Wafer test lens module and wafer test device

Abstract

The utility model provides a wafer test lens module and a wafer test device, the lens module comprises a lens module seat, a lifting structure capable of generating axial displacement relative to the lens module seat, and a lens body detachably connected with the lifting structure, one end of the lifting structure is provided with a plurality of connecting units arranged at intervals in the circumferential direction, and the other end of the lifting structure is connected with the lens body. At least part of the connecting units are provided with first clamping parts, and the peripheral wall of the lens body is provided with second clamping parts used for being mutually clamped with the first clamping parts. According to the wafer test lens module and the wafer test device provided by the utility model, one end of the lifting structure can be deformed, the size of the lifting structure can be changed, the second clamping part on the lens body can be clamped with the first clamping part, and the lens body can be easily detached from the lifting structure, so that the lens body is convenient to replace, and the wafer test efficiency is improved. The replacement process is simple, the lens body cannot be scratched, the time required for replacing the lens body is short, and the debugging time is short.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer testing, and more specifically, relates to a wafer testing lens module and a wafer testing device. Background Art

[0002] In the production process of a CMOS image sensor (abbreviated as CIS), after wafer manufacturing is completed, wafer testing is required. Wafer testing is to perform needle testing on each die on the wafer. Probes are set on the testing device and contact the contacts on the die to test its electrical characteristics.

[0003] However, for the probe card lens module currently in use, the lens is directly fixed to the lifting component of the module by glue. When the lens needs to be replaced for testing, there is a problem that the lens is easily scratched. If the entire module is directly replaced, the lens module needs to be re-adjusted, and the adjustment time is relatively long. Summary of the Utility Model

[0004] The purpose of the embodiment of the utility model is to provide a wafer testing lens module and a wafer testing device, so as to solve the technical problems of easy scratching during lens replacement and long replacement and adjustment time existing in the prior art.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is: to provide a wafer testing lens module, including a lens module seat, a lifting structure capable of generating an axial displacement relative to the lens module seat, and a lens body detachably connected to the lifting structure. One end of the lifting structure has a plurality of circumferentially spaced connection units, and at least some of the connection units are provided with first clamping portions, and the circumferential wall of the lens body is provided with second clamping portions for mutually clamping with the first clamping portions.

[0006] In the above solution, the wafer testing lens module includes a lens module seat, a lifting structure and a lens body. The lifting structure can axially move relative to the lens module seat, so as to change the axial position of the lens body. One end of the lifting structure is provided with a plurality of circumferentially spaced connection units, and at least some of the connection units are provided with first clamping portions, so that one end of the lifting structure can be deformed and its size can change. The second clamping portion on the lens body can be clamped with the first clamping portion, and the lens body can also be easily detached from the lifting structure, which is convenient for replacing the lens body. The replacement process is simple, the lens body will not be scratched, and the time required for replacing the lens body is short, and the adjustment time is short.

[0007] Optionally, there is a spacing space between adjacent two of the connection units, and the first clamping portion is arranged close to the spacing space.

[0008] In the above solution, the circumferential edge of the connecting unit is adjacent to the spaced-apart space. Therefore, the circumferential edge of the connecting unit is more likely to deform. When the first engaging portion is provided at this location, the mutual engagement and mutual separation of the first engaging portion and the second engaging portion are made easier, reducing the difficulty of disassembling and assembling the lens body.

[0009] Optionally, an installation space is formed between the inner peripheral wall of the lifting structure and the outer peripheral wall of the lens body, and a light leakage prevention structure is provided in the installation space.

[0010] In the above solution, by providing the light leakage prevention structure, the light of the light source can be prevented from leaking out between the lifting structure and the lens body. In particular, one end of the lifting structure has a plurality of spaced-apart spaces, which may cause light to directly emit from the spaced-apart spaces. Therefore, the light leakage prevention structure is provided to block some of the spaced-apart spaces and the gap between the connecting unit and the lens body.

[0011] Optionally, the lifting structure includes a first annular wall, a second annular wall, and a first radial connecting wall connecting the first annular wall and the second annular wall. The inner diameter of the first annular wall is greater than the inner diameter of the second annular wall, and the connecting unit is provided on the first annular wall; the lens body includes a third annular wall and a fourth annular wall connected to each other. At least a part of the outer diameter of the fourth annular wall is smaller than the outer diameter of the third annular wall, and the second engaging portion is provided on the third annular wall; the first annular wall, the first radial connecting wall, and the fourth annular wall enclose the installation space.

[0012] In the above solution, by setting the lifting structure as the first annular wall and the second annular wall with different inner diameters, the first annular wall and the second annular wall are connected by the first radial connecting wall. By setting the outer peripheral wall of the lens body as the third annular wall and the fourth annular wall with different outer diameters, the first annular wall and the fourth annular wall are spaced apart. The light leakage prevention structure is provided between the first annular wall and the fourth annular wall. At the same time, the first radial connecting wall can axially limit the light leakage prevention structure.

[0013] Optionally, the lifting structure includes a lifting seat and a lens fixing member connected to each other. The lifting seat is installed on the lens module seat, and one end of the lens fixing member away from the lifting seat has the connecting unit.

[0014] In the above solution, by setting the lifting structure as the lifting seat and the lens fixing member, the structural complexity of the lifting structure can be reduced. The lifting seat and the lens fixing member can be formed separately and then installed and fixed.

[0015] Optionally, the lifting seat includes a fifth annular wall, a sixth annular wall, and a second radial connecting wall connecting the fifth annular wall and the sixth annular wall. The fifth annular wall is used to connect with the lens fixing member, and the sixth annular wall is threadedly connected with the lens module seat.

[0016] In the above solution, the inner diameters of the fifth annular wall and the sixth annular wall are different, and they are connected to each other through the second radial connecting wall. The fifth annular wall is connected to the lens fixing member to fix the lifting seat and the lens fixing member to each other. The sixth annular wall is threadedly connected to the lens module seat to achieve the axial movement of the lifting seat relative to the lens module seat. Specifically, when the axial position of the lifting seat needs to be adjusted, the lifting seat is rotated, and at the same time, the axial distance between the lifting seat and the lens module seat changes.

[0017] Optionally, the lens fixing member includes a first annular wall, a second annular wall, and a first radial connecting wall connecting the first annular wall and the second annular wall. The connecting unit is disposed on the first annular wall, and the second annular wall is threadedly connected to the fifth annular wall.

[0018] In the above solution, by threadedly connecting the second annular wall of the lens fixing member to the fifth annular wall of the lifting seat, the fixed connection between the lens fixing member and the lifting seat is realized. This makes the fixed connection method of the two simple, without the need to use additional fixing members, and the assembly is convenient.

[0019] Optionally, a light homogenizing plate is fixedly arranged inside the lifting seat. A limiting step is recessed at the inner wall of the lifting seat, and the second radial connecting wall has a threaded hole for cooperating with a threaded member. The opposite sides of the light homogenizing plate are respectively limited by the limiting step and the head of the threaded member.

[0020] In the above solution, through the setting of the light homogenizing plate, the light can be emitted to the lens body after passing through the light homogenizing plate, and thus the emitted light can be made more uniform. The opposite sides of the light homogenizing plate are respectively limited by the lifting seat and the head of the threaded member, so that the light homogenizing plate is stably installed inside the lifting seat.

[0021] Optionally, the light homogenizing plate is in the shape of a round plate, and the outer diameter of the light homogenizing plate is larger than the inner diameter of the end of the lifting seat close to the light homogenizing plate.

[0022] In the above solution, the light homogenizing plate is in the shape of a round plate, and there is no need to distinguish the installation angle of the light homogenizing plate. The outer diameter of the light homogenizing plate is larger than the inner diameter of the end of the lifting seat close to the light homogenizing plate, so that the light homogenizing plate can be assembled from the end of the lifting seat close to the lens module seat, providing a feasible assembly solution.

[0023] The present invention also provides a wafer testing device, which includes a module fixing frame and a plurality of the above-mentioned wafer testing lens modules, and the lens module seats of the wafer testing lens modules are fixed to the module fixing frame.

[0024] In the above solution, the wafer test lens module includes a lens module base, a lifting structure, and a lens body. The lifting structure can axially move relative to the lens module base, thereby changing the axial position of the lens body. One end of the lifting structure is provided with a plurality of circumferentially spaced connection units, and at least some of the connection units are provided with first latching portions, so that one end of the lifting structure can be deformed and its size can change. The second latching portion on the lens body can be latched with the first latching portion, and the lens body can also be easily disassembled from the lifting structure, facilitating the replacement of the lens body. The replacement process is simple, the lens body will not be scratched, and the time required to replace the lens body is short, and the debugging time is short. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0026] Figure 1 A three-dimensional structure diagram of the wafer test lens module provided by the embodiment of the present invention;

[0027] Figure 2 An exploded structure diagram of the wafer test lens module provided by the embodiment of the present invention;

[0028] Figure 3 A cross-sectional view of the wafer test lens module provided by the embodiment of the present invention;

[0029] Figure 4 A three-dimensional structure diagram of the lens body provided by the embodiment of the present invention;

[0030] Figure 5 A three-dimensional structure diagram of the lens fixing member provided by the embodiment of the present invention;

[0031] Figure 6 A three-dimensional structure of the wafer test device provided by the embodiment of the present invention Figure 1 ;

[0032] Figure 7 A three-dimensional structure of the wafer test device provided by the embodiment of the present invention Figure 2 ;

[0033] Figure 8 A three-dimensional structure diagram of the circuit board provided by the embodiment of the present invention.

[0034] Among them, the reference numerals in the drawings are as follows:

[0035] 100 - Wafer test lens module; 200 - Probe card fixing frame; 300 - Circuit board assembly; 301 - Circuit board body; 302 - Probe assembly; 303 - Connector; 400 - Module fixing bracket; 500 - Probe protection plate;

[0036] 10 - Lens module seat; 11 - Seventh annular wall; 12 - Flange; 20 - Lifting structure; 21 - Lifting seat; 211 - Fifth annular wall; 212 - Sixth annular wall; 213 - Second radial connecting wall; 214 - Limit step; 22 - Lens fixing member; 221 - First annular wall; 222 - Second annular wall; 223 - First radial connecting wall; 224 - First clamping portion; 225 - Spacing space; 226 - Connecting unit; 23 - Installation space; 30 - Lens body; 31 - Third annular wall; 32 - Fourth annular wall; 33 - Second clamping portion; 34 - Positioning groove; 40 - Light leakage prevention structure; 50 - Light homogenizing plate; 60 - Threaded part. Detailed implementation manners

[0037] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0038] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0039] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0040] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0041] Wafer testing involves probing each die on the wafer. Probes are set on the testing device and brought into contact with the contacts on the die to test its electrical characteristics. Generally, the testing device includes a circuit board on which multiple groups of probes are provided, and each group of probes corresponds to a die for detection. At the same time, when detecting each die, each die requires a probe card lens module. The lens module can displace the lens in the optical axis direction relative to the die through the movement of the lifting component to achieve focusing.

[0042] However, for the currently used lens module, the lens is directly fixed to the lifting component of the module with glue. When the lens needs to be replaced for testing, there is a problem that the lens is easily scratched. If the entire module is directly replaced, the lens module needs to be re-adjusted, and the adjustment time is relatively long.

[0043] Now, the wafer testing lens module 100 provided by the embodiments of the present invention will be described.

[0044] Please refer to Figures 1 to 3 , the wafer testing lens module 100 includes a lens module base 10, a lifting structure 20, and a lens body 30.

[0045] The lens module base 10 is fixedly arranged and can be fixed to fixed structures such as a circuit board and a module fixing bracket 400. The main function of the lens module base 10 is to mount the entire wafer testing lens module 100 to the fixed structure.

[0046] The lifting structure 20 can generate an axial displacement relative to the lens module base 10, thereby driving the lens body 30 to generate an axial displacement. Herein, the axial direction refers to the optical axis direction of the lens body 30. The lifting structure 20 moves synchronously with the lens body 30 and can generate an axial displacement relative to the lens module base 10, and thus can focus on the die opposite thereto.

[0047] The lens body 30 is detachably connected to the lifting structure 20. When the lens body 30 is mounted on the lifting structure 20, the two are fixed to each other. The lens body 30 can also be easily removed from the lifting structure 20. Compared with the scheme in which the lens body 30 is fixed to the lifting structure 20, when the lens body 30 is removed, it will not be scratched, the time required for disassembly and assembly is shorter, and the lens module does not need to be replaced as a whole, and the adjustment time required for the lens module is also shorter.

[0048] Specifically, one end of the lifting structure 20 has a plurality of connecting units 226 arranged at circumferential intervals, so that this end of the lifting structure 20 is arranged in a circular shape. There is an interval between adjacent two connecting units 226, having an interval space 225. In this way, each connecting unit 226 can be deformed under an external force. At least some of the connecting units 226 are provided with a first clamping portion 224, that is to say: some of the connecting units 226 are provided with a first clamping portion 224, some of the connecting units 226 are not provided with a first clamping portion 224, or all of the connecting units 226 are provided with a first clamping portion 224. The peripheral wall of the lens body 30 is provided with a second clamping portion 33. The peripheral wall of the lens body 30 is circular. When the number of the second clamping portions 33 is multiple, they are arranged at intervals in sequence along the peripheral wall of the lens body 30. The first clamping portion 224 and the second clamping portion 33 are clamped with each other. Generally speaking, the number of the first clamping portion 224 and the second clamping portion 33 is the same, so that the two are in one-to-one correspondence and cooperation. In special cases, the number of the first clamping portion 224 and the second clamping portion 33 may also be different.

[0049] When installing the lens body 30, the second clamping portion 33 on the lens body 30 and the first clamping portion 224 on the lifting structure 20 are circumferentially aligned. Under the action of the axial force, the second clamping portion 33 squeezes the connecting unit 226, causing the connecting unit 226 to deform. The second clamping portion 33 and the first clamping portion 224 approach each other until they are clamped with each other, and the connecting unit 226 returns to its original state. When disassembling the lens body 30, pulling the lens body 30 in the axial direction, the first clamping portion 224 and the second clamping portion 33 are separated from each other. The second clamping portion 33 squeezes the connecting unit 226, causing the connecting unit 226 to deform until the lens body 30 and the lifting structure 20 are completely separated, and the connecting unit 226 returns to its original state. Therefore, the disassembly and installation of the lens body 30 are very convenient, the lens body 30 will not be scratched, the lens body 30 can be directly replaced on the production line, and the disassembly and assembly speed is relatively fast.

[0050] The wafer test lens module 100 in the above embodiment includes a lens module seat 10, a lifting structure 20 and a lens body 30. The lifting structure 20 can axially move relative to the lens module seat 10, so as to change the axial position of the lens body 30. One end of the lifting structure 20 is provided with a plurality of circumferentially spaced connecting units 226. At least some of the connecting units 226 are provided with a first clamping portion 224, so that one end of the lifting structure 20 can be deformed and its size can change. The second clamping portion 33 on the lens body 30 can be clamped with the first clamping portion 224, and the lens body 30 can also be easily disassembled from the lifting structure 20, which is convenient for replacing the lens body 30. The replacement process is simple, the lens body 30 will not be scratched, and the time required for replacing the lens body 30 is short, and the debugging time is short.

[0051] In some embodiments of the present utility model, please refer to Figure 4 and Figure 5 , the connecting unit 226 is a wall-like structure. When the lens body 30 is mounted on the lifting structure 20, at least part of the lens body 30 is hidden inside the connecting unit 226, and the second engaging portion 33 is correspondingly arranged on the outer peripheral wall of the lens body 30. Among them, the connecting unit 226 being arranged as a wall-like structure makes it easier to deform.

[0052] In some embodiments of the present utility model, please refer to Figure 4 and Figure 5 , the first engaging portion 224 is a card hole, and the second engaging portion 33 is a buckle. The connecting unit 226 is a thin-wall structure, and a card hole is formed thereon, and the structure is more reasonable. Moreover, generally no holes are formed on the lens body 30 to avoid affecting the integrity of the lens body 30.

[0053] In some embodiments of the present utility model, please refer to Figure 5 , there is a spaced space 225 between two adjacent connecting units 226, and the first engaging portion 224 is arranged close to the spaced space 225. There are spaced spaces 225 on both circumferential sides of the connecting unit 226, and the first engaging portion 224 can be arranged close to any one of the spaced spaces 225. Among them, the middle part of the connecting unit 226 in the circumferential direction is the part away from the spaced space 225, and the two edge parts of the connecting unit 226 in the circumferential direction are the parts close to the spaced space 225.

[0054] The circumferential edge of the connecting unit 226 is adjacent to the spaced space 225. Therefore, the circumferential edge of the connecting unit 226 is more likely to deform. When the first engaging portion 224 is arranged here, the mutual engagement and mutual separation of the first engaging portion 224 and the second engaging portion 33 are made easier, reducing the disassembly and assembly difficulty of the lens body 30.

[0055] In some embodiments of the present utility model, please refer to Figure 2 and Figure 3, an installation space 23 is formed between the inner peripheral wall of the lifting structure 20 and the outer peripheral wall of the lens body 30, and a light leakage prevention structure 40 is provided in the installation space 23. The inner peripheral wall of the connection unit 226 is a part of the inner peripheral wall of the lifting structure 20, and the inner peripheral wall of the connection unit 226 and at least a part of the outer peripheral wall of the lens part are matched in size to achieve mutual clamping. The other part of the inner peripheral wall of the lifting structure 20 is spaced from the outer peripheral wall of the lens body 30 to form the installation space 23. The wafer test lens module 100 is used in cooperation with a light source to illuminate the wafer. Specifically, the light source emits light, and after passing through structures such as a light homogenizing plate, it is refracted through the lens body 30 to the wafer. The lens body 30 has a light incident side and a light exit side. The light incident side of the lens body 30 is close to the lens module seat 10, and the light exit side of the lens body 30 is far from the lens module seat 10. When light passes through the lens body 30, some light will leak out between the inner peripheral wall of the connection unit 226 and the outer peripheral wall of the lens body 30, resulting in a light halo around the wafer and affecting the detection of the wafer.

[0056] By providing the light leakage prevention structure 40, the light of the light source can be prevented from leaking out between the lifting structure 20 and the lens body 30. In particular, one end of the lifting structure 20 has a plurality of spaced spaces 225, which may cause light to directly emit from the spaced spaces 225. Therefore, the light leakage prevention structure 40 is provided to block some of the spaced spaces 225 and the gap between the connection unit 226 and the lens body 30.

[0057] In some embodiments, the light leakage prevention structure 40 is annular and is provided around the inner peripheral wall of the lifting structure 20 and the outer peripheral wall of the lens body 30. In this way, the gaps at all circumferential locations can be blocked by the light leakage prevention structure 40.

[0058] In some embodiments, the light leakage prevention structure 40 is a soft structure, which can be made of materials such as rubber and silica gel. When the light leakage prevention structure 40 is installed between the lifting structure 20 and the lens body 30, it can be deformed under the extrusion of the two, further eliminating the gap between the lifting structure 20 and the lens body 30 and improving the light leakage prevention effect.

[0059] In some embodiments of the present invention, please refer to Figures 2 to 5, the lifting structure 20 includes a first annular wall 221, a second annular wall 222, and a first radial connecting wall 223 connecting the first annular wall 221 and the second annular wall 222. The inner diameter of the first annular wall 221 is greater than the inner diameter of the second annular wall 222, and the connecting unit 226 is disposed on the first annular wall 221; the lens body 30 includes a third annular wall 31 and a fourth annular wall 32 connected to each other. At least part of the outer diameter of the fourth annular wall 32 is smaller than the outer diameter of the third annular wall 31, and the second clamping portion 33 is disposed on the third annular wall 31; the first annular wall 221, the first radial connecting wall 223, and the fourth annular wall 32 enclose an installation space 23.

[0060] The connecting unit 226 is disposed on the first annular wall 221 of the lifting structure 20. The first annular wall 221 cooperates with the third annular wall 31 of the lens body 30, and their dimensions match each other. The inner diameters of the first annular wall 221 and the second annular wall 222 of the lifting structure 20 are different, so that an axial limiting step 214 is formed at the connection between the two (the first radial connecting wall 223). The outer diameter of the fourth annular wall 32 is smaller than the inner diameter of the first annular wall 221. The first annular wall 221, the first radial connecting wall 223, and the fourth annular wall 32 enclose the installation space 23, and the light leakage prevention structure 40 is disposed in the installation space 23.

[0061] By setting the lifting structure 20 to the first annular wall 221 and the second annular wall 222 with different inner diameters, the first annular wall 221 and the second annular wall 222 are connected by the first radial connecting wall 223. By setting the outer peripheral wall of the lens body 30 to the third annular wall 31 and the fourth annular wall 32 with different outer diameters, there is a spaced arrangement between the first annular wall 221 and the fourth annular wall 32. The light leakage prevention structure 40 is disposed between the first annular wall 221 and the fourth annular wall 32. At the same time, the first radial connecting wall 223 can axially limit the light leakage prevention structure 40.

[0062] In some embodiments, please refer to Figure 3 , at least part of the outer diameter of the fourth annular wall 32 is gradually changed, so that part of the outer diameter of the fourth annular wall 32 is smaller than the first annular wall 221.

[0063] Optionally, part of the outer wall of the third annular wall 31 is conical. Correspondingly, at least part of the inner wall of the light leakage prevention structure 40 is conical and cooperates with the third annular wall 31.

[0064] Optionally, the cross-section of the light leakage prevention structure 40 is square, and a conical chamfer is formed near the inner peripheral wall of the light leakage prevention structure 40, so that the light leakage prevention structure 40 fits with the conical part of the third annular wall 31.

[0065] Optionally, a positioning groove 34 is formed by recessing the lens body 30 along its axial direction. One axial end of the light leakage prevention structure 40 is disposed in the positioning groove 34, and the other axial end of the light leakage prevention structure 40 is limited by the first radial connecting wall 223. In this way, the installation of the light leakage prevention structure 40 can be made more stable and not easily fall off.

[0066] In some embodiments, the fourth annular wall 32 has a structure with a constant outer diameter, and the fourth annular wall 32 and the third annular wall 31 are connected by a radial connecting wall.

[0067] In some embodiments of the present utility model, please refer to Figure 2 and Figure 3 , the lifting structure 20 includes a lifting seat 21 and a lens fixing member 22 that are connected to each other. The lifting seat 21 is installed on the lens module seat 10, and one end of the lens fixing member 22 away from the lifting seat 21 has a connecting unit 226. The lifting seat 21 can axially move relative to the lens module seat 10, and the lens fixing member 22 fixes the lens body 30 through its connecting unit 226.

[0068] By setting the lifting structure 20 as the lifting seat 21 and the lens fixing member 22, the structural complexity of the lifting structure 20 can be reduced. The lifting seat 21 and the lens fixing member 22 can be formed separately and then installed and fixed.

[0069] In some embodiments, please refer to Figure 2 and Figure 3 , the lifting seat 21 includes a fifth annular wall 211, a sixth annular wall 212, and a second radial connecting wall 213 connecting the fifth annular wall 211 and the sixth annular wall 212. The fifth annular wall 211 is used to connect with the lens fixing member 22, and the sixth annular wall 212 is threadedly connected to the lens module seat 10.

[0070] The inner diameters of the fifth annular wall 211 and the sixth annular wall 212 are different, and they are connected to each other by the second radial connecting wall 213. The fifth annular wall 211 is connected to the lens fixing member 22 to fix the lifting seat 21 and the lens fixing member 22 to each other. The sixth annular wall 212 is threadedly connected to the lens module seat 10 to realize the axial movement of the lifting seat 21 relative to the lens module seat 10. Specifically, when the axial position of the lifting seat 21 needs to be adjusted, the lifting seat 21 is rotated, and at the same time, the axial distance between the lifting seat 21 and the lens module seat 10 changes.

[0071] The sixth annular wall 212 of the lifting seat 21 is threadedly connected to the lens module seat 10, so that the axial position of the lens body 30 can be adjusted by rotating the lifting seat 21, and the axial position adjustment method of the lens body 30 is simple.

[0072] In some embodiments, a sixth annular wall 212 is disposed on the outer periphery of the lens module base 10, and the inner peripheral wall of the sixth annular wall 212 is threadedly connected to the outer peripheral wall of the lens module base 10.

[0073] In some embodiments, referring to Figure 2 and Figure 3 , the lens module base 10 is disposed on the outer periphery of the sixth annular wall 212, and the inner peripheral wall of the lens module base 10 is threadedly connected to the inner peripheral wall of the sixth annular wall 212.

[0074] In some embodiments, referring to Figure 2 , Figure 3 and Figure 5 , the lens fixing member 22 includes a first annular wall 221, a second annular wall 222, and a first radial connecting wall 223 connecting the first annular wall 221 and the second annular wall 222. A connecting unit 226 is disposed on the first annular wall 221, and the second annular wall 222 is threadedly connected to the fifth annular wall 211. The first annular wall 221 is used to connect and fix the lens body 30, and the second annular wall 222 is used to connect to the lifting base 21.

[0075] By threadedly connecting the second annular wall 222 of the lens fixing member 22 to the fifth annular wall 211 of the lifting base 21, a fixed connection between the lens fixing member 22 and the lifting base 21 is achieved. This makes the fixed connection method between the two simple, without the need to additionally use fixing members, and the assembly is convenient.

[0076] Optionally, the second annular wall 222 is disposed on the outer periphery of the fifth annular wall 211, and the inner peripheral wall of the second annular wall 222 is threadedly connected to the outer peripheral wall of the fifth annular wall 211.

[0077] Optionally, referring to Figure 3 , the fifth annular wall 211 is disposed on the outer periphery of the second annular wall 222, and the inner peripheral wall of the fifth annular wall 211 is threadedly connected to the outer peripheral wall of the second annular wall 222.

[0078] In other embodiments, the lifting base 21 and the lens fixing member 22 can be fixed to each other by means of fixing such as glue fixing and screws.

[0079] In some embodiments of the present utility model, referring to Figure 2 and Figure 3, a light homogenizing plate 50 is fixedly arranged inside the lifting seat 21. A limiting step 214 is recessed on the inner wall of the lifting seat 21, and the second radial connecting wall 213 has a threaded hole for cooperating with the threaded part 60. Opposite sides of the light homogenizing plate 50 are respectively limited by the limiting step 214 and the head of the threaded part 60. After the light emitted by the light source passes through the light homogenizing plate 50, it is refracted by the lens body 30, which can make the light more uniform. The threaded part 60 includes a head and a rod part. The outer diameter of the head is larger than that of the rod part, and an external thread is provided on the rod part. Therefore, when the threaded part 60 is connected to the threaded hole of the second radial connecting wall 213, its head is exposed, and the head can stop the edge of the light homogenizing plate 50.

[0080] Through the arrangement of the light homogenizing plate 50, the light can be emitted to the lens body 30 after passing through the light homogenizing plate 50, and thus the emitted light can be made more uniform. Opposite axial sides of the light homogenizing plate 50 are respectively limited by the lifting seat 21 and the head of the threaded part 60, so that the light homogenizing plate 50 is stably installed inside the lifting seat 21.

[0081] In some embodiments, the number of the threaded parts 60 is multiple, and they are arranged at circumferential intervals on the second radial connecting wall 213 to improve the stability of the light homogenizing plate 50.

[0082] In other embodiments, one axial side of the light homogenizing plate 50 is limited by the limiting step 214, and the second radial connecting wall 213 is provided with a pin hole. Opposite sides of the light homogenizing plate 50 are respectively limited by the limiting step 214 and the head of the pin.

[0083] In other embodiments, the light homogenizing plate 50 is fixed on the limiting step 214 through a bonding structure such as glue or double-sided tape.

[0084] In some embodiments, please refer to Figure 2 and Figure 3 , the light homogenizing plate 50 is in a disc shape, and the outer diameter of the light homogenizing plate 50 is larger than the inner diameter of the end of the lifting seat 21 close to the light homogenizing plate 50. The lifting seat 21 includes a fifth annular wall 211, a sixth annular wall 212, and a second radial connecting wall 213 connecting the fifth annular wall 211 and the sixth annular wall 212. The light homogenizing plate 50 is arranged inside the second radial connecting wall 213. The end of the lifting seat 21 close to the light homogenizing plate 50 is the sixth annular wall 212, and the inner diameter of the sixth annular wall 212 is smaller than the outer diameter of the light homogenizing plate 50, so that the light homogenizing plate 50 can be inserted from the end of the sixth annular wall 212 away from the second radial connecting wall 213, and the threaded part 60 is installed at this end.

[0085] The light homogenizing plate 50 is in a disc shape, and there is no need to distinguish the installation angle of the light homogenizing plate 50. The outer diameter of the light homogenizing plate 50 is larger than the inner diameter of the end of the lifting seat 21 close to the light homogenizing plate 50, so that the light homogenizing plate 50 can be assembled from the end of the lifting seat 21 close to the lens module seat 10, providing a feasible assembly solution.

[0086] In some embodiments of the present utility model, please refer to Figure 1 and Figure 2 , the lens module base 10 includes a seventh annular wall 11 and a flange 12 connected to the periphery of the seventh annular wall 11. A plurality of connection holes are provided on the flange 12, so that the lens module base 10 can be fixed on the module fixing bracket 400 through the flange 12 and fixing members.

[0087] Optionally, an internal thread is provided on the inner peripheral wall of the seventh annular wall 11, and the outer peripheral wall of the lifting structure 20 is threadedly connected to the inner peripheral wall of the seventh annular wall 11 to realize the axial movement of the lifting structure 20.

[0088] Please refer to Figures 6 to 8 , the present utility model further provides a wafer testing device. The wafer testing device includes the wafer testing lens module 100 in any of the above embodiments, and further includes a module fixing bracket 400. The lens module base 10 of the wafer testing lens module 100 is fixed to the module fixing bracket 400. The module fixing bracket 400 has a plurality of installation positions, and the number of installation positions is the same as the number of wafer testing lens modules 100.

[0089] For the wafer testing device provided by the present utility model, the above-mentioned wafer testing lens module 100 is adopted. The wafer testing lens module 100 includes a lens module base 10, a lifting structure 20 and a lens body 30. The lifting structure 20 can axially move relative to the lens module base 10, so as to change the axial position of the lens body 30. A plurality of circumferentially spaced connection units 226 are provided at one end of the lifting structure 20, and at least some of the connection units 226 are provided with first latching portions 224, so that one end of the lifting structure 20 can be deformed and its size can change. The second latching portion 33 on the lens body 30 can be latched with the first latching portion 224, and the lens body 30 can also be easily disassembled from the lifting structure 20, which is convenient for replacing the lens body 30. The replacement process is simple, the lens body 30 will not be scratched, and the time required for replacing the lens body 30 is short, and the debugging time is short.

[0090] In some embodiments of the present utility model, please refer to Figure 1 and Figure 2 , the module fixing bracket 400 is provided with multiple groups of connection holes, and each group of connection holes is used to connect a lens module base 10. A flange 12 is provided on the lens module base 10. A plurality of connection holes are provided on the flange 12. Connecting members such as screws pass through the connection holes on the flange 12 and are connected to the connection holes on the module fixing bracket 400 to realize the installation and fixation of the wafer testing lens module 100.

[0091] In some embodiments of the present utility model, please refer to Figures 6 to 8, the wafer testing device further includes a probe card fixing frame 200, a circuit board assembly 300, and a probe protection plate 500. The module fixing frame 400 and the circuit board assembly 300 are respectively fixed on opposite sides of the probe card fixing frame 200. Specifically, the circuit board assembly 300 is disposed on the first side of the probe card fixing frame 200, and the module fixing frame 400 is disposed on the second side of the probe card fixing frame 200. The probe card fixing frame 200 is provided with mounting holes, such that the module fixing frame 400 is disposed opposite to the mounting holes, and the wafer testing lens module 100 can pass through the probe card fixing frame 200 to its first side.

[0092] The circuit board assembly 300 includes a circuit board body 301, a probe assembly 302 fixed to the first side of the circuit board body 301, and a connector 303 fixed to the second side of the circuit board body 301. The probe card fixing frame 200 is provided with avoidance holes for avoiding the connector 303. The circuit board body 301 is provided with a plurality of board holes for each wafer testing lens module 100 to pass through.

[0093] The probe protection plate 500 is fixed to the first side of the circuit board body 301 for shielding and protecting the probe assembly 302.

[0094] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A wafer testing lens module, characterized in that: It includes a lens module seat, a lifting structure capable of generating axial displacement relative to the lens module seat, and a lens body detachably connected to the lifting structure, one end of the lifting structure has a plurality of circumferentially spaced connection units, at least some of the connection units are provided with a first clamping portion, and the peripheral wall of the lens body is provided with a second clamping portion for mutually clamping with the first clamping portion.

2. The wafer testing lens module according to claim 1, wherein: There is a spacing space between two adjacent connection units, and the first clamping portion is arranged close to the spacing space.

3. The wafer testing lens module according to claim 1, wherein: An installation space is formed between the inner peripheral wall of the lifting structure and the outer peripheral wall of the lens body, and a light leakage prevention structure is arranged in the installation space.

4. The wafer testing lens module according to claim 3, characterized in that: The lifting structure includes a first annular wall, a second annular wall and a first radial connecting wall connecting the first annular wall and the second annular wall, the inner diameter of the first annular wall is larger than the inner diameter of the second annular wall, and the connecting unit is arranged on the first annular wall; the lens body includes a third annular wall and a fourth annular wall connected to each other, at least a part of the outer diameter of the fourth annular wall is smaller than the outer diameter of the third annular wall, and the second clamping portion is arranged on the third annular wall; the first annular wall, the first radial connecting wall and the fourth annular wall enclose the installation space.

5. The wafer testing lens module according to claim 1, wherein: The lifting structure comprises a lifting seat and a lens fixing member connected to each other. The lifting seat is installed on the lens module seat, and the end of the lens fixing member away from the lifting seat is provided with the connecting unit.

6. The wafer testing lens module according to claim 5, characterized in that: The lifting seat includes a fifth annular wall, a sixth annular wall and a second radial connecting wall connecting the fifth annular wall and the sixth annular wall. The fifth annular wall is used to connect with the lens fixing piece, and the sixth annular wall is threadedly connected with the lens module seat.

7. The wafer testing lens module according to claim 6, wherein: The lens fixing member includes a first annular wall, a second annular wall and a first radial connecting wall connecting the first annular wall and the second annular wall. The connecting unit is arranged on the first annular wall, and the second annular wall is threadedly connected to the fifth annular wall.

8. The wafer testing lens module according to claim 6, wherein: A light-distributing plate is fixedly arranged in the lifting seat, the inner wall of the lifting seat is recessed to form a limiting step, and the second radial connecting wall has a threaded hole matched with the threaded member, and the opposite sides of the light-distributing plate are respectively limited by the limiting step and the head of the threaded member.

9. The wafer testing lens module according to claim 8, characterized in that: The light averaging plate is in the shape of a disc, and the outer diameter of the light averaging plate is larger than the inner diameter of one end of the lifting seat close to the light averaging plate.

10. A wafer testing device, characterized in that: It comprises a module fixing frame and a plurality of wafer testing lens modules according to any one of claims 1 to 9, wherein a lens module seat of the wafer testing lens module is fixed to the module fixing frame.

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