Polishing treatment device for recycling target material

Abstract

The utility model discloses a polishing treatment device for recycled target materials, which belongs to the technical field of target material processing and comprises a machine body for placing the recycled target materials, a placing hole is arranged on the side face of the machine body, a mounting groove is arranged on the bottom wall of the placing hole, and a polishing mechanism is arranged in the machine body. The grinding mechanism comprises a placing plate arranged in the mounting groove, an electric telescopic rod arranged in the machine body in a sliding mode, a first driving assembly used for driving the electric telescopic rod to slide, an object placing plate arranged on an output shaft of the electric telescopic rod, a first motor arranged on the object placing plate and a grinding disc fixed to an output shaft of the first motor, and the grinding disc is located above the placing plate; and a positioning mechanism for fixing a recycled target material is arranged in the machine body. The polishing device has the effect of improving the polishing efficiency of the recycled target material.

Description

Technical Field

[0001] The utility model relates to the technical field of target processing, in particular to a grinding device for recycling targets. Background Art

[0002] A target, also known as a sputtering target, is a core material for thin film preparation and is mainly applied in various fields. In the electronic field, targets are often used to manufacture various electronic devices, such as integrated circuits, solar cells, etc. To save resources, some targets can be recycled. Usually, there are sputtered substances on the backplane of the recycled target, which need to be removed before reuse. In the existing grinding technology, workers usually place the recycled target on the machine body and fix it, and then manually grind the backplane of the recycled target, resulting in low grinding efficiency.

[0003] In view of the above related technologies, it is urgent to design and develop a grinding device for recycling targets, which uses a mechanical device to grind the recycled target and improve the grinding efficiency of the recycled target. Summary of the Utility Model

[0004] In order to improve the grinding efficiency of recycled targets, this application provides a grinding device for recycling targets.

[0005] A grinding device for recycling targets provided by this application adopts the following technical solutions:

[0006] A grinding device for recycling targets includes a machine body for placing the recycled target. A placement hole is opened on the side surface of the machine body, and an installation groove is opened on the bottom wall of the placement hole. A grinding mechanism is arranged inside the machine body. The grinding mechanism includes a placement plate arranged in the installation groove, an electric telescopic rod slidably arranged inside the machine body, a first driving component for driving the electric telescopic rod to slide, a placement plate arranged on the output shaft of the electric telescopic rod, a motor I arranged on the placement plate, and a grinding disc fixed on the output shaft of the motor I. The grinding disc is located above the placement plate. A positioning mechanism for fixing the recycled target is arranged inside the machine body.

[0007] By adopting the above technical solutions, a placement hole is opened on the side surface of the machine body, an installation groove is opened on the bottom wall of the placement hole, the placement plate is arranged in the installation groove, the electric telescopic rod is slidably arranged inside the machine body, the placement plate is arranged on the output shaft of the electric telescopic rod, the motor I is arranged on the placement plate, the grinding disc is fixed on the output shaft of the motor I, and the grinding disc is located above the placement plate. When it is necessary to grind the recycled target, the recycled target is fixed by using the positioning mechanism, the electric telescopic rod is driven to a suitable position by using the first driving component, the electric telescopic rod drives the grinding disc to a suitable position, and the motor I is driven to drive the grinding disc to rotate, which is convenient for grinding the recycled target and improves the grinding efficiency of the recycled target.

[0008] Preferably, a sliding hole is formed in the top surface of the machine body. The first driving assembly includes a second motor disposed on the machine body, a first screw rod fixed to the output shaft of the second motor, and a sliding block threadedly sleeved on the first screw rod. The first screw rod is rotatably disposed in the sliding hole and in the machine body. The sliding block is slidably disposed in the sliding hole, and the electric telescopic rod is disposed on the sliding block.

[0009] By adopting the above technical solution, a sliding hole is formed in the top surface of the machine body. The second motor is disposed on the machine body, the first screw rod is fixed to the output shaft of the second motor, the first screw rod is rotatably disposed in the sliding hole and in the machine body, the sliding block is threadedly sleeved on the first screw rod, the sliding block is slidably disposed in the sliding hole, and the electric telescopic rod is disposed on the sliding block. When it is necessary to adjust the grinding disc to a proper position, the second motor is driven to drive the first screw rod to rotate forward or backward. Under the limiting action of the sliding hole, the sliding block slides in the sliding hole, and the sliding block drives the electric telescopic rod to slide, so as to facilitate the adjustment of the position of the grinding disc and facilitate the grinding of the recycled target material.

[0010] Preferably, a sliding groove is formed in the bottom wall of the placing hole. The positioning mechanism includes a support column disposed in the placing hole, a first positioning strip disposed on the support column, a third motor disposed on the machine body, a second screw rod fixed to the output shaft of the third motor, and a second positioning strip threadedly sleeved on the second screw rod. The second screw rod is rotatably disposed in the sliding groove and in the machine body. The second positioning strip is slidably disposed in the sliding groove and in the installation groove. Both the first positioning strip and the second positioning strip are located above the placing plate.

[0011] By adopting the above technical solution, the support column is disposed in the placing hole, the first positioning strip is disposed on the support column, a sliding groove is formed in the bottom wall of the placing hole, the third motor is disposed on the machine body, the second screw rod is fixed to the output shaft of the third motor, the second screw rod is rotatably disposed in the sliding groove and in the machine body, the second positioning strip is threadedly sleeved on the second screw rod, the second positioning strip is slidably disposed in the sliding groove and in the installation groove, and both the first positioning strip and the second positioning strip are located above the placing plate. When it is necessary to fix the recycled target material, one end of the recycled target material is abutted against the side surface of the first positioning strip, and the third motor is driven to drive the second screw rod to rotate. Under the limiting action of the sliding groove, the second positioning strip slides towards the direction close to the recycled target material, so that the second positioning strip abuts against the recycled target material, facilitating the fixing of the recycled target material.

[0012] Preferably, the positioning mechanism includes a slide rail disposed on the bottom wall of the placing hole. A slider is disposed on the second positioning strip, and the slider is slidably connected to the slide rail.

[0013] By adopting the above technical solution, the slide rail is arranged on the bottom wall of the placement hole, and a slider is arranged on the second positioning strip. The slider is slidably connected to the slide rail, improving the sliding stability of the second positioning strip.

[0014] Preferably, a first protective cushion strip is arranged on the side surface of the first positioning strip close to the second positioning strip, and a second protective cushion strip is arranged on the side surface of the second positioning strip close to the first positioning strip.

[0015] By adopting the above technical solution, a first protective cushion strip is arranged on the side surface of the first positioning strip close to the second positioning strip, and a second protective cushion strip is arranged on the side surface of the second positioning strip close to the first positioning strip. During the process of fixing the recycled target by the first positioning strip and the second positioning strip, the first protective cushion strip and the second protective cushion strip are closely attached to the recycled target, improving the safety of fixing the recycled target.

[0016] Preferably, a sliding hole is opened on the top surface of the machine body. A spraying mechanism is arranged on the machine body. The spraying mechanism includes a material storage box for storing grinding fluid, a telescopic pipe connected to the material storage box, and a spray head connected to the telescopic pipe. The material storage box is arranged on the top surface of the machine body. The telescopic pipe passes through the sliding hole, and the spray head is arranged in the placement hole.

[0017] By adopting the above technical solution, a sliding hole is opened on the top surface of the machine body. The material storage box is arranged on the top surface of the machine body. The material storage box stores grinding fluid. The telescopic pipe is connected to the material storage box. The telescopic pipe passes through the sliding hole. The spray head is connected to the telescopic pipe. The spray head is arranged in the placement hole. When it is necessary to spray grinding fluid on the grinding disc and the recycled target, the spray head sprays the grinding disc and the recycled target, facilitating the spraying of grinding fluid on the grinding disc and the recycled target.

[0018] Preferably, a limiting groove is opened on the side wall of the sliding hole. The spraying mechanism includes a sliding block sleeved on the telescopic pipe. The sliding block is slidably arranged in the sliding hole. A limiting block is arranged on the side surface of the sliding block. The limiting block is slidably arranged in the limiting groove.

[0019] By adopting the above technical solution, a limiting groove is opened on the side wall of the sliding hole. The sliding block is sleeved on the telescopic pipe. The sliding block is slidably arranged in the sliding hole. A limiting block is arranged on the side surface of the sliding block. The limiting block is slidably arranged in the limiting groove. When it is necessary to adjust the position of the spray head, sliding the sliding block can drive the telescopic pipe to slide, thus facilitating the sliding of the spray head.

[0020] Preferably, a through groove is opened on the side surface of the machine body. The through groove is communicated with the installation groove. A liquid outlet pipe is arranged on the machine body. The liquid outlet pipe is communicated with the through groove. A liquid collection bucket is arranged below the liquid outlet pipe.

[0021] By adopting the above technical solution, a through groove is formed on the side of the machine body. The through groove communicates with the installation groove. A liquid outlet pipe is arranged on the machine body and communicates with the through groove. A liquid collection bucket is arranged below the liquid outlet pipe, facilitating the collection of grinding liquid.

[0022] In summary, the present application includes at least one of the following beneficial technical effects:

[0023] 1. A placement hole is formed on the side of the machine body. An installation groove is formed on the bottom wall of the placement hole. A placement plate is arranged in the installation groove. An electric telescopic rod is slidably arranged in the machine body. A placement plate is arranged on the output shaft of the electric telescopic rod. A first motor is arranged on the placement plate. A grinding disc is fixed on the output shaft of the first motor. The grinding disc is located above the placement plate. When it is necessary to grind the recycled target, the positioning mechanism is used to fix the recycled target. The first driving component is used to drive the electric telescopic rod to a suitable position. The electric telescopic rod drives the grinding disc to a suitable position. The first motor is driven to drive the grinding disc to rotate, facilitating the grinding of the recycled target and improving the grinding efficiency of the recycled target.

[0024] 2. A sliding hole is formed on the top surface of the machine body. A second motor is arranged on the machine body. A first screw rod is fixed on the output shaft of the second motor. The first screw rod is rotatably arranged in the sliding hole and in the machine body. A sliding block is threadedly sleeved on the first screw rod. The sliding block is slidably arranged in the sliding hole. An electric telescopic rod is arranged on the sliding block. When it is necessary to adjust the grinding disc to a suitable position, the second motor is driven to drive the first screw rod to rotate forward or backward. Under the limiting action of the sliding hole, the sliding block slides in the sliding hole. The sliding block drives the electric telescopic rod to slide, thus facilitating the adjustment of the position of the grinding disc and facilitating the grinding of the recycled target.

[0025] 3. A support column is arranged in the placement hole. A first positioning plate strip is arranged on the support column. A sliding groove is formed on the bottom wall of the placement hole. A third motor is arranged on the machine body. A second screw rod is fixed on the output shaft of the third motor. The second screw rod is rotatably arranged in the sliding groove and in the machine body. A second positioning plate strip is threadedly sleeved on the second screw rod. The second positioning plate strip is slidably arranged in the sliding groove and in the installation groove. Both the first positioning plate strip and the second positioning plate strip are located above the placement plate. When it is necessary to fix the recycled target, one end of the recycled target is abutted against the side surface of the first positioning plate strip. The third motor is driven to drive the second screw rod to rotate. Under the limiting action of the sliding groove, the second positioning plate strip slides towards the direction close to the recycled target, so that the second positioning plate strip abuts against the recycled target, facilitating the fixation of the recycled target. Description of the Drawings

[0026] Figure 1 It is a schematic diagram of the overall structure of the grinding treatment device for recycled targets in the embodiment of the present application.

[0027] Figure 2It is a cross-sectional view of the body in the embodiments of the present application.

[0028] Explanation of reference numerals:

[0029] 1. Bottom plate; 2. Body; 21. Placing hole; 22. Installation groove; 23. Sliding groove; 24. Sliding hole; 25. Sliding hole; 251. Limiting groove; 26. Through groove; 27. Liquid outlet pipe; 28. Liquid collection bucket; 3. Grinding mechanism; 31. Placing plate; 32. Electric telescopic rod; 33. First driving assembly; 331. Motor two; 332. Screw one; 333. Sliding block; 34. Object placing plate; 35. Motor one; 36. Grinding disc; 4. Positioning mechanism; 41. Support pillar; 42. First positioning plate strip; 421. First protective cushion strip; 43. Motor three; 44. Screw two; 45. Second positioning plate strip; 451. Sliding connection block; 452. Second protective cushion strip; 453. Slide block; 46. Slide rail; 5. Spraying mechanism; 51. Material storage box; 52. Telescopic pipe; 53. Nozzle; 54. Sliding block; 55. Limiting block. Detailed implementation manners

[0030] The following will further elaborate on the present application in conjunction with the attached Figure 1-2 drawings.

[0031] Embodiments of the present application disclose a grinding treatment device for recycling target materials. Referring to Figure 1 the figure shown, the grinding treatment device for recycling target materials includes a bottom plate 1, a body 2, a grinding mechanism 3, a positioning mechanism 4, and a spraying mechanism 5. The bottom plate 1 is horizontally arranged, and the length direction of the bottom plate 1 is parallel to the ground.

[0032] Referring to Figure 1 the figure shown, the body 2 is horizontally arranged on the bottom plate 1. The length direction of the body 2 is the same as that of the bottom plate 1. A placing hole 21 is provided on the side surface of the body 2. The length direction of the placing hole 21 is the same as that of the body 2. An installation groove 22 is provided on the bottom wall of the placing hole 21. The length direction of the installation groove 22 is the same as that of the placing hole 21.

[0033] Referring to Figure 1 the figure shown, a sliding groove 23 is provided on the bottom wall of the placing hole 21. The length direction of the sliding groove 23 is the same as that of the placing hole 21. A sliding hole 24 is provided on the top surface of the body 2. The length direction of the sliding hole 24 is the same as that of the body 2. The grinding mechanism 3 includes a placing plate 31, an electric telescopic rod 32, a first driving assembly 33, an object placing plate 34, a motor one 35, and a grinding disc 36. The placing plate 31 is arranged in the installation groove 22. The length direction of the placing plate 31 is the same as that of the body 2.

[0034] Referring to Figure 1 and Figure 2As shown, the first driving assembly 33 includes a second motor 331, a first screw 332, and a sliding block 333. The second motor 331 is fixed to the machine body 2, the first screw 332 is fixed to the output shaft of the second motor 331, the first screw 332 is rotatably arranged in the sliding hole 24, the first screw 332 is rotatably arranged in the machine body 2, and the length direction of the first screw 332 is the same as the length direction of the machine body 2.

[0035] Refer to Figure 1 As shown, the sliding block 333 is threadedly sleeved on the first screw 332, the sliding block 333 is slidably arranged in the sliding hole 24, the electric telescopic rod 32 is arranged on the sliding block 333, the storage plate 34 is arranged on the output shaft of the electric telescopic rod 32, and the axial line direction of the storage plate 34 coincides with the axial line of the electric telescopic rod 32.

[0036] Refer to Figure 1 As shown, the first motor 35 is arranged on the storage plate 34, the grinding disc 36 is fixed to the output shaft of the first motor 35, the axial line direction of the output shaft of the first motor 35 coincides with the axial line direction of the storage plate 34, the axial line direction of the grinding disc 36 coincides with the axial line direction of the output shaft of the first motor 35, and the grinding disc 36 is located above the storage plate 34.

[0037] Refer to Figure 1 As shown, the positioning mechanism 4 includes a support column 41, a first positioning strip 42, a third motor 43, a second screw 44, a second positioning strip 45, and a slide rail 46. The support column 41 is fixed to the inner wall of the placement hole 21, the first positioning strip 42 is welded and fixed to the side surface of the support column 41, and the length direction of the first positioning strip 42 is the same as the width direction of the bottom plate 1.

[0038] Refer to Figure 1 As shown, the third motor 43 is fixed to the machine body 2, the second screw 44 is fixed to the output shaft of the third motor 43, the second screw 44 is rotatably arranged in the sliding groove 23, the second screw 44 is rotatably arranged in the machine body 2, and the length direction of the second screw 44 is the same as the length direction of the machine body 2.

[0039] Refer to Figure 1 As shown, a sliding connection block 451 is arranged on the second positioning strip 45, the sliding connection block 451 is threadedly sleeved on the second screw 44, the sliding connection block 451 is slidably arranged in the sliding groove 23, the sliding connection block 451 is slidably arranged in the installation groove 22, the length direction of the second positioning strip 45 is the same as the length direction of the first positioning strip 42, and both the first positioning strip 42 and the second positioning strip 45 are located above the placement plate 31.

[0040] Refer to Figure 1 As shown, a first protective pad strip 421 is arranged on the side surface of the first positioning strip 42 close to the second positioning strip 45, and a second protective pad strip 452 is arranged on the side surface of the second positioning strip 45 close to the first positioning strip 42.

[0041] Referring to Figure 1 as shown, the slide rail 46 is horizontally arranged on the bottom wall of the placement hole 21. The length direction of the slide rail 46 is the same as the length direction of the machine body 2. A slider 453 is arranged on the positioning strip two 45, and the slider 453 is slidably connected to the slide rail 46, improving the sliding stability of the positioning strip two 45.

[0042] Referring to Figure 1 as shown, when it is necessary to fix the recycled target, one end of the recycled target is abutted against the side surface of the positioning strip one 42. The driving motor three 43 drives the screw two 44 to rotate. Under the limiting action of the sliding groove 23, the positioning strip two 45 slides towards the direction close to the recycled target, so that the positioning strip two 45 abuts against the recycled target, facilitating the fixing of the recycled target.

[0043] Referring to Figure 1 and Figure 2 as shown, a sliding hole 25 is opened on the top surface of the machine body 2. A limiting groove 251 is opened on the side wall of the sliding hole 25. The length direction of the limiting groove 251 is the same as the length direction of the machine body 2. The length direction of the sliding hole 25 is the same as the length direction of the machine body 2. The spraying mechanism 5 includes a material storage box 51, a telescopic pipe 52, a spray head 53 and a sliding block 54. The material storage box 51 is arranged on the top surface of the machine body 2, and the material storage box 51 contains grinding liquid.

[0044] Referring to Figure 1 and Figure 2 as shown, the telescopic pipe 52 is connected to the material storage box 51, the spray head 53 is connected to the telescopic pipe 52. The telescopic pipe 52 passes through the sliding hole 25, the spray head 53 is arranged in the placement hole 21, the sliding block 54 is slidably arranged in the sliding hole 25, the sliding block 54 is sleeved on the telescopic pipe 52, a limiting block 55 is arranged on the side surface of the sliding block 54, and the limiting block 55 is slidably arranged in the limiting groove 251. When it is necessary to adjust the position of the spray head 53, sliding the sliding block 54 can drive the telescopic pipe 52 to slide, thus facilitating the sliding of the spray head 53.

[0045] Referring to Figure 1 as shown, a through groove 26 is opened on the side surface of the machine body 2. The through groove 26 is communicated with the installation groove 22. A liquid outlet pipe 27 is arranged on the machine body 2, the liquid outlet pipe 27 is communicated with the through groove 26, and a liquid collection bucket 28 is arranged below the liquid outlet pipe 27, facilitating the collection of grinding liquid.

[0046] The implementation principle of the grinding treatment device for recycled targets in the embodiment of the present application is as follows:

[0047] When the recycled target needs to be polished, one end of the recycled target is abutted against the side surface of the first positioning strip 42, the third driving motor 43 drives the second screw rod 44 to rotate, and under the limiting action of the sliding groove 23, the second positioning strip 45 slides towards the direction close to the recycled target, so that the second positioning strip 45 abuts against the recycled target to fix the recycled target. The second driving motor 331 drives the first screw rod 332 to rotate forward or backward. Under the limiting action of the sliding hole 24, the sliding block 333 slides in the sliding hole 24, and the sliding block 333 drives the electric telescopic rod 32 to slide. The electric telescopic rod 32 is driven to a suitable position, and the electric telescopic rod 32 drives the grinding disc 36 to a suitable position. The first driving motor 35 drives the grinding disc 36 to rotate, which is convenient for polishing the recycled target and improves the polishing efficiency of the recycled target.

[0048] The above are all the preferred embodiments of the present application, and the protection scope of the present application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A grinding treatment device for recycling target materials, comprising a body (2) for placing recycled target materials, characterized in that: A placement hole (21) is provided on the side of the machine body (2), a mounting groove (22) is provided on the bottom wall of the placement hole (21), a grinding mechanism (3) is provided in the machine body (2), the grinding mechanism (3) comprises a placement plate (31) provided in the mounting groove (22), an electric telescopic rod (32) slidably provided in the machine body (2), a first driving component (33) for driving the electric telescopic rod (32) to slide, a placement plate (34) provided on the output shaft of the electric telescopic rod (32), a motor (35) provided on the placement plate (34), and a grinding disc (36) fixed on the output shaft of the motor (35), wherein the grinding disc (36) is located above the placement plate (31), and a positioning mechanism (4) for fixing the recovered target material is provided in the machine body (2).

2. A grinding treatment device for recovering target materials according to claim 1, characterized in that: A sliding hole (24) is provided on the top surface of the machine body (2); the first driving assembly (33) comprises a second motor (331) arranged on the machine body (2), a first screw (332) fixed on the output shaft of the second motor (331), and a sliding block (333) threadedly sleeved on the first screw (332); the first screw (332) is rotatably arranged in the sliding hole (24); the first screw (332) is rotatably arranged in the machine body (2); the sliding block (333) is slidably arranged in the sliding hole (24); and the electric telescopic rod (32) is arranged on the sliding block (333).

3. The grinding treatment device for recovering target material according to claim 1, characterized in that: A sliding groove (23) is provided on the bottom wall of the placement hole (21); the positioning mechanism (4) comprises a pillar (41) arranged in the placement hole (21), a positioning strip (42) arranged on the pillar (41), a motor (43) arranged on the machine body (2), a screw (44) fixed on the output shaft of the motor (43), and a positioning strip (45) threadedly sleeved on the screw (44); the screw (44) is rotatably arranged in the sliding groove (23); the screw (44) is rotatably arranged in the machine body (2); the positioning strip (45) is slidably arranged in the sliding groove (23); the positioning strip (45) is slidably arranged in the installation groove (22); the positioning strip (42) and the positioning strip (45) are both located above the placement plate (31).

4. The grinding treatment device for recovering target material according to claim 3 is characterized in that: The positioning mechanism (4) comprises a slide rail (46) arranged on the bottom wall of the placement hole (21), and a slider (453) is arranged on the second positioning strip (45), and the slider (453) is slidably connected to the slide rail (46).

5. The grinding treatment device for recovering target material according to claim 3, characterized in that: A protective pad strip 1 (421) is provided on the side of the positioning strip 1 (42) close to the positioning strip 2 (45), and a protective pad strip 2 (452) is provided on the side of the positioning strip 2 (45) close to the positioning strip 1 (42).

6. The grinding treatment device for recovering target materials according to claim 1, characterized in that: A sliding hole (25) is provided on the top surface of the machine body (2), and a spraying mechanism (5) is provided on the machine body (2). The spraying mechanism (5) comprises a material holding box (51) for holding polishing liquid, a telescopic tube (52) connected to the material holding box (51), and a spray head (53) connected to the telescopic tube (52). The material holding box (51) is arranged on the top surface of the machine body (2), the telescopic tube (52) passes through the sliding hole (25), and the spray head (53) is arranged in the placement hole (21).

7. The grinding treatment device for recovering target material according to claim 6, characterized in that: A limiting groove (251) is provided on the side wall of the sliding hole (25); the spraying mechanism (5) comprises a sliding block (54) sleeved on the telescopic tube (52); the sliding block (54) is slidably arranged in the sliding hole (25); a limiting block (55) is provided on the side wall of the sliding hole (25); the limiting block (55) is slidably arranged in the limiting groove (251).

8. The grinding treatment device for recovering target materials according to claim 1, characterized in that: A through groove (26) is provided on the side of the machine body (2), the through groove (26) being in communication with the mounting groove (22), a liquid outlet pipe (27) is provided on the machine body (2), the liquid outlet pipe (27) being in communication with the through groove (26), and a liquid collecting bucket (28) is provided below the liquid outlet pipe (27).

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