Single crystal furnace pipeline cleaning device
By designing a single-crystal furnace pipeline cleaning device including a cleaning assembly and a cleaning pipeline, the problem of oxide adhesion along the inner wall of the single-crystal furnace pipeline is solved, and the oxide is thoroughly cleaned and the crystal pulling quality is improved.
Patent Information
- Application Number
- CN202422031292.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2025-06-13
- Estimated Expiration
- 2034-08-21
AI Technical Summary
During operation, the single-crystal furnace pipeline is stuck in the adhesion of oxides, which slows down the flow rate of argon gas. The existing cleaning device cannot thoroughly clean the oxide on the lower edge of the inner wall of the pipeline, affecting the crystal pulling quality.
A single crystal furnace pipeline cleaning device is designed, including a cleaning assembly and a cleaning pipe. The cleaning assembly includes a driving part and a cleaning part extending into the pipeline. The cleaning part can telescope back and forth in the pipeline, and oxides are pushed out of the pipeline through the cleaning assembly.
This device can thoroughly clean the oxide on the lower edge of the inner wall of the pipe, reduce the anti-ash phenomenon, avoid the attachment of oxide dust in the furnace, and improve the crystal pulling quality.
Smart Images

Figure CN222970536U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of photovoltaic equipment, and more specifically, to a cleaning device for single crystal furnace pipelines. Background Art
[0002] After the thermal field of the single crystal furnace has been operating for a period of time, a large amount of oxides adhere to the dust cleaning pipeline and precipitate in large quantities on the lower wall of the pipeline inner wall, affecting the argon gas flow rate in the single crystal furnace pipeline. It is necessary to close the ball valve to inflate the furnace to a certain extent and then open the ball valve to take away part of the oxides through instantaneous suction. However, the actual operation effect is poor, it is easy to cause oxides to adhere to the furnace, form back ash and the cleaning effect is not obvious, and only manual cleaning of the pipeline can be carried out after the furnace is stopped.
[0003] With the iteration of crystal pulling technology, higher requirements are placed on the pressure inside the single crystal furnace and the pumping speed of the vacuum pump. Without changing the vacuum pump and the argon gas remaining unchanged, only reducing the pipeline dust accumulation can be considered to increase the pipeline permeability. The following deficiencies exist in the cleaning process:
[0004] Since the oxides mainly adhere to the lower edge of the pipeline inner wall, the existing dust cleaning devices cannot clean it;
[0005] After inflating the operating furnace to a certain extent and then opening the ball valve to take away part of the oxides through instantaneous suction, only a little surface dust can be taken away, and oxides are easily attached to the furnace, affecting the crystal pulling quality. Summary of the Utility Model
[0006] The purpose of this application is to provide a cleaning device for single crystal furnace pipelines to solve the above-mentioned technical problems.
[0007] To achieve the above purpose, the utility model provides a cleaning device for single crystal furnace pipelines, including: a dust cleaning component, which is installed in the dust cleaning pipeline of the single crystal furnace;
[0008] The dust cleaning pipeline includes a dust cleaning main pipe and dust cleaning sub-pipes arranged on both sides of the dust cleaning main pipe, and the dust cleaning sub-pipes intersect the dust cleaning main pipe in a centered manner;
[0009] The dust cleaning component includes a driving part and a dust cleaning part extending into the dust cleaning pipeline. The dust cleaning part is vertically arranged in the dust cleaning pipeline and can be telescopically moved back and forth in the pipeline.
[0010] In an alternative embodiment, both the dust cleaning main pipe and the dust cleaning sub-pipes are horizontally arranged and are connected by a four-way pipe. The four-way pipe includes a dust cleaning main pipe port without a connected pipeline, and the dust cleaning main pipe is oppositely arranged to the dust cleaning main pipe port.
[0011] In an alternative embodiment, the dust cleaning sub-pipes are connected to both sides of the four-way pipe, and vacuum pipelines are respectively connected above the dust cleaning sub-pipes.
[0012] In an alternative embodiment, pipe end blind plates are respectively provided at the end openings of the dust cleaning auxiliary pipe and the dust cleaning main pipe opening, and the dust cleaning assembly is connected to the pipe end blind plates.
[0013] In an alternative embodiment, the driving part includes a dust cleaning cylinder, at least a part of the dust cleaning cylinder extends into the pipe end blind plate, and a telescopic rod is connected to the output end of the dust cleaning cylinder.
[0014] In an alternative embodiment, the dust cleaning part includes a dust cleaning push plate connected to the telescopic rod, and the dust cleaning push plate is connected to the telescopic end of the telescopic rod.
[0015] In an alternative embodiment, the dust cleaning push plate includes a dust cleaning flat plate with a semi-circular plate structure, the dust cleaning flat plate is vertically arranged in the dust cleaning pipe, and the outer edge of the flat plate is attached to the lower half pipe wall of the dust cleaning pipe.
[0016] In an alternative embodiment, a dust cleaning ball valve is provided on the other side of the dust cleaning main pipe relative to the dust cleaning assembly. The dust cleaning ball valve includes a dust cleaning valve core, and a dust cleaning channel is provided on the dust cleaning valve core. The channel size of the dust cleaning channel is the same as the inner pipe diameter of the dust cleaning main pipe.
[0017] In an alternative embodiment, the dust cleaning ball valve is connected with a dust discharging short pipe, a dust discharging port is provided on the dust discharging short pipe, and the dust discharging port is arranged downward.
[0018] In an alternative embodiment, a maintenance pipe opening is provided on the dust cleaning main pipe, and the maintenance pipe opening is arranged at a position close to the dust cleaning ball valve.
[0019] The single crystal furnace pipe cleaning device in the present utility model can thoroughly clean the oxides deposited on the lower edge of the pipe inner wall. For the vacuum dust discharging operation after dust cleaning, the occurrence of back dust can be reduced, and the attachment of oxide dust in the furnace can be avoided to the greatest extent, thereby improving the crystal pulling quality.
[0020] Other features and advantages of the present application will be described in detail in the subsequent specific embodiment part. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.
[0022] Figure 1 It is a top view structural schematic diagram of the single crystal furnace pipe cleaning device in the present application;
[0023] Figure 2 It is a schematic side view structure diagram of a pipeline cleaning device for a single crystal furnace;
[0024] Figure 3 It is a schematic structure diagram of the dust cleaning component.
[0025] Icon:
[0026] 1 - Main dust cleaning pipe;
[0027] 2 - Auxiliary dust cleaning pipe;
[0028] 3 - Four - way pipe; 31 - Main dust cleaning pipe orifice;
[0029] 4 - Vacuum pipeline;
[0030] 5 - Pipe orifice blind plate;
[0031] 6 - Dust cleaning cylinder; 61 - Telescopic rod; 62 - Dust cleaning push plate;
[0032] 7 - Dust cleaning ball valve;
[0033] 8 - Short ash discharge pipe; 81 - Ash discharge orifice;
[0034] 9 - Maintenance pipe orifice. Specific implementation manners
[0035] To make the objectives, technical solutions and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, rather than all of them. Usually, the components of the embodiments of this application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.
[0036] In the description of this application, it should be noted that the orientation or positional relationship indicated by terms such as "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this application is usually placed during use. It is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application. In addition, terms such as "first", "second", etc. are only used for distinguishing descriptions, and cannot be understood as indicating or implying relative importance.
[0037] In the description of the present application, it should also be noted that unless otherwise clearly specified and defined, the terms "arrangement" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.
[0038] The single crystal furnace pipe cleaning device in the present application mainly conducts the ash discharging process of the single crystal furnace. Specifically, by arranging necessary ash cleaning structures, the oxide dust deposited in the pipe is thoroughly removed, so as to reduce the back-ash phenomenon during the instantaneous vacuum suction process, avoid the adhesion of oxide dust in the single crystal furnace, and improve the crystal pulling quality.
[0039] See Figures 1-3 , the single crystal furnace pipe cleaning device in the present utility model includes: an ash cleaning component, and the ash cleaning component is installed in the ash cleaning pipe of the single crystal furnace;
[0040] The ash cleaning pipe includes an ash cleaning main pipe 1 and ash cleaning sub-pipes 2 arranged on both sides of the ash cleaning main pipe 1. The ash cleaning sub-pipes 2 intersect the ash cleaning main pipe 1 in a centered manner;
[0041] The ash cleaning component includes a driving part and an ash cleaning part extending into the ash cleaning pipe. The ash cleaning part is vertically arranged in the ash cleaning pipe and can be telescopically moved back and forth in the pipe.
[0042] By arranging the ash cleaning pipe and the ash cleaning component, the ash accumulated in the pipe can be removed, the oxides deposited along the lower edge of the pipe inner wall can be exported, and combined with the vacuum pipe 4, the oxide dust in the pipe can be cleaned more thoroughly.
[0043] The ash cleaning main pipe 1 and the ash cleaning sub-pipes 2 arranged on both sides of the ash cleaning main pipe 1, combined with the connection form that the ash cleaning sub-pipes 2 intersect the ash cleaning main pipe 1 in a centered manner, can first push the ash accumulated in the ash cleaning sub-pipes 2 to the ash cleaning main pipe 1 in a centered manner through the ash cleaning component, and then push and export the ash in the ash cleaning main pipe 1 through the ash cleaning component, so as to reduce the ash accumulation dead angle and remove the ash accumulated in the pipe, especially along the lower edge of the pipe inner wall.
[0044] The ash cleaning part of the ash cleaning component extending into the ash cleaning pipe can be telescopically moved back and forth in the ash cleaning pipe under the drive of the driving part. Combined with its vertical arrangement in the ash cleaning pipe, it can push and scrape the ash accumulated along the lower edge of the ash cleaning pipe inner wall, which is beneficial to thoroughly remove the dust deposited in the lower half of the pipe.
[0045] In order to clean the oxide ash accumulated along the lower edge of the pipe inner wall, both the ash cleaning main pipe 1 and the ash cleaning sub-pipes 2 are horizontally arranged, which can effectively deposit the oxide dust, and then further push and discharge the ash from the ash cleaning pipe through the ash cleaning component.
[0046] From the perspective of removing the accumulated ash in the ash cleaning secondary pipe 2 and the ash cleaning main pipe 1 in stages, the ash cleaning main pipe 1 and the ash cleaning secondary pipe 2 are connected through a four-way pipe 3, which can conduct the pipe cavities in the ash cleaning main pipe 1 and the ash cleaning secondary pipe 2, thereby enabling the centering and collection of oxide dust and the discharge through the ash cleaning main pipe 1.
[0047] The four-way pipe 3 includes an ash cleaning main pipe opening 31 without a connected pipe. The ash cleaning main pipe 1 is disposed opposite to the ash cleaning main pipe opening 31, enabling the ash cleaning assembly to enter the ash cleaning main pipe 1 through the ash cleaning main pipe opening 31. After the accumulated ash in the ash cleaning secondary pipe 2 is pushed and centered for collection, it is pushed out from the ash cleaning main pipe 1.
[0048] The ash cleaning secondary pipe 2 is connected to both sides of the four-way pipe 3. Preferably, the ash cleaning secondary pipe 2 is symmetrically disposed on both sides of the ash cleaning main pipe 1 and the four-way pipe 3 with the ash cleaning main pipe 1 as the axis, which is conducive to the centering and collection of the accumulated ash.
[0049] In order to perform vacuum suction ash discharge operation on the pipe after ash cleaning, vacuum pipes 4 are respectively connected above the ash cleaning secondary pipe 2. Combined with the ash cleaning ball valve 7 installed on the ash cleaning main pipe 1, instantaneous ash suction can be carried out by opening the ash cleaning ball valve 7 under the suction state of the vacuum pump after the ash cleaning operation is completed, thereby finally completing the cleaning of the single crystal furnace pipe and ensuring the cleanliness of the pipe to the greatest extent.
[0050] In order to facilitate the connection and installation of the ash cleaning assembly on the ash cleaning pipe, pipe end blind plates 5 are respectively provided at the end pipe orifice of the ash cleaning secondary pipe 2 and the ash cleaning main pipe opening 31 on the four-way pipe 3, and the ash cleaning assembly is connected to the pipe end blind plate 5.
[0051] Furthermore, the ash cleaning assembly includes a main pipe ash cleaning assembly and a secondary pipe ash cleaning assembly. The pipe end blind plate 5 includes a main pipe orifice blind plate 5 and a secondary pipe orifice blind plate 5. The main pipe ash cleaning assembly enters the ash cleaning main pipe 1 through the main pipe orifice blind plate 5, and the secondary pipe ash cleaning assembly enters the ash cleaning secondary pipe 2 through the secondary pipe orifice blind plate 5.
[0052] Regarding that the ash cleaning assembly can push and clean the accumulated ash in the pipe, the driving part of the ash cleaning assembly includes an ash cleaning cylinder 6. At least a part of the ash cleaning cylinder 6 extends into the pipe end blind plate 5, and a telescopic rod 61 is connected to the output end of the ash cleaning cylinder 6.
[0053] The telescopic rod 61 connected to the output end of the ash cleaning cylinder 6 can be controlled to expand and contract inside the pipe through the ash cleaning cylinder 6. Combining the front end of the ash cleaning cylinder 6 passing through the pipe end blind plate 5, the telescopic rod 61 can expand and contract inside the pipe, further driving the ash cleaning part to perform ash pushing operation.
[0054] An air cylinder bracket is provided outside the ash cleaning pipe, which is mainly used to fix the ash cleaning cylinder 6 to provide a reliable external support for the temperature.
[0055] Specifically, the present utility model pushes the accumulated ash in the center in the ash cleaning secondary pipe 2, and externally discharges the accumulated ash after collection in the ash cleaning main pipe 1. It is necessary to set up a necessary ash pushing structure to ensure that the accumulated ash along the lower edge of the inner wall of the pipe is further pushed and discharged in the lower part of the pipe.
[0056] Specifically, the ash cleaning push plate 62 includes an ash cleaning flat plate with a semi-circular plate structure. The ash cleaning flat plate is vertically arranged in the ash cleaning pipe, or based on the different orientations of the ash cleaning pipe, the ash cleaning flat plate is arranged perpendicular to the axial direction of the ash cleaning pipe, so that the outer edge of the ash cleaning flat plate can be attached to the lower half pipe wall of the ash cleaning pipe, thereby effectively removing the accumulated ash along the lower edge of the inner wall of the pipe.
[0057] From the perspective of externally discharging the accumulated ash after collection through the ash cleaning main pipe 1, an ash cleaning ball valve 7 is arranged on the other side of the ash cleaning main pipe 1 relative to the ash cleaning assembly. After the ash cleaning flat plate of the main pipe ash cleaning assembly in the ash cleaning main pipe 1 is pushed over the ash cleaning ball valve 7, the accumulated ash is discharged to the downstream of the ash cleaning ball valve 7.
[0058] Further, the ash cleaning ball valve 7 includes an ash cleaning valve core, and an ash cleaning channel is arranged on the ash cleaning valve core. The channel size of the ash cleaning channel is the same as the inner diameter of the ash cleaning main pipe 1. Through this setting method, the ash discharging operation in the ash cleaning main pipe 1 can be carried out when the ash cleaning ball valve 7 is in the open state.
[0059] The ash cleaning ball valve 7 is connected with an ash discharging short pipe 8, and an ash discharging port 81 is arranged on the ash discharging short pipe 8. The ash discharging port 81 is arranged downward, so that the externally discharged oxide dust can fall into the ash collecting device connected to the ash discharging port 81.
[0060] An inspection pipe orifice 9 is arranged on the ash cleaning main pipe 1, and the inspection pipe orifice 9 is arranged at a position close to the ash cleaning ball valve 7, which can facilitate the inspection and maintenance of the inside of the pipe and ensure the stable and reliable operation of the ash cleaning ball valve 7.
[0061] During the specific operation process, the single crystal furnace can maintain normal operation, and during the process of charging the single crystal furnace, the cleaning operation of the pipe can be carried out.
[0062] First, the ash cleaning flat plate in the ash cleaning secondary pipe 2 is pushed to reach the ash cleaning main pipe 1 through the secondary pipe ash cleaning assembly, and the accumulated ash in the ash cleaning secondary pipe 2 is centered and collected, and then the ash cleaning flat plate returns to its original position;
[0063] Then, the ash cleaning flat plate in the ash cleaning main pipe 1 is pushed over the ash cleaning ball valve 7 through the main pipe ash cleaning assembly, and the centered and collected oxide dust is pushed and externally discharged, and then the ash cleaning flat plate returns to its original position;
[0064] After the above process runs in a cycle for several times, the accumulated ash along the lower edge of the inner wall of the pipe is completely removed.
[0065] Through the single crystal furnace pipeline cleaning device in the utility model, in cooperation with the online tank cleaning process of the single crystal furnace, the single crystal furnace after running for a period of time can be made to approach the state of a newly opened furnace, which greatly improves the operating conditions of the single crystal furnace and ensures the quality of crystal pulling.
[0066] It should be noted that, without conflict, the features in the embodiments in this application can be combined with each other.
[0067] The above are only the preferred embodiments of this application and are not intended to limit this application. For those skilled in the art, this application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.
Claims
1. A single crystal furnace pipeline cleaning device, characterized in that: include: A ash cleaning component, which is installed in the ash cleaning pipeline of the single crystal furnace; The ash cleaning pipeline includes an ash cleaning main pipe and ash cleaning auxiliary pipes arranged on both sides of the ash cleaning main pipe, and the ash cleaning auxiliary pipes intersect with the ash cleaning main pipe in the middle; The ash cleaning component comprises a driving part and an ash cleaning part extending into the ash cleaning pipe. The ash cleaning part is vertically arranged in the ash cleaning pipe and can be extended and retracted back and forth in the pipe.
2. The single crystal furnace pipeline cleaning device according to claim 1 is characterized in that: The main ash cleaning pipe and the auxiliary ash cleaning pipe are both arranged horizontally and connected by a four-way pipe. The four-way pipe includes a main ash cleaning pipe port that is not connected to a pipeline. The main ash cleaning pipe is arranged opposite to the main ash cleaning pipe port.
3. The single crystal furnace pipeline cleaning device according to claim 2 is characterized in that: The auxiliary dust cleaning pipe is connected to both sides of the four-way pipe, and vacuum pipes are respectively connected above the auxiliary dust cleaning pipe.
4. The single crystal furnace pipeline cleaning device according to claim 2, characterized in that: The end pipe opening of the auxiliary cleaning pipe and the main cleaning pipe opening are respectively provided with pipe opening blind plates, and the cleaning assembly is connected to the pipe opening blind plates.
5. The single crystal furnace pipeline cleaning device according to claim 4, characterized in that: The driving part comprises a cleaning cylinder, at least a portion of which extends into the pipe opening blind plate, and a telescopic rod is connected to the output end of the cleaning cylinder.
6. The single crystal furnace pipeline cleaning device according to claim 5, characterized in that: The dust cleaning part comprises a dust cleaning push plate connected to the telescopic rod, and the dust cleaning push plate is connected to the telescopic end of the telescopic rod.
7. The single crystal furnace pipeline cleaning device according to claim 6, characterized in that: The cleaning push plate comprises a cleaning flat plate with a semicircular plate structure. The cleaning flat plate is vertically arranged in the cleaning pipe, and the outer edge of the flat plate is arranged in contact with the lower half of the pipe wall of the cleaning pipe.
8. The single crystal furnace pipeline cleaning device according to any one of claims 1 to 7, characterized in that: A cleaning ball valve is arranged on the other side of the cleaning main pipe relative to the cleaning component. The cleaning ball valve includes a cleaning valve core. A cleaning channel is arranged on the cleaning valve core. The channel size of the cleaning channel is the same as the internal pipe diameter of the cleaning main pipe.
9. The single crystal furnace pipeline cleaning device according to claim 8, characterized in that: The ash cleaning ball valve is connected to a short ash discharge pipe, and the short ash discharge pipe is provided with an ash discharge port, and the ash discharge port is arranged downward.
10. The single crystal furnace pipeline cleaning device according to claim 8, characterized in that: The dust cleaning main pipe is provided with an inspection pipe opening, and the inspection pipe opening is arranged at a position close to the dust cleaning ball valve.