Stand column of single crystal growth furnace

Abstract

The utility model relates to a single crystal growth furnace stand column which is characterized in that a sliding part moves by starting a driving part and utilizing the threaded connection relation between the driving part and the sliding part, and further, the sliding part slides relative to a supporting part when the driving part is started based on the sliding connection relation between the sliding part and the supporting part; therefore, the overall length of the stand column formed by the sliding piece and the supporting piece is adjusted.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal growth furnaces, and in particular to a column of a single crystal growth furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and grows single crystals without dislocation using the Czochralski method. In the production process of single crystal silicon, the single crystal furnace must first be evacuated with a vacuum pump to keep the single crystal furnace in a high vacuum state, remove excess harmful gases, and then fill it with inert gas as a protective gas. After that, the graphite heater in the single crystal furnace is used to heat and melt the block polycrystalline silicon material placed in the quartz crucible to complete the production of single crystal silicon. In the production process of single crystal silicon, the single crystal furnace must be continuously evacuated and continuously filled with inert protective gas.

[0003] When the single crystal furnace is installed in a fixed position, the bottom of the furnace body needs to be connected to multiple columns to keep the bottom of the furnace body at a certain distance from the ground. However, most of the existing single crystal growth furnace columns are fixed-size castings formed by direct die-casting. When the ground is not flat enough, the furnace body will tilt, thereby affecting the safety of the single crystal furnace. Utility Model Content

[0004] Based on this, it is necessary to provide single crystal growth furnace columns to address the problem that most traditional single crystal growth furnace columns are fixed-size castings formed by direct die casting. When the ground is not flat enough, the furnace body will tilt, thereby affecting the safety of the single crystal furnace.

[0005] The present application provides a single crystal growth furnace column, comprising:

[0006] Supports;

[0007] A sliding member, arranged on the top of the supporting member, the bottom of the sliding member is inserted into the supporting member, and the sliding member is slidably connected with the supporting member;

[0008] The driving member is arranged on the sliding member, the driving member is inserted into the sliding member, and the driving member is threadedly connected to the sliding member.

[0009] The present application relates to a column of a single crystal growth furnace, which moves the sliding member by starting a driving member and utilizing the threaded connection between the driving member and the sliding member. Based on the sliding connection between the sliding member and the supporting member, the sliding member slides relative to the supporting member when the driving member is started, thereby adjusting the overall length of the column composed of the sliding member and the supporting member. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1Schematic structural diagram of the column of a single crystal growth furnace provided by an embodiment of the present application.

[0011] Figure 2 Schematic cross-sectional view of the support member in the column of a single crystal growth furnace provided by an embodiment of the present application.

[0012] Figure 3 Schematic diagram of the positional relationship between the threaded rod and the limiting groove in the column of a single crystal growth furnace provided by an embodiment of the present application.

[0013] Reference numerals:

[0014] 11. Support member; 111. Limiting groove; 112. Limiting hole; 12. Sliding member; 13. Driving member;

[0015] 131. Threaded rod; 132. Gear disc; 133. Adjusting rod; 14. First adapter;

[0016] 15. Second adapter; 16. Driven rod. Detailed implementation manners

[0017] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0018] As Figure 1 shown, in an embodiment of the present application, the column of the single crystal growth furnace includes a support member 11, a sliding member 12 and a driving member 13.

[0019] The sliding member 12 is arranged at the top of the support member 11. The bottom of the sliding member 12 is inserted into the support member 11. The sliding member 12 is slidably connected to the support member 11.

[0020] The driving member 13 is arranged on the sliding member 12. The driving member 13 is inserted into the sliding member 12. The driving member 13 is threadedly connected to the sliding member 12.

[0021] In this embodiment, by starting the driving member 13 and using the threaded connection relationship between the driving member 13 and the sliding member 12, the sliding member 12 is moved, and based on the sliding connection relationship between the sliding member 12 and the support member 11, when the driving member 13 is started, the sliding member 12 slides relative to the support member 11, so that the overall length of the column formed by the sliding member 12 and the support member 11 is adjusted.

[0022] As Figure 2As shown, in an embodiment of the present application, a limiting groove 111 is formed on the support member 11, and the bottom of the sliding member 12 is inserted into the limiting groove 111. The sliding member 12 is slidably connected to the limiting groove 111.

[0023] In this embodiment, the limiting groove 111 is provided at the top of the support member 11, and the opening of the limiting groove 111 faces upward.

[0024] As Figure 2 shown, in an embodiment of the present application, the driving member 13 includes a threaded rod 131, a gear disk 132, and an adjusting rod 133.

[0025] The threaded rod 131 is rotatably arranged in the limiting groove 111. The threaded rod 131 is inserted into the sliding member 12. The threaded rod 131 is threadedly connected to the sliding member 12.

[0026] The gear disk 132 is arranged at the bottom of the threaded rod 131. The gear disk 132 is fixedly sleeved on the threaded rod 131.

[0027] The adjusting rod 133 is arranged at the bottom of the support member 11. The adjusting rod 133 is arranged on one side close to the gear disk 132. The adjusting rod 133 is rotatably connected to the support member 11. The adjusting rod 133 is in transmission cooperation with the gear disk 132.

[0028] In this embodiment, the bottom of the threaded rod 131 is rotatably connected to the bottom wall of the limiting groove 111, and the gear disk 132 is also arranged on one side close to the bottom wall of the limiting groove 111. Due to the connection relationship of the transmission cooperation between the adjusting rod 133 and the gear disk 132, when the adjusting rod 133 is rotated, the gear disk 132 will be driven to rotate, and then the threaded rod 131 will be driven to rotate.

[0029] As Figure 2 shown, in an embodiment of the present application, the adjusting rod 133 and the gear disk 132 are in transmission cooperation through a worm on the gear disk 132 and a worm gear on the adjusting rod 133.

[0030] As Figure 2 shown, in an embodiment of the present application, a first adapter 14 is fixedly connected to the top of the sliding member 12.

[0031] In this embodiment, the first adapter 14 is used to connect the sliding member 12 and the single crystal growth furnace located at the top of the sliding member 12 or to fix the position between the sliding member 12 and the single crystal growth furnace.

[0032] As Figure 2 shown, in an embodiment of the present application, a second adapter 15 is fixedly connected to the bottom of the support member 11.

[0033] In this embodiment, the second adapter 15 is used to fix the position between the support member 11 and the ground or other objects with a supporting function.

[0034] As Figure 2 to Figure 3 shown, in an embodiment of the present application, the cross-section of the sliding member 12 is circular, and the cross-section of the limiting groove 111 is also circular.

[0035] In this embodiment, the outer circumferential surface of the sliding member 12 is slidably connected to the circular inner wall of the limiting groove 111, so that when the sliding member 12 slides relative to the limiting groove 111, the inside of the limiting groove 111 is in a sealed state, which is used to prevent external dust and the like from entering the limiting groove 111 and affecting the sliding fit relationship between the sliding member 12 and the limiting groove 111.

[0036] As Figure 2 shown, in an embodiment of the present application, a plurality of driven rods 16 are further included.

[0037] A plurality of the driven rods 16 are provided. One end of each of the driven rods 16 is fixedly connected to the first adapter 14. The other end of each of the driven rods 16 is inserted into the support member 11.

[0038] In this embodiment, when the sliding member 12 slides relative to the limiting groove 111, the sliding member 12 drives a plurality of driven rods 16 to slide synchronously through the first adapter 14, and the moving direction of each of the driven rods 16 is the same as the moving direction of the sliding member 12. The axis of each of the driven rods 16 is parallel to the axis of the sliding member 12, so that the sliding member 12 has higher stability when sliding relative to the limiting groove 111.

[0039] As Figure 2 shown, in an embodiment of the present application, the plurality of driven rods 16 are arranged equidistantly along the circumferential direction of the sliding member 12.

[0040] As Figure 3 shown, in an embodiment of the present application, a plurality of limiting holes 112 are formed at the top of the support member 11. The number of the limiting holes 112 is the same as the number of the driven rods 16. One of the limiting holes 112 corresponds to one of the driven rods 16. One of the driven rods 16 is inserted into one of the limiting holes 112.

[0041] In this embodiment, the plurality of limiting holes 112 are also arranged equidistantly along the circumferential direction of the limiting groove 111, and the depth of each of the limiting holes 112 is the same as the depth of the limiting groove 111, and the axis of each of the limiting holes 112 is parallel to the axial direction of the limiting groove 111.

[0042] The technical features of the above-described embodiments can be combined arbitrarily, and there is no limitation on the execution order of each method step. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0043] The above-described embodiments only represent several implementation manners of the present application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A single crystal growth furnace column, characterized in that: The single crystal growth furnace column comprises: Supports; A sliding member, arranged on the top of the supporting member, the bottom of the sliding member is inserted into the supporting member, and the sliding member is slidably connected with the supporting member; The driving member is arranged on the sliding member, the driving member is inserted into the sliding member, and the driving member is threadedly connected to the sliding member.

2. The single crystal growth furnace column according to claim 1, characterized in that: The support member is provided with a limiting groove, the bottom of the sliding member is inserted into the limiting groove, and the sliding member is slidably connected with the limiting groove.

3. The single crystal growth furnace column according to claim 2, characterized in that: The driving member comprises: A threaded rod, rotatably disposed in the limiting groove, the threaded rod is inserted into the sliding member, and the threaded rod is threadedly connected to the sliding member; A gear plate is arranged at the bottom of the threaded rod, and the gear plate is fixedly sleeved on the threaded rod; An adjusting rod is arranged at the bottom of the supporting member, the adjusting rod is arranged at a side close to the gear plate, the adjusting rod is rotationally connected to the supporting member, and the adjusting rod is transmission-matched with the gear plate.

4. The single crystal growth furnace column according to claim 3, characterized in that: The adjusting rod and the gear plate are matched with each other through the worm wheel on the gear plate and the worm on the adjusting rod.

5. The single crystal growth furnace column according to claim 4, characterized in that: The top of the sliding member is fixedly connected with a first adapter member.

6. The single crystal growth furnace column according to claim 5, characterized in that: The bottom of the support member is fixedly connected with a second adapter member.

7. The single crystal growth furnace column according to claim 6, characterized in that: The cross section of the sliding member is circular, and the cross section of the limiting groove is also circular.

8. The single crystal growth furnace column according to claim 7, characterized in that: Also includes: The driven rods are arranged in plurality, one end of each of the driven rods is fixedly connected to the first adapter, and the other end of each of the driven rods is inserted into the support member.

9. The single crystal growth furnace column according to claim 8, characterized in that: The plurality of driven rods are arranged equidistantly along the circumferential direction of the sliding member.

10. The single crystal growth furnace column according to claim 9, characterized in that: A plurality of limiting holes are provided on the top of the support member, the number of the limiting holes is the same as the number of the driven rods, one limiting hole is provided corresponding to one driven rod, and one driven rod is inserted into one limiting hole.

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