Lifting system for ultrahigh vacuum exhaust table

Abstract

The utility model relates to a lifting system for an ultrahigh vacuum exhaust table, and relates to the field of device machining, the lifting system comprises an upper lifting system and a lower lifting system, in the installation process of a bell jar structure, the upper lifting system is used for descending a first furnace body to a lifting replacing position of the lower lifting system, and the lower lifting system is used for replacing the upper lifting system; descending the first furnace body to a target position; in the process of removing installation of the bell jar structure, the lower lifting system is used for lifting the first furnace body to the lifting replacing position of the upper lifting system, and the upper lifting system is used for replacing the lower lifting system to remove the first furnace body. The service life and the reliability of the lifting system can be effectively improved, the cost of the lifting system is reduced, and the installation space is saved.

Description

Technical Field

[0001] The present disclosure relates to the field of device processing, and more particularly, to a lifting system for an ultra-high vacuum exhaust station. Background Art

[0002] With the rapid development of the electronics and semiconductor industries, the size and complexity of devices have been continuously increasing, posing higher requirements for processing technologies. In particular, the increase in the height and volume of devices has presented new challenges to existing vacuum exhaust stations. Traditional vacuum exhaust station designs are often targeted at devices within a specific size range, but with the progress of device processing technologies, these devices have become inadequate when dealing with larger-sized devices. When using an ultra-high vacuum exhaust station, how to design the bell structure of the exhaust station has become an urgent problem to be solved. Summary of the Utility Model

[0003] The present disclosure provides a lifting system for an ultra-high vacuum exhaust station. The lifting system includes an upper lifting system and a lower lifting system, and the upper lifting system is fixed above the lower lifting system. The exhaust station includes a bell structure, and the bell structure includes a furnace cover and a plurality of segmented furnace bodies.

[0004] The plurality of segmented furnace bodies includes at least one first furnace body and at least one second furnace body, and the first furnace body is located below the second furnace body in the bell structure.

[0005] The first furnace body includes a first support arm group and a second support arm group. The first support arm group is used to be combined with the upper lifting system, and the second support arm group is used to be combined with the lower lifting system.

[0006] During the installation process of the bell structure, the upper lifting system is used to lower the first furnace body to the lifting handover position of the lower lifting system, and the lower lifting system is used to take over the upper lifting system and lower the first furnace body to the target position.

[0007] During the uninstallation process of the bell structure, the lower lifting system is used to raise the first furnace body to the lifting handover position of the upper lifting system, and the upper lifting system is used to take over the lower lifting system and remove the first furnace body.

[0008] Optionally, the upper lifting system and the lower lifting system each include a driving motor, a set of transmission components, two lead screws, four guide shafts, and two sets of lifting arms.

[0009] The two lead screws are respectively coupled to the transmission components. The lead screws and the guide shafts are arranged perpendicular to the ground, and the two sets of lifting arms are arranged horizontally and oppositely to the ground. Each lifting arm passes through one of the lead screws and two of the guide shafts.

[0010] The driving motor is used to drive the transmission assembly, and the transmission assembly is used to drive the lead screw to rotate so that the two lifting arms move linearly synchronously along the guide shaft;

[0011] A telescopic slide is arranged on the lifting arm. When the slide extends, the slide is used to engage with the support arm of the segmented furnace body and / or the furnace cover.

[0012] Optionally, a positioning pin is arranged on the top of the slide, and the positioning pin is used to engage with the positioning hole of the support arm of the segmented furnace body and / or the furnace cover.

[0013] Optionally, a detection switch is arranged on each slide, and the detection switch is used to detect whether the positioning pin is inserted into the support arm positioning hole.

[0014] Optionally, the lifting system includes a first controller, and the first controller is respectively connected to each slide;

[0015] The first controller is used to receive the first signal of the detection switch and control the opening or closing of the driving motor according to the first signal.

[0016] Optionally, limit switches are respectively arranged at the upper and lower ends of the upper lifting system, and / or, at the upper and lower ends of the lower lifting system;

[0017] The limit switch is used for limit protection during the lifting process.

[0018] Optionally, the limit switch includes a main limit switch and an auxiliary limit switch, and the auxiliary limit switch is used for limit protection during the lifting process when the main limit switch fails.

[0019] Optionally, the lifting system includes a second controller, and the second controller is respectively connected to each limit switch;

[0020] The second controller is used to receive the second signal of the limit switch and control the extension or retraction of the slide and / or the opening or closing of the driving motor according to the second signal.

[0021] Optionally, the lifting system includes a control panel, and the control panel is used to receive manual operation instructions and control the extension or retraction of the slide and / or the opening or closing of the driving motor according to the manual operation instructions.

[0022] Optionally, the number of the segmented furnace bodies is greater than or equal to 5, and the height of the segmented furnace body is greater than or equal to 1400 millimeters;

[0023] The maximum lifting stroke of the upper lifting system is greater than or equal to 4,200 millimeters, and the maximum lifting stroke of the lower lifting system is greater than or equal to 2,800 millimeters; or, the maximum lifting stroke of the upper lifting system is greater than or equal to 2,800 millimeters, and the maximum lifting stroke of the lower lifting system is greater than or equal to 4,200 millimeters.

[0024] Through the above technical solution, in the scenario of an ultra-high vacuum exhaust table, by dividing the lifting system of the exhaust table bell structure into upper and lower sections, the lengths of the lead screw and the guide shaft can be effectively reduced, preventing the lead screw from deforming during long-term use, greatly improving the service life and reliability of the lifting system, reducing the cost of the lifting system, and saving installation space.

[0025] Other features and advantages of the present disclosure will be described in detail in the subsequent specific implementation section. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings are used to provide a further understanding of the present disclosure, and constitute a part of the specification, and are used to explain the present disclosure together with the following specific implementation manners, but do not constitute a limitation to the present disclosure. In the drawings:

[0027] Figure 1 is a schematic diagram of a lifting system for an ultra-high vacuum exhaust table shown according to an exemplary embodiment.

[0028] Figure 2 is a schematic diagram of a lower lifting system shown according to an exemplary embodiment.

[0029] Figure 3 is a schematic flowchart of a lifting system control method shown according to an exemplary embodiment. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] The following will describe in detail the specific implementation manners of the present disclosure with reference to the drawings. It should be understood that the specific implementation manners described herein are only for explaining and understanding the present disclosure, and are not used to limit the present disclosure.

[0031] The following will describe in detail the specific implementation manners of the present disclosure with reference to the drawings. It should be understood that the specific implementation manners described herein are only for explaining and understanding the present disclosure, and are not used to limit the present disclosure.

[0032] It should be noted that when a component is referred to as "fixed to" or "disposed on" another component, it can be directly on the other component or there may also be an intermediate component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0033] It should be noted that concepts such as "first" and "second" mentioned in this disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependent relationships.

[0034] Figure 1 is a schematic diagram of a lifting system for an ultra-high vacuum exhaust platform shown according to an exemplary embodiment, as Figure 1 shown, the lifting system includes an upper lifting system 110 and a lower lifting system 120, and the upper lifting system 110 is fixed above the lower lifting system 120; the exhaust platform includes a bell structure 200, and the bell structure 200 includes a furnace cover 210 and a plurality of segmented furnace bodies;

[0035] The plurality of segmented furnace bodies includes at least one first furnace body 221 and at least one second furnace body 222, and the first furnace body 221 is located below the second furnace body 222 in the bell structure 200;

[0036] The first furnace body 221 includes a first support arm group and a second support arm group, the first support arm group is used to be combined with the upper lifting system 110, and the second support arm group is used to be combined with the lower lifting system 120;

[0037] During the installation process of the bell structure 200, the upper lifting system 110 is used to lower the first furnace body 221 to the lifting replacement position of the lower lifting system 120, and the lower lifting system 120 is used to replace the upper lifting system 110 and lower the first furnace body 221 to the target position;

[0038] During the uninstallation process of the bell structure 200, the lower lifting system 120 is used to raise the first furnace body 221 to the lifting replacement position of the upper lifting system 110, and the upper lifting system 110 is used to replace the lower lifting system 120 and remove the first furnace body 221.

[0039] Optionally, the first support arm group and the second support arm group can each include 4 support arms.

[0040] Optionally, the lifting replacement position of the lower lifting system 120 can be the highest limit position of the lower lifting system 120. Optionally, the lifting replacement position of the upper lifting system 110 can be the lowest limit position of the upper lifting system 110. That is, when the upper lifting system 110 descends to the lowest and the lower lifting system 120 ascends to the highest, the furnace body can be supported by the upper lifting system 110 and replaced by the lower lifting system 120, or supported by the lower lifting system 120 and replaced by the upper lifting system 110.

[0041] It can be understood that since the installation and uninstallation processes of the second furnace body 222 do not require the participation of the lower lifting system 120, only one set of support arms is provided for the second furnace body 222.

[0042] In some possible implementation manners, the first support arm group can be disposed above the second support arm group. In this way, the replacement lifting of the upper lifting system 110 and the lower lifting system 120 can be more conveniently realized.

[0043] Those skilled in the art should know that in specific implementation, the lifting system, the exhaust platform and its components also include other components. Figure 1 Only a part related to the embodiments of the present disclosure is shown, and other necessary components are not shown one by one. For example, the lifting system may further include a commutator for adjusting the rotation direction of the lead screw, and the exhaust platform may further include an internal vacuum system, an external vacuum system, a heating system for heating the devices inside the bell jar, a cooling system for cooling the bell jar, and so on.

[0044] In the embodiments of the present disclosure, in the scenario of an ultra-high vacuum exhaust platform, by dividing the lifting system of the exhaust platform bell jar structure 200 into upper and lower sections, the lengths of the lead screw and the guide shaft can be effectively reduced, preventing the lead screw from deforming during long-term use, greatly improving the service life and reliability of the lifting system, reducing the cost of the lifting system, and saving the installation space.

[0045] In some optional embodiments, the upper lifting system 110 and the lower lifting system 120 respectively include a driving motor, a set of transmission components, two lead screws, four guide shafts, and two sets of lifting arms;

[0046] The two lead screws are respectively coupled to the transmission components, the lead screws and the guide shafts are arranged perpendicular to the ground, the two sets of lifting arms are arranged horizontally and oppositely to the ground, and each lifting arm passes through one of the lead screws and two of the guide shafts;

[0047] The driving motor is used to drive the transmission components, and the transmission components are used to drive the lead screws to rotate so that the two sets of lifting arms move linearly along the guide shafts synchronously;

[0048] A telescopic sliding seat is arranged on the lifting arm. When the sliding seat extends out, the sliding seat is used to engage with the support arms of the segmented furnace body and / or the furnace cover.

[0049] Among them, the transmission components can be realized, for example, by a driving rod and two transmission rods. For example, the two transmission rods are respectively coupled to the driving rod through gears. When the motor drives the driving rod to rotate, the transmission rods rotate synchronously with the driving rod.

[0050] Exemplarily, if a furnace body has been hoisted above the lifting system and it is ready to use the lifting system to lower the furnace body to its installation position, the slide seat can be controlled to extend, so that the lifting arm is combined with the furnace body. At this time, the lifting rope of the furnace body can be removed, and the furnace body can be moved by the lifting system. Further, after the furnace body is lowered to the target position, for example, when the furnace body has been successfully docked above another furnace body, the slide seat can be controlled to retract to decouple the lifting arm from the furnace body.

[0051] In some alternative embodiments, a positioning pin is provided at the top of the slide seat, and the positioning pin is used to engage with the positioning holes of the support arms of the segmented furnace body and / or the furnace cover.

[0052] In some alternative embodiments, a detection switch is provided on each slide seat, and the detection switch is used to detect whether the positioning pin is inserted into the positioning hole of the support arm.

[0053] In some alternative embodiments, the lifting system includes a first controller, and the first controller is respectively connected to each slide seat;

[0054] The first controller is used to receive the first signal from the detection switch and control the opening or closing of the drive motor according to the first signal.

[0055] Exemplarily, if it is determined according to the first signal of the detection switch that each positioning pin is inserted into the positioning hole of the furnace body support arm, the drive motor can be controlled to start to automatically move the furnace body to the target installation position after the furnace body is correctly engaged with the lifting arm.

[0056] In some alternative embodiments, limit switches are respectively provided at the upper and lower ends of the upper lifting system, and / or, at the upper and lower ends of the lower lifting system 120;

[0057] The limit switches are used for limit protection during the lifting process.

[0058] In some alternative embodiments, the limit switch includes a main limit switch and an auxiliary limit switch, and the auxiliary limit switch is used for limit protection during the lifting process when the main limit switch fails.

[0059] Exemplarily, the lifting system may include a total of 8 limit switches, with two limit switches respectively provided at the upper and lower ends of the upper lifting system 110, and two limit switches also respectively provided at the upper and lower ends of the lower lifting system 120.

[0060] In some alternative embodiments, the lifting system includes a second controller, and the second controller is respectively connected to each limit switch;

[0061] The second controller is configured to receive the second signal from the limit switch and control the extension or retraction of the carriage and / or the activation or deactivation of the drive motor according to the second signal.

[0062] Exemplarily, if it is determined according to the second signal that the lifting arm of the lower lifting system 120 has descended to the lowest position, the carriage can be controlled to retract and the drive motor can be controlled to deactivate. Alternatively, after controlling the carriage to retract, the drive motor can be controlled to drive in the reverse direction to drive the lifting arm of the lower lifting system 120 to move upward.

[0063] In some alternative embodiments, the lifting system includes a control panel configured to receive manual operation instructions and control the extension or retraction of the carriage and / or the activation or deactivation of the drive motor according to the manual operation instructions.

[0064] In some examples, some of the above-described embodiments can be combined to control the extension or retraction of the carriage and / or the activation or deactivation of the drive motor. For example, the control panel can display relevant information corresponding to the first signal and / or the second signal, and the staff can control the carriage and the drive motor based on this information. Alternatively, the lifting system can perform fully automated control of the extension or retraction of the carriage and the activation or deactivation of the drive motor according to the first signal and the second signal.

[0065] In some alternative embodiments, the number of segmented furnace bodies is greater than or equal to 5, and the height of the segmented furnace bodies is greater than or equal to 1400 millimeters;

[0066] The maximum lifting stroke of the upper lifting system 110 is greater than or equal to 4200 millimeters, and the maximum lifting stroke of the lower lifting system 120 is greater than or equal to 2800 millimeters; or, the maximum lifting stroke of the upper lifting system 110 is greater than or equal to 2800 millimeters, and the maximum lifting stroke of the lower lifting system 120 is greater than or equal to 4200 millimeters.

[0067] To enable those skilled in the art to better understand the technical solutions provided by the present disclosure, the present disclosure also provides the following embodiments.

[0068] Figure 2 is a schematic diagram of a lower lifting system shown according to an exemplary embodiment, as Figure 2 shown, the lower lifting system includes a drive motor 1201, a drive rod 1202, a transmission rod 1203, a lead screw 1204, a guide shaft 1205, and a lifting arm 1206. Among them, two carriages 1207 are provided on each lifting arm 1206. Optionally, the lower lifting system further includes two commutators 1208.

[0069] It is worth noting that Figure 2The lifting heights of the two lifting arms of the lower lifting system shown are approximately different for the convenience of viewing. In actual use, the lifting heights of these two lifting arms can change synchronously.

[0070] In addition, in some embodiments, the upper lifting system in the lifting system can be similar to Figure 2 the lower lifting system shown. For example, the same transmission method can be adopted so that the motor of the upper lifting system can drive the two lifting arms of the upper lifting system to move vertically synchronously along the guide shaft. Optionally, the motor and the transmission device in the upper lifting system can be arranged at the top of the lead screw.

[0071] In some embodiments, Figure 2 the lower lifting system shown can be used for an ultra-high vacuum exhaust platform. The bell jar of this exhaust platform can cover a furnace body composed of 5 sections and a furnace cover. There are four support arms on both sides of each section of the furnace body (8 support arms for the 4th and 5th sections). There are positioning pins on the support arms, which cooperate with the positioning holes at the top of the slide rail on the lifting mechanism to complete the connection between the lifting mechanism and the bell jar; there are four lifting lugs at the upper end of the bell jar for use when hoisting the furnace body; there are four positioning devices at the lower end of the furnace body to position the bell jar on the frame (on the furnace bottom plate), as well as the positioning between the furnace bodies. The 5 sections of the furnace body are connected to the frame as a whole. Accurate positioning is beneficial to the lifting of the bell jar and the improvement of the stability of the bell jar; the upper lifting system lifts these 5 sections of the furnace body, and the above-mentioned lower lifting system can be used to lift the 4th and 5th sections of the furnace body.

[0072] Optionally, two groups of limit switches are respectively installed at the upper and lower ends of the upper and lower lifting systems for extreme position limit protection during the lifting process. One limit switch is for standby. When one group fails, the other group can stop the lifting mechanism and give an alarm prompt.

[0073] Optionally, a detection switch is installed on the sliding seat to determine whether the positioning pins on the sliding seat are inserted into the positioning holes of the furnace body support seat during the lifting process. When a signal is detected during the lifting process, the system indicator light prompts that the furnace body is in place. On the contrary, when the signal disappears during the lifting process, the system indicator light prompts that the furnace body has left, and the lifting mechanism automatically stops. The user can perform the next operation according to the prompt. If the detection signals of the four sliding seats are not all complete and there are missing signals during the lifting process, the system gives an alarm prompt and automatically stops the lifting.

[0074] Optionally, the lifting system further includes a coarse limit device, which is used to limit the position of the furnace body before it is combined with the lifting arm of the upper lifting system. It can effectively prevent the furnace body from not being accurately engaged with the upper lifting system.

[0075] Combining the above-mentioned some embodiments, Figure 3 is a flowchart of a method for installing a bell jar structure shown according to an exemplary embodiment. This method can be applied to the first furnace body in the bell jar structure, such as Figure 3As shown, the execution subject of this method can be, for example, a lifting system controller. This method includes the following steps:

[0076] Step S3101: Raise the upper and lower lifting arms to the uppermost position and wait for the furnace body to be in place.

[0077] Among them, the slide seat of the lower lifting arm of the lower lifting system extends, and the slide seat of the upper lifting arm of the upper lifting system does not extend temporarily.

[0078] Step S3102: Respond to the rough limit extension instruction and extend the rough limit device.

[0079] Among them, the rough limit extension instruction can be issued by an operator operating the control panel.

[0080] Step S3103: Respond to the upper slide seat extension instruction and extend the upper slide seat.

[0081] Among them, the upper slide seat extension instruction can be issued by an operator pressing the "Upper Slide Seat Extension" button after determining that the upper lifting arm is in the middle of the furnace body.

[0082] Step S3104: Determine that the slide seat positioning pins are respectively inserted into the positioning holes of the furnace body support arms according to the detection signals of the detection switches on the upper lifting arm, delay for 3 seconds for rough limit, and issue a hoisting in-place notice.

[0083] Among them, after the furnace body is hoisted in place, that is, after the furnace body is successfully docked with the lifting arm of the upper lifting system, the operator can remove the hoisting rope.

[0084] Step S3105: Respond to the upper lifting arm lowering instruction and control the upper lifting arm to lower.

[0085] Among them, the upper lifting arm lowering instruction can be issued by an operator pressing the "Upper Lifting Arm Lowering" button after removing the hoisting rope.

[0086] Step S3106: Determine that the furnace body has been lowered in place according to the detection signals of the detection switches on the upper lifting arm. After delaying for 5 seconds to control the upper lifting arm to stop moving, control the upper slide seat to retract.

[0087] Optionally, it can also be determined whether to control the upper slide seat to retract according to the operator's operation instruction after the upper lifting arm stops moving.

[0088] Step S3107: Respond to the lower lifting arm lowering instruction and control the lower lifting arm to lower.

[0089] Among them, the lower lifting arm lowering instruction can be issued by an operator pressing the "Lower Lifting Arm Lowering" button.

[0090] Step S3108: Determine that the furnace body has descended in place according to the detection signal of the detection switch of the lower lifting arm. After delaying for 5 seconds to control the lower lifting arm to stop moving, control the lower sliding seat to retract.

[0091] Optionally, it can also be that after the lower lifting arm stops moving, determine whether to control the lower sliding seat to retract according to the operation instructions of the staff.

[0092] Step S3109: Control the upper lifting arm and the lower lifting arm to rise to the highest limit position.

[0093] It can be understood that the installation process of the bell structure can be of the same type as the above installation process, that is, some furnace bodies in the lower position of the bell structure require the upper lifting system to take over the lower lifting system to drive these furnace bodies to rise and fall to complete the installation process. The embodiments of the present disclosure will not elaborate on this.

[0094] The preferred embodiments of the present disclosure have been described in detail above in conjunction with the accompanying drawings. However, the present disclosure is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0095] In addition, it should be noted that, among the various specific technical features described in the above specific embodiments, they can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the present disclosure will not separately describe various possible combination methods.

[0096] In addition, any combination can be made between various different embodiments of the present disclosure as long as it does not violate the idea of the present disclosure, and it should also be regarded as the content disclosed by the present disclosure.

Claims

1. A lifting system for an ultra-high vacuum exhaust table, characterized in that: The lifting system includes an upper lifting system and a lower lifting system, wherein the upper lifting system is fixed above the lower lifting system; the exhaust platform includes a bell structure, wherein the bell structure includes a furnace cover and a plurality of segmented furnace bodies; The plurality of segmented furnace bodies include at least one first furnace body and at least one second furnace body, wherein the first furnace body is located below the second furnace body in the bell structure; The first furnace body includes a first support arm group and a second support arm group, the first support arm group is used to be combined with the upper lifting system, and the second support arm group is used to be combined with the lower lifting system; During the installation of the bell structure, the upper lifting system is used to lower the first furnace body to the lifting replacement position of the lower lifting system, and the lower lifting system is used to replace the upper lifting system to lower the first furnace body to the target position; During the removal and installation process of the bell jar structure, the lower lifting system is used to lift the first furnace body to the lifting and replacing position of the upper lifting system, and the upper lifting system is used to replace the lower lifting system to remove the first furnace body.

2. The lifting system for an ultra-high vacuum exhaust stage according to claim 1, characterized in that: The upper lifting system and the lower lifting system respectively include a driving motor, a set of transmission components, two screw rods, four guide shafts and two sets of lifting arms; The two screw rods are respectively coupled to the transmission assembly, the screw rods and the guide shafts are arranged perpendicular to the ground, the two sets of lifting arms are arranged horizontally on the ground and opposite to each other, and each lifting arm passes through one screw rod and two guide shafts; The driving motor is used to drive the transmission assembly, and the transmission assembly is used to drive the screw to rotate so that the two groups of lifting arms move synchronously and linearly along the guide shaft; A retractable slide is provided on the lifting arm. When the slide is extended, the slide is used to be combined with the support arm of the segmented furnace body and / or the furnace cover.

3. The lifting system for an ultra-high vacuum exhaust stage according to claim 2, characterized in that: A positioning pin is arranged on the top of the slide seat, and the positioning pin is used to be combined with the positioning hole of the support arm of the segmented furnace body and / or the furnace cover.

4. The lifting system for an ultra-high vacuum exhaust stage according to claim 3, characterized in that: A detection switch is provided on each of the slide seats, and the detection switch is used to detect whether the positioning pin is inserted into the positioning hole of the support arm.

5. The lifting system for an ultra-high vacuum exhaust stage according to claim 4, characterized in that: The lifting system includes a first controller, and the first controller is respectively connected to each of the slide seats; The first controller is used to receive a first signal from the detection switch and control the driving motor to be turned on or off according to the first signal.

6. The lifting system for an ultra-high vacuum exhaust stage according to claim 2, characterized in that: The upper end and the lower end of the upper lifting system, and / or the upper end and the lower end of the lower lifting system, are respectively provided with limit switches; The limit switch is used for limit protection during the lifting process.

7. The lifting system for an ultra-high vacuum exhaust stage according to claim 6, characterized in that: The limit switch includes a main limit switch and an auxiliary limit switch, and the auxiliary limit switch is used for limit protection during the lifting process when the main limit switch fails.

8. The lifting system for an ultra-high vacuum exhaust stage according to claim 6, characterized in that: The lifting system includes a second controller, and the second controller is respectively connected to each of the limit switches; The second controller is used to receive a second signal from the limit switch, and control the extension or retraction of the slide and / or the turning on or off of the drive motor according to the second signal.

9. The lifting system for an ultra-high vacuum exhaust stage according to claim 2, characterized in that: The lifting system comprises a control panel, and the control panel is used to receive manual operation instructions and control the extension or retraction of the slide seat and / or the opening or closing of the drive motor according to the manual operation instructions.

10. The lifting system for an ultra-high vacuum exhaust stage according to any one of claims 1 to 9, characterized in that: The number of the segmented furnace bodies is greater than or equal to 5, and the height of the segmented furnace bodies is greater than or equal to 1400 mm; The maximum lifting stroke of the upper lifting system is greater than or equal to 4200 mm, and the maximum lifting stroke of the lower lifting system is greater than or equal to 2800 mm; or, the maximum lifting stroke of the upper lifting system is greater than or equal to 2800 mm, and the maximum lifting stroke of the lower lifting system is greater than or equal to 4200 mm.

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