Laser coupler and exposure device
By designing a laser coupler containing an optical coupling module, the reflective surface and the transmission surface are used to achieve coupling of laser light at different wavelengths, the problems of complex operation and uneven energy distribution in the prior art are solved, and the uniform distribution of laser energy and simplicity of operation are achieved.
Patent Information
- Application Number
- CN202421925634.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-06-13
- Estimated Expiration
- 2034-08-09
AI Technical Summary
The existing laser coupling technology requires the introduction of lasers of different wavelengths into the same laser head module, resulting in complex operation and uneven laser energy distribution.
A laser coupler is designed, including an optical coupling module, each module includes a housing and optical element, and the coupling of laser light at different wavelengths is achieved through the reflective surface and the transmissive surface to ensure uniform energy distribution.
The uniform coupling of lasers at different wavelengths is achieved, with simple operation, simple structure, low cost, and uniform energy distribution of coupled lasers.
Smart Images
Figure CN222979874U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of optical processing technology, and particularly to a laser coupler and an exposure device having the laser coupler. Background Art
[0002] When an exposure machine exposes some special lithography materials (photoresist) or to achieve certain specific lithography processes, it is necessary to irradiate the lithography materials with laser light of a specific energy. The energy of the laser is related to the wavelength, and the laser energies corresponding to different wavelengths of laser light (such as laser light with a wavelength of 375 nm, laser light with a wavelength of 405 nm, laser light with a wavelength of 445 nm) are different. If the energy of the required specific laser is between two wavelengths, then it is necessary to couple the two wavelengths of laser light.
[0003] Currently, when performing laser coupling, it is necessary to introduce two wavelengths of laser light into the same laser head module, that is, one end of multiple optical fibers is all plugged into the same laser head module, and the other end is plugged into the corresponding laser, such as a part is plugged into a laser that can generate laser light with a wavelength of 375 nm, and a part is plugged into a laser that can generate laser light with a wavelength of 405 nm. However, this laser coupling method needs to ensure that the optical fibers corresponding to different wavelengths of laser light are evenly distributed in the laser head module, otherwise the laser energy emitted by the laser head module will be uneven. Moreover, this laser coupling method is relatively complex in operation.
[0004] The information disclosed in this background art section is only intended to increase the understanding of the overall background of the utility model, and should not be regarded as an admission or any form of suggestion that this information constitutes the prior art already known to those of ordinary skill in the art. Summary of the Utility Model
[0005] The purpose of the utility model is to provide a laser coupler and an exposure device, which are convenient to operate during laser coupling and the energy distribution of the coupled laser is uniform.
[0006] To achieve the above object, an embodiment of the utility model provides a laser coupler, including at least one optical coupling module, and each of the optical coupling modules includes
[0007] a housing, including a first light inlet, a second light inlet and a light outlet;
[0008] an optical element, disposed in the housing, including a reflective surface and a transmissive surface disposed opposite to each other; wherein,
[0009] the laser light entering the housing through the first light inlet is reflected by the reflective surface to the light outlet;
[0010] The laser entering the housing through the second light inlet passes through the optical element through the transmission surface and is directed towards the light outlet, and further couples with the laser entering the housing through the first light inlet.
[0011] In one or more embodiments of the present invention, the wavelength of the laser entering the housing through the first light inlet is different from the wavelength of the laser entering the housing through the second light inlet.
[0012] In one or more embodiments of the present invention, at least one optical fiber is provided at the first light inlet, and the optical fiber is configured to transmit laser light into the housing through the first light inlet.
[0013] In one or more embodiments of the present invention, at least one optical fiber is provided at the second light inlet, and the optical fiber is configured to transmit laser light into the housing through the second light inlet.
[0014] In one or more embodiments of the present invention, the laser entering the housing through the first light inlet forms a 45° angle with the reflection surface, and the laser entering the housing through the second light inlet forms a 45° angle with the transmission surface.
[0015] In one or more embodiments of the present invention, a plurality of the optical coupling modules are included, and the laser entering the first light inlet and / or the second light inlet of each optical coupling module can be provided by another optical coupling module.
[0016] In one or more embodiments of the present invention, the shape of the housing is a cube, and the optical element is located on the cross-section passing through the center point of the cube.
[0017] An embodiment of the present invention further provides an exposure device, including
[0018] A reflection box, which is internally provided with a first optical component;
[0019] A lens box, which is internally provided with a second optical component;
[0020] A DMD, which is arranged on the reflection box;
[0021] The above-mentioned laser coupler, which is arranged on the reflection box; wherein,
[0022] The laser generated by the laser coupler is processed by the first optical component and then directed towards the DMD, and after being processed by the DMD, it is directed towards the second optical component, and after being processed by the second optical component, it is emitted to the outside.
[0023] In one or more embodiments of the present invention, the first optical component includes a convex lens and a reflector.
[0024] In one or more embodiments of the present utility model, the second optical component includes a lens.
[0025] Compared with the prior art, the laser coupler and the exposure device according to the embodiments of the present utility model can at least couple lasers with different wavelengths into a laser with energy meeting the requirements, and have the advantages of simple operation, simple structure, low cost, uniform energy distribution of the coupled laser, etc. Description of the Drawings
[0026] Figure 1 is a schematic structural diagram of a laser coupler according to an embodiment of the present utility model;
[0027] Figure 2 is a schematic connection diagram of a plurality of optical coupling modules according to an embodiment of the present utility model;
[0028] Figure 3 is a schematic structural diagram of an exposure device according to an embodiment of the present utility model;
[0029] Figure 4 is a schematic structural diagram of an exposure device according to another embodiment of the present utility model.
[0030] Main Reference Numeral Description:
[0031] 10 - Laser coupler, 11 - Optical coupling module, 111 - Housing, 111a - First light input port, 111b - Second light input port, 111c - Light output port, 112 - Optical element, 112a - Reflective surface, 112b - Transmissive surface, 20 - Exposure device, 21 - Reflection box, 211 - Reflection box body, 212 - First optical component, 22 - Lens box, 23 - DMD. Detailed Embodiments
[0032] The following will describe in detail the specific embodiments of the present utility model with reference to the drawings, but it should be understood that the protection scope of the present utility model is not limited by the specific embodiments.
[0033] Unless otherwise clearly stated, throughout the specification and claims, the term "comprise" or its variations such as "comprises" or "including" etc. will be understood to include the stated elements or components, without excluding other elements or other components.
[0034] Such as Figures 1 to 2As shown, a laser coupler 10 according to a preferred embodiment of the present utility model can at least couple lasers of different wavelengths into a laser with energy meeting the requirements. When the laser coupler 10 couples lasers, the operation is simple. Only by guiding the light of the corresponding wavelength into it through the corresponding number of optical fibers can a laser with the required energy be coupled out. For example, when using lasers with wavelengths of 405 nm and 375 nm respectively and coupling out a laser with energy C by using 64 optical fibers, 16 optical fibers can be used to transmit the laser with a wavelength of 405 nm into the laser coupler 10, and at the same time, 48 optical fibers can be used to transmit the laser with a wavelength of 375 nm into the laser coupler 10, and finally a laser with energy C can be coupled out.
[0035] In addition, when the laser coupler 10 couples lasers, the energy of the finally coupled laser has the advantage of uniform distribution. This is because when the laser coupler 10 couples lasers, it is not affected by whether the optical fibers corresponding to the lasers of different wavelengths are evenly distributed, so that the energy of the coupled laser can be evenly distributed.
[0036] Specifically, as shown in Figure 1 and Figure 2 the laser coupler 10 includes at least one optical coupling module 11. When the laser coupler 10 includes multiple optical coupling modules 11, as shown in Figure 2 the laser coupler 10 includes two optical coupling modules 11. The optical coupling modules 11 can cooperate with each other to finally couple out a laser with the required energy. Here, the number of the optical coupling modules 11 can be set according to actual needs.
[0037] As shown in Figure 1 each optical coupling module 11 includes a housing 111 and an optical element 112. Among them, the housing 111 is a hollow structure, which includes a first light inlet 111a, a second light inlet 111b and a light outlet 111c. Both the first light inlet 111a and the second light inlet 111b are used for allowing lasers to enter the housing 111, and the light outlet 111c is used for allowing lasers to emit from the inside of the housing 111 to the outside. The optical element 112 is arranged in the housing 111 and is used for coupling the laser entering the housing 111 through the first light inlet 111a and the laser entering the housing 111 through the second light inlet 111b, and emitting the coupled laser to the outside through the light outlet 111c. That is to say, the laser entering the housing 111 through the first light inlet 111a and the laser entering the housing 111 through the second light inlet 111b are coupled by the optical element 112 and then emitted to the outside through the light outlet 111c.
[0038] Further, the optical element 112 includes a reflection surface 112a and a transmission surface 112b which are oppositely arranged. Among them, the reflection surface 112a is configured to reflect the laser; the transmission surface 112b is configured to allow the laser to pass through the optical element 112. In a specific implementation, the laser entering the housing 111 through the first light inlet 111a is directed towards the reflection surface 112a of the optical element 112, and after being reflected by the reflection surface 112a, it is directed towards the light outlet 111c; the laser entering the housing 111 through the second light inlet 111b is directed towards the transmission surface 112b of the optical element 112, and after being processed by the transmission surface 112b, it passes through the optical element 112 and is directed towards the light outlet 111c. At the same time, the laser entering the housing 111 through the second light inlet 111b is also coupled with the laser entering the housing 111 through the first light inlet 111a on the path towards the light outlet 111c.
[0039] In this embodiment, the wavelengths of the laser entering the housing 111 through the first light inlet 111a and the laser entering the housing 111 through the second light inlet 111b are preferably different, so as to synthesize a laser with an energy between the two wavelengths.
[0040] Combined Figure 1 and Figure 2 As shown, a 45° angle is formed between the laser entering the housing 111 through the first light inlet 111a and the reflection surface 112a, and a 45° angle is also formed between the laser entering the housing 111 through the second light inlet 111b and the transmission surface 112b. Through this angle setting, the laser entering the housing 111 through the first light inlet 111a and the laser entering the housing 111 through the second light inlet 111b can be coupled on the path towards the light outlet 111c.
[0041] Further, as Figure 1 shown, when the laser coupler 10 includes one optical coupling module 11, the lasers entering the housing 111 through the first light inlet 111a and the second light inlet 111b are both guided by optical fibers. That is to say, by arranging optical fibers at the first light inlet 111a and the second light inlet 111b, the corresponding lasers are transmitted into the housing 111. The number of optical fibers here can be set according to actual needs. For example, it can be set to 1, or as described above, 16 optical fibers can be arranged at the first light inlet 111a to transmit a laser with a wavelength of 405 nm, and 48 optical fibers can be arranged at the second light inlet 111b to transmit a laser with a wavelength of 375 nm.
[0042] Of course, in other embodiments, combined Figure 2As shown, when the laser coupler 10 includes a plurality of optical coupling modules 11, the laser entering at least one of the first light input ports 111a and the second light input ports 111b of each optical coupling module 11 can be provided by other optical coupling modules 11. That is to say, the laser entering the first light input port 111a or the second light input port 111b of each optical coupling module 11 can be provided by other optical coupling modules 11, or the lasers entering the first light input port 111a and the second light input port 111b of each optical coupling module 11 are both provided by other optical coupling modules 11. As Figure 2 shown, the laser entering the second light input port 111b of the optical coupling module 11 on the left side is provided by the optical coupling module 11 on the right side.
[0043] In this embodiment, as Figure 1 shown, the housing 111 is generally in the shape of a cube. The first light input port 111a is provided on the top surface of the housing 111, the second light input port 111b is provided on the right side surface, and the light output port 111c is provided on the left side surface. The optical element 112 is disposed inside it and is located on the cross-section passing through the center point. This cross-section can divide the cube into two equal parts, and the angle between this cross-section and the bottom surface is 45 degrees. Of course, in other embodiments, the shape of the housing 111 and the position of the optical element 112 can also be set according to actual needs, as long as the lasers entering the housing 111 through the first light input port 111a and the lasers entering the housing 111 through the second light input port 111b are coupled by the optical element 112 and then emitted to the outside through the light output port 111c.
[0044] The laser coupler 10 described in the present utility model can conveniently realize the coupling of the laser by adopting the above-mentioned optical element 112, and the coupled laser has the advantage of uniform energy distribution. The laser coupler 10 also has the advantages of simple structure and low cost.
[0045] Combined with Figure 3 and Figure 4 shown, an exposure device 20 according to a preferred embodiment of the present utility model is used for exposing an object to be exposed (such as photoresist, etc.), and includes a reflection box 21, a lens box 22, a DMD (Digital Micromirror Device), and the above-mentioned laser coupler 10. Among them, the reflection box 21 includes a reflection box body 211 and a first optical component 212. The first optical component 212 is disposed inside the reflection box body 211 and is configured to process the laser light. The lens box 22 includes a lens box body and a second optical component. The lens box body is connected to the reflection box body 211, and the second optical component is disposed inside the lens box and is configured to process the laser. Both the DMD 23 and the laser coupler 10 are disposed in the reflection box body 211.
[0046] In specific implementation, the laser generated by the laser coupler 10 enters the reflection box body 211, is processed by the first optical component 212 and then shoots towards the DMD 23. Further processed by the DMD 23, it shoots towards the second optical component 222 in the lens box body 221, and is output after being further processed by the second optical component 222 to perform exposure processing on the object to be exposed.
[0047] In this embodiment, the first optical component 212 includes, but is not limited to, a convex lens and a reflector arranged along the light transmission path. The specific structure of the first optical component 212 can be set according to actual needs, as long as it can guide the laser generated by the laser coupler 10 to the DMD 23. The second optical component 222 includes, but is not limited to, a lens arranged along the light transmission path. The lens here includes, but is not limited to, a convex lens and a concave lens. The specific structure of the second optical component 222 can be set according to actual needs.
[0048] The foregoing description of specific exemplary embodiments of the present invention is for purposes of illustration and exemplification. These descriptions are not intended to limit the present invention to the precise forms disclosed, and it is obvious that many changes and variations can be made in light of the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical applications, so that those skilled in the art can implement and utilize various different exemplary embodiments of the present invention, as well as various different selections and changes. The scope of the present invention is intended to be defined by the claims and their equivalents.
Claims
1. A laser coupler, characterized in that: At least one optical coupling module is included, each of the optical coupling modules includes The housing comprises a first light inlet, a second light inlet and a light outlet; The optical element is disposed in the housing and includes a reflective surface and a transmissive surface disposed opposite to each other; wherein, The laser light entering the housing through the first light inlet is reflected by the reflective surface to the light outlet; The laser light entering the housing through the second light inlet passes through the optical element via the transmission surface and is emitted toward the light outlet, and is further coupled with the laser light entering the housing through the first light inlet.
2. The laser coupler according to claim 1, characterized in that The wavelength of the laser light entering the housing through the first light entrance is different from the wavelength of the laser light entering the housing through the second light entrance.
3. The laser coupler according to claim 1, wherein: At least one optical fiber is disposed at the first light entrance, and the optical fiber is configured to transmit laser light into the housing through the first light entrance.
4. The laser coupler according to claim 1 or 3, characterized in that: At least one optical fiber is disposed at the second light entrance, and the optical fiber is configured to transmit laser light into the housing through the second light entrance.
5. The laser coupler according to claim 1, wherein: The laser light entering the housing through the first light entrance forms an angle of 45° with the reflective surface, and the laser light entering the housing through the second light entrance forms an angle of 45° with the transmissive surface.
6. The laser coupler according to claim 1, wherein: A plurality of the optical coupling modules are included, and the laser light entering the first light entrance port and / or the second light entrance port of each optical coupling module may be provided by another optical coupling module.
7. The laser coupler according to claim 1, wherein: The shell is in the shape of a cube, and the optical element is located on a cross section of the cube passing through a center point.
8. An exposure device, characterized in that: include A reflection box, in which a first optical component is arranged; A lens box, in which a second optical component is arranged; DMD, arranged on the reflection box; The laser coupler according to any one of claims 1 to 7 is provided on the reflection box; wherein: The laser generated by the laser coupler is emitted toward the DMD after being processed by the first optical component, and then emitted toward the second optical component after being processed by the DMD, and then emitted to the outside after being processed by the second optical component.
9. The exposure device according to claim 8, characterized in that The first optical component includes a convex lens and a reflector arranged along the light transmission path.
10. The exposure device according to claim 8, wherein The second optical component includes a lens.