Radio frequency probe double-probe card with limiting structure

Abstract

The utility model discloses a radio frequency probe double-needle card with a limit structure, which belongs to the technical field of chip testing and comprises an elastic needle tip (1), a microwave absorber (2), a fixing support (3) and a radio frequency connector assembly (4), the radio frequency connector assembly (4) comprises a connector portion and a cable portion, the elastic needle tip (1) is arranged at the tail end of the cable portion, and the microwave absorber (2) is arranged on the fixing support (3). The fixing support (3) is provided with two spacing grooves (5) which are arranged at an interval, and the cable part is arranged in the spacing grooves (5). According to the utility model, the test problem caused by the fact that a conventional probe cannot meet the requirement of a relatively wide chip pressure welding point under a special test condition in the prior art can be solved, the flexibility of chip design is improved, and the design constraint caused by insufficient test flexibility of the probe is broken through.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing, in particular to a radio frequency probe double needle card with a limiting structure. Background Art

[0002] The development trend of microwave integrated circuits is towards high frequency and complexity. Radio frequency probes are the core components of integrated circuit testing, mainly used to connect measuring instruments and semiconductor chips, test the electrical performance parameters of the chips, and are applied to chip semiconductor process model testing, process monitoring, and finished product testing, running through the entire process of microwave integrated circuits.

[0003] The main principle of radio frequency probes is to contact the bonding pads of the semiconductor chips to be tested through the needle tips, so as to realize the in-situ characteristic testing. Due to the differences in the design and processing layout of the chips to be tested, there will be multiple bonding pads. At this time, the application of multi-head probe cards is required to achieve the testing purpose. In multi-head probes, the needle tip pitch (SS pitch) also needs to be customized according to the different bonding pads of the chips to be tested. How to achieve the largest possible coverage range of the SS pitch while ensuring the testing performance and ensuring the reliability during use has always been a difficult point in structural design.

[0004] Currently, the structure of traditional radio frequency probe double needle cards is as Figure 1 , Figure 2 shown, mainly including four parts: elastic needle tips 1, microwave absorbers 2, fixed brackets 3, and radio frequency connector assemblies 4. Due to the limitations of the shape and conventional processes of this type of probe needle card, it cannot meet the testing requirements of some chips with wider bonding pad designs.

[0005] When testing the circuit to be tested, signals need to be sent to the circuit to be tested through transmission lines. Radio frequency probes require at least two conductors, one is the signal conductor (S), and the other is the ground conductor (G);

[0006] Taking the GSGSG needle tips of traditional radio frequency double needle cards as an example, as Figure 3 shown, this type of needle tips is generally mainly integrally processed needle tips. At this time, when designing the chips to be tested, the bonding pads need to be forced to be close, which greatly limits the flexibility in chip design. Summary of the Utility Model

[0007] The purpose of the utility model is to provide a radio frequency probe double needle card with a limiting structure to solve the above problems.

[0008] To achieve the above object, the technical solution adopted by the present utility model is as follows: A double-needle card for a radio frequency probe with a limiting structure, the radio frequency connector assembly includes a connector part and a semi-rigid cable part, the elastic needle tip is arranged at the end of the cable part, and two limiting grooves with a spacing are arranged on the fixed bracket, and the cable part is arranged in the limiting grooves.

[0009] Under the condition of ensuring the flatness of the needle tip, the elastic needle tips of the present utility model are processed separately, and then the two semi-rigid cables are adjusted to the width of the pressure welding point of the chip to be tested by using the limiting grooves, which improves the flexibility in chip design and solves the problem of the limitation of the traditional radio frequency double-needle card for chip design.

[0010] As a preferred technical solution, the spacing between the two limiting grooves is 300 - 4000 μm

[0011] As a further preferred technical solution, the spacing between the two limiting grooves is 3550 μm.

[0012] As a preferred technical solution, the cable part is a semi-rigid cable.

[0013] Compared with the prior art, the advantages of the present utility model are as follows: The present utility model can solve the test problems caused by the relatively wide pressure welding points of chips that cannot be satisfied by conventional probes in special test situations of the prior art, improves the flexibility of chip design, and breaks the design constraints caused by the insufficient test flexibility of the probe itself. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a structural diagram of the radio frequency probe double-needle card of the prior art of the present utility model;

[0015] Figure 2 is Figure 1 a side view of;

[0016] Figure 3 is Figure 1 a schematic diagram of the integrated processing needle tip structure in;

[0017] Figure 4 is Figure 1 an application schematic diagram of the radio frequency probe double-needle card of;

[0018] Figure 5 is a structural diagram of the radio frequency probe double-needle card of the present utility model;

[0019] Figure 6 is Figure 5 a side view of;

[0020] Figure 7 is Figure 5 a limiting structure diagram in;

[0021] Figure 8 is the rear view of Figure 7 ;

[0022] Figure 9 is Figure 5 a schematic diagram of the probe tip of

[0023] Figure 10 is Figure 5 a schematic diagram of the application of the RF probe double - needle card of

[0024] Figure 11 and Figure 12 is Figure 1 a graph of the test electrical performance results of the RF probe double - needle card of

[0025] Figure 13 and Figure 14 is Figure 5 a graph of the test electrical performance results of the RF probe double - needle card of

[0026] In the figure: 1. Elastic tip; 2. Microwave absorber; 3. Fixed bracket; 4. RF connector assembly; 5. Limit groove; 6. SS pitch. Detailed implementation manners

[0027] The present utility model will be further described below in conjunction with the accompanying drawings.

[0028] Embodiment:

[0029] Referring to Figures 5 to 9 , a RF probe double - needle card with a limit structure includes an elastic tip 1, a microwave absorber 2, a fixed bracket 3 and a RF connector assembly 4. Among them, the RF connector assembly 4 includes a connector part and a cable part. The cable part is a semi - rigid cable. The elastic tip 1 is arranged at the end of the cable part. Two spaced limit grooves 5 are arranged on the fixed bracket 3, as Figure 7 and Figure 8 shown, and the cable part is arranged in the limit grooves 5;

[0030] Figure 9 is a schematic diagram of the probe tip. In the figure, the SS pitch 6 can be processed and adjusted after knowing the pitch of the bonding pads to meet the test requirements;

[0031] Taking the RF double - needle card of the GSGGSG tip type with an SS pitch 6 value of 3550 μm as an example, when testing a chip with spaced bonding pads using the traditional RF probe double - needle card as Figure 1 shown, as Figure 4 shown, from Figure 4It can be seen that the tips of the double-needle card of the traditional radio frequency probe cannot contact the bonding pads of the chip, thus unable to meet its test requirements; while using the radio frequency double-needle card of this embodiment, as Figure 10 shown, the tips of the double-needle card of the radio frequency probe can contact the bonding pads of the chip, thus meeting its test requirements;

[0032] Comparison of the electrical performance tests between the conventional probe and the probe of this invention (frequency DC~40GHz, the elastic tips all use GSG tips with a GS pitch of 150μm and a tip width of 20μm. The tip structure of the conventional probe is an integrally processed GSGSG structure, and the SS pitch is 100μm; the lower tip structure of this invention is GSGGSG, and the SS pitch is 3550μm) is as Figures 11 - 12 and Figures 13 - 14 , and it can be seen from the figure that:

[0033] For the conventional probe, the return loss ≤ -16.5dB and the insertion loss ≤ 0.79dB;

[0034] For the probe of this embodiment, the return loss ≤ -14.6dB and the insertion loss ≤ 0.86dB;

[0035] It can be seen that the electrical performance of this embodiment is not much different from that of the conventional probe, and both meet the test requirements, and the problem of unstable electrical performance caused by the increase in the SS pitch can be excluded.

[0036] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A radio frequency probe double needle card with a limiting structure, characterized in that: The invention comprises an elastic needle tip (1), a microwave absorber (2), a fixing bracket (3) and a radio frequency connector assembly (4), wherein the radio frequency connector assembly (4) comprises a connector portion and a cable portion, the elastic needle tip (1) is arranged at the end of the cable portion, two limiting grooves (5) with a spacing are arranged on the fixing bracket (3), and the cable portion is arranged in the limiting groove (5).

2. The radio frequency probe double needle card with a limiting structure according to claim 1, characterized in that: The distance between the two limiting grooves (5) is 300 to 4000 μm.

3. The radio frequency probe double needle card with a limiting structure according to claim 2, characterized in that: The distance between the two limiting grooves (5) is 3550 μm.

4. The radio frequency probe double needle card with a limiting structure according to claim 1, characterized in that: The cable part is a semi-steel cable.

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