Vacuum breaking device and vacuum drying equipment

Abstract

The utility model relates to a vacuum breaking device and vacuum drying equipment, which are used for carrying out vacuum breaking on a vacuum cavity, the vacuum breaking device comprises an air supply unit, a vacuum breaking unit and an anti-deflection assembly, the air supply unit is used for supplying air to the vacuum breaking unit, so that the vacuum breaking unit can break the vacuum state of the vacuum cavity, and the anti-deflection assembly is used for preventing deflection of the vacuum cavity. The air supply unit is further connected with the vacuum breaking unit through the anti-deflection assembly so that the air supply unit can be fixedly connected with the vacuum breaking unit. The air supply unit comprises an air supply pipe, the vacuum breaking unit comprises a connector assembly, and the anti-deflection assembly is connected with the air supply pipe and the connector assembly. The vacuum breaking unit can be limited in the installation process, so that position deviation of the vacuum breaking unit caused by mistaken touch of personnel or installation deviation is effectively avoided, collision between the vacuum breaking unit and the inner wall of the vacuum cavity is effectively avoided, and the service life of the vacuum breaking unit is prolonged. And interference between the vacuum breaking unit and the vacuum cavity in the closing process of the vacuum cavity can be avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum drying, in particular to a vacuum-breaking device and a vacuum drying equipment. Background Art

[0002] Vacuum drying equipment is widely used in industries such as semiconductors, liquid crystal displays, and batteries. Vacuum drying equipment utilizes the evaporation effect under low-pressure conditions. By creating a high-vacuum environment in the evaporation chamber, moisture and other liquids in an object are evaporated, thereby achieving the purpose of rapid drying and crystallization. Specifically, the coated substrate needs to be transferred into a Hot Vacuum Chamber Dryer (HVCD) for drying operations, so that the solvent in the coated slurry volatilizes and rapid crystallization is achieved. During the drying process, the gas in the vacuum chamber is extracted through the air extraction port of the vacuum cavity, causing the air pressure in the vacuum cavity to drop, and rapid crystallization is achieved. After crystallization is completed, before removing the substrate, a vacuum-breaking operation needs to be performed, and then the vacuum cavity is opened. Currently, nitrogen is filled into the vacuum cavity to break the vacuum. The vacuum-breaking assembly is assembled inside the vacuum cavity and is connected to the nitrogen connecting pipe through a connector to release nitrogen into the vacuum cavity.

[0003] The deficiency of the prior art is that the length of the vacuum-breaking assembly is usually long. During the assembly process, due to accidental contact by the operator or angular deviation during installation, the vacuum-breaking assembly will deflect relative to the nitrogen connecting pipe. When the end of the vacuum-breaking assembly rotates to the side wall and edge positions of the vacuum cavity, during the closing process of the vacuum cavity, the vacuum-breaking assembly will collide with the vacuum cavity, which will damage the vacuum cavity on the one hand and also damage the vacuum-breaking assembly on the other hand. Therefore, it is necessary to design a vacuum-breaking device that can be fixedly installed in the vacuum cavity to avoid interference during the closing process of the vacuum cavity. Summary of the Utility Model

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the deficiencies in the prior art and provide a vacuum-breaking device and a vacuum drying equipment that can limit the vacuum-breaking unit during the installation process, effectively avoid the collision between the vacuum-breaking unit and the inner wall of the vacuum cavity, and avoid interference between the vacuum-breaking unit and the vacuum cavity during the closing process of the vacuum cavity.

[0005] To solve the above technical problems, the utility model provides a vacuum-breaking device for breaking the vacuum of a vacuum cavity, including,

[0006] A gas supply unit, a vacuum-breaking unit, and an anti-deflection component. The gas supply unit is used to supply gas to the vacuum-breaking unit so that the vacuum-breaking unit can destroy the vacuum state of the vacuum chamber. The gas supply unit and the vacuum-breaking unit are also connected through the anti-deflection component so that the gas supply unit and the vacuum-breaking unit are fixedly connected.

[0007] In an embodiment of the present invention, the gas supply unit includes a gas supply pipe, the vacuum-breaking unit includes a joint assembly, and the anti-deflection component connects the gas supply pipe and the joint assembly.

[0008] In an embodiment of the present invention, the anti-deflection component includes a first connecting piece and a second connecting piece. The first connecting piece is fixedly connected to the gas supply pipe. One end of the second connecting piece is fixedly connected to the first connecting piece, and the other end of the second connecting piece is fixedly connected to the joint assembly.

[0009] In an embodiment of the present invention, the first connecting piece includes a fixing ring, and the fixing ring is sleeved on the gas supply pipe.

[0010] In an embodiment of the present invention, the second connecting piece includes a fixing plate. The fixing plate is fixedly connected to the first connecting piece and is also fixedly connected to the joint assembly.

[0011] In an embodiment of the present invention, the vacuum-breaking unit further includes a ventilation diffuser. One end of the joint assembly is connected to the ventilation diffuser, and the other end of the joint assembly is connected to the gas supply pipe. Gas flows through the gas supply pipe, the joint assembly, and the ventilation diffuser in sequence and is released to the vacuum chamber through the ventilation diffuser.

[0012] In an embodiment of the present invention, the joint assembly includes a body, a first port, and a second port. The first port is configured as the air inlet of the body and is connected to the gas supply pipe. The second port is configured as the air outlet of the body and is connected to the ventilation diffuser.

[0013] In an embodiment of the present invention, the gas supply unit further includes a mounting seat and a seal. The gas supply pipe is connected to the vacuum chamber through the mounting seat, and the seal is installed between the vacuum chamber and the mounting seat.

[0014] In an embodiment of the present invention, the gas supply unit further includes a solenoid valve. One end of the solenoid valve is connected to the gas supply end, and the other end of the solenoid valve is connected to the gas supply pipe.

[0015] In an embodiment of the present utility model, the gas supply unit further includes a filter, and the filter is located between the solenoid valve and the gas supply pipe. Wherein, one end of the filter is connected to the solenoid valve, and the other end of the filter is connected to the gas supply pipe.

[0016] The present utility model also provides a vacuum drying device, which includes a vacuum chamber and the vacuum-breaking device as described above. The vacuum chamber includes a first chamber and a second chamber that are movably connected, and the vacuum-breaking device is used to break the vacuum state of the vacuum chamber.

[0017] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0018] The vacuum-breaking device of the present utility model is provided with a gas supply unit, a vacuum-breaking unit, and an anti-deflection component. Among them, the gas supply unit is used to supply nitrogen to the vacuum-breaking unit so that the vacuum-breaking unit can break the vacuum state of the vacuum chamber. In addition, the gas supply unit and the vacuum-breaking unit are also fixedly connected through the anti-deflection component. Thus, during the assembly process, the angle and position of the vacuum-breaking unit can be fixed to achieve limit, and it can effectively avoid the position deviation of the vacuum-breaking unit. The present utility model can limit the vacuum-breaking unit during the installation process. In this way, it can effectively avoid the position deviation of the vacuum-breaking unit caused by human accidental touch or installation deviation, thereby effectively avoiding the collision between the vacuum-breaking unit and the inner wall of the vacuum chamber, and avoiding the interference between the vacuum-breaking unit and the vacuum chamber during the closing process of the vacuum chamber. Description of the Drawings

[0019] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to the specific embodiments of the present utility model and in conjunction with the drawings, where:

[0020] Figure 1 is the overall structural schematic diagram of the vacuum drying device in the preferred embodiment of the present utility model.

[0021] Figure 2 is the structural schematic diagram of the vacuum chamber in the non-covered state in the preferred embodiment of the present utility model.

[0022] Figure 3 is the overall structural schematic diagram of the vacuum-breaking device in the preferred embodiment of the present utility model.

[0023] Figure 4 is the partial structural schematic diagram of the mounting seat, joint assembly, ventilation diffuser, gas supply pipe, and second connecting piece of the vacuum-breaking device in the preferred embodiment of the present utility model.

[0024] Description of the reference numerals in the drawings: 1. Vacuum chamber; 11. First chamber; 12. Second chamber; 2. Gas supply unit; 20. Gas supply pipe; 21. Mounting seat; 22. Seal; 23. Solenoid valve; 24. Filter; 3. Vacuum-breaking unit; 30. Connector assembly; 300. Body; 301. First port; 302. Second port; 31. Ventilation diffuser; 4. Anti-deflection assembly; 41. First connecting member; 42. Second connecting member. Detailed implementation manners

[0025] The present utility model will be further described below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the embodiments cited do not limit the present utility model.

[0026] Embodiment 1

[0027] Refer to Figure 1 and Figure 3 As shown, the present utility model discloses a vacuum-breaking device for breaking the vacuum of a vacuum chamber 1. The vacuum-breaking device includes a gas supply unit 2, a vacuum-breaking unit 3 and an anti-deflection assembly 4. The gas supply unit 2 is used to supply gas to the vacuum-breaking unit 3 so that the vacuum-breaking unit 3 can release gas into the vacuum chamber 1, thereby destroying the vacuum state of the vacuum chamber 1.

[0028] Specifically, the gas supply unit 2 and the vacuum-breaking unit 3 are also connected by the anti-deflection assembly 4 so that the gas supply unit 2 and the vacuum-breaking unit are fixedly connected.

[0029] It can be seen from this that the vacuum-breaking device to be protected by the present utility model is provided with a gas supply unit, a vacuum-breaking unit and an anti-deflection assembly. Among them, the gas supply unit is used to supply nitrogen to the vacuum-breaking unit so that the vacuum-breaking unit can break the vacuum state of the vacuum chamber. In addition, the gas supply unit and the vacuum-breaking unit are also fixedly connected through the anti-deflection assembly. Thus, during the assembly process, the angle and position of the vacuum-breaking unit can be fixed to achieve limiting, and the position deviation of the vacuum-breaking unit can be effectively avoided. The present utility model can limit the vacuum-breaking unit during the installation process. In this way, it can effectively avoid the position deviation of the vacuum-breaking unit caused by human accidental touch or installation deviation, thereby effectively avoiding the collision between the vacuum-breaking unit and the inner wall of the vacuum chamber, and avoiding the interference between the vacuum-breaking unit and the vacuum chamber during the closing process of the vacuum chamber.

[0030] Furthermore, as shown in Figure 3 the gas supply unit 2 includes a gas supply pipe 20, the vacuum-breaking unit 3 includes a connector assembly 30, and the anti-deflection assembly 4 connects the gas supply pipe 20 and the connector assembly 30.

[0031] Further, according to Figure 3 and Figure 4 shown, the anti-deflection assembly 4 includes a first connecting member 41 and a second connecting member 42. The first connecting member 41 is fixedly connected to the air supply pipe 20. One end of the second connecting member 42 is fixedly connected to the first connecting member 41, and the other end of the second connecting member 42 is fixedly connected to the joint assembly 30.

[0032] Preferably, referring to Figure 3 shown, the first connecting member 41 includes, but is not limited to, a fixing ring, and the fixing ring is sleeved on the air supply pipe 20. The fixing ring is a split D-shaped cutting style fixing ring. In detail, the inner diameter of the fixing ring is the same as the outer diameter of the air supply pipe 20.

[0033] Specifically, in combination with Figure 3 seen, the second connecting member 42 includes, but is not limited to, a fixing plate. The fixing plate is fixedly connected to the first connecting member 41. At the same time, the fixing plate is also fixedly connected to the joint assembly 30. With such a setting, the joint assembly 30 and the air supply pipe 20 can be rigidly connected through the first connecting member 41 and the second connecting member 42.

[0034] In detail, during the assembly process, the fixing ring is sleeved on a suitable position of the air supply pipe 20, and the fixing plate is installed on the fixing ring; the fixing plate is provided with mounting holes, and by assembling locking screws and locking nuts into the mounting holes, the fixing plate is locked with the fixing ring and the joint assembly 30. Among them, the locking nut can play a role in preventing loosening.

[0035] As Figure 1 , Figure 3 and Figure 4 shown, the vacuum-breaking unit 3 further includes a ventilation diffuser 31. One end of the joint assembly 30 is connected to the ventilation diffuser 31, and the other end of the joint assembly 30 is connected to the air supply pipe 20. With such a setting, gas can flow through the air supply pipe 20, the joint assembly 30, and the ventilation diffuser 31 in sequence, and is released to the vacuum chamber 1 through the ventilation diffuser 30.

[0036] Furthermore, in combination with Figure 4As shown, the joint assembly 30 includes a body 300, a first port 301, and a second port 302. Among them, the first port 301 is configured as the air inlet of the body 300, and the first port 301 is connected to the air supply pipe 20; the second port 302 is configured as the air outlet of the body 300, and the second port 302 is connected to the ventilation diffuser 31. In this way, when breaking the vacuum of the vacuum chamber 1, gas can enter the first port 301 through the air supply pipe 20, pass through the body 300 and be discharged to the ventilation diffuser 31 via the second port 302, thereby realizing the rapid diffusion of gas in the vacuum chamber 1.

[0037] Furthermore, in order to facilitate the stable assembly of the air supply pipe 20 to the vacuum chamber 1, the air supply unit 2 further includes a mounting seat 21 and a seal 22. The air supply pipe 20 is fixedly assembled to the vacuum chamber 1 through the mounting seat 21, and the seal 22 is installed between the vacuum chamber 1 and the mounting seat 21. The seal 22 includes, but is not limited to, an O-ring.

[0038] Specifically, the air supply unit 2 further includes a solenoid valve 23. One end of the solenoid valve 23 is connected to the gas supply end to control the opening and closing of the gas supply end, and the other end of the solenoid valve 23 is connected to the air supply pipe 20.

[0039] According to Figure 3 As shown, the air supply unit further includes a filter 24. The filter 24 is located between the solenoid valve 23 and the air supply pipe 20. Among them, one end of the filter 24 is connected to the solenoid valve 23, and the other end of the filter 24 is connected to the air supply pipe 20. Thus, after the solenoid valve 23 is opened, gas can first pass through the filter 24 for filtration and then enter the vacuum chamber 1 through the air supply pipe 20 to ensure that the gas has good cleanliness.

[0040] Embodiment 2

[0041] The present utility model also discloses a vacuum drying device, including a vacuum chamber 1 and a vacuum-breaking device as described in Embodiment 1. Referring to Figure 1 and Figure 2 As shown, among them, the vacuum chamber 1 includes a first chamber 11 and a second chamber 12 that are movably connected, and the vacuum-breaking device is used to break the vacuum state of the vacuum chamber 1.

[0042] It can be known therefrom that the vacuum drying device adopting the above-mentioned vacuum-breaking device can effectively limit the deflection of the vacuum-breaking unit in the vacuum-breaking device, avoid interference and collision caused by the deflection of the vacuum-breaking unit, and thus effectively protect the vacuum-breaking device and the vacuum chamber.

[0043] When vacuum drying operation is required, the vacuum chamber 1 is in a vacuum state. At this time, the first chamber 11 and the second chamber 12 are buckled. When the drying is completed and the substrate located in the vacuum chamber 1 needs to be removed, the first chamber 11 and the second chamber 12 are separated at this time to facilitate the removal of the substrate.

[0044] Specifically, in combination with Figure 1 and Figure 3 As shown, the second chamber 12 has a mounting hole. The air supply pipe 20 of the vacuum-breaking device is assembled to the second chamber 12 through the mounting hole and can be fixed to the second chamber through the base 21. One end of the joint assembly 30 is connected to the air supply pipe 20, and the other end of the joint assembly 30 is connected to the ventilation diffuser 31. When the first chamber 11 and the second chamber 12 are buckled, both the joint assembly 30 and the ventilation diffuser 31 are located in the closed space of the vacuum chamber 1.

[0045] In the description of the embodiments of the present invention, it should also be noted that unless otherwise clearly defined and limited, if the terms "set" and "connect" are used, they should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0046] In the description of the present invention, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise clearly and specifically defined.

[0047] In the present invention, unless otherwise clearly defined and limited, the terms "install", "connect", "join", "fix" and other terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0048] Obviously, the above embodiments are merely examples for clear illustration and not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation manners here. And the obvious changes or modifications derived therefrom still fall within the protection scope of the creation of the present utility model.

Claims

1. A vacuum breaking device, used to break the vacuum in the vacuum chamber, characterized in that: include, An air supply unit, a vacuum breaking unit and an anti-deflection component, wherein the air supply unit is used to supply air to the vacuum breaking unit so that the vacuum breaking unit can destroy the vacuum state of the vacuum chamber, and the air supply unit and the vacuum breaking unit are also connected through the anti-deflection component so that the air supply unit and the vacuum breaking unit are fixedly connected.

2. The vacuum breaking device according to claim 1, characterized in that: The air supply unit includes an air supply pipe, the vacuum breaking unit includes a joint assembly, and the anti-deflection assembly connects the air supply pipe and the joint assembly.

3. The vacuum breaking device according to claim 2, characterized in that: The anti-deflection assembly includes a first connecting member and a second connecting member, the first connecting member is fixedly connected to the air supply pipe, one end of the second connecting member is fixedly connected to the first connecting member, and the other end of the second connecting member is fixedly connected to the joint assembly.

4. The vacuum breaking device according to claim 3, characterized in that: The first connecting member comprises a fixing ring, and the fixing ring is sleeved on the air supply pipe.

5. The vacuum breaking device according to claim 3 or 4, characterized in that: The second connecting member includes a fixing plate, the fixing plate is fixedly connected to the first connecting member, and the fixing plate is also fixedly connected to the joint assembly.

6. The vacuum breaking device according to claim 2, characterized in that: The vacuum breaking unit also includes a ventilation diffuser, one end of the joint assembly is connected to the ventilation diffuser, and the other end of the joint assembly is connected to the air supply pipe. The gas flows through the air supply pipe, the joint assembly and the ventilation diffuser in sequence, and is released into the vacuum chamber through the ventilation diffuser.

7. The vacuum breaking device according to claim 6, characterized in that: The joint assembly includes a body, a first port and a second port, wherein the first port is configured as an air inlet of the body and is connected to the air supply pipe; the second port is configured as an air outlet of the body and is connected to the ventilation diffuser.

8. The vacuum breaking device according to claim 1, characterized in that: The air supply unit further comprises a mounting seat and a sealing member, the air supply pipe is connected to the vacuum chamber through the mounting seat, and the sealing member is installed between the vacuum chamber and the mounting seat.

9. The vacuum breaking device according to claim 1, characterized in that: The gas supply unit further includes a solenoid valve, one end of which is connected to the gas supply end, and the other end of which is connected to the gas supply pipe.

10. The vacuum breaking device according to claim 9, characterized in that: The air supply unit further includes a filter, and the filter is located between the solenoid valve and the air supply pipe, wherein one end of the filter is connected to the solenoid valve, and the other end of the filter is connected to the air supply pipe.

11. Vacuum drying equipment, characterized in that: It comprises a vacuum cavity and a vacuum breaking device as described in any one of claims 1 to 10, wherein the vacuum cavity comprises a first cavity and a second cavity which are movably connected, and the vacuum breaking device is used for destroying the vacuum state of the vacuum cavity.

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