Cyclone single-head cleaning machine

Abstract

The utility model discloses a cyclone single-head cleaning machine which comprises a cleaning machine shell. At least one cleaning assembly and a dust suction assembly are arranged in the cleaning machine shell, each cleaning assembly comprises a rotatable cleaning spray head and an air inlet pipe connected with the spray head, and each cleaning spray head comprises an air inlet cavity and two nozzles communicated with the air inlet cavity. The nozzles are located at the two ends of the bottom of the air inlet cavity and are obliquely arranged in the direction away from the air inlet cavity, and the dust suction assembly comprises an exhaust pipe which is located at the top of the cleaning machine shell and communicates with the cleaning machine shell. The surface of a product subjected to plasma cleaning is dedusted and cleaned, the cleaning efficiency of the surface of the product is guaranteed, and the surface cleanliness of the product is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning and dust removal, in particular to a cyclone single-head cleaning machine. Background Art

[0002] The plasma cleaning machine is a brand-new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter. Applying sufficient energy to a gas to ionize it turns it into a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaning machine processes the surface of the sample by utilizing the properties of these active components, thereby achieving purposes such as cleaning and coating.

[0003] Currently, after plasma cleaning, dust or impurity particles still adhere to the surface of the product, and this cleaning strength cannot meet the production and cleaning standards of wafers or MINILED substrates.

[0004] Therefore, a cyclone single-head cleaning machine is needed to solve the above problems. Summary of the Utility Model

[0005] To overcome the above drawbacks, the purpose of the utility model is to provide a cyclone single-head cleaning machine, which performs dust removal and cleaning on the surface of the product after plasma cleaning, ensures the cleaning efficiency of the product surface, and improves the surface cleanliness of the product.

[0006] To achieve the above purpose, the technical solution adopted by the utility model is: a cyclone single-head cleaning machine, including a cleaning machine housing; at least one set of cleaning components and a dust extraction component are arranged in the cleaning machine housing. The cleaning component includes a rotatable cleaning nozzle and an air inlet pipe connected to the nozzle. The cleaning nozzle includes an air inlet cavity and two nozzles connected to the air inlet cavity. The nozzles are located at both ends of the bottom of the air inlet cavity and are respectively inclined away from the air inlet cavity. The dust extraction component includes a dust extraction pipe located at the top of the cleaning machine housing and communicating with it.

[0007] Furthermore, it further includes a pipe accommodation cavity and a connecting ring fixedly provided at its bottom. The top of the cleaning nozzle is rotatably connected to the connecting ring through a bearing. The connecting ring is connected to the air inlet pipe through a connecting pipe, and the connecting pipe is located in the pipe accommodation cavity. The air inlet pipe is arranged on the outer wall of the cleaning machine housing, and one end of it is connected to the air compressor, and the other end passes through the outer wall of the cleaning machine housing and is connected to the connecting pipe located in the pipe accommodation cavity. The pipe accommodation cavity can provide space for the placement of the connecting pipe, thereby reasonably distributing the space inside the cleaning machine housing and avoiding clutter inside the cleaning machine housing. The setting of the connecting ring can not only connect with the connecting pipe to provide compressed air for the cleaning nozzle, but also not interfere with the rotation of the cleaning nozzle, ensuring that the cleaning nozzle can work normally.

[0008] Furthermore, on both sides of the cleaning nozzle in the length direction, there is respectively provided an isolation plate. Between the two isolation plates, there are connected by at least one horizontally arranged support plate. The space formed between the side of the two isolation plates away from the cleaning nozzle and the inside of the cleaning machine housing constitutes a dust suction channel for dust to enter. The space formed between the upper surface of the support plate and the isolation plate and the cleaning machine housing is the above-mentioned pipe accommodation cavity. The dust suction channel is separated from the cleaning nozzle, and dust will not adhere to the cleaning nozzle during the suction process, ensuring the cleaning and dust removal efficiency of subsequent products.

[0009] Furthermore, the air inlet cavity includes a main cavity and a sub-cavity that communicate with each other up and down. The two nozzles are located at both ends of the length direction of the lower surface of the sub-cavity. At the installation position of the upper nozzle of the sub-cavity, there is provided an inclined surface, and the end of the inclined surface away from the main cavity is inclined upward. During installation, the installation surface on the nozzle is completely attached to the inclined surface, so that the nozzle is inclined relative to the sub-cavity. After the compressed gas is ejected from the inclined nozzles on the cleaning nozzle, the entire cleaning nozzle can be rotated to achieve uniform cleaning of the product surface.

[0010] Furthermore, it further includes at least one set of static elimination components. The static elimination component includes an ionizer. The top of the ionizer is provided with an installation chute that matches the installation slider on the lower surface of the support plate. On the side of the cleaning machine housing, there is provided an installation through groove corresponding to the position and size of the ionizer. The straight line in the length direction of the ionizer is parallel to the straight line in the length direction of the isolation plate. One end of the ionizer is a wire connection end, and the wire connection end extends outside the installation through groove and is connected to an external wire. When the external wire is energized, the ionizer can emit ion waves to eliminate the static electricity on the product surface.

[0011] Furthermore, a plurality of nut placement grooves are provided on the side and top of the cleaning machine housing. The nut placement grooves are used to place T-shaped nuts, which is convenient for installing the entire cleaning machine housing on the machine table above the product to be cleaned.

[0012] Further, at least a pair of opposite side bottoms around the cleaning machine housing are provided with a dust baffle perpendicular to the side surfaces, which can prevent the dust blown up during the rotation and air blowing of the cleaning nozzle from spreading around and affecting the dust suction efficiency.

[0013] Advantages of the present utility model:

[0014] In the present utility model, the cleaning machine housing, the dust extraction channel, the air inlet pipe, the cleaning nozzle and the connecting pipe cooperate with each other. Through the nozzles inclinedly arranged in the relative sub-chambers, after compressed air is introduced, the cleaning nozzle rotates as a whole to blow up the dust on the product surface. The air extraction channel cooperates with the dust extraction pipe to suck and collect the blown-up dust, thereby ensuring the cleaning efficiency of the product surface and improving the surface cleanliness of the product. Description of the drawings

[0015] Figure 1 is the axonometric view of the overall structure of an embodiment of the present utility model;

[0016] Figure 2 is the bottom view of the overall structure of an embodiment of the present utility model;

[0017] Figure 3 is the partial structure cross-sectional view of an embodiment of the present utility model;

[0018] Figure 4 is the cross-sectional view of another part of the structure of an embodiment of the present utility model;

[0019] In the figure: 1. Cleaning machine housing; 2. Dust extraction pipe; 3. Nut placement groove; 4. Electrostatic elimination component; 41. Ionizer; 42. Installation slider; 43. Connecting chute; 5. Installation through groove; 6. Isolation plate; 7. Dust extraction channel; 8. Air inlet pipe; 9. Connecting pipe; 10. Connecting ring; 11. Cleaning nozzle; 111. Main chamber; 112. Sub-chamber; 113. Inclined surface; 114. Nozzle; 12. Pipe accommodation chamber; 13. Dust baffle; 14. Support plate. Detailed implementation manners

[0020] The following elaborates on the preferred embodiments of the present utility model in conjunction with the drawings, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present utility model.

[0021] See the appendix Figures 1 to 4As shown in the figure, a cyclone single-head cleaning machine in this embodiment includes a cleaning machine housing 1; at least one set of cleaning components and a dust extraction component are arranged in the cleaning machine housing 1. The cleaning component includes a rotatable cleaning nozzle 11 and an air inlet pipe 8 connected to the nozzle. The cleaning nozzle 11 includes an air inlet cavity and two nozzles 114 communicating with the air inlet cavity. The nozzles 114 are located at both ends of the bottom of the air inlet cavity and are respectively inclined away from the air inlet cavity. The compressed gas enters the nozzle through the air inlet pipe 8, and then is respectively ejected through the two nozzles 114 communicating with the air inlet cavity. Since the two nozzles 114 are inclined away from the center line of the air inlet cavity, the power for the cleaning nozzle 11 to rotate can be provided when the compressed gas is ejected, thereby expanding the range of the compressed air for cleaning the product surface. During the rotating cleaning process, the two compressed air ejection points can form pulsed gas, which plays a role in patting the dirt on the product surface, and further improves the cleanliness of the product surface;

[0022] The dust extraction component includes a dust extraction pipe 2 located at the top of the cleaning machine housing 1 and communicating with it. The dust extraction pipe 2 can suck the dust and surface dirt blown up or patted up by the cleaning nozzle 11 into the cleaning machine housing 1 and discharge them uniformly through the dust extraction pipe 2 into the dust collection box.

[0023] In some embodiments, a blower is connected to one end of the dust extraction pipe 2 that is not connected to the cleaning machine housing 1. It should be noted that it is not limited to only a blower, as long as it can provide the negative pressure for sucking dust in the dust extraction pipe 2.

[0024] It further includes a pipe accommodation cavity 12 and a connection ring 10 fixed at its bottom. The top of the cleaning nozzle 11 is rotatably connected to the connection ring 10 through a bearing. The connection ring 10 is connected to the air inlet pipe 8 through a connection pipe 9. The connection pipe 9 is located in the pipe accommodation cavity 12. The air inlet pipe 8 is arranged on the outer wall of the cleaning machine housing 1, one end of which is connected to an air compressor, and the other end passes through the outer wall of the cleaning machine housing 1 and is connected to the connection pipe 9 located in the pipe accommodation cavity 12. The pipe accommodation cavity 12 can provide space for the placement of the connection pipe 9, thereby reasonably distributing the space inside the cleaning machine housing 1 and avoiding clutter inside the cleaning machine housing 1; the setting of the connection ring 10 can not only connect with the connection pipe 9 to provide compressed air for the cleaning nozzle 11, but also does not interfere with the rotation of the cleaning nozzle 11, ensuring that the cleaning nozzle 11 can work normally.

[0025] On both sides of the cleaning nozzle 11 in the length direction, a partition plate 6 is respectively arranged. At least one horizontally arranged support plate 14 is connected between the two partition plates 6. On one side of the two partition plates 6 away from the cleaning nozzle 11, a dust extraction channel 7 for dust to enter is formed with the inside of the cleaning machine housing 1. The space formed between the upper surface of the support plate 14, the partition plate 6 and the cleaning machine housing 1 is the above-mentioned pipeline accommodation cavity 12. The dust extraction channel 7 is separated from the cleaning nozzle 11, so that dust will not adhere to the cleaning nozzle 11 during the suction process, ensuring the cleaning and dust removal efficiency of subsequent products.

[0026] In some embodiments, one horizontally arranged support plate 14 is provided. The two sides of it that are not connected to the partition plate 6 are respectively connected to the two opposite inner walls of the cleaning machine housing 1, thereby playing a supporting role in the setting of the partition plate 6. At this time, the space formed by the upper surface of the support plate 14, the cleaning machine housing 1 and the two partition plates 6 is the pipeline accommodation space.

[0027] In some other embodiments, two support plates 14 are provided. The space formed between the two support plates 14 and the two partition plates 6 is the pipeline accommodation space. This pipeline accommodation space is completely separated from the dust extraction channel 7 when the dust inside the cleaning machine housing 1 is sucked, thus ensuring that no dust will fall on the surface of the connecting pipeline 9 and eliminating the need to spend time cleaning the dust on the surface of the connecting pipeline 9.

[0028] In some embodiments, the lower surface of the partition plate 6 extends to the same horizontal line as the bottom surface of the cleaning machine housing 1, so as to be able to block the dust blown up by the compressed air as much as possible, prevent floating dust from falling on the cleaning nozzle 11, and ensure the cleaning effect of subsequent products to be cleaned.

[0029] The air inlet cavity includes a main cavity 111 and a sub-cavity 112 that communicate up and down. The two nozzles 114 are located at both ends of the lower surface of the sub-cavity 112 in the length direction. An inclined surface 113 is provided at the installation position of the nozzle 114 on the sub-cavity 112. The end of the inclined surface 113 away from the main cavity 111 is inclined upward. During installation, the installation surface on the nozzle 114 is completely attached to the inclined surface 113, so that the nozzle 114 is inclined relative to the sub-cavity 112. After the compressed gas is ejected from the inclined nozzle 114 on the cleaning nozzle 11, the whole cleaning nozzle 11 can rotate, realizing uniform cleaning of the product surface.

[0030] It further includes at least one set of static eliminator components 4. The static eliminator components 4 include an ionizer 41. A connecting chute 43 matching the mounting slider 42 on the lower surface of the support plate 14 is provided at the top of the ionizer 41. An installation through slot 5 corresponding to the position and size of the ionizer 41 is provided on the side of the cleaning machine housing 1. The straight line in the length direction of the ionizer 41 is parallel to the straight line in the length direction of the partition plate 6. One end of the ionizer 41 is a wire connection end, and the wire connection end extends outside the installation through slot 5 and is connected to an external wire. When the external wire is powered on, the ionizer 41 can emit ion waves to eliminate the static electricity on the surface of the product. When the ionizer 41 is disassembled, by pulling the wire connection end, it can slide along the mounting slider 42 and move out of the installation through slot 5 until it is completely separated from the cleaning machine housing 1, which is convenient for the installation, disassembly and replacement of the ionizer 41 and facilitates the operation of the staff.

[0031] The surfaces of some products will carry static electricity, making the adhesion of dust and dirt greater. When the cleaning nozzle 11 blows air on the surface of the product, it is difficult to blow up all the dust and dirt, which will affect the cleaning efficiency of the product surface. The setting of the static eliminator components 4 enables the ionizer 41 to work and emit ions to eliminate the static electricity on the product surface after being powered on, resulting in higher cleaning efficiency of the dust on the product surface.

[0032] In some embodiments, the static eliminator components 4 are symmetrically arranged along the cleaning nozzle 11 to expand the range of static elimination on the product surface and improve the dust removal efficiency of the product surface.

[0033] A plurality of nut placement grooves 3 are provided on the side and top of the cleaning machine housing 1. The nut placement grooves 3 are used to place T-shaped nuts, which is convenient for installing the entire cleaning machine housing 1 on the machine table above the product to be cleaned.

[0034] At least one pair of opposite side bottoms around the cleaning machine housing 1 are provided with a dust baffle 13 perpendicular to its side surface. This can prevent the blown-up dust from spreading around when the cleaning nozzle 11 rotates and blows air to remove dust, affecting the dust suction efficiency.

[0035] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention. The purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it, and it should not be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A cyclone single-head cleaning machine, characterized in that: It includes a cleaning machine shell; at least one group of cleaning components and dust extraction components are arranged in the cleaning machine shell, the cleaning component includes a rotatable cleaning nozzle and an air intake pipe connected to the nozzle, the cleaning nozzle includes an air intake cavity and two nozzles connected to the air intake cavity, the nozzles are located at both ends of the bottom of the air intake cavity and are respectively inclined in a direction away from the air intake cavity, and the dust extraction component includes an exhaust pipe located at the top of the cleaning machine shell and connected thereto.

2. A cyclone single-head cleaning machine according to claim 1, characterized in that: It also includes a pipeline accommodating cavity and a connecting ring fixed at the bottom thereof, the top of the cleaning nozzle is rotatably connected to the connecting ring through a bearing, the connecting ring is connected to the air inlet pipe through a connecting pipe, and the connecting pipe is located in the pipeline accommodating cavity.

3. A cyclone single-head cleaning machine according to claim 1, characterized in that: An isolation plate is respectively arranged on both sides of the length direction of the cleaning nozzle, and the two isolation plates are connected by at least one horizontally arranged support plate. The side of the two isolation plates away from the cleaning nozzle forms a dust extraction channel for dust to enter with the inside of the cleaning machine shell.

4. A cyclone single-head cleaning machine according to claim 1, characterized in that: The air inlet cavity includes a main cavity and a sub-cavity connected up and down. The two nozzles are located at both ends of the length direction of the lower surface of the sub-cavity. An inclined surface is provided at the installation position of the nozzle on the sub-cavity. The inclined surface is inclined upward at one end away from the main cavity.

5. The cyclone single-head cleaning machine according to claim 3, characterized in that: It also includes at least one group of static electricity removal components, which include an ionizer. The top of the ionizer is provided with a connecting groove that matches the installation slider on the lower surface of the support plate, and the side of the cleaning machine shell is provided with an installation groove corresponding to the position and size of the ionizer.

6. A cyclone single-head cleaning machine according to claim 1, characterized in that: A plurality of nut placement grooves are arranged on the side and top of the cleaning machine housing.

7. A cyclone single-head cleaning machine according to claim 1, characterized in that: At least one pair of opposite side bottoms around the cleaning machine housing is provided with a dust shield plate perpendicular to the side.

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