Simple tool for cutting graphite felt of single crystal furnace

Abstract

The utility model discloses a simple tool for cutting a graphite felt in a single crystal furnace, which belongs to the technical field of graphite felt cutting and comprises a base, a fixing frame is arranged at the top of the base, a second rotating shaft is connected to the right side wall in the fixing frame through a bearing, a motor is arranged on the left side wall of the fixing frame, and the output end of the motor is connected with one end of the second rotating shaft. According to the graphite felt cutting device, graphite felt can be guided under the action of the guide assembly, the situation that the graphite felt is inclined during conveying is avoided, the graphite felt can be cut, the graphite felt can be cut, and the service life of the graphite felt is prolonged. Under the action of the cutting assembly, redundant graphite felts can be cut according to needs, under the action of the positioning assembly, the graphite felts can be positioned, and it is guaranteed that the cutting assembly does not incline when cutting the graphite felts.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite felt cutting, in particular to a simple tooling for cutting graphite felt in a single crystal furnace. Background Technique

[0002] As a semiconductor material, single crystal silicon is generally used in the manufacture of integrated circuits and other electronic components. At present, there are two growth techniques for single crystal silicon, the zone melting method and the Czochralski method. Among them, the Czochralski method is the commonly used method at present. When the existing graphite felt for single crystal furnaces is used, it needs to be cut according to requirements. When cutting the graphite felt, a cutting tooling is required. The existing cutting tooling is relatively complex, and it is easy to have the situation of skew cutting when cutting the graphite felt, which affects the cutting effect. Therefore, we propose a simple tooling for cutting graphite felt in a single crystal furnace. Content of the Utility Model

[0003] The purpose of the utility model is to provide a simple tooling for cutting graphite felt in a single crystal furnace to solve the problems raised in the above background technique.

[0004] To achieve the above purpose, the utility model provides the following technical solution: A simple tooling for cutting graphite felt in a single crystal furnace, including a base. A fixed frame is provided on the top of the base. The right inner wall of the fixed frame is connected with a second rotating shaft through a bearing. A motor is provided on the left side wall of the fixed frame. The output end of the motor is connected with one end of the second rotating shaft. A heat preservation roller is sleeved and installed on the outer wall of the second rotating shaft. A guiding component is provided on the top of the base. An installation frame is provided on the top of the base. A cutting component is provided on the inner top of the installation frame. The cutting component includes two groups of sliders slidably connected to the inner top of the installation frame. The left and right side walls inside the installation frame are both provided with first electric telescopic rods. One ends of the two groups of first electric telescopic rods are respectively connected with the outer side walls of the two groups of sliders away from each other. Second electric telescopic rods are provided at the bottoms of the two groups of sliders. Driving motors are provided at one ends of the two groups of second electric telescopic rods. Cutting knives are connected to the output ends of the two groups of driving motors. Positioning components are provided on the opposite side walls of the two groups of sliders.

[0005] Further, the positioning component includes an installation rod provided on the right side wall of the slider. A cavity is opened in the installation rod. A sliding plate is slidably connected in the cavity. A third electric telescopic rod is provided at the top of the cavity. One end of the third electric telescopic rod is connected with the top of the sliding plate. A movable rod is provided at the bottom of the sliding plate. One end of the movable rod penetrates through the bottom of the cavity and is connected with a connection frame provided outside. A rotating rod is provided in the connection frame. The two ends of the rotating rod are respectively connected with bearings I provided on the left and right side walls inside the connection frame. A positioning roller is sleeved and installed on the outer wall of the rotating rod.

[0006] Further, guiding grooves are formed in the left and right side walls of the cavity, and guiding blocks matching the guiding grooves are arranged on the left and right side walls of the sliding plate.

[0007] Further, the mounting rod is arranged in an L shape.

[0008] Further, a limiting groove is formed in the inner top of the mounting frame, limiting blocks matching the limiting groove are arranged on the tops of the two groups of sliders, and both the limiting groove and the limiting blocks are arranged in a T shape.

[0009] Further, the guiding assembly includes a guiding frame arranged on the top of the base, two groups of first rotating shafts are arranged in the guiding frame, two ends of the two groups of first rotating shafts are respectively connected to bearings II arranged on the left and right side walls in the guiding frame, and guiding rollers are sleeved and installed on the outer walls of the two groups of first rotating shafts.

[0010] Further, the guiding frame is arranged in a U shape.

[0011] Further, the fixing frame is arranged in a U shape.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows: Under the action of the guiding assembly, the graphite felt can be guided to avoid skewing during transportation; under the action of the cutting assembly, the redundant graphite felt can be cut as needed; under the action of the positioning assembly, the graphite felt can be positioned to ensure that the cutting assembly does not skew during cutting of the graphite felt. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a schematic structural diagram of the present utility model;

[0014] Figure 2 is a schematic diagram of the internal structure of the cavity of the present utility model;

[0015] Figure 3 is a schematic diagram of Structure A of the present utility model.

[0016] In the figure: 1. Base; 2. Mounting frame; 3. Cutting assembly; 30. First electric telescopic rod; 31. Slider; 32. Second electric telescopic rod; 33. Driving motor; 34. Cutting knife; 4. Positioning assembly; 40. Mounting rod; 41. Cavity; 42. Third electric telescopic rod; 43. Sliding plate; 44. Movable rod; 45. Connecting frame; 46. Positioning roller; 47. Rotating rod; 5. Guiding assembly; 50. Guiding frame; 51. First rotating shaft; 52. Guiding roller; 6. Fixing frame; 7. Heat preservation roller; 8. Second rotating shaft; 9. Motor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0018] Embodiment 1:

[0019] Please refer to Figure 1-2 , the present invention provides a technical solution: a simple tooling for cutting graphite felt in a single crystal furnace, including a base 1. A fixed frame 6 is provided on the top of the base 1. The fixed frame 6 is arranged in a U shape. The right inner side wall of the fixed frame 6 is provided with a second rotating shaft 8 through a bearing. A motor 9 is provided on the left side wall of the fixed frame 6. The output end of the motor 9 is connected to one end of the second rotating shaft 8. A heat preservation roller 7 is sleeved and installed on the outer wall of the second rotating shaft 8. A guiding component 5 is provided on the top of the base 1. An installation frame 2 is provided on the top of the base 1. A cutting component 3 is provided on the inner top of the installation frame 2. The cutting component 3 includes two groups of sliders 31 slidably connected to the inner top of the installation frame 2. A limiting groove is opened on the inner top of the installation frame 2. Limiting blocks matched with the limiting groove are provided on the tops of the two groups of sliders 31. Both the limiting groove and the limiting blocks are arranged in a T shape. Under the action of the limiting groove and the limiting blocks, the sliders 31 move more stably left and right. First electric telescopic rods 30 are provided on the left and right side walls inside the installation frame 2. One ends of the two groups of first electric telescopic rods 30 are respectively connected to the side walls far away from the two groups of sliders 31. Second electric telescopic rods 32 are provided at the bottoms of the two groups of sliders 31. Driving motors 33 are provided at one ends of the two groups of second electric telescopic rods 32. Cutting knives 34 are connected to the output ends of the two groups of driving motors 33. Positioning components 4 are provided on the opposite side walls of the two groups of sliders 31.

[0020] Please refer to Figure 2-3 , the positioning component 4 includes an installation rod 40 provided on the right side wall of the slider 31. The installation rod 40 is arranged in an L shape. A cavity 41 is opened in the installation rod 40. A sliding plate 43 is slidably connected in the cavity 41. Guide grooves are opened on the left and right side walls inside the cavity 41. Guide blocks matched with the guide grooves are provided on the left and right side walls of the sliding plate 43. Under the action of the guide grooves and the guide blocks, the sliding plate 43 moves more stably up and down in the cavity 41. A third electric telescopic rod 42 is provided on the inner top of the cavity 41. One end of the third electric telescopic rod 42 is connected to the top of the sliding plate 43. A movable rod 44 is provided at the bottom of the sliding plate 43. One end of the movable rod 44 penetrates through the inner bottom of the cavity 41 and is connected to a connection frame 45 provided outside. A rotating rod 47 is provided in the connection frame 45. The two ends of the rotating rod 47 are respectively connected to the bearings I provided on the left and right side walls inside the connection frame 45. A positioning roller 46 is sleeved and installed on the outer wall of the rotating rod 47.

[0021] Please refer toFigure 1 , the guiding component 5 includes a guiding frame 50 provided on the top of the base 1. The guiding frame 50 is arranged in a U shape. Two groups of first rotating shafts 51 are provided inside the guiding frame 50. Both ends of the two groups of first rotating shafts 51 are respectively connected to the second bearings provided on the left and right side walls inside the guiding frame 50. Guide rollers 52 are sleeved and installed on the outer walls of the two groups of first rotating shafts 51. With the cooperation of the two groups of guide rollers 52, the graphite felt can be guided.

[0022] Working principle: The graphite felt to be cut is wound around the heat preservation roller 7. The motor 9 drives the second rotating shaft 8 to rotate, and the second rotating shaft 8 drives the heat preservation roller 7 to rotate. One end of the graphite felt passes through between the two groups of guide rollers 52. The size of the graphite felt is cut as required. The first electric telescopic rod 30 drives the slider 31 to move, the slider 31 drives the cutting knife 34 to move, the second electric telescopic rod 32 drives the driving motor 33 to move downward, the driving motor 33 drives the cutting knife 34 to rotate, and the cutting knife 34 can cut the graphite felt. When cutting, the third electric telescopic rod 42 drives the sliding plate 43 to move downward, the sliding plate 43 drives the movable rod 44 to move downward, the movable rod 44 drives the connecting frame 45 to move downward, and the connecting frame 45 drives the positioning roller 46 to contact the graphite felt, so as to position the graphite felt and avoid skewing during cutting.

[0023] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A simple tool for cutting graphite felt in a single crystal furnace, comprising a base (1), a fixing frame (6) is provided on the top of the base (1), a second rotating shaft (8) is provided on the right side wall of the fixing frame (6) through a bearing, a motor (9) is provided on the left side wall of the fixing frame (6), an output end of the motor (9) is connected to one end of the second rotating shaft (8), and a heat preservation roller (7) is sleeved and installed on the outer wall of the second rotating shaft (8), characterized in that: A guide assembly (5) is provided at the top of the base (1), a mounting frame (2) is provided at the top of the base (1), a cutting assembly (3) is provided at the top of the mounting frame (2), the cutting assembly (3) comprises two groups of sliders (31) slidably connected at the top of the mounting frame (2), first electric telescopic rods (30) are provided at the left and right side walls of the mounting frame (2), one end of the two groups of the first electric telescopic rods (30) are respectively connected to the side walls away from the two groups of sliders (31), a second electric telescopic rod (32) is provided at the bottom of the two groups of the sliders (31), one end of the two groups of the second electric telescopic rods (32) are provided with a driving motor (33), the output ends of the two groups of the driving motors (33) are connected with a cutting knife (34), and positioning assemblies (4) are provided at the opposite side walls of the two groups of the sliders (31).

2. The simple tooling for cutting graphite felt in a single crystal furnace according to claim 1, characterized in that: The positioning assembly (4) comprises a mounting rod (40) provided on the right side wall of the slider (31), a cavity (41) being provided in the mounting rod (40), a sliding plate (43) being slidably connected in the cavity (41), a third electric telescopic rod (42) being provided at the top of the cavity (41), one end of the third electric telescopic rod (42) being connected to the top of the sliding plate (43), a movable rod (44) being provided at the bottom of the sliding plate (43), one end of the movable rod (44) passing through the bottom of the cavity (41) and being connected to a connecting frame (45) provided outside, a rotating rod (47) being provided in the connecting frame (45), two ends of the rotating rod (47) being respectively connected to bearings provided on the left and right side walls of the connecting frame (45), and a positioning roller (46) being sleeved and installed on the outer wall of the rotating rod (47).

3. The simple tooling for cutting graphite felt in a single crystal furnace according to claim 2, characterized in that: The left and right side walls of the cavity (41) are both provided with guide grooves, and the left and right side walls of the sliding plate (43) are both provided with guide blocks matching the guide grooves.

4. The simple tooling for cutting graphite felt in a single crystal furnace according to claim 2, characterized in that: The mounting rod (40) is arranged in an L shape.

5. The simple tool for cutting graphite felt in a single crystal furnace according to claim 1, characterized in that: A limiting groove is provided at the top of the mounting frame (2), and limiting blocks matching the limiting groove are provided at the tops of the two groups of sliding blocks (31), and the limiting groove and the limiting blocks are both arranged in a T shape.

6. The simple tool for cutting graphite felt for single crystal furnace according to claim 1, characterized in that: The guide assembly (5) comprises a guide frame (50) provided on the top of a base (1), two groups of first rotating shafts (51) being provided inside the guide frame (50), two ends of the two groups of first rotating shafts (51) being respectively connected to two bearings provided on the left and right side walls inside the guide frame (50), and guide rollers (52) being sleeved and mounted on the outer walls of the two groups of first rotating shafts (51).

7. The simple tool for cutting graphite felt in a single crystal furnace according to claim 6, characterized in that: The guide frame (50) is arranged in a U shape.

8. The simple tool for cutting graphite felt in a single crystal furnace according to claim 1, characterized in that: The fixing frame (6) is arranged in a U shape.

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