Vacuum exhaust table

Abstract

The utility model relates to the field of device machining, in particular to a vacuum exhaust table which comprises a vacuum system, a bell jar structure and a lifting system. The bell jar structure comprises a furnace cover and a plurality of sectional furnace bodies; the lifting system is used for mounting the furnace cover and the plurality of sectional furnace bodies above the furnace bottom plate or removing the furnace cover and the plurality of sectional furnace bodies from the upper part of the furnace bottom plate; the vacuum system comprises an inner vacuum system and an outer vacuum system, the inner vacuum system is used for exhausting air in a processing device in the bell jar structure, and the outer vacuum system is used for vacuumizing in the bell jar structure. The processing requirements of large-sized devices can be met, and the processing of small and medium-sized devices is also considered through the combination of the furnace cover and different sectional furnace bodies; the requirement for the overall installation space of the exhaust table is effectively reduced, and the installation and use cost of the vacuum exhaust table is greatly reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of device processing, and more particularly, to a vacuum exhaust table. Background Art

[0002] With the rapid development of the electronics and semiconductor industries, the size and complexity of devices have been continuously increasing, posing higher requirements for processing technologies. In particular, the increase in the height and volume of devices has presented new challenges to existing vacuum exhaust tables. Traditional vacuum exhaust table designs are often targeted at devices within a specific size range, but with the advancement of device processing technologies, these devices are struggling to handle larger-sized devices. Summary of the Utility Model

[0003] The objective of the present disclosure is to provide a vacuum exhaust table that can effectively perform vacuum exhaust processing on larger-sized devices.

[0004] To achieve the above objective, the present disclosure provides a vacuum exhaust table, which includes a vacuum system, a bell jar structure, and a lifting system;

[0005] The bell jar structure includes a furnace lid and a plurality of segmented furnace bodies;

[0006] The lifting system is used to install the furnace lid and the plurality of segmented furnace bodies above the furnace bottom plate, or to remove the furnace lid and the plurality of segmented furnace bodies from above the furnace bottom plate;

[0007] The vacuum system includes an inner vacuum system and an outer vacuum system. The inner vacuum system is used for exhausting the inside of the processing device within the bell jar structure, and the outer vacuum system is used for evacuating the bell jar structure.

[0008] Optionally, each of the segmented furnace bodies and the furnace lid respectively includes a plurality of groups of support arms, and positioning holes are provided on the support arms;

[0009] The positioning holes are used for connecting with the positioning pins of the support of the lifting system.

[0010] Optionally, both the segmented furnace bodies and the furnace lid adopt a double-layer hollow structure, and at least one cooling water path that spirally ascends is provided in the double-layer hollow structure;

[0011] Water path quick connectors are provided at both ends of the cooling water path, and the water path quick connectors include check valves;

[0012] Wherein, when the water path quick connector is docked with another water path quick connector, the check valve opens to form a connected water path.

[0013] Optionally, sealing flange rings are provided at the upper and lower parts of each of the segmented furnace bodies, and at the lower part of the furnace cover;

[0014] The cooling water path at least passes through the position corresponding to the sealing flange ring.

[0015] Optionally, heat insulation screens are provided inside each of the segmented furnace bodies and the furnace cover, and the heat insulation screens are arranged in a stepped manner to form a closed thermal field.

[0016] Optionally, a plurality of temperature control thermocouples are provided at different heights inside the bell structure, and each temperature control thermocouple is independently powered and its power is independently adjustable.

[0017] Optionally, one temperature control thermocouple is provided on the top of the furnace cover and on the furnace bottom plate respectively;

[0018] One temperature control thermocouple is provided at the upper and lower parts of each of the segmented furnace bodies respectively.

[0019] Optionally, a detachable workpiece tray is provided on the furnace bottom plate, and the workpiece tray is used to support the processing device and / or the bracket of the processing device;

[0020] The furnace bottom plate is provided with a first exhaust gas pipeline and a second exhaust gas pipeline;

[0021] The first end of the first exhaust gas pipeline is used to connect to the middle part of the workpiece tray, and the first end of the second exhaust gas pipeline is used to connect to the edge part of the workpiece tray;

[0022] The second end of the first exhaust gas pipeline is used to connect to the inner vacuum system, and the second end of the second exhaust gas pipeline is used to connect to the outer vacuum system.

[0023] Optionally, the number of the segmented furnace bodies is greater than or equal to 5;

[0024] The height of the segmented furnace body is greater than or equal to 1400 mm, and the diameter is greater than or equal to 2000 mm.

[0025] By the above technical solution, the bell is set as a segmented structure, which can not only meet the processing requirements of large devices, but also, by controlling the lifting of the segmented furnace bodies and the furnace cover respectively, without the need for the overall lifting of the bell structure, reduces the requirements for the lifting scale of the lifting system, and thus effectively reduces the requirements for the overall installation space of the exhaust platform, and also takes into account the processing of medium and small devices, greatly reducing the installation and use costs of the vacuum exhaust platform.

[0026] Other features and advantages of the present disclosure will be described in detail in the subsequent detailed description section. Description of the Drawings

[0027] The accompanying drawings are used to provide a further understanding of the present disclosure, and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure, but do not constitute a limitation to the present disclosure. In the accompanying drawings:

[0028] Figure 1 is a schematic diagram of a vacuum exhaust table shown according to an exemplary embodiment.

[0029] Figure 2 is a side view schematic diagram of a segmented furnace body shown according to an example.

[0030] Figure 3 is a schematic diagram of a vacuum exhaust table shown according to another exemplary embodiment.

[0031] Description of Reference Numerals

[0032] 100 Exhaust table 110 Vacuum system

[0033] 120 Bell structure 130 Lifting system

[0034] 111 Inner vacuum system 112 Outer vacuum system

[0035] 121 Furnace cover 122 Segmented furnace body

[0036] 123 Furnace bottom plate 1221 Support arm

[0037] 1222 Positioning hole 1223 Suspension rod

[0038] 1224 Limit block structure Detailed Description of the Specific Embodiment

[0039] The following provides a detailed description of the specific embodiments of the present disclosure in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present disclosure, and are not used to limit the present disclosure.

[0040] It should be noted that when a component is referred to as "fixed to" or "disposed on" another component, it can be directly on the other component or there may also be an intermediate component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0041] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or mutual dependence relationship of the functions performed by these devices, modules or units.

[0042] Figure 1 is a schematic diagram of a vacuum exhaust table shown according to an exemplary embodiment. As Figure 1 shown, the exhaust table 100 includes a vacuum system 110, a bell structure 120, and a lifting system 130;

[0043] The bell structure 120 includes a furnace lid 121 and a plurality of segmented furnace bodies 122;

[0044] The lifting system 130 is configured to mount the furnace lid 121 and the plurality of segmented furnace bodies 122 above the furnace bottom plate 123, or to remove the furnace lid 121 and the plurality of segmented furnace bodies 122 from above the furnace bottom plate 123;

[0045] The vacuum system 110 includes an inner vacuum system 111 and an outer vacuum system 112. The inner vacuum system 111 is used for exhausting the inside of the processing device within the bell structure 120, and the outer vacuum system 112 is used for evacuating the bell structure 120.

[0046] In this embodiment, the bell can be a circular structure, that is, both the furnace lid 121 and the segmented furnace bodies 122 can be circular structures. For example, the furnace lid 121 can be an arc-shaped top, and the segmented furnace bodies 122 can be cylinders. The diameters of the furnace lid 121 and the segmented furnace bodies 122 can be the same, and the diameter of the furnace bottom plate 123 can be greater than that of the furnace lid 121 and the segmented furnace bodies 122, or can be equal to that of the furnace lid 121 and the segmented furnace bodies 122. The embodiments of the present disclosure do not limit this.

[0047] It can be understood that Figure 1 the exhaust table 100 shown can be the exhaust table in a working state or ready to enter the working state. For example Figure 1 the exhaust table 100 shown can be in the state after the processing device has been placed. After the staff places the processing device on the furnace bottom plate 123, they can control the lifting system 130 to sequentially install the segmented furnace bodies 122 and the furnace lid 121 to form a sealed processing area. After the processing of the processing device is completed, the furnace lid 121 and the segmented furnace bodies 122 in the bell structure 120 can be removed through the lifting system 130, so that the staff can more conveniently remove the processed device.

[0048] In addition, it should be understood that a furnace bottom frame can also be provided below the furnace bottom plate 123, which can be welded by square tubes and steel plates and is used to support the furnace bottom plate 123 and the bell structure 120. The square tubes can be channel steel or square steel, for example.

[0049] In some possible embodiments, each segmented furnace body 122 can be numbered, and during installation, the segmented furnace bodies 122 are installed in sequence according to their numbers. Moreover, when removing, each segmented furnace body 122 is placed at the corresponding position according to the number of the segmented furnace body 122.

[0050] In some possible embodiments, when processing a device, according to the size or height of the device, only some of the segmented furnace bodies 122 can be installed. For example, only 2 or 3 of the 5 segmented furnace bodies can be installed.

[0051] In some possible embodiments, the lifting system 130 is driven by a motor and a speed reducer, and the linear movement of the guide shaft can be achieved by rotating the lead screw, so that the lifting arm can move up and down. For example, the lifting system 130 adopts a double-section lead screw and smooth rod device, enabling the furnace body to automatically take over the lifting, ensuring that the furnace body is lifted smoothly and accurately to the predetermined position.

[0052] Those skilled in the art should know that during specific implementation, the exhaust table 100 and its components also include other parts. Figure 1 Only a small part related to the embodiments of the present disclosure is shown, and other necessary parts are not shown one by one. For example, the exhaust table 100 may further include a heating system for heating the devices inside the bell jar, a cooling system for cooling the bell jar, and so on.

[0053] In the embodiments of the present disclosure, setting the bell jar structure as a segmented structure can not only meet the processing requirements of large devices, but also, by separately controlling the lifting of the segmented furnace body and the furnace cover, there is no need to lift the bell jar structure as a whole, reducing the requirements for the lifting scale of the lifting system, and thus effectively reducing the requirements for the overall installation space of the exhaust table. It also takes into account the processing of medium and small devices, greatly reducing the installation and use costs of the vacuum exhaust table.

[0054] In some embodiments, each segmented furnace body 122 can also be provided with a limit block structure. For example, a protrusion is provided below the furnace body and a recess is provided at the corresponding position above the furnace body, or a protrusion is provided above the furnace body and a recess is provided at the corresponding position below the furnace body. This limit block structure can be used to ensure that the segmented furnace bodies 122 can be correctly connected.

[0055] In some embodiments, each segmented furnace body 122 can also be provided with a suspension rod (or suspension plate), which can be used to connect with a suspension rope. The segmented furnace body 122 can be hoisted near the center position of the lifting system 130 through the connection of the suspension rope, and the segmented furnace body 122 is lowered onto the support of the lifting system 130, so as to further lift the segmented furnace body 122 through the lifting system 130 to place the segmented furnace body 122 in place.

[0056] In some embodiments, each of the segmented furnace bodies 122 and the furnace cover 121 respectively includes multiple groups of support arms, and positioning holes are provided on the support arms; the positioning holes are used for connecting with the support pins of the lifting system 130.

[0057] Specifically, the support arms may be provided with positioning holes, which cooperate with the support pins at the top of the sliding rails on the lifting mechanism for connecting the lifting mechanism with the bell jar, ensuring that the furnace body can be accurately positioned.

[0058] Exemplarily, with reference to Figure 2 as shown, four groups of support arms 1221 may be installed on the outer wall of a segmented furnace body 122, positioning holes 1222 are provided on each support arm 1221, and four groups of suspension rods 1223 (or suspension plates). In addition, a plurality of limit block structures 1224 are further provided on the upper part of the segmented furnace body 122. Among them, Figure 2 is a side view schematic diagram of a segmented furnace body 122 shown according to an exemplary embodiment, and the view of the other side of the segmented furnace body 122 may be the same as the Figure 2 shown side view. It can be understood that Figure 2 only shows the parts involved in the lifting and installation process of the segmented furnace body 122. Devices or interfaces such as water-cooled electrodes, water-cooled interfaces, and motor interfaces may also be provided on the outer side surface of the segmented furnace body 122, which are not shown in Figure 2 here.

[0059] In some embodiments, the lifting system 130 may adopt a two-stage structure. For the segmented furnace body that needs to use the lower half of the lifting system 130, more support arms may be provided, so that when the lifting is switched from the upper half of the lifting system 130 to the lower half for lifting, the reliable connection of the lifting system 130 of the segmented furnace body 122 can still be ensured. Exemplarily, when a 5-stage furnace body is adopted, the number of support arms of the bottom furnace body can be designed to be more. For example, the 4th and 5th segments may be provided with 8 groups of support arms.

[0060] In some possible implementation manners, the support pins may be provided with corresponding sensors, and the sensors can be used to detect whether the positioning holes on the support arms are effectively connected with the support pins. The lifting system 130 can perform lifting control only when the positioning holes of the support arms are effectively docked with the support pins.

[0061] In some embodiments, both the segmented furnace body 122 and the furnace cover 121 adopt a double-layer hollow structure, and at least one cooling water channel spirally rising is arranged in the double-layer hollow structure;

[0062] Both ends of the cooling water channel are provided with water channel quick connectors, and the water channel quick connectors include one-way valves;

[0063] Wherein, when the waterway quick-plug connector is docked with another waterway quick-plug connector, the one-way valve is opened to form a connected waterway.

[0064] The inner wall of the furnace body and the furnace cover 121 can be made of SUS304L stainless steel, and the outer tube can be made of Q235-B carbon steel. Waterproof strips and waterproof rings are welded between the inner wall and the outer wall, and the interlayer is cooled by water.

[0065] It is understandable that when the furnace cover 121 or the segmented furnace body 122 is installed with another segmented furnace body 122, the water channel quick plug connector at the cooling water channel outlet of the lower segmented furnace body 122 can be connected with the water channel quick plug connector at the cooling water channel inlet of the upper segmented furnace body 122 or the furnace cover 121. On the contrary, if the furnace cover 121 or the segmented furnace body 122 is not installed, the one-way valve in the water channel quick plug connector thereon is closed, and a connected water channel cannot be formed.

[0066] Optionally, the cooling water path of the furnace body can adopt a dual cooling water path mode with two inlets and two outlets. The two water inlets can be respectively arranged on both sides of the furnace body. The cooling water enters from the lower side of the furnace body and is discharged from the upper side of the furnace body. The cooling water spirally circulates in the interlayer from bottom to top to fully cool all parts of the furnace body.

[0067] In some embodiments, the upper and lower parts of each of the segmented furnace bodies 122 and the lower part of the furnace cover 121 are provided with sealing flange rings;

[0068] The cooling water channel at least passes through a position corresponding to the sealing flange ring.

[0069] Optionally, the water channel quick connector can be arranged in the middle of the sealing flange ring. For example, a water channel quick connector installation hole can be arranged on the sealing flange ring, and when the sealing flange ring is installed on the furnace body or furnace cover 121, the installation hole can be aligned with the inlet and outlet of the cooling water channel and then installed, and the water channel quick connector can be further installed in the corresponding installation hole.

[0070] Optionally, a flange seal can be used between the furnace cover 121 and the first furnace body, and a large flange can be used to compress a vacuum rubber ring to seal between the furnace bodies. In order to prevent the rubber ring from aging when the temperature rises, water cooling protection can be used at the flange rubber rings on both sides.

[0071] In some embodiments, each of the segmented furnace bodies 122 and the furnace cover 121 is provided with a heat insulation screen, and the heat insulation screens are arranged in a stepped manner to form a closed thermal field.

[0072] Optionally, the heat shield may be fixed to the inner wall of the segmented furnace body 122 and the furnace cover 121. Optionally, a heat shield may also be provided on the furnace bottom plate 123.

[0073] In the above embodiments, the heat insulation screen inside the bell jar is designed into multiple segments, and the heat insulation screens are arranged in a stepped manner. Each segment of the heat insulation screen has a certain height difference relative to the adjacent lower segment, forming a stepped structure. This helps to reduce the heat dissipation from the high-temperature area to the low-temperature area, because each segment of the heat insulation screen can capture the heat escaping from the previous segment. Through the stepped design, the heat field is effectively enclosed inside the furnace body, reducing the heat dissipation to the external environment through the furnace wall. By reducing the heat dissipation, the stepped heat field enclosure method can improve the thermal efficiency of the furnace body and reduce the energy consumption. The segmented design also facilitates the maintenance and replacement of the heat insulation screen, because a certain part can be removed and replaced separately without replacing the entire heat insulation screen system.

[0074] In some embodiments, a plurality of temperature control thermocouples and a plurality of heaters are provided at different heights inside the bell jar structure 120, and each heater is independently powered and its power is independently adjustable.

[0075] Specifically, the heater and the temperature control thermocouple can be fixed on the bell jar structure 120, for example, fixed on the inner wall of the segmented furnace body 122. Among them, the heater can be located inside the heat insulation screen to heat the working area inside the bell jar structure 120. Optionally, the heater provided on the segmented furnace body 122 can be made by pressing ribs on both sides of a molybdenum strip. The temperature control thermocouple can pass through the heat insulation screen and the heater to detect the temperature of the working area inside the bell jar structure 120 when the exhaust furnace is working.

[0076] In some embodiments, one temperature control thermocouple and one heater are respectively provided on the top of the furnace cover 121 and on the furnace bottom plate 123;

[0077] One temperature control thermocouple and one heater are respectively provided on the upper and lower parts of each segmented furnace body 122.

[0078] Exemplarily, taking the number of segmented furnace bodies 122 equal to 5 as an example, 12 groups of heaters and temperature control thermocouples can be provided on the bell jar structure 120, among which, 10 groups are on the side, 1 group is at the bottom, and 1 group is at the top. The 10 groups on the side are respectively provided on 5 segmented furnace bodies 122, and two heaters are provided on each segmented furnace body 122, and these two heaters are respectively provided on the upper and lower parts of the furnace body. Optionally, the 12 groups of heaters can independently adjust their powers to achieve the possibility of the same temperature in 12 areas.

[0079] In one example, the total power of 12 groups of heaters is 290 kW, with a total of 12 temperature zones. The power distribution is as follows (from top to bottom): top heater 15 kW (1 temperature zone); 2 side heaters 1 with 55 kW (2 temperature zones); 3 side heaters 2 with 50 kW (2 temperature zones); 4 side heaters 3 with 40 kW (2 temperature zones); 5 side heaters 4 with 45 kW (2 temperature zones); 6 side heaters 5 with 55 kW (2 temperature zones); 7 bottom heater 30 kW (1 temperature zone).

[0080] In some embodiments, a detachable workpiece tray is provided on the furnace bottom plate 123, and the workpiece tray is used to support the processing device and / or the bracket of the processing device;

[0081] The furnace bottom plate 123 is provided with a first exhaust gas pipeline and a second exhaust gas pipeline;

[0082] The first end of the first exhaust gas pipeline is used to connect to the middle part of the workpiece tray, and the first end of the second exhaust gas pipeline is used to connect to the edge part of the workpiece tray;

[0083] The second end of the first exhaust gas pipeline is used to connect to the internal vacuum system 111, and the second end of the second exhaust gas pipeline is used to connect to the external vacuum system 112.

[0084] In some possible implementation manners, various evacuation nozzles, gauge nozzles, workpiece thermocouple interfaces, filament lead interfaces, 12-point temperature measurement interfaces, etc. can also be arranged on the furnace bottom plate 123.

[0085] In some embodiments, the number of the segmented furnace bodies 122 is greater than or equal to 5;

[0086] The height of the segmented furnace body 122 is greater than or equal to 1400 mm, and the diameter is greater than or equal to 2000 mm.

[0087] In some embodiments, the maximum lifting stroke of the lifting system 130 is greater than or equal to 7000 mm.

[0088] Optionally, the maximum lifting stroke of the lifting system can be determined based on the number and height of the segmented furnace bodies. For example, if the number of the segmented furnace bodies is equal to 5 and the height is equal to 1400 mm, then the maximum stroke of the lifting system can be equal to 7000 mm. When the number of the segmented furnace bodies is greater than 5, or the height is greater than 1400 mm, then the maximum stroke of the lifting system can be greater than 7000 mm.

[0089] To enable those skilled in the art to better understand the technical solutions provided by the present disclosure, the present disclosure also provides the following more specific embodiments:

[0090] Figure 3is a schematic diagram of a large vacuum exhaust table according to an exemplary embodiment. Figure 3 As shown, the bell jar of the exhaust table can adopt a circular structure, consisting of 5 straight sections of the furnace body and the furnace cover (i.e., bell jar 1 to bell jar 5), and a furnace bottom plate is also arranged below the bell jar 5, the inner vacuum system can be arranged below the furnace bottom plate, and the outer vacuum system can be arranged outside the furnace bottom plate. Among them, the bell jar of the exhaust table can have a diameter of 2590 mm and a height of 7560 mm, and the height of the lifting system can be 7560 mm, and the size of the heating zone in the bell jar can be greater than or equal to Φ2000mm×6500mm, for example, it can be Φ2250mm×6800mm.

[0091] In some embodiments, the exhaust platform may include a heating system, a cooling water system, a compressed air system, a nitrogen filling system, an electrical control system, etc. in addition to the bell jar (sections), furnace bottom plate, heat insulation screen and heater, internal vacuum system, external vacuum system, and lifting system.

[0092] In some embodiments, the furnace body and furnace cover adopt a double-layer hollow structure, the inner wall and flange are SUS304L, and the outer tube is Q235-B carbon steel; the water barrier strips and water barrier rings are welded inside, and the interlayer is cooled by water. The cooling water path of the furnace body adopts two inlets and two outlets, water enters from the bottom of the furnace body and is discharged from the upper side of the furnace body. The water spirally circulates in the interlayer from bottom to top, so that all parts of the furnace body are fully cooled.

[0093] Optionally, the water inlet and outlet of the furnace body adopt a unified water inlet pipe and water outlet pipe, and the cooling water of the furnace body and the cooling water of the heating electrode are both carried out through pipes. The water inlet pipe and the water outlet pipe are both installed with waterway quick plug connectors (with one-way valves at both ends), and when installing and disassembling the furnace body, the inlet and outlet waterways can be quickly installed and disassembled.

[0094] In some embodiments, multiple CF flange heating electrode interfaces (water cooling) are arranged on each section of the furnace body to control two independent heaters respectively. The heating electrode connection wire is led out to one side of the furnace body, separated from the water connection port, and a safety protection cover is installed at the heating electrode connection. Two temperature control thermocouples are installed at the upper and lower positions on the side of the furnace body to control the heating power of the two sections of heaters respectively.

[0095] In some embodiments, the furnace bottom plate is a stainless steel (SUS304L) flat hollow structure, which is cooled by water. Various vacuum pipes, gauge pipes, workpiece thermocouple interfaces, filament lead interfaces, 12-point temperature measurement interfaces, etc. are arranged on it. A stainless steel workpiece plate is installed on the furnace bottom plate to support the workpiece and the workpiece rack. The connection between the pipe and the base is as far as possible using a metal knife-edge seal. The filament lead has a load capacity of MAX50A, MAX60V, and can work stably for a long time. The number is two groups of four ceramic leads.

[0096] Optionally, there are 12 measuring thermocouple interfaces reserved on the base plate. 12 flexible thermocouples are inserted from the furnace bottom plate to measure the temperature of the workpiece in the constant temperature area inside the furnace. The thermocouple is a 2mm diameter armored flexible couple, which can be placed at any position of the workpiece. Whether the workpiece thermocouple participates in temperature control during operation can be manually selected. When participating in temperature control, temperature control intervention is carried out by setting the maximum temperature difference of the thermocouple.

[0097] Optionally, the base adopts a flat plate with a water jacket cooling method. The flat plate is provided with multiple layers of stainless steel insulation layers, and molybdenum wire heaters are arranged on the screen.

[0098] Optionally, a keel and a detachable stainless steel workpiece tray are installed above the base, which are used to support workpieces, workpiece racks, etc. The load capacity of the workpiece tray or the keel is ≥3t. When specifically designing, the problem of thermal deformation can be considered, and the design value should reserve redundancy as much as possible. The structural strength design of the base can fully consider the requirements of the furnace shell and thermal load-bearing.

[0099] Optionally, the main vacuum pipeline passes through the base plate and enters the furnace. There are two exhaust ports, located in the middle and at the edge of the workpiece tray. The workpiece tray is used to support the exhaust workpiece and its tooling bracket. The workpiece tray is detachable and is equipped with a supporting keel below, which directly supports the pipe fittings and tooling. Below the workpiece tray, the main vacuum exhaust system and the external vacuum exhaust system are connected through different vacuum pipelines. The exhaust pipe of the main vacuum exhaust system passes through the bottom plate of the loading table and is docked with the device exhaust pipe to exhaust the device. After the segmented bell jar is assembled, the external vacuum exhaust system exhausts the bell jar through the exhaust port below the loading table, so that the workpiece is baked under the conditions of internal and external double vacuum to thoroughly degas.

[0100] In some embodiments, a stainless steel heat insulation screen is provided inside the bell jar, which is divided into an upper heat insulation screen, a side heat insulation screen (5 sections), and a bottom heat insulation screen. The uppermost furnace cover is fixedly connected to the upper heat insulation screen, and the following sections of the bell jar are fixedly connected to the side heat insulation screen. The upper heat insulation screen and the side heat insulation screen move together with the furnace cover and the furnace body respectively. The bottom heat insulation screen is installed on the furnace bottom plate. Optionally, the bottom heat insulation screen can be detachable for easy installation and disassembly of the product, or the bottom heat insulation screen can also be fixed to the furnace bottom plate.

[0101] Optionally, a stepped thermal field enclosure method is adopted between the upper heat insulation screen and the side heat insulation screen, between the side heat insulation screens, and between the side heat insulation screen and the bottom heat insulation screen to minimize heat loss as much as possible.

[0102] Optionally, the side heaters are made of molybdenum strips, and the bottom heaters and top heaters are made of molybdenum wire wound around. They are insulated by porcelain parts. Due to the large surface load of the molybdenum heaters, they work stably and reliably for a long time.

[0103] The preferred embodiments of the present disclosure have been described in detail above in conjunction with the accompanying drawings. However, the present disclosure is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0104] In addition, it should be noted that, among the various specific technical features described in the above specific embodiments, without conflict, they can be combined in any appropriate manner. To avoid unnecessary repetition, the present disclosure will not separately describe various possible combination methods.

[0105] Furthermore, any combination can be made among various different embodiments of the present disclosure, as long as it does not violate the idea of the present disclosure, and it should also be regarded as the content disclosed by the present disclosure.

Claims

1. A vacuum exhaust table, characterized in that: The exhaust platform (100) comprises a vacuum system (110), a bell structure (120) and a lifting system (130); The bell jar structure (120) comprises a furnace cover (121) and a plurality of segmented furnace bodies (122); The lifting system (130) is used to install the furnace cover (121) and the multiple segmented furnace bodies (122) above the furnace bottom plate (123), or to remove the furnace cover (121) and the multiple segmented furnace bodies (122) from above the furnace bottom plate (123); The vacuum system (110) comprises an inner vacuum system (111) and an outer vacuum system (112); the inner vacuum system (111) is used for exhausting the inside of a processing device in the bell jar structure (120); and the outer vacuum system (112) is used for evacuating the inside of the bell jar structure (120).

2. The vacuum exhaust table according to claim 1, characterized in that: Each of the segmented furnace bodies (122) and the furnace cover (121) comprises a plurality of groups of support arms, and positioning holes are provided on the support arms; The positioning hole is used to connect with the support positioning pin of the lifting system (130).

3. The vacuum exhaust table according to claim 1, characterized in that: The segmented furnace body (122) and the furnace cover (121) both adopt a double-layer hollow structure, and at least one spirally ascending cooling water channel is provided in the double-layer hollow structure; Waterway quick-plug connectors are provided at both ends of the cooling waterway, and the waterway quick-plug connectors include a one-way valve; Wherein, when the waterway quick-plug connector is docked with another waterway quick-plug connector, the one-way valve is opened to form a connected waterway.

4. The vacuum exhaust table according to claim 3, characterized in that: The upper and lower parts of each segmented furnace body (122) and the lower part of the furnace cover (121) are provided with sealing flange rings; The cooling water channel at least passes through a position corresponding to the sealing flange ring.

5. The vacuum exhaust table according to claim 1, characterized in that: A heat insulation screen is provided inside each of the segmented furnace bodies (122) and the furnace cover (121), and the heat insulation screens are arranged in a stepped manner to form a closed thermal field.

6. The vacuum exhaust table according to claim 1, characterized in that: A plurality of temperature-controlled thermocouples and a plurality of heaters are arranged at different heights inside the bell jar structure (120), and each of the heaters is independently powered and has independently adjustable power.

7. The vacuum exhaust table according to claim 6, characterized in that: A temperature-controlling thermocouple and a heater are respectively arranged on the top of the furnace cover (121) and the furnace bottom plate (123); A temperature-controlling thermocouple and a heater are respectively arranged at the upper part and the lower part of each segmented furnace body (122).

8. The vacuum exhaust table according to claim 1, characterized in that: A detachable workpiece tray is arranged on the furnace bottom plate (123), and the workpiece tray is used to support the processing device and / or the support of the processing device; The furnace bottom plate (123) is provided with a first exhaust pipeline and a second exhaust pipeline; The first end of the first exhaust pipeline is used to be connected to the middle of the workpiece disk, and the first end of the second exhaust pipeline is used to be connected to the edge of the workpiece disk; The second end of the first exhaust pipeline is used to be connected to the internal vacuum system (111), and the second end of the second exhaust pipeline is used to be connected to the external vacuum system (112).

9. The vacuum exhaust table according to claim 1, characterized in that: The number of the segmented furnace bodies (122) is greater than or equal to 5; The height of the segmented furnace body (122) is greater than or equal to 1400 mm, and the diameter is greater than or equal to 2000 mm.

10. The vacuum exhaust table according to claim 1, characterized in that: The maximum lifting stroke of the lifting system (130) is greater than or equal to 7000 mm.

Images