. This helps to more comprehensively detect defects on the wafer, improve the accuracy and reliability of detection. At the same time, it can also meet the detection requirements of wafers of different specifications, making the detection equipment more versatile and flexible, and can be applied to a wider range of production scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of a wafer appearance defect detection device with an automatic feeding function;

[0017] Figure 2 is a schematic internal structure diagram of a wafer appearance defect detection device with an automatic feeding function;

[0018] Figure 3 is a partially enlarged schematic view of the structure at the turntable of a wafer appearance defect detection device with an automatic feeding function;

[0019] Figure 4 is a partially enlarged cross-sectional view of the structure at the turntable of a wafer appearance defect detection device with an automatic feeding function.

[0020] In the figure: box body 1, box door 2, storage cabinet 3, cross plate 4, turntable 5, groove 6, slide 7, inner rod 8, top plate 9, disc 10, linear motor 11, support ring 12, gear ring 13, first motor 14, driving wheel 15, connecting shaft 16, friction wheel 17, second motor 18, central shaft 19, limiting ring 20. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0022] Please refer to Figures 1-4 , the present invention provides a technical solution for a wafer appearance defect detection device with an automatic feeding function:

[0023] A wafer appearance defect detection device with an automatic feeding function, including a box body 1, a box door 2 is installed on the box body 1, a detector is installed at the upper end inside the box body 1, a horizontal plate 4 is fixedly installed inside the box body 1, a turntable 5 is arranged at the upper end of the horizontal plate 4, a driving mechanism is arranged on the horizontal plate 4, the driving mechanism is connected to the turntable 5 and is used to drive the turntable 5 to rotate. A plurality of grooves 6 distributed in a circumferential array are formed on the turntable 5, the grooves 6 penetrate through the turntable 5, sliding seats 7 are slidably arranged in the grooves 6, inner rods 8 penetrate through the sliding seats 7, and both ends of the inner rods 8 are fixedly connected to the inner sides of the grooves 6 respectively. Top plates 9 are fixedly installed at the upper ends of the sliding seats 7, discs 10 can be rotatably installed on the top plates 9, linear motors 11 are installed in the grooves 6, and the sliding blocks of the linear motors 11 are fixedly connected to the sliding seats 7. A storage cabinet 3 is arranged at the lower end of the box body 1. The driving mechanism includes a support ring 12, the support ring 12 can be rotatably installed on the horizontal plate 4, and the upper end of the support ring 12 is fixedly connected to the center of the bottom of the turntable 5. A toothed ring 13 is sleeved and fixedly connected on the support ring 12, a first motor 14 is fixedly installed on the horizontal plate 4, a driving wheel 15 is fixedly installed at the output shaft end of the first motor 14, and the driving wheel 15 meshes with the toothed ring 13. A protective cover is installed on the first motor 14.

[0024] As Figure 3 and Figure 4 shown, connecting shafts 16 are fixedly installed at the bottoms of the discs 10, friction wheels 17 are fixedly installed at the lower ends of the connecting shafts 16, a second motor 18 is arranged inside the support ring 12, the second motor 18 is fixedly installed on the horizontal plate 4, a central shaft 19 is fixedly installed at the output shaft end of the second motor 18, the central shaft 19 penetrates through the turntable 5 and is rotatably connected to the turntable 5, the top of the central shaft 19 can contact the bottom of the friction wheel 17, and anti-slip patterns are arranged on the contact surfaces of the central shaft 19 and the friction wheel 17. A plurality of limiting rings 20 with different diameters are connected to the tops of the discs 10 by screws.

[0025] The working principle of the present utility model is as follows: Multiple wafers are respectively placed on the disc 10. During the detection process, the linear motor 11 drives the slide seat 7 to move along the direction of the inner rod 8, so that the slide seat 7 and the top plate 9 move synchronously, and the disc 10 and the top plate 9 move synchronously. The wafers on the disc 10 can move below the detector for appearance defect detection. During the detection process, the next linear motor 11 is started, and similarly, the next wafer is driven to move below the detector for appearance defect detection, so that the feeding and detection of wafers can be automatically carried out. During the detection process, the position and angle of the wafer are adjusted. The first motor 14 drives the driving wheel 15 to rotate, and the driving wheel 15 drives the gear ring 13 to rotate, which can drive the wafers on the disc 10 to rotate around the support ring 12, and the position of the wafers can be adjusted to detect different positions of the wafers. At the same time, the second motor 18 drives the central shaft 19 to rotate, and the central shaft 19 drives the friction wheel 17 to rotate, thereby driving the connecting shaft 16 and the upper disc 10 to rotate, so as to adjust the angle of the wafers on the disc 10. By adjusting the detection angle and position of the wafers, it can ensure that the lens or sensor of the detector can capture each area and detail on the surface of the wafer. This helps to more comprehensively detect the defects on the wafer and improve the accuracy and reliability of the detection. At the same time, it can also meet the detection requirements of wafers of different specifications, which makes the detection equipment have stronger versatility and flexibility and can be applied to a wider range of production scenarios.

[0026] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art of this technology, without departing from the principle of the present utility model, several improvements and refinements can still be made, and these improvements and refinements should also be regarded as the protection scope of the present utility model. The structures, devices, and operation methods not specifically described and explained in the present utility model are implemented according to the conventional means in the art without special explanation and limitation.

Claims

1. A wafer appearance defect detection device with automatic loading function, characterized in that: The invention comprises a box body (1), a box door (2) being installed on the box body (1), a detector being installed on the upper end of the box body (1), a transverse plate (4) being fixedly installed in the box body (1), a turntable (5) being arranged on the upper end of the transverse plate (4), a driving mechanism being arranged on the transverse plate (4), the driving mechanism being connected to the turntable (5) and being used for driving the turntable (5) to rotate, a plurality of grooves (6) distributed in a circumferential array being opened on the turntable (5), the grooves (6) passing through the turntable (5), a slide seat (7) being slidably arranged in each of the grooves (6), an inner rod (8) passing through the slide seat (7), two ends of the inner rod (8) being respectively fixedly connected to the inner side of the groove (6), a top plate (9) being fixedly installed on the upper end of each of the slide seats (7), a disc (10) being rotatably installed on each of the top plates (9), a linear motor (11) being installed in each of the grooves (6), a sliding block of the linear motor (11) being fixedly connected to the slide seat (7).

2. The wafer appearance defect detection device with automatic loading function according to claim 1 is characterized in that: A storage cabinet (3) is provided at the lower end of the box body (1).

3. The wafer appearance defect detection device with automatic loading function according to claim 2 is characterized in that: The driving mechanism comprises a support ring (12), the support ring (12) being rotatably mounted on the transverse plate (4), and the upper end of the support ring (12) being fixedly connected to the center of the bottom of the rotating disk (5).

4. The wafer appearance defect detection device with automatic loading function according to claim 3 is characterized in that: A gear ring (13) is sleeved on and fixedly connected to the support ring (12), a first motor (14) is fixedly mounted on the transverse plate (4), a driving wheel (15) is fixedly mounted on the output shaft end of the first motor (14), and the driving wheel (15) is meshed with the gear ring (13).

5. The wafer appearance defect detection device with automatic loading function according to claim 4 is characterized in that: A protective cover is installed on the first motor (14).

6. The wafer appearance defect detection device with automatic loading function according to claim 5, characterized in that: A connecting shaft (16) is fixedly mounted on the bottom of each of the circular discs (10), a friction wheel (17) is fixedly mounted on the lower end of each of the connecting shafts (16), a second motor (18) is arranged in the support ring (12), the second motor (18) is fixedly mounted on the horizontal plate (4), a central shaft (19) is fixedly mounted on the output shaft end of the second motor (18), the central shaft (19) passes through the rotating disc (5) and is rotatably connected to the rotating disc (5), the top of the central shaft (19) is capable of contacting the bottom of the friction wheel (17), and the contact surfaces of the central shaft (19) and the friction wheel (17) are both provided with anti-slip textures.

7. The wafer appearance defect detection device with automatic loading function according to claim 6, characterized in that: The top of the disc (10) is connected to a plurality of limiting rings (20) with different diameters via screws.

Images