Variable-pitch taking and placing mechanism
By designing a variable distance pick-and-place mechanism including a variable distance seat and a drive device, the problems of slow distance action speed and insufficient accuracy in the prior art are solved, and the ability to flexibly adjust the spacing between the pick-and-place devices and accurately correspond to different grain positions is realized.
Patent Information
- Application Number
- CN202421634004.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-07-11
AI Technical Summary
The variable distance operation speed of the existing variable distance pick-up and placement devices is slow, and the variable distance accuracy is insufficient, making it difficult to effectively adjust the distance of the pick-up and placement devices to adapt to different grain positions.
A variable distance pick-and-place mechanism including a variable distance seat and a variable distance drive device that drives the lifting and lowering movement of the variable distance seat is designed. The variable pitch seat is equipped with a waist-shaped hole, and the spacing of the pick-and-place device is adjusted by the cooperation between the guide and the load-and-release seat.
Flexible adjustment of the spacing between the pick-and-place devices is realized, so that the pick-and-place devices can accurately correspond to the grain positions at the start and end points of the transfer, and improve the speed and accuracy of the variable distance operation.
Smart Images
Figure CN222966079U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of transferring semiconductor components. Background Art
[0002] In the semiconductor packaging and testing process, a pick-and-place device is used to carry and transfer wafers or their packages. In the earlier stage, a single-wafer pick-and-place device was used, that is, one wafer or its package was carried and picked and placed at a time. Its disadvantage is that it is time-consuming and energy-consuming, and the process efficiency is low. Subsequently, a pick-and-place device that can transfer multiple wafers or their packages simultaneously was developed, but its limitation is that the wafer pitch at the transfer starting point and the wafer pitch at the end placement point must be the same; in other words, the pick-and-place device cannot automatically change the pitch. Recently, a pitch-changing pick-and-place mechanism has been developed, but due to the limitations of the mechanism components, its pitch-changing actuation speed is slow. Summary of the Utility Model
[0003] To solve the problems of the pitch-changing actuation speed and pitch-changing accuracy of the prior art variable-pitch pick-and-place device, the utility model proposes a new type of pitch-changing pick-and-place mechanism.
[0004] The technical solution and its beneficial effects of the utility model are as follows:
[0005] A pitch-changing pick-and-place mechanism includes a pitch-changing mechanism and a pick-and-place mechanism connected to the pitch-changing mechanism; the pitch-changing mechanism includes a pitch-changing base and a pitch-changing driving device for driving the pitch-changing base to move up and down; the pitch-changing base is provided with a plurality of waist-shaped holes, and the adjacent distance at a first end of the plurality of waist-shaped holes is smaller than the adjacent distance at a second end of the waist-shaped holes; a guiding member is arranged in each waist-shaped hole, the guiding member is connected to a carrying base, and the carrying base loads a pick-and-place device in the pick-and-place mechanism; the carrying base is carried by a pitch-changing saddle, and the pitch-changing saddle is slidably arranged on a pitch-changing slide rail; the pitch-changing driving device drives the pitch-changing base to move up and down, so as to adjust the pitch of the plurality of pick-and-place devices.
[0006] Preferably, the pitch-changing driving device includes a pitch-changing driving motor directly connected to a pitch-changing ball screw module; the pitch-changing driving motor is fixed to the frame, and the pitch-changing ball screw module is connected to the pitch-changing base.
[0007] Preferably, a longitudinal slide rail is arranged at each of the left and right relative positions of the frame, a first saddle is slidably arranged on each of the two longitudinal slide rails, the pitch-changing base is fixed to the two first saddles, and the pitch-changing base can reciprocate along the longitudinal slide rail.
[0008] Preferably, the pitch-changing pick-and-place mechanism is mounted on a translation device through a frame carrying device.
[0009] Preferably, the frame carrying device includes a carrying plate and a lifting driving device;
[0010] The receiving plate is slidably arranged on the two longitudinal slide rails through a second saddle; the second saddle is further equipped with a horizontal saddle frame connected to a translation track of the translation device;
[0011] The lifting drive device is installed on the loading plate and is connected to control the vertical reciprocating movement of the frame.
[0012] Preferably, the lifting drive device is a combination of a frame drive motor, a reducer and a frame ball screw module; the frame drive motor is installed on the loading plate, the frame ball screw module is connected to the frame, and the reducer reduces the rotational power of the frame drive motor and transmits it to the frame ball screw module.
[0013] The beneficial effect of the utility model is that the spacing between the plurality of pick-and-place devices is adjusted so that each pick-and-place device can correspond to the position of the die at the starting point and the end point of the transfer. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a front stereoscopic appearance diagram of the driving mechanism and the pitch-changing mechanism of the utility model.
[0015] Figure 2 It is a rear-view stereoscopic appearance diagram of the driving mechanism and the pitch-changing mechanism of the utility model.
[0016] Figure 3 Yes Yes Figure 1 Front view plan view.
[0017] Figure 4 yes Figure 2 Rear view plan.
[0018] Figure 5 It is a front view of the pitch changing mechanism of the utility model and one of the pitch changing schematic diagrams.
[0019] Figure 6 yes Figure 5 Rear view plan.
[0020] Figure 7 This is the front view of the pitch changing mechanism of the utility model and the second pitch changing schematic diagram.
[0021] Figure 8 yes Figure 7 Rear view plan. DETAILED DESCRIPTION
[0022] In order to facilitate the explanation of the central idea of the utility model in the above utility model content column, the specific embodiments are used for expression. Various objects in the embodiments are depicted according to the proportions, sizes, deformations or displacements suitable for the description, rather than being drawn according to the proportions of the actual components, which should be explained first.
[0023] like Figures 1 to 4The variable distance pick-and-place mechanism of the utility model comprises a variable distance mechanism 10 and a pick-and-place mechanism controlled by the variable distance mechanism 10.
[0024] like Figures 1 to 4 The pitch changing mechanism 10 includes a pitch changing seat 11 and a pitch changing driving device 20 .
[0025] The variable pitch seat 11 is provided with a plurality of waist-shaped holes 12, and the adjacent distances of the first ends 121 of the plurality of waist-shaped holes 12 are smaller than the adjacent distances of the second ends 122 of the waist-shaped holes 12. The adjacent distances are arranged accordingly according to the need for variable pitch. A guide 13 is arranged in each waist-shaped hole 12, and the guide 13 is connected to a transfer seat 14, and the transfer seat 14 is loaded with a pick-and-place device in the pick-and-place mechanism. The pick-and-place device can be any mechanical device for picking up and placing crystal grains or semiconductor components. The transfer seat 14 is supported by a variable pitch saddle 15, and the variable pitch saddle 15 can be slidably arranged on a variable pitch slide rail 16, and the variable pitch slide rail 16 is fixed to a frame 50.
[0026] The variable pitch drive device 20 is installed on the frame 50, and drives the variable pitch seat 11 to reciprocate along the Z axis (vertical axis) of the variable pitch pick-and-place mechanism. The variable pitch drive device 20 is a combination of a variable pitch drive motor 21 directly connected to a variable pitch ball screw module 22.
[0027] In the figure, the frame 50 is provided with two longitudinal slide rails 51 at relative positions on the left and right, and a first saddle 52 is slidably arranged on each of the two longitudinal slide rails 51. The variable distance seat 11 is fixed to the two first saddles 52, and the variable distance seat 11 can reciprocate along the longitudinal slide rails 51.
[0028] In the example shown in the figure, the waist-shaped hole 12, the guide member 13, the transfer seat 14, the variable pitch saddle 15, and the variable pitch slide rail 16 are divided into two groups, arranged in an upper and lower position and arranged alternately at intervals.
[0029] like Figures 5 to 8 , describes the operation of the pitch-changing mechanism 10. Figure 5 and Figure 6 When the pitch-changing seat 11 is driven by the pitch-changing driving device 20 to move upward and stop at the first position, the guide member 13 is located at the second end 122 of the waist-shaped hole 12, and the guide member 13 guides the carrier 14 and the pitch-changing saddle 15 to move along the pitch-changing slide rail 16 to be arranged at the widest distance. Figure 7 and Figure 8When the pitch-changing seat 11 is driven by the pitch-changing driving device 20 to move downward and stop at the second position, the guide member 13 is located at the first end 121 of the waist-shaped hole 12, and the guide member 13 guides the carrier 14 and the pitch-changing saddle 15 to move along the pitch-changing slide rail 16 to form the narrowest pitch arrangement. The pitch-changing seat 11 can also be stopped at any position between the first position and the second position under the control of the pitch-changing driving device 20, so as to adjust the working pitch of each of the pick-and-place devices.
[0030] Furu Figures 1 to 4 The variable pitch pick-and-place mechanism of the present invention is connected to a translation track 63 of a translation device (not shown) through a rack transfer device 60. The translation device is a conventional technology and is not the main technical content of the present invention, so it will not be described in detail here. The translation device mainly performs horizontal movement (X axis and / or Y axis), driving the variable pitch pick-and-place mechanism to move between the transfer start point and the end point of the wafer or semiconductor component.
[0031] The frame carrying and moving device 60 includes a carrying plate 61 and a lifting and lowering driving device 64 .
[0032] The receiving plate 61 is slidably disposed on the two longitudinal slide rails 51 through a second saddle 53. A horizontal saddle 62 is mounted on the second saddle 53 and connected to the translation track 63 of the translation device (not shown). Accordingly, the variable distance pick-and-place mechanism can be controlled by the translation device to perform horizontal (X-axis and / or Y-axis) movement.
[0033] The lifting drive device 64 is a combination of a frame drive motor 65, a speed reducer 66 and a frame ball screw module 67. The frame drive motor 65 is mounted on the carrier plate 61, the frame ball screw module 67 is connected to the frame 50, and the speed reducer 66 reduces the rotational power of the frame drive motor 65 and transmits it to the frame ball screw module 67, thereby converting it into a vertical linear movement of the frame 50 (i.e., the entire variable pitch pick-and-place mechanism).
[0034] As described above, the variable distance pick-up and placement mechanism is controlled by the translation device to move between the starting point of the transfer and the final placement. During the horizontal movement, the variable distance mechanism 10 drives the various pick-up and placement devices of the pick-up and placement mechanism to adjust the spacing, so that each pick-up and placement device can correspond to the position of the grain or semiconductor component at the starting point of the transfer and the final placement. The large distance vertical movement corresponding to the position of the grain is performed by the lifting drive device 64, which controls the variable distance pick-up and placement mechanism to approach or move away from the starting point of the transfer and the final placement in the vertical distance. When the variable distance pick-up and placement mechanism approaches the starting point of the transfer and the final placement, the pick-up and placement device moves vertically by a small distance to absorb or place the grain.
[0035] The above are the preferred embodiments of the utility model and the technical principles used therein. For those skilled in the art, without departing from the spirit and scope of the utility model, any obvious changes such as equivalent transformation, simple replacement, etc. based on the technical solution of the utility model shall fall within the protection scope of the utility model.
Claims
1. A variable distance pick-and-place mechanism, characterized in that: The variable distance pick-up and put mechanism comprises a variable distance mechanism and a pick-up and put mechanism connected to the variable distance mechanism; the variable distance mechanism comprises: A variable pitch seat is provided with a plurality of waist-shaped holes, wherein the adjacent distance between a first end of the plurality of waist-shaped holes is smaller than the adjacent distance between a second end of the waist-shaped holes; a guide is arranged in each of the waist-shaped holes, and the guide is connected to a loading and shifting seat, and the loading and shifting seat is loaded with a pick-and-place device in the pick-and-place mechanism; the loading and shifting seat is supported by a variable pitch saddle, and the variable pitch saddle is slidably arranged on a variable pitch slide rail, and the variable pitch slide rail is fixed to a frame; A variable pitch driving device is installed on the frame, and the variable pitch driving device drives the variable pitch seat to reciprocate along a Z axis of the variable pitch pick-and-place mechanism, thereby adjusting the spacing between the plurality of pick-and-place devices.
2. The variable distance pick-and-place mechanism according to claim 1, characterized in that: The variable pitch drive device comprises a variable pitch drive motor, which is directly connected to a variable pitch ball screw module; the variable pitch drive motor is fixed to the frame, and the variable pitch ball screw module is connected to the variable pitch seat.
3. The variable distance pick-and-place mechanism according to claim 1, characterized in that: The frame is provided with a longitudinal slide rail at the left and right relative positions, and each of the two longitudinal slide rails is slidably equipped with a first saddle. The variable distance seat is fixed to the two first saddles, and the variable distance seat can reciprocate along the longitudinal slide rails.
4. The variable distance pick-and-place mechanism according to claim 3, characterized in that: The variable distance pick-and-place mechanism is connected to a translation device through a frame loading and moving device.
5. The variable distance pick-and-place mechanism according to claim 4, characterized in that: The frame loading and moving device comprises a loading plate and a lifting drive device; The receiving plate is slidably arranged on the two longitudinal slide rails through a second saddle; the second saddle is further equipped with a horizontal saddle frame connected to a translation track of the translation device; The lifting drive device is installed on the loading plate and is connected to control the vertical reciprocating movement of the frame.
6. The variable distance pick-and-place mechanism according to claim 5, characterized in that: The lifting drive device is a combination of a frame drive motor, a reducer and a frame ball screw module; the frame drive motor is installed on the loading plate, the frame ball screw module is connected to the frame, and the reducer reduces the rotational power of the frame drive motor and transmits it to the frame ball screw module.