Probe card automatic debugging equipment

Abstract

The utility model provides an automatic debugging device for a probe card, which comprises a workbench, a probe card platform, a multi-axis moving module and a visual detection module, the visual detection module is used for detecting the bending state of a probe in the probe card, and the probe adjusting module is used for adjusting the bending state of the probe. The probe adjusting module comprises a probe adjusting rod and a probe adjusting moving assembly used for driving the probe adjusting rod to move, the tail end of the probe adjusting rod is provided with a probe adjusting hole allowing the probe to stretch in, and the visual detection module and the probe adjusting module are both connected to the motion output end of the multi-axis moving module. The probe card automatic debugging device provided by the utility model can automatically debug the bending state of the probe without manual adjustment, thereby improving the efficiency and accuracy of probe adjustment.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor testing, and more specifically, relates to a probe card automatic debugging device. Background Art

[0002] In the production process of a CMOS image sensor (abbreviated as CIS), after wafer manufacturing is completed, wafer testing is required. Wafer testing is to perform pin testing on each die on the wafer. A probe card is set on the testing device to contact the contacts on the die, and its electrical characteristics are tested. Furthermore, abnormal dies on the wafer can be detected before packaging, thereby reducing the packaging cost and improving the yield of subsequent testing.

[0003] The pin positions of the probe card need to be regularly maintained and debugged to ensure the stability of the probe card when testing the wafer. Usually, the probe card is manually adjusted under a microscope using a manual debugging fixture. However, due to the large number of probes, the debugging time is too long and the debugging efficiency is too low, which affects the production progress. In addition, personnel are prone to visual fatigue during long-term debugging, resulting in debugging deviations. Summary of the Utility Model

[0004] The purpose of the embodiment of the utility model is to provide a probe card automatic debugging device to solve the technical problems of low debugging efficiency and easy debugging deviation caused by manual debugging of the probe card in the prior art.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is: to provide a probe card automatic debugging device, including:

[0006] A workbench;

[0007] A probe card platform for placing the probe card;

[0008] A multi-axis movement module, at least used to move the vision detection module and the needle adjustment module;

[0009] A vision detection module for detecting the bending state of the probes in the probe card;

[0010] A needle adjustment module for adjusting the bending state of the probes. The needle adjustment module includes a needle adjustment rod and a needle adjustment movement component for driving the needle adjustment rod to move. The end of the needle adjustment rod has a needle adjustment hole for the probe to extend into;

[0011] The probe card platform and the multi-axis movement module are both arranged on the workbench, and the vision detection module and the needle adjustment module are both connected to the movement output end of the multi-axis movement module.

[0012] In the above solution, the probe card automatic debugging device includes a multi-axis movement module and a probe card platform arranged on the workbench. Both the vision detection module and the needle adjustment module can be moved by the multi-axis movement module to be directly opposite to the probe to be adjusted on the probe card platform. After the vision detection module detects and calculates the bending state of the probe, the needle adjustment rod of the needle adjustment module is moved to be directly opposite to the probe, and the probe is inserted into the needle adjustment hole. The needle adjustment rod is moved by the needle adjustment movement component, thereby adjusting the bending state of the probe. Therefore, the probe card automatic debugging device can automatically debug the bending state of the probe without manual adjustment, thereby improving the efficiency and accuracy of probe adjustment.

[0013] Optionally, the needle adjustment movement component includes a first driver for driving the needle adjustment rod to move in a first direction and a second driver for driving the needle adjustment rod to move in a second direction. The motion output end of the first driver is connected to the second driver, and the motion output end of the second driver is connected to the needle adjustment rod. The first direction and the second direction are perpendicular to each other.

[0014] In the above solution, through the setting of the first driver and the second driver, the movement of the needle adjustment rod in the first direction and the second direction can be realized, thereby realizing the adjustment of the bending state of the probe.

[0015] Optionally, the needle adjustment movement component further includes a slide rail and a slider slidably arranged on the slide rail. The motion output end of the first driver is fixedly connected to the slider. The sliding direction of the slider is the first direction, and the second driver is fixed on the slider.

[0016] In the above solution, through the mutual cooperation of the slider and the slide rail, the movement of the second driver and the needle adjustment rod in the first direction can be guided, making the movement of the second driver and the needle adjustment rod more stable and the probe debugging accuracy higher. Moreover, the setting of the slider provides an installation position for the second driver and makes the relative position between the first driver and the second driver more flexible.

[0017] Optionally, the needle adjustment module further includes a first fixing frame connected to the motion output end of the multi-axis movement module. One end of the needle adjustment rod is floatingly arranged on the first fixing frame, and the other end of the needle adjustment rod is driven by the needle adjustment movement component.

[0018] In the above solution, through the setting of the first fixing frame, the needle adjustment rod and the needle adjustment movement component are both installed on the first fixing frame, making the needle adjustment module form an integral body. One end of the needle adjustment rod is floatingly supported by the first fixing frame and the other end is driven by the needle adjustment movement component, which can make the needle adjustment rod more stable during the movement and avoid the needle adjustment rod from being skewed.

[0019] Optionally, the first fixing frame includes a first fixing plate, a second fixing plate arranged at intervals, and a first back plate connecting the first fixing plate and the second fixing plate. The first fixing plate is provided with a first through hole for the needle adjusting rod to pass through. A floating joint is arranged between the first through hole and the needle adjusting rod. The needle adjusting movement assembly is fixed to the second fixing plate.

[0020] In the above solution, through the arrangement of the first fixing plate and the second fixing plate, the needle adjusting rod and the needle adjusting movement assembly are respectively installed, and the needle adjusting module is reasonably arranged.

[0021] Optionally, the vision detection module includes a second fixing frame, a camera, a lens barrel, and a light source. The camera and the lens barrel are both fixed to the second fixing frame, and the camera and the lens barrel are coaxially arranged. The light source is arranged on the side of the lens barrel.

[0022] In the above solution, by arranging the light source on the side of the lens barrel, phenomena such as glare and ghosting in the captured image can be reduced, and the capture quality can be improved.

[0023] Optionally, a clip assembly for fixing the probe card is arranged on the probe card platform. The clip assembly includes a positioning pin inserted into the probe card platform and a fixing clip fixed to the probe card platform. The positioning pin includes a first positioning post, a second positioning post, and a crimping plate connecting the first positioning post and the second positioning post. The first positioning post is used to extend into the probe card platform, the second positioning post is used to extend into the probe card, one end of the crimping plate is used to press the edge of the probe card, and the other end of the crimping plate is tightly fixed by the fixing clip.

[0024] In the above solution, through the cooperation of the positioning pin and the fixing clip, the probe card can be both positioned and tightly positioned. Only a second positioning hole needs to be opened on the probe card, and no other matching structures need to be provided on the probe card. The fixing clip does not directly contact the probe card and will not damage the probe card.

[0025] Optionally, the probe card automatic debugging device further includes a cross beam structure arranged on the workbench. The multi-axis movement module includes a first movement component, a second movement component, and two third movement components. The first movement component can output movement in a first direction and is arranged on the workbench. The probe card platform is connected to the movement output end of the first movement component. The second movement component can output movement in a second direction and is arranged on the cross beam structure. The third movement component is connected to the movement output end of the second movement component. The third movement component can output movement in a third direction. The multi-axis movement module and the vision detection module are respectively arranged at the movement output ends of the two third movement components. The first direction, the second direction, and the third direction are perpendicular to each other in pairs.

[0026] In the above solution, by setting the probe card platform at the motion output end of the first moving component, and the first moving component and the second moving component are respectively and independently arranged on the workbench and the crossbeam structure, the movements of the first moving component and the second moving component are relatively independent, the load requirement for the first moving component is small, and there is no error accumulation during movement, and the structure is simpler.

[0027] Optionally, the probe card automatic debugging device further includes a casing structure covering the workbench and a fan filter component arranged on the casing structure. An accommodation space is formed between the casing structure and the workbench, and the probe card platform is arranged in the accommodation space.

[0028] In the above solution, through the setting of the casing structure, the modules in the device can be protected and it has a dust-proof function. The fan filter component is arranged on the casing structure, so that the air enters the accommodation space after being filtered and the filtered clean air is output to ensure that no a large amount of floating dust is introduced during the adjustment process of the probe card.

[0029] Optionally, the probe card automatic debugging device further includes a base, the workbench is arranged on the base, and a horizontal adjustment structure is arranged between the workbench and the base, and the horizontal adjustment structure is used to adjust the levelness of the probe card platform.

[0030] In the above solution, through the setting of the horizontal adjustment structure, the levelness of the workbench can be adjusted, and then the probe card platform and the probe card can be kept horizontal to ensure the probe adjustment accuracy.

[0031] The beneficial effect of the probe card automatic debugging device provided by the present utility model is that: compared with the prior art, the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present utility model, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0033] Figure 1 It is a three-dimensional structure diagram of the probe card automatic debugging device provided by the embodiment of the present utility model;

[0034] Figure 2 It is an internal structure diagram of the probe card automatic debugging device provided by the embodiment of the present utility model;

[0035] Figure 3The three-dimensional structure diagram of the needle adjustment module provided by the embodiment of the present utility model;

[0036] Figure 4 The cross-sectional view of the needle adjustment module provided by the embodiment of the present utility model;

[0037] Figure 5 The three-dimensional structure diagram of the vision detection module provided by the embodiment of the present utility model;

[0038] Figure 6 The partial structure diagram of the embodiment of the present utility model at the clamping component;

[0039] Figure 7 The exploded structure diagram of the clamping component of the embodiment of the present utility model;

[0040] Figure 8 The three-dimensional structure diagram of the fixed clamp provided by the embodiment of the present utility model;

[0041] Figure 9 The three-dimensional structure diagram of the first moving component provided by the embodiment of the present utility model;

[0042] Figure 10 The exploded structure diagram of the first moving component provided by the embodiment of the present utility model;

[0043] Figure 11 The three-dimensional structure diagram of the third moving component provided by the embodiment of the present utility model;

[0044] Figure 12 The partial structure diagram of the third moving component provided by the embodiment of the present utility model (the transition plate is hidden).

[0045] Among them, the reference numerals in the figure are as follows:

[0046] 11 - Workbench; 12 - Beam structure; 13 - Housing structure; 131 - Door body; 14 - Fan filter assembly; 15 - Base; 16 - Horizontal adjustment structure;

[0047] 20 - Probe card platform; 21 - First positioning hole;

[0048] 30 - Probe card; 31 - Second positioning hole;

[0049] 40 - Multi - axis moving module; 41 - First moving component; 411 - First motor; 412 - First lead screw; 413 - First nut block; 414 - First mounting bracket; 4141 - Mounting base plate; 4142 - Lead screw bracket; 4143 - Cover plate; 4144 - Connecting block; 415 - First guide rail; 42 - Second moving component; 43 - Third moving component; 431 - Third motor; 432 - Driving gear; 433 - Driving rack; 434 - Third guide rail; 435 - Transition plate; 436 - Third mounting bracket; 437 - Third guide block;

[0050] 50 - Vision detection module; 51 - Camera; 52 - Lens barrel; 53 - Light source; 54 - Second fixing bracket; 541 - Third fixing plate; 542 - Fourth fixing plate; 543 - Second back plate;

[0051] 60 - Needle adjustment module; 61 - Needle adjustment moving component; 611 - First driver; 612 - Second driver; 613 - Slide block; 6131 - Connecting arm; 6132 - Slide block body; 614 - Slide rail; 62 - Needle adjustment rod; 63 - First fixing bracket; 631 - First fixing plate; 6311 - First through - hole; 632 - Second fixing plate; 6321 - Second through - hole; 633 - First back plate; 64 - Floating joint; 65 - Height measurement sensor;

[0052] 70 - Clamping component; 71 - Fixed clamp; 711 - Mounting plate; 712 - First rotating frame; 7121 - Clamping seat; 7122 - Spring frame; 7123 - Spring; 713 - Second rotating frame; 7131 - Crimping beam; 7132 - Limiting beam; 72 - Positioning pin; 721 - First positioning column; 722 - Second positioning column; 723 - Crimping plate; 7231 - Groove. Detailed implementation manners

[0053] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0054] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0055] It should be understood that the orientation or positional relationship indicated by terms such as "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0056] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more, unless otherwise specifically defined.

[0057] Wafer testing is to perform pin testing on each die on the wafer. A probe card is set on the testing device to contact the contacts on the die and test its electrical characteristics. Thus, abnormal dies on the wafer can be detected before packaging, thereby reducing the packaging cost and improving the yield of subsequent testing.

[0058] The pin positions of the probe card 30 need to be regularly maintained and adjusted to ensure the stability of the probe card 30 during wafer testing. Usually, the probe card 30 is manually adjusted under a microscope using a manual debugging fixture. However, due to the large number of probes, it will lead to too long debugging time and too low debugging efficiency, which affects the production progress. In addition, personnel are prone to visual fatigue during long-term debugging, resulting in debugging deviations. Moreover, it is difficult to control the force of people. The probes are extremely thin metals, and it is easy to cause excessive bending if not careful. Therefore, the accuracy of manual adjustment is relatively low.

[0059] To solve the above technical problems, the present utility model proposes an automatic debugging setting for a probe card, which includes a workbench 11, a probe card platform 20, a visual detection module 50, a multi-axis movement module 40, and a needle adjustment module 60. The visual detection module 50 moves above the probe card platform 20 under the operation of the multi-axis movement module 40, and is disposed opposite to the probes to be debugged on the probe card 30, performs visual detection on the probes to obtain the bending states of the probes, and then adjusts the probes through the needle adjustment module 60, thereby realizing the automatic debugging of the probes. There is no need to use manual debugging of the probes, which can improve the debugging efficiency. Moreover, the displacement of the automatically controlled needle adjustment module 60 is accurate, and the accuracy of needle adjustment is higher.

[0060] Now, the automatic debugging device for the probe card provided by the embodiments of the present utility model will be described.

[0061] Please refer to Figures 1 to 3, the probe card automatic debugging device includes a workbench 11, a probe card platform 20, a multi-axis movement module 40, a vision detection module 50, and a needle adjustment module 60.

[0062] The workbench 11 is the basic platform of the device and generally has an installation plane. Most of the core components are arranged on the workbench 11. Specifically, both the probe card platform 20 and the multi-axis movement module 40 are arranged on the workbench 11 and supported by the workbench 11.

[0063] The probe card platform 20 is arranged on the workbench 11. The probe card platform 20 is used to place the probe card 30 so that the probe card 30 can be detected in a stable state. The probe card 30 has a plurality of probes arranged in sequence. One end of the probe is fixed to the probe card 30, and the other end is arranged upward, which can be arranged vertically upward or inclined upward.

[0064] The vision detection module 50 is used to detect the bending state of the probes in the probe card 30. The vision detection module 50 generally detects the bending state of the probes by means of photographing and uploading and software calculation. Among them, the bending state of the probes can refer to the bending angle of the probes relative to the vertical direction.

[0065] The needle adjustment module 60 is used to adjust the bending state of the probes. After the vision detection module 50 detects the bending state of the probes, if there is a difference from the predetermined bending state, the needle adjustment module 60 needs to be used for adjustment, otherwise no adjustment is required. The needle adjustment module 60 includes a needle adjustment rod 62 and a needle adjustment movement component 61. The end of the needle adjustment rod 62 has a needle adjustment hole for the probe to extend into. After the probe extends into the needle adjustment hole, the needle adjustment movement component 61 can drive the needle adjustment rod 62 to move to adjust the bending state of the probes. The movement output end of the needle adjustment movement component 61 is connected to the needle adjustment rod 62.

[0066] The multi-axis movement module 40 can achieve multi-axis movement, for example, it can achieve movement in two perpendicular directions. The multi-axis movement module 40 is at least used to move the vision detection module 50 and the needle adjustment module 60 so that both the vision detection module 50 and the needle adjustment module 60 can be directly opposite to the probes to be debugged on the probe card 30.

[0067] When the probe card automatic debugging equipment is working, the probe card 30 is first placed on the probe card platform 20, and the visual inspection module 50 is made to face the probe to be debugged through the multi-axis moving module 40. The visual inspection module 50 takes a picture of the probe to be debugged, and calculates the bending state of the probe to be debugged through software analysis, compares the current bending state of the probe with the predetermined bending state, calculates the adjustment path, and then moves the needle adjustment module 60 to face the probe to be debugged through the multi-axis moving module 40, and makes the probe extend into the needle adjustment hole of the needle adjustment rod 62, and then the needle adjustment moving component 61 works according to the adjustment path to realize the debugging of the probe. After the debugging of one probe is completed, repeat the above steps to complete the debugging of all probes.

[0068] The probe card automatic debugging device in the above embodiment includes a multi-axis moving module 40 and a probe card platform 20 arranged on a workbench 11. The visual inspection module 50 and the needle adjustment module 60 can be moved to face the probe that needs to be adjusted on the probe card platform 20 through the multi-axis moving module 40. After the visual inspection module 50 detects and calculates the bending state of the probe, it then moves the needle adjustment rod 62 of the needle adjustment module 60 to face the probe, and allows the probe to extend into the needle adjustment hole. The needle adjustment rod 62 is moved by the needle adjustment moving component 61 to adjust the bending state of the probe. Therefore, the probe card automatic debugging device can automatically adjust the bending state of the probe without manual adjustment, thereby improving the efficiency and accuracy of probe adjustment.

[0069] In some embodiments of the present invention, please refer to Figure 3 The needle adjustment moving assembly 61 includes a first driver 611 for driving the needle adjustment rod 62 to move in a first direction, and a second driver 612 for driving the needle adjustment rod 62 to move in a second direction. The motion output end of the first driver 611 is connected to the second driver 612, and the motion output end of the second driver 612 is connected to the needle adjustment rod 62. The first direction and the second direction are perpendicular to each other. Specifically, the motion output end of the first driver 611 is connected to a fixed structure such as a housing of the second driver 612.

[0070] The first driver 611, the second driver 612 and the needle adjustment rod 62 are sequentially connected in transmission. It can be understood that when the first driver 611 is working, the second driver 612 and the needle adjustment rod 62 can be driven to move in the first direction, and when the second driver 612 is working, the needle adjustment rod 62 can be driven to move in the second direction. Therefore, with the cooperation of the first driver 611 and the second driver 612, the needle adjustment rod 62 can be moved in at least two directions, thereby meeting the needs of probe debugging.

[0071] By disposing the first driver 611 and the second driver 612 , the movement of the needle adjusting rod 62 in the first direction and the second direction can be realized, thereby realizing the adjustment of the bending state of the probe.

[0072] In some embodiments, both the first direction and the second direction are parallel to the horizontal direction. That is to say, driven by the needle adjustment moving assembly 61, the needle adjustment rod 62 can move in any horizontal direction, and the debugging efficiency of the probe is higher.

[0073] In some embodiments, the first driver 611 and the second driver 612 are cylinders, motors, motor and transmission assemblies, etc. that can output linear motion.

[0074] In some embodiments of the present utility model, please refer to Figure 3 , the needle adjustment moving assembly 61 further includes a slide rail 614 and a slider 613 slidably disposed on the slide rail 614. The motion output end of the first driver 611 is fixedly connected to the slider 613. The sliding direction of the slider 613 is the first direction, and the second driver 612 is fixed to the slider 613. Specifically, the housing and other fixed structures of the second driver 612 are fixed to the slider 613. The second driver 612 moves synchronously with the slider 613. The slider 613 moves along the extension direction of the slide rail 614, that is, the slide rail 614 extends along the first direction. The first driver 611 is a power component that provides power for the slider 613. When the first driver 611 works, it drives the slider 613 to move in the first direction on the slide rail 614, and then drives the second driver 612 and the needle adjustment rod 62 to move in the first direction.

[0075] Through the mutual cooperation of the slider 613 and the slide rail 614, the movement of the second driver 612 and the needle adjustment rod 62 in the first direction can be guided, making the movement of the second driver 612 and the needle adjustment rod 62 more stable and the probe debugging accuracy higher. Moreover, the setting of the slider 613 provides an installation position for the second driver 612 and makes the relative position between the first driver 611 and the second driver 612 more flexible.

[0076] In some embodiments, please refer to Figure 3 , the slider 613 includes a slider body 6132 and a connecting arm 6131. The slider body 6132 is slidably disposed on the slide rail 614. The slider 613 is provided with a chute that cooperates with the slide rail 614. One end of the connecting arm 6131 is connected to the slider body 6132, and the other end of the connecting arm 6131 is fixedly connected to the motion output of the first driving member. Through the setting of the connecting arm 6131, the layout of the first driver 611 and the second driver 612 is made easier, and structural interference is avoided.

[0077] Optionally, the length direction of the connecting arm 6131 is parallel to the second direction, and the length direction of the slide rail 614 is parallel to the first direction, so that the connecting arm 6131 and the slider body 6132 are perpendicularly connected, matching the movement directions of the movement output ends of the first driver 611 and the second driver 612.

[0078] In some embodiments of the present invention, please refer to Figure 3 and Figure 4 , the needle adjustment module 60 further includes a first fixing frame 63 connected to the movement output end of the multi-axis movement module 40. One end of the needle adjustment rod 62 is floatingly arranged on the first fixing frame 63, and the other end of the needle adjustment rod 62 is driven by the needle adjustment movement assembly 61. The first fixing frame 63 is the main frame structure of the needle adjustment module 60, and the needle adjustment movement assembly 61 and the needle adjustment rod 62 are both arranged on the first fixing frame 63. When the multi-axis movement module 40 works, the first fixing frame 63 moves along with the movement output end of the multi-axis movement module 40, driving the entire needle adjustment module 60 to move, and thus the needle adjustment module 60 can be made to approach and move away from the probe to be debugged. The first end of the needle adjustment rod 62 is floatingly connected to the first fixing frame 63. It can be understood that the first end of the needle adjustment rod 62 can generate a small displacement relative to the first fixing frame 63. Thus, after the second end of the needle adjustment rod 62 is driven by the needle adjustment movement assembly 61, the first end of the needle adjustment rod 62 will also generate a corresponding displacement. Generally speaking, the first end of the needle adjustment rod 62 moves synchronously with its second end.

[0079] Through the setting of the first fixing frame 63, the needle adjustment rod 62 and the needle adjustment movement assembly 61 are both installed on the first fixing frame 63, making the needle adjustment module 60 form an integral whole. One end of the needle adjustment rod 62 is floatingly supported by the first fixing frame 63 and one end is driven by the needle adjustment movement assembly 61, which can make the needle adjustment rod 62 more stable during the movement process and avoid the needle adjustment rod 62 from being skewed.

[0080] In some embodiments, the floating connection position between the needle adjustment rod 62 and the first fixing frame 63 is the first position, and the connection position between the needle adjustment rod 62 and the needle adjustment movement assembly 61 is the second position, and the first position is below the second position. When performing probe debugging, the probe is located below the needle adjustment rod 62, and the probe will have a reaction force on the needle adjustment rod 62. Therefore, when the second position is closer to the probe, under the reaction force of the probe, the position of the needle adjustment rod 62 will not shift, and thus the accuracy of probe debugging can be avoided from being affected.

[0081] In some embodiments, please refer to Figure 3 and Figure 4, the first fixing bracket 63 includes a first fixing plate 631 and a second fixing plate 632 arranged at intervals, and a first back plate 633 connecting the first fixing plate 631 and the second fixing plate 632. The first fixing plate 631 is provided with a first through hole 6311 for the needle adjusting rod 62 to pass through. A floating joint 64 is arranged between the first through hole 6311 and the needle adjusting rod 62. The needle adjusting movement assembly 61 is fixed to the second fixing plate 632. The first fixing plate 631 and the second fixing plate 632 are arranged at intervals. One end of the needle adjusting rod 62 is floatingly connected to the first fixing plate 631 through the floating joint 64, and the end of the needle adjusting rod 62 connected to the needle adjusting movement assembly 61 is arranged close to the second fixing plate 632. The first back plate 633 can connect the first fixing plate 631 and the second fixing plate 632, and the first back plate 633 can also be connected to the movement output end of the multi-axis movement module 40. The movement of the first back plate 633 drives the entire needle adjusting module 60 to move.

[0082] Through the settings of the first fixing plate 631 and the second fixing plate 632, the needle adjusting rod 62 and the needle adjusting movement assembly 61 are respectively installed, and the needle adjusting module 60 is reasonably arranged.

[0083] Optionally, the floating joint 64 includes a floating seat and a rotating head. The rotating head and the floating seat can be ball-jointed, so that the rotating head can rotate relative to the floating seat in any direction. The floating seat is fixed to the first fixing plate 631, and the rotating head extends into the first through hole 6311 and is connected to one end of the needle adjusting rod 62. Thus, when the needle adjusting rod 62 moves horizontally, it can be supported by the first fixing plate 631 and is not restricted by the first fixing plate 631.

[0084] Optionally, the needle adjusting movement assembly 61 includes a first driver 611, a second driver 612, a slide rail 614 and a slider 613. Among them, the first driver 611, the second driver 612 and the slide rail 614 are all fixed on the second fixing plate 632.

[0085] Optionally, the second fixing plate 632 is provided with a second through hole 6321. The needle adjusting rod 62 passes through the second through hole 6321. The inner diameter of the second through hole 6321 is larger than the outer diameter of the needle adjusting rod 62. When the needle adjusting movement assembly 61 works, the needle adjusting rod 62 moves horizontally in the second through hole 6321, and the second through hole 6321 does not contact the needle adjusting rod 62.

[0086] Optionally, the needle adjusting rod 62 is arranged at the edge of the second fixing plate 632, and the second fixing plate 632 can be provided with an avoidance notch at its edge to avoid the needle adjusting rod 62.

[0087] Optionally, the first fixing plate 631 and the second fixing plate 632 are parallel to each other, so that the needle adjusting rod 62 can be placed vertically, and the needle adjusting movement assembly 61 can move the needle adjusting rod 62 in the horizontal direction.

[0088] In some embodiments of the present utility model, please refer to Figure 3 , the needle adjustment module 60 further includes a height measurement sensor 65. The height measurement sensor 65 is used to measure the height of the needle adjustment rod 62. When the needle adjustment rod 62 descends to a predetermined position, the height measurement sensor 65 is triggered. The height measurement sensor 65 feeds back the measurement result to the control system, and the control system sends a command to the execution structure (such as the multi-axis movement module 40) to stop the descent of the needle adjustment rod 62.

[0089] Optionally, the height measurement sensor 65 is a laser height measurement sensor.

[0090] In some embodiments of the present utility model, please refer to Figure 5 , the vision detection module 50 includes a second fixing frame 54, a camera 51, a lens barrel 52, and a light source 53. The camera 51 and the lens barrel 52 are both fixed to the second fixing frame 54, and the camera 51 and the lens barrel 52 are coaxially arranged. The light source 53 is arranged on the side of the lens barrel 52. The second fixing frame 54 is the main frame structure of the vision detection module 50, and the camera 51 and the lens barrel 52 are both arranged on the second fixing frame 54. The camera 51 has a shooting function and can shoot pictures of the probe within the field of view. The lens barrel 52 is coaxially arranged with the camera 51 and has functions such as magnification and focusing to assist the camera 51 in shooting clearer pictures of the probe. The light source 53 provides light at the probe, enabling the camera 51 to clearly capture the image of the probe when shooting. Since the probe is arranged vertically or obliquely, if the light source 53 is arranged directly above the probe, it will cause phenomena such as glare and ghosting in the captured image of the probe, and the shooting effect is not good. Therefore, the light source 53 is arranged on the side of the lens barrel 52.

[0091] By arranging the light source 53 on the side of the lens barrel 52, phenomena such as glare and ghosting in the captured image can be reduced, and the shooting quality can be improved.

[0092] In some embodiments, the second fixing frame 54 includes a second back plate 543, a third fixing plate 541, and a fourth fixing plate 542. The third fixing plate 541 and the fourth fixing plate 542 are arranged at intervals, the third fixing plate 541 is arranged above the fourth fixing plate 542, the camera 51 is fixed to the third fixing plate 541, one end of the lens barrel 52 is fixed to the camera 51, and the other end of the lens barrel 52 is fixed by the fourth fixing plate 542, so that the lens barrel 52 can be more stably fixed to the second fixing frame 54.

[0093] In some embodiments of the present utility model, please refer to Figure 2 , Figure 6 and Figure 7, a clamping assembly 70 for fixing the probe card 30 is provided on the probe card platform 20. The clamping assembly 70 includes a positioning pin 72 inserted into the probe card platform 20 and a fixing clamp 71 fixed to the probe card platform 20. The positioning pin 72 includes a first positioning post 721, a second positioning post 722, and a crimping plate 723 connecting the first positioning post 721 and the second positioning post 722. The first positioning post 721 is used to extend into the probe card platform 20, the second positioning post 722 is used to extend into the probe card 30, one end of the crimping plate 723 is used to press against the edge of the probe card 30, and the other end of the crimping plate 723 is pressed and fixed by the fixing clamp 71. Correspondingly, a first positioning hole 21 cooperating with the first positioning post 721 is provided on the probe card platform 20, and a second positioning hole 31 cooperating with the second positioning post 722 is provided on the probe card 30.

[0094] The clamping assembly 70 is fixed on the probe card platform 20, and the clamping assembly 70 can clamp the probe card 30 so that the probe card 30 is fixed to the probe card platform 20. The clamping assembly 70 includes a positioning pin 72 and a fixing clamp 71. The fixing clamp 71 is fixed on the probe card platform 20. The first positioning post 721 of the positioning pin 72 extends into the probe card platform 20, and the second positioning post 722 of the positioning pin 72 extends into the probe card 30, so that the probe card 30 is positioned on the probe card platform 20. One end of the crimping plate 723 of the positioning pin 72 presses against the edge of the probe card 30, and the other end of the crimping plate 723 is pressed and fixed by the fixing clamp 71. In this way, when fixing the probe card platform 20, first place the probe card 30 on the probe card platform 20, then insert the first positioning post 721 and the second positioning post 722 of the positioning pin 72 into the probe card platform 20 and the probe card 30 respectively, and then fix the crimping plate 723 through the fixing clamp 71. When disassembling the probe card 30, first open the fixing clamp 71, then remove the positioning pin 72, and finally remove the probe card 30.

[0095] Through the cooperation of the positioning pin 72 and the fixing clamp 71, the probe card 30 can be both positioned and tightly positioned. Only a second positioning hole 31 needs to be provided on the probe card 30, and no other matching structures need to be provided on the probe card 30. The fixing clamp 71 does not directly contact the probe card 30 and will not damage the probe card 30.

[0096] In some embodiments, please refer to Figure 7, the crimping plate 723 is a flat structure, and the length of the first positioning post 721 is greater than that of the second positioning post 722. Since the probe card 30 is disposed on the probe card platform 20, the upper surface of the probe card 30 is higher than the upper surface of the probe card platform 20, and thus the second positioning post 722 can be designed to be relatively short. Moreover, when the second positioning post 722 is short, when removing the positioning pin 72, the upward movement distance of the positioning pin 72 is short, and the positioning pin 72 can be pulled upward until the second positioning post 722 is disengaged from the probe card 30, while the first positioning post 721 remains inserted into the probe card platform 20. Then, the positioning pin 72 is rotated to move the second positioning post 722 away from the probe card 30. In this way, the probe card 30 can be removed without completely removing the positioning pin 72, which can prevent the loss of the positioning pin 72.

[0097] In some embodiments, please refer to Figure 8 , the fixing clip 71 includes a mounting plate 711, a first rotating frame 712, and a second rotating frame 713. The mounting plate 711 is fixed on the probe card platform 20. The first rotating frame 712 is rotatably connected to the mounting plate 711, and the second rotating frame 713 is rotatably connected to the first rotating frame 712. One end of the second rotating frame 713 away from the first rotating frame 712 is used to press against the crimping plate 723. In order to make the cooperation between the second rotating frame 713 and the crimping plate 723 closer, a groove 7231 is formed on the crimping plate 723, and the crimping beam 7131 on the second rotating frame 713 cooperates with the groove 7231 on the crimping plate 723.

[0098] The first rotating frame 712 includes a clip seat 7121, a spring frame 7122 disposed in the clip seat 7121, and a spring 7123 disposed on the spring frame 7122. The second rotating frame 713 has a crimping beam 7131 and a limiting beam 7132 arranged at intervals. The crimping beam 7131 is used to press against the crimping plate 723, and the limiting beam 7132 is used to push the spring frame 7122, thereby compressing the spring 7123. Specifically, when using the fixing clip 71, the crimping beam 7131 of the second rotating frame 713 is stuck in the groove 7231 on the crimping plate 723, and the first rotating frame 712 is rotated. The limiting beam 7132 of the second rotating frame 713 pushes the spring frame 7122 to compress the spring 7123, and the second rotating frame 713 rotates accordingly, thereby tightly pressing the crimping plate 723.

[0099] In some embodiments, the number of the clamping assemblies 70 is multiple, and they are circumferentially arranged at the circumference of the probe card platform 20, so that the probe card 30 can be placed more stably on the probe card platform 20.

[0100] In some embodiments of the present utility model, please refer to Figure 2, the probe card automatic debugging device further includes a cross beam structure 12 disposed on the workbench 11. The multi-axis movement module 40 includes a first movement component 41, a second movement component 42, and two third movement components 43. The first movement component 41 can output movement in a first direction and is disposed on the workbench 11. The probe card platform 20 is connected to the movement output end of the first movement component 41. The second movement component 42 can output movement in a second direction and is disposed on the cross beam structure 12. The third movement component 43 is connected to the movement output end of the second movement component 42. The third movement component 43 can output movement in a third direction. The multi-axis movement module 40 and the vision detection module 50 are respectively disposed on the movement output ends of the two third movement components 43. The first direction, the second direction, and the third direction are perpendicular to each other in pairs.

[0101] The first movement component 41 is disposed on the workbench 11, and the probe card platform 20 is driven by the first movement component 41 to move in the first direction. The second movement component 42 is disposed on the cross beam structure 12. The cross beam structure 12 spans across the first movement component 41, so that the second movement component 42 is located above the probe card platform 20. Correspondingly, the third movement component 43, the vision detection module 50, and the needle adjustment module 60 are also disposed above the probe card platform 20. The two third movement components 43 are relatively independent and can respectively drive the vision detection module 50 and the needle adjustment module 60 to move in the third direction. The first direction and the second direction can be horizontal directions, and the third direction can be a vertical direction.

[0102] When debugging the probe, the position of the probe card platform 20 in the first direction is adjusted by the first movement component 41, and the position of the vision detection module 50 in the second direction is adjusted by the second movement component 42, so that the vision detection module 50 is directly opposite to the probe to be debugged on the probe card 30. Then, the vision detection module 50 is lowered by the third movement component 43 until it can clearly take a picture of the probe. The bending state of the probe to be debugged is calculated and analyzed by software. According to the current bending state of the probe and the predetermined bending state, the adjustment path is calculated. Then, the position of the needle adjustment module 60 in the second direction is adjusted by the second movement component 42, so that the needle adjustment module 60 is directly opposite to the probe to be debugged. The adjustment needle bar 62 is lowered by the third movement component 43 until the probe extends into the needle adjustment hole. Finally, the needle adjustment movement component 61 works according to the adjustment path to realize the debugging of the probe.

[0103] By disposing the probe card platform 20 at the movement output end of the first movement component 41, and the first movement component 41 and the second movement component 42 are respectively and independently disposed on the workbench 11 and the cross beam structure 12, the movements of the first movement component 41 and the second movement component 42 are relatively independent, the load requirement for the first movement component 41 is small, and there is no error accumulation during movement, and the structure is simpler.

[0104] In some embodiments, the vision detection module 50 and the needle adjustment module 60 are arranged in sequence along the second direction. In this way, after the vision detection module 50 moves to face the probe to be debugged, the position of the needle adjustment module 60 and the probe platform in the first direction does not need to be adjusted anymore, the first moving component 41 does not need to work anymore, and the needle adjustment module 60 can be directly aligned with the probe through the second moving component 42.

[0105] In some embodiments of the present utility model, the multi-axis moving module 40 includes a first moving component 41, a second moving component 42 and two third moving components 43. The first moving component 41 is arranged on the workbench 11, and the probe card platform 20 is also arranged on the workbench 11. The second moving component 42 is connected to the motion output end of the first moving component 41, and the third moving component 43 is connected to the motion output end of the second moving component 42. The motion output ends of the two third moving components 43 are respectively connected to the vision detection module 50 and the multi-axis moving module 40. The first moving component 41 can output motion in the first direction, the second moving component 42 can output motion in the second direction, and the third moving component 43 can output motion in the third direction. When the first moving component 41 works, it drives the second moving component 42, the third moving component 43, the multi-axis moving module 40 and the vision detection module 50 to move in the first direction; when the second moving component 42 works, it drives the third moving component 43, the multi-axis moving module 40 and the vision detection module 50 to move in the second direction; when the third moving component 43 works, it drives the multi-axis moving module 40 and the vision detection module 50 to move in the second direction. In this way, through the work of each moving component, the vision detection module 50 and the needle adjustment module 60 can be moved to face the probe, and the probe can enter the needle adjustment rod 62.

[0106] In some embodiments of the present utility model, please refer to Figure 9 and Figure 10 Figure [the specific figure number is missing here], the first moving component 41 includes a first motor 411, a first lead screw 412, a first nut block 413, a first guide rail 415 and a first mounting bracket 414. The first mounting bracket 414 is fixed on the workbench 11 and is the main support and mounting structure of the first moving component 41. The first motor 411 can output rotational motion, the first lead screw 412 is driven by the first motor 411 to rotate, the first nut block 413 is threadedly connected to the first lead screw 412, and the first nut block 413 is slidably connected to the first guide rail 415, so that the first nut block 413 moves along the length direction of the first lead screw 412. The first nut block 413 is the motion output end of the first moving component 41. The probe card platform 20 can be fixedly connected to the first nut block 413 to realize the motion of the probe card platform 20 in the first direction.

[0107] In some embodiments, please refer to Figure 9 and Figure 10, the first mounting bracket 414 includes a mounting base plate 4141, a lead screw bracket 4142, and a connecting block 4144. The mounting base plate 4141 is fixed on the workbench 11, the lead screw bracket 4142 is fixed on the mounting base plate 4141, and opposite ends of the first lead screw 412 are rotatably supported by the lead screw bracket 4142. A cover plate 4143 is provided at the top of the lead screw bracket 4142. The cover plate 4143 is used to shield the first lead screw 412 to reduce foreign objects from falling onto the first lead screw 412. The first mounting bracket 414 further includes a connecting block 4144. The connecting block 4144 is a hollow structure. The cover plate 4143 is disposed through the connecting block 4144. One side of the connecting block 4144 is fixed to the first nut block 413, and the other side of the connecting block 4144 is fixed to the probe card platform 20.

[0108] In some embodiments of the present invention, the structures of the first moving assembly 41 and the second moving assembly 42 are the same to save design costs.

[0109] In some embodiments of the present invention, please refer to Figure 11 and Figure 12 , the third moving assembly 43 includes a third motor 431, a transmission gear 432, a transmission rack 433, a third mounting bracket 436, a third guide rail 434, a third guide block 437, and a transition plate 435. The third mounting bracket 436 is connected to the motion output end of the second moving assembly 42. The third motor 431 is also fixed to the third mounting bracket 436. The transmission gear 432 is fixed to the motion output end of the third motor 431. The transmission gear 432 meshes with the transmission rack 433. The transmission rack 433 and the third guide block 437 are fixedly connected through the transition plate 435. The third guide block 437 is slidably disposed on the third guide rail 434. When the third motor 431 operates, the transmission gear 432 rotates, driving the transmission rack 433 to move linearly through meshing. The transmission rack 433 moves along the third direction through the guiding cooperation of the third guide block 437 and the third guide rail 434. Among them, the transition plate 435 is the motion output end of the third moving assembly 43. The vision detection module 50 and the needle adjustment module 60 are fixed on the corresponding transition plate 435.

[0110] In some embodiments of the present invention, please refer to Figure 1 , the probe card automatic debugging device further includes a housing structure 13 covering the workbench 11 and a fan filter assembly 14 disposed on the housing structure 13. An accommodation space is formed between the housing structure 13 and the workbench 11. The probe card platform 20 is disposed in the accommodation space. The accommodation space formed between the housing structure 13 and the workbench 11 is relatively isolated from the external space, which can reduce dust, foreign objects, etc. from falling inside the device. Among them, the probe card platform 20, the multi-axis moving module 40, and the needle adjustment module 60 are all disposed inside the accommodation space.

[0111] By providing the housing structure 13, the modules inside the device can be protected, and it has a dust-proof function. A fan filter assembly 14 is provided on the housing structure 13, so that air enters the accommodation space after being filtered and the filtered clean air is output to ensure that no large amount of floating dust is introduced during the adjustment process of the probe card 30.

[0112] In some embodiments, the fan filter assembly 14 is an FFU.

[0113] In some embodiments, a door body 131 is provided on the housing structure 13. The door body 131 can be opened and closed to facilitate the loading and unloading of the probe card 30.

[0114] In some embodiments of the present invention, please refer to Figure 1 , the probe card automatic debugging device further includes a base 15. The workbench 11 is arranged on the base 15, and a horizontal adjustment structure 16 is arranged between the workbench 11 and the base 15. The horizontal adjustment structure 16 is used to adjust the levelness of the probe card platform 20. There is a gap between the base 15 and the workbench 11, and the horizontal adjustment structure 16 is arranged in this gap. The workbench 11 can be kept level by adjustment, and thus the probe card platform 20 can be kept level.

[0115] By providing the horizontal adjustment structure 16, the levelness of the workbench 11 can be adjusted, and thus the probe card platform 20 and the probe card 30 can be kept level to ensure the probe adjustment accuracy.

[0116] In some embodiments, the horizontal adjustment structure 16 is an air-floating structure. By blowing gas between the workbench 11 and the base 15, the levelness of the probe card 30 is adjusted.

[0117] Optionally, the number of the air-floating structures is four, which are respectively arranged at the four corners of the side of the base 15 facing the workbench 11, so that the workbench 11 can be more easily balanced.

[0118] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A probe card automatic debugging device, characterized in that: include: Workbench; A probe card platform for placing the probe card; A multi-axis moving module, at least used to move the visual inspection module and the needle adjustment module; A visual inspection module, used for detecting the bending state of the probes in the probe card; A needle adjustment module, used for adjusting the bending state of the probe, the needle adjustment module comprises a needle adjustment rod and a needle adjustment moving assembly for driving the needle adjustment rod to move, the end of the needle adjustment rod has a needle adjustment hole for the probe to extend into; The probe card platform and the multi-axis moving module are both arranged on the workbench, and the visual inspection module and the needle adjustment module are both connected to the motion output end of the multi-axis moving module.

2. The probe card automatic debugging equipment according to claim 1, characterized in that: The needle adjustment moving assembly includes a first driver for driving the needle adjustment rod to move in a first direction, and a second driver for driving the needle adjustment rod to move in a second direction. The motion output end of the first driver is connected to the second driver, and the motion output end of the second driver is connected to the needle adjustment rod. The first direction and the second direction are perpendicular to each other.

3. The probe card automatic debugging equipment according to claim 2, characterized in that: The needle adjustment moving assembly also includes a slide rail and a slider slidably arranged on the slide rail, the motion output end of the first driver is fixedly connected to the slider, the sliding direction of the slider is a first direction, and the second driver is fixed on the slider.

4. The probe card automatic debugging equipment according to claim 1, characterized in that: The needle adjustment module also includes a first fixed frame connected to the motion output end of the multi-axis moving module, one end of the needle adjustment rod is floatingly arranged on the first fixed frame, and the other end of the needle adjustment rod is driven by the needle adjustment moving assembly.

5. The probe card automatic debugging equipment according to claim 4, characterized in that: The first fixing frame includes a first fixing plate and a second fixing plate which are spaced apart from each other, and a first back plate connecting the first fixing plate and the second fixing plate. The first fixing plate is provided with a first through hole for the needle adjusting rod to pass through. A floating joint is provided between the first through hole and the needle adjusting rod. The needle adjusting moving assembly is fixed to the second fixing plate.

6. The probe card automatic debugging device according to any one of claims 1 to 5, characterized in that: The visual inspection module includes a second fixing frame, a camera, a lens barrel and a light source. The camera and the lens barrel are both fixed to the second fixing frame, and the camera and the lens barrel are coaxially arranged. The light source is arranged on the side of the lens barrel.

7. The probe card automatic debugging device according to any one of claims 1 to 5, characterized in that: A clamp assembly for fixing the probe card is provided on the probe card platform, the clamp assembly includes a positioning pin inserted on the probe card platform and a fixing clamp fixed to the probe card platform, the positioning pin includes a first positioning column, a second positioning column and a crimping plate connecting the first positioning column and the second positioning column, the first positioning column is used to extend into the probe card platform, the second positioning column is used to extend into the probe card, one end of the crimping plate is used to press the edge of the probe card, and the other end of the crimping plate is pressed and fixed by the fixing clamp.

8. The probe card automatic debugging device according to any one of claims 1 to 5, characterized in that: The probe card automatic debugging equipment also includes a cross-beam structure arranged on the workbench, the multi-axis mobile module includes a first mobile component, a second mobile component and two third mobile components, the first mobile component can output movement in a first direction and is arranged on the workbench, the probe card platform is connected to the movement output end of the first mobile component, the second mobile component can output movement in a second direction and is arranged on the cross-beam structure, the third mobile component is connected to the movement output end of the second mobile component, the third mobile component can output movement in a third direction, the multi-axis mobile module and the visual inspection module are respectively arranged at the movement output ends of the two third mobile components, and the first direction, the second direction and the third direction are perpendicular to each other.

9. The probe card automatic debugging device according to any one of claims 1 to 5, characterized in that: The probe card automatic debugging equipment also includes a casing structure covered on the workbench and a fan filter assembly arranged on the casing structure. A receiving space is formed between the casing structure and the workbench, and the probe card platform is arranged in the receiving space.

10. The probe card automatic debugging device according to any one of claims 1 to 5, characterized in that: The probe card automatic debugging device also includes a base, the workbench is arranged on the base, and a horizontal adjustment structure is arranged between the workbench and the base, and the horizontal adjustment structure is used to adjust the horizontality of the probe card platform.

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