Pressure relief equipment and polycrystalline silicon cold hydrogenation process system

Abstract

The embodiment of the utility model provides pressure relief equipment and a polycrystalline silicon cold hydrogenation process system, the pressure relief equipment comprises: a pressure relief filter, the inlet of which is connected to a silicon powder receiving tank and / or a silicon powder storage tank of the polycrystalline silicon cold hydrogenation process system; the pressure relief pipeline is connected with an outlet of the pressure relief filter; a part of the pipe wall of the pressure relief pipeline is a perspective observation part, and the perspective observation part forms a monitoring area for monitoring the interior of the pressure relief pipeline; and a flow limiting orifice plate is arranged in the pressure relief pipeline and is arranged on the downstream side of the perspective observation part. Through the arrangement, whether silicon powder leaks in the pressure relief pipeline or not is monitored through the perspective observation part, so that the effect of indirectly monitoring whether the filter element of the pressure relief filter is penetrated or not can be achieved, and the situation that the pressure relief pipeline is impacted by silicon powder and leaks due to the fact that the filter element is not found to be penetrated in time is avoided.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of chemical equipment, and in particular, to a pressure relief device and a polysilicon cold hydrogenation process system. Background Art

[0002] In the prior art, silicon powder in a polysilicon cold hydrogenation process system is collected in a high-pressure tank together with high-pressure gas. After the high-pressure gas in the high-pressure tank is recovered, the low-pressure gas remaining in the tank needs to be filtered by a pressure relief filter arranged at the top of the tank and then discharged to a tail gas treatment device along a pressure relief pipeline. During the long-term operation of the filter element of the pressure relief filter, it may be penetrated. When the filter element is penetrated and damaged, the silicon powder in the high-pressure tank will enter the tail gas treatment system along the pressure relief pipeline with the discharged gas. The high-hardness silicon powder will continuously rub against the pressure relief pipeline, resulting in continuous thinning of the pipe wall and even leakage, causing problems such as environmental pollution. In the polysilicon cold hydrogenation process system of the prior art, it is impossible to monitor whether the filter element of the pressure relief filter is penetrated, and only after the pressure relief pipeline is worn and leaked can it be found that the filter element is penetrated.

[0003] In view of this, the present application is specifically proposed. Utility Model Content

[0004] In view of the above problems, the embodiments of the present application provide a pressure relief device and a polysilicon cold hydrogenation process system to achieve real-time monitoring of whether there is silicon powder in the pressure relief pipeline, and further achieve the purpose of monitoring whether the filter element of the pressure relief filter is penetrated.

[0005] To achieve the above purpose, the embodiments of the present application provide the following technical solutions:

[0006] The first aspect of the embodiments of the present application provides a pressure relief device for a polysilicon cold hydrogenation process system; the pressure relief device includes: a pressure relief filter, the inlet of the pressure relief filter is connected to a silicon powder receiving tank and / or a silicon powder storage tank of the polysilicon cold hydrogenation process system; a pressure relief pipeline, connected to the outlet of the pressure relief filter; a part of the pipe wall of the pressure relief pipeline is a perspective observation part, and the perspective observation part constitutes a monitoring area for monitoring the inside of the pressure relief pipeline; a flow-limiting orifice plate is arranged in the pressure relief pipeline, and the flow-limiting orifice plate is arranged on the downstream side of the perspective observation part.

[0007] In a possible implementation manner, the perspective observation part includes a perspective pipe section arranged on the pressure relief pipeline; the perspective pipe section is any pipe section connected in series on the pressure relief pipeline; and / or, the perspective pipe section is a pipeline connected in parallel on any pipe section of the pressure relief pipeline.

[0008] In a possible implementation, the flow-limiting orifice plate is disposed at the downstream end of the perspective pipe section; the flow-limiting orifice plate covers the cross-section of the downstream end of the perspective pipe section, and a plurality of hollowed-out flow-limiting holes are arranged on the flow-limiting orifice plate, and the hollowed-out flow-limiting holes communicate with the upstream and downstream sides of the flow-limiting orifice plate.

[0009] In a possible implementation, a joint is provided at the outlet of the pressure relief filter, and the joint is communicated with the inlet end of the pressure relief pipeline; a perspective lens is provided on the joint and / or the pressure relief pipeline, the perspective lens is made of a perspective material, and the perspective lens forms at least part of the pipe wall of the joint or the pressure relief pipeline.

[0010] In a possible implementation, a blowing pipeline is connected to the pressure relief pipeline or the joint, and the blowing pipeline is connected to a gas B supply source; a control valve for controlling the on-off of the blowing pipeline is provided on the blowing pipeline; the connection between the blowing pipeline and the pressure relief pipeline or the joint is located on the downstream side of the perspective lens, and the pipe section where the blowing pipeline is connected to the pressure relief pipeline or the joint is a connecting pipe section, and the connecting pipe section extends obliquely towards the perspective lens.

[0011] In a possible implementation, a detection pipe section is provided on the joint or the pressure relief pipeline, the detection pipe section is a bent pipe with an axis extending along an arc, and the diameter of the detection pipe section is smaller than the diameter of the pressure relief pipeline; a detector is provided on the detection pipe section, and the detector monitors the wall thickness of the detection pipe section.

[0012] The second aspect of the embodiments of the present application provides a polysilicon cold hydrogenation process system, which includes a cyclone separator having an inlet one for gas A containing silicon powder to flow in, an outlet one for separated silicon powder to flow out, and an outlet one for separated gas to flow out; a silicon powder filter having an inlet two communicated with the outlet one, an internal filter element for filtering silicon powder from the incoming gas, and an outlet two for silicon powder-filtered gas to flow out and an outlet two for filtered silicon powder to flow out; a silicon powder receiving tank provided with an inlet three communicated with the outlet two, an outlet three for the silicon powder received in the tank to flow out, and an outlet three for the gas in the tank to flow out; a silicon powder storage tank provided with an inlet four communicated with the outlet one, an outlet four for the silicon powder received in the tank to flow out, and an outlet four for the gas in the tank to flow out; and a tail gas treatment device, and the outlet three and the outlet four are connected to the tail gas treatment device through any one of the above pressure relief devices.

[0013] In a possible implementation, the pressure relief pipeline includes a first pressure relief branch, a second pressure relief branch, and a pressure relief outlet pipeline; a first pressure relief filter is provided at the three-way outlet of the silica powder receiving tank, the outlet of the first pressure relief filter is the first outlet, and the first outlet is connected to the inlet of the first pressure relief branch; a second pressure relief filter is provided at the four-way outlet of the silica powder storage tank, the outlet of the second pressure relief filter is the second outlet, and the second outlet is connected to the inlet of the second pressure relief branch; the outlets of the first pressure relief branch and the second pressure relief branch converge at the inlet of the pressure relief outlet pipeline, a perspective pipe section is provided on the pressure relief outlet pipeline, and the outlet of the pressure relief outlet pipeline is connected to the tail gas treatment device.

[0014] In a possible implementation, the inlet of the first pressure relief filter is the first inlet, and the first inlet is in communication with the three-way outlet of the silica powder receiving tank; a first filter element is provided in the first pressure relief filter, and the first filter element filters silica powder from the pressure relief air flow passing through the first pressure relief filter; a first perspective lens is provided at the connection between the first outlet and the first pressure relief branch; the inlet of the second pressure relief filter is the second inlet, and the second inlet is in communication with the four-way outlet of the silica powder storage tank, a second filter element is provided in the second pressure relief filter, and the second filter element filters silica powder from the pressure relief air flow passing through the second pressure relief filter; a second perspective lens is provided at the connection between the second outlet and the second pressure relief branch.

[0015] In a possible implementation, the perspective pipe section, and / or the first perspective lens, and / or the second perspective lens are provided with monitoring cameras; the monitoring cameras monitor the inside of the pressure relief outlet pipeline through the perspective pipe section, and / or the inside of the first pressure relief branch through the first perspective lens, and / or the inside of the second pressure relief branch through the second perspective lens.

[0016] After the embodiments of the present application adopt the above technical solutions, the following remarkable technical improvements are also achieved:

[0017] In the embodiment of the present application, the filter element penetration monitoring device for the pressure relief filter and the polysilicon cold hydrogenation process system add a perspective observation part on the pressure relief pipeline, and use the perspective observation part to monitor the flowing medium in the pressure relief pipeline, so as to directly obtain the detection information of whether the pressure relief gas flowing through the pressure relief pipeline and flowing out of the high-pressure tank through the pressure relief filter contains silicon powder. Furthermore, based on the detection information that the pressure relief gas flowing out of the pressure relief pipeline contains silicon powder, it is possible to indirectly determine whether the filter element of the pressure relief filter is penetrated, achieving the effect of effectively monitoring whether the filter element of the pressure relief filter is penetrated. Furthermore, it is possible to achieve a significant technological progress of timely replacement reminder for the filter element of the pressure relief filter and prevention of potential safety hazards caused by wear of the pressure relief pipeline. In particular, by setting a flow limiting orifice plate on the downstream side of the perspective observation part, the flow rate of the gas in the pressure relief pipeline is reduced and adjusted by the installed flow limiting orifice plate to intercept the silicon powder contained in the gas flowing through the perspective observation part, effectively improving the convenience of observing whether silicon powder flows through the pressure relief pipeline by using the perspective observation part, and further improving the accuracy of monitoring whether the filter element of the pressure relief filter is penetrated.

[0018] In addition to the technical problems solved by the embodiments of the present application described above, the technical features constituting the technical solutions, and the beneficial effects brought by these technical features of the technical solutions, the other technical problems that can be solved by a pressure relief device and a polysilicon cold hydrogenation process system provided by the embodiments of the present application, the other technical features included in the technical solutions, and the beneficial effects brought by these technical features will be further described in detail in the specific implementation manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a schematic structural diagram of the polysilicon cold hydrogenation process system provided by the embodiment of the present application;

[0021] Figure 2 It is a connection schematic diagram of the pressure relief filter provided by the embodiment of the present application.

[0022] Description of the reference numerals:

[0023] 100 - Cyclone separator; 200 - Silicon powder filter; 300 - Silicon powder receiving tank; 400 - Silicon powder storage tank; 500 - Silicon powder collection tank; 600 - Pressure relief pipeline; 700 - Blowing pipeline; 800 - Pressure relief filter;

[0024] 10 - Filter penetration monitoring device;

[0025] 1 - Fluoroscopy tube section; 2 - Flow limiting orifice plate; 3 - Fluoroscope; 31 - First fluoroscope; 32 - Second fluoroscope; 4 - Detector;

[0026] 81 - Connector; 82 - Detection tube section;

[0027] 601 - First pressure relief branch; 602 - Second pressure relief branch; 603 - Pressure relief outlet pipeline;

[0028] 701 - Connecting tube section;

[0029] 801 - First pressure relief filter; 802 - Second pressure relief filter. Detailed implementation mode

[0030] As described in the background art, the main reaction of cold hydrogenation in the polysilicon cold hydrogenation process system in the related art is: Si + 2H2 + 3SiCl4 → 4SiHCl3; the reaction occurs in a fluidized bed. During the process, some silicon powder will enter the cyclone separator 100 and the silicon powder filter 200 along with the gas. After being separated by the cyclone separator 100 and filtered by the silicon powder filter 200, this part of the silicon powder will be collected in a high-pressure tank. After the high-pressure gas in the high-pressure tank is recycled, there will still be some low-pressure gas left, and the low-pressure gas will be depressurized to the tail gas treatment system. The top of the high-pressure tank is equipped with a pressure relief filter 800 to intercept the silicon powder flowing out of the high-pressure tank and prevent silicon powder from being carried out during the process of depressurizing to the tail gas treatment system, which may cause wear to the pressure relief pipeline 600. During the operation of the entire process system, with the accumulation of usage time, the filter element of the pressure relief filter 800 may be penetrated during long-term operation. When the filter element is penetrated and damaged, the silicon powder in the high-pressure tank will enter the tail gas treatment system along with the discharge gas through the pressure relief pipeline 600. The high-hardness silicon powder will continuously rub against the pressure relief pipeline 600, resulting in the continuous thinning of the wall of the pressure relief pipeline 600 until leakage occurs, and even leakage of silicon powder and low-pressure gas may occur, which will pollute the environment and pose potential safety hazards.

[0031] In an embodiment of the present application, a filter element penetration monitoring device 10 for a pressure relief filter 800 is provided. The outlet of the pressure relief filter 800 is connected to a pressure relief pipeline 600, and a perspective observation part is provided on the pressure relief pipeline 600. By monitoring the flowing medium in the pressure relief pipeline 600 through the perspective observation part, the detection information on whether the pressure relief gas flowing through the pressure relief pipeline 600 and flowing out of the high-pressure tank through the pressure relief filter 800 contains silicon powder can be directly obtained. Furthermore, based on the detection information that the pressure relief gas flowing out of the pressure relief pipeline 600 contains silicon powder, it can be indirectly determined whether the filter element of the pressure relief filter 800 is penetrated, achieving the effect of effectively monitoring whether the filter element of the pressure relief filter 800 is penetrated. Furthermore, it can achieve the significant technological progress of timely reminding to replace the filter element of the pressure relief filter 800 and preventing potential safety hazards caused by wear of the pressure relief pipeline 600.

[0032] In order to make the above objects, features, and advantages of the embodiments of the present application more obvious and understandable, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0033] As Figure 1 shown, in an embodiment of the present application, a polysilicon cold hydrogenation process system is provided, which includes: a cyclone separator 100. The cyclone separator 100 uses the rotational centrifugal force generated by its own rotating components to separate silicon powder from the inflowing gas A, so that the separated silicon powder and gas flow out respectively, achieving the effect of separating and filtering the silicon powder-containing gas A generated during the reaction process of the process system. The middle part of the cyclone separator 100 has an inlet one for the silicon powder-containing gas A to flow in, an outlet one at the bottom of the cyclone separator 100 for the separated silicon powder to flow out, and an outlet one at the top of the cyclone separator 100 for the separated gas to flow out. At the same time, in order to further thoroughly filter and separate the silicon powder in the silicon powder-containing gas A, the polysilicon cold hydrogenation process system further includes: a silicon powder filter 200. A filter element is provided inside the silicon powder filter 200 to perform secondary filtration and separation on the flowing gas that has been centrifugally separated by the cyclone separator 100, thereby achieving the purpose of thoroughly filtering the silicon powder in the silicon powder-containing gas A generated in the process system. The middle part of the silicon powder filter 200 has an inlet two connected to the outlet one of the cyclone separator 100. The inside of the silicon powder filter 200 has a filter element for filtering silicon powder from the incoming gas. The top of the silicon powder filter 200 also has an outlet two for the filtered gas to flow out, and the bottom of the silicon powder filter 200 is provided with an outlet two for the filtered silicon powder to flow out.

[0034] As Figure 1 shown, in the embodiment of the present application, the first discharge port of the cyclone separator 100 and the second discharge port of the silicon powder filter 200 are respectively connected to a high-pressure tank to collect the silicon powder separated by the above two into the corresponding high-pressure tanks. The high-pressure tank includes: a silicon powder receiving tank 300 and a silicon powder storage tank 400. The upper part of the silicon powder receiving tank 300 is provided with an inlet three connected to the second discharge port of the silicon powder filter 200, the bottom is provided with a discharge port three for the outflow of the received silicon powder, and the top is provided with an air outlet three for the outflow of the pressure relief gas; the air outlet three of the silicon powder receiving tank 300 is provided with a first pressure relief filter 801 for filtering and intercepting silicon powder in the outflow air current. The first pressure relief filter 801 is provided with a filter element for filtering and intercepting silicon powder in the outflow gas. The outlet of the first pressure relief filter 801 is the first outlet, and the first outlet is connected to a pressure relief pipeline 600, so that the pressure relief gas discharged from the first pressure relief filter 801 flows to the waste gas treatment equipment of the process system through the pressure relief pipeline 600.

[0035] Meanwhile, the upper part of the silicon powder storage tank 400 is provided with an inlet four connected to the first discharge port of the cyclone separator 100, the bottom is provided with a discharge port four for the outflow of the received silicon powder, and the top is provided with an air outlet four for the outflow of the pressure relief gas; the air outlet four of the silicon powder storage tank 400 is provided with a second pressure relief filter 802 for filtering and intercepting silicon powder in the outflow air current. The second pressure relief filter 802 is provided with a filter element for filtering and intercepting silicon powder in the outflow gas. The outlet of the second pressure relief filter 802 is the second outlet, and the second outlet is connected to the pressure relief pipeline 600, so that the pressure relief gas discharged from the second pressure relief filter 802 flows to the waste gas treatment equipment of the process system through the pressure relief pipeline 600. Optionally, in order to improve the collection efficiency of the silicon powder separated by the cyclone separator 100 flowing into the silicon powder storage tank 400, a silicon powder collection tank 500 can be arranged between the cyclone separator 100 and the silicon powder storage tank 400. The silicon powder collection tank 500 is a conical tank with a large upper part and a small lower part. The upper part of the tank body with a large radial dimension is provided with an inlet to be connected to the first discharge port of the cyclone separator 100, and the lower part of the tank body with a small radial dimension is provided with an outlet to be connected to the inlet four arranged on the upper part of the silicon powder storage tank 400, so as to guide the silicon powder separated by the cyclone separator 100 into the silicon powder storage tank 400 by using the conical silicon powder collection tank 500.

[0036] In order to realize the anti-penetration monitoring of the filter elements of the first pressure relief filter 801 and the second pressure relief filter 802, the following settings are made specifically:

[0037] As Figure 1As shown in the figure, in the embodiment of the present application, a pressure relief device includes a pressure relief filter 800, and the outlet of the pressure relief filter 800 is connected to a pressure relief pipeline 600; a filter element penetration monitoring device 10 is provided on the pressure relief pipeline 600. The filter element penetration monitoring device 10 includes a perspective observation part, and the perspective observation part is made of a perspective material. The perspective observation part forms at least part of the pipe wall of the pressure relief pipeline 600, so as to observe the inside of the pressure relief pipeline 600 through the perspective observation part, and further observe whether the pressure relief air flow flowing through the pressure relief pipeline 600 contains silicon powder, so as to realize the effect of timely monitoring whether the filter element of the pressure relief filter 800 is penetrated, and achieve the remarkable technical progress of preventing the silicon powder from being discharged outside with the pressure relief air flow and damaging the pressure relief pipeline 600, etc., and effectively protecting the pressure relief pipeline 600. The above-mentioned perspective material can be any existing material that can achieve a perspective effect, such as: transparent stainless steel pipe, transparent quartz glass, etc.

[0038] In the embodiment of the present application, the perspective observation part includes a perspective pipe section 1 provided on the pressure relief pipeline 600; the perspective pipe section 1 is any pipe section connected in series on the pressure relief pipeline 600; and / or, the perspective pipe section 1 is a pipeline connected in parallel to any pipe section of the pressure relief pipeline 600. Optionally, a partial pipe section of the pressure relief pipeline 600 near the outlet end is set as the perspective pipe section 1, and the perspective pipe section 1 is used to simultaneously monitor whether the filter elements of the two pressure relief filters are penetrated.

[0039] In the embodiment of the present application, the pressure relief pipeline 600 includes: a first pressure relief branch 601, a second pressure relief branch 602 and a pressure relief outlet pipeline 603; the outlet of the first pressure relief filter 801 is a first outlet, and the first outlet is connected to the inlet of the first pressure relief branch 601; a second pressure relief filter 802 is provided at four places at the air outlet of the silicon powder storage tank 400. The outlet of the second pressure relief filter 802 is a second outlet, and the second outlet is connected to the inlet of the second pressure relief branch 602; the outlets of the first pressure relief branch 601 and the second pressure relief branch 602 converge and intersect, and are jointly connected to the inlet of the pressure relief outlet pipeline 603. The outlet of the pressure relief outlet pipeline 603 is connected to the waste gas treatment equipment of the process system to perform waste gas treatment on the two filtered outlet air flows and then discharge them outside.

[0040] At the same time, in order to enable the same perspective pipe section 1 to simultaneously monitor the penetration of the above two pressure relief filters 800, the perspective pipe section 1 is arranged on the pressure relief outlet pipeline 603, so that no matter whether the filter elements of the first pressure relief filter 801 and the second pressure relief filter 802 are penetrated and the leaked silicon powder will flow through the pressure relief outlet pipeline 603, it can be observed and monitored through the perspective pipe section 1, thereby realizing the effect of simultaneously monitoring the anti-penetration of the filter elements of the two pressure relief filters 800.

[0041] In an embodiment of the present application, optionally, a flow limiting orifice plate 2 is further provided at the downstream end of the perspective pipe section 1. The added flow limiting orifice plate 2 is used to reduce and adjust the gas flow rate flowing through the perspective pipe section 1, thereby intercepting the silicon powder contained in the flowing gas and effectively improving the accuracy of monitoring whether silicon powder flows through the perspective pipe section 1 and whether the filter element of the pressure relief filter is penetrated. At the same time, the flow limiting orifice plate 2 covers the cross section of the downstream end of the perspective pipe section 1, and a plurality of hollowed-out flow limiting holes are arranged on the flow limiting orifice plate 2. The hollowed-out flow limiting holes communicate with the upstream and downstream sides of the flow limiting orifice plate 2, and the above-mentioned hollowed-out flow limiting holes are used for the pressure relief gas to pass through the flow limiting orifice plate 2 and smoothly flow to the downstream outlet of the pressure relief pipeline 600.

[0042] In an embodiment of the present application, in order to further improve the accuracy and timeliness of monitoring the penetration of the filter element of the pressure relief filter 800: the filter element penetration monitoring device 10 may further include perspective lenses 3 respectively provided at the outlets of the two pressure relief filters 800 and / or on the pressure relief pipelines 600 connected thereto, so as to use the perspective lenses 3 to detect whether the pressure relief gas flow out of different pressure relief filters 800 contains silicon powder, and then accurately determine which pressure relief filter 800's filter element is penetrated.

[0043] The perspective lens 3 may be made of a perspective material, generally a part of the pipe wall of the joint 81 provided at the outlet of the pressure relief filter 800; the above-mentioned perspective material may be any existing material that can achieve a perspective effect, such as: transparent stainless steel pipe, transparent quartz glass, etc. Specifically, it may be as follows:

[0044] The outlet of the pressure relief filter 800 is generally provided at the top of the pressure relief filter 800. An outwardly protruding joint 81 is provided at the outlet of the pressure relief filter 800. The joint 81 is composed of a pipe section for the pressure relief pipeline 600 to be inserted and conducted; a part of the pipe wall of the joint 81 is made of a perspective material to form the perspective lens 3. At the same time, optionally, in order to control the on-off of the pressure relief air outlet of the pressure relief filter 800, a control ball valve for controlling the on-off of the joint 81 may be provided on the joint 81 at the outlet. The control ball valve and the perspective lens 3 are arranged at the same pipe section of the joint 81, so that the perspective lens 3 can also be used to effectively observe whether the control valve is on or off; and, the perspective lens 3 can be installed on the joint 81 in a detachable manner, so that the perspective lens 3 can be disassembled for cleaning, replacement, etc. after closing the control ball valve to ensure the accuracy of observing the gas flowing inside through the perspective lens 3.

[0045] Of course, in the embodiments of the present application, the discussion is carried out by taking the installation of the perspective lens 3 on the joint 81 as an example. The perspective lens 3 can also be arranged on the first pressure relief branch 601 and the second pressure relief branch 602, which will not be elaborated here, but the above technical solutions also fall within the protection scope of the present application.

[0046] The specific setting method of arranging the perspective lens 3 on the above process system can be as follows:

[0047] The inlet of the first pressure relief filter 801 is the first inlet, and the first inlet is communicated with the third gas outlet of the silicon powder receiving tank 300; a first filter element is arranged in the first pressure relief filter 801, and the first filter element filters silicon powder from the pressure relief gas flow flowing through the first pressure relief filter 801; the outlet of the first pressure relief filter 801 is the first outlet, and a first perspective lens 31 is arranged at the connection between the first outlet and the first pressure relief branch 601.

[0048] The inlet of the second pressure relief filter 802 is the second inlet, and the second inlet is communicated with the fourth gas outlet of the silicon powder storage tank 400. A second filter element is arranged in the second pressure relief filter 802, and the second filter element filters silicon powder from the pressure relief gas flow flowing through the second pressure relief filter 802; the outlet of the second pressure relief filter 802 is the second outlet, and a second perspective lens 32 is arranged at the connection between the second outlet and the second pressure relief branch 602.

[0049] Meanwhile, in the embodiments of the present application, in order to effectively improve the automation degree of the detection equipment, the following settings can also be made: an automatic detection unit is arranged at the perspective pipe section 1, and / or at the first perspective lens 31, and / or at the second perspective lens 32; the automatic detection unit includes a monitoring camera, and the monitoring camera is arranged outside the pressure relief pipeline 600 to isolate the monitoring camera from the gas flowing inside the pressure relief pipeline 600, so as to prevent the flowing medium from damaging the above sensors. The monitoring camera can be any existing sensor that automatically visually observes and monitors the inside of the pressure relief pipeline 600 through the perspective pipe section 1 and the perspective lens 3. Furthermore, the automatic monitoring of whether there is silicon powder flowing inside the pressure relief pipeline 600 can be carried out by using the obtained visual observation data, so that the whole process system can automatically monitor whether the filter element of the pressure relief filter 800 is penetrated without relying on manual observation, thereby greatly improving the timeliness and accuracy of the filter element penetration monitoring.

[0050] Meanwhile, the above-mentioned monitoring camera can be installed at the perspective observation part of a single position of the pressure relief pipeline 600, or monitoring cameras can be installed at the perspective observation parts of different positions respectively; for example, the monitoring cameras are respectively arranged at the perspective pipe section 1, and / or at the first perspective lens 31, and / or at the second perspective lens 32, and the monitoring cameras visually detect whether there is silicon powder in the pressure relief outlet pipeline 603, and / or in the first pressure relief branch 601, and / or in the second pressure relief branch 602. Optionally, the monitoring cameras are respectively arranged at the perspective pipe section 1, the first perspective lens 31, and the second perspective lens 32.

[0051] In an embodiment of the present application, optionally, the automatic detection unit is communicatively connected to the alarm unit, and sends an alarm signal to the alarm unit based on the detection information of silicon powder detected by the automatic detection unit; the alarm unit includes any one or a combination of a horn that emits an alarm prompt sound outward based on the received alarm signal, a display that emits an alarm prompt image outward based on the received alarm signal, and a processor that sends an alarm prompt push message to a mobile terminal based on the received alarm signal, so as to automatically send any one or a combination of sound, image, prompt push, etc. alarm prompts to the user by using the above-mentioned alarm unit, so that an alarm reminder can be sent outward in time after the filter element of the pressure relief filter 800 is penetrated.

[0052] Certainly, in an embodiment of the present application, an electric control valve for controlling the on / off of the pipeline may be further provided on the pressure relief pipeline 600; the electric control valve is communicatively connected to the alarm unit, and based on the alarm signal received by the alarm unit, the electric control valve generates an action of automatically disconnecting the pressure relief pipeline 600, so as to stop the pressure relief exhaust gas flow in time after the filter element of the pressure relief filter 800 is penetrated, effectively preventing the silicon powder contained in the pressure relief exhaust gas from wearing the pressure relief pipeline 600, and further effectively preventing the situation of leakage caused by the damage of the pressure relief pipeline 600.

[0053] In addition, in an embodiment of the present application, during the operation of the process system, the airflow flowing through the pressure relief pipeline 600 will pollute the perspective lens 3 and affect the transparency of the perspective lens 3. In order not to affect the observation, it needs to be effectively cleaned in time; therefore, the following is set:

[0054] As Figure 1 shown, in an embodiment of the present application, a blowing pipeline 700 is connected to the pressure relief pipeline 600, and the blowing pipeline 700 is connected to a gas B supply source to blow gas B into the pressure relief pipeline 600 through the blowing pipeline 700 to form a blowing airflow; the gas B is a gas such as nitrogen, so as to use the blown blowing airflow to perform air blowing cleaning on the perspective lens 3. Specifically as follows:

[0055] The connection between the blow air pipeline 700 and the pressure relief pipeline 600 is located downstream of the perspective lens 3, and the connection between the blow air pipeline 700 and the pressure relief pipeline 600 is as close as possible to the perspective lens 3; generally, the outlet end of the blow air pipeline 700 is communicated with a joint 81 provided at the outlet of the pressure relief filter 800; the pipe section at the connection between the blow air pipeline 700 and the pressure relief pipeline 600 is a connecting pipe section 701, and the connecting pipe section 701 extends obliquely towards the perspective lens 3, so that the gas B entering the pressure relief pipeline 600 through the blow air pipeline 700 forms a blowing air flow that directly blows towards the perspective lens 3, thereby achieving the effect of effectively cleaning the perspective lens 3 by air blowing.

[0056] In addition, a control valve is provided on the blow air pipeline 700, and the control valve controls the on-off of the blow air pipeline 700 to achieve the purpose of controllably blowing the gas B blowing air flow towards the perspective lens 3.

[0057] In the embodiment of the present application, the filter element penetration monitoring device 10 can also use other detection means besides visual detection to detect whether the pressure relief gas flowing through the pressure relief pipeline 600 contains silicon powder. For example, the pressure of the pressure relief gas flowing through, the wall thickness of the pressure relief pipeline 600 and other parameters are detected to directly or indirectly determine whether the gas containing silicon powder flows through the pressure relief pipeline 600.

[0058] As Figure 2 shown, for example, as follows: a detection pipe section 82 is provided on the joint 81 provided at the outlet of the pressure relief filter 800, and the detection pipe section 82 is an elbow pipe section whose axis extends along an arc section, so that the gas flowing through the detection pipe section 82 flows along the arc direction, and thus the flow velocity of the flowing gas changes due to the action of centrifugal force, making the part of the entire pressure relief pipeline 600 that is most easily worn by the pressure composed of the detection pipe section 82. At the same time, in order to further improve the detection accuracy, the pipe diameter of the detection pipe section 82 can be smaller than the pipe diameter of the pipe section of the pressure relief pipeline 600. A detector 4 is provided on the detection pipe section 82, and the detector 4 detects the wall thickness of the detection pipe section 82, and then determines whether the pressure relief pipeline 600 is worn based on the wall thickness detection value, and indirectly determines whether the pressure relief gas flow contains silicon powder; the detector 4 constitutes at least a part of the filter element penetration monitoring device 10, and the detector 4 can also be communicatively connected to the above-mentioned alarm unit, and determines whether the gas flow flowing through the pressure relief pipeline 600 contains silicon powder based on the wall thickness information of the detection pipe section 82 detected by the detector 4, and then sends an alarm signal to the alarm unit based on the determination that the gas flow contains silicon powder information.

[0059] Of course, in the embodiments of the present application, the discussion is carried out by taking the detection pipe section 82 being arranged on the joint 81 as an example. The detection pipe section 82 can also be arranged on the pressure relief pipeline 600, and the effect of monitoring the wall thickness of the maximum pressure-bearing part on the flow path of the pressure relief gas and then realizing the monitoring of whether the filter element is penetrated can also be achieved. The above solutions will not be elaborated here, but the above technical solutions also fall within the protection scope of the present application.

[0060] The above detector 4 can be any existing device capable of detecting the wall thickness of a pipeline. For example, the detector 4 includes a thermal imaging probe that performs thermal imaging on the pipeline and directly obtains the detection value of the wall thickness of the pipeline from the captured image. Or, the detector 4 includes an infrared grating probe and a receiver. The infrared grating probe emits a detection infrared grating to the pipeline, and the receiver receives the detection infrared grating reflected by the pipeline, and indirectly obtains the detection value of the wall thickness of the pipeline based on the detection infrared grating received by the receiver.

[0061] In the embodiments of the present application, the filter element penetration monitoring device 10 of the pressure relief filter 800 provided on the polysilicon cold hydrogenation process system can also be applied to other systems. It can also be any pressure relief device that only needs to have a pressure relief filter to perform perspective observation and parameter detection such as wall thickness on the pipeline connected to the outlet of the pressure relief filter, so as to realize the monitoring of whether the filter element of the pressure relief filter is penetrated, and then timely replace and maintain the filter element of the pressure relief filter, effectively preventing potential safety hazards such as wear and leakage of the pipeline connected to the outlet of the pressure relief filter.

[0062] In this specification, the embodiments or implementation manners are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts among the embodiments can be referred to each other.

[0063] It should be noted that the phrases such as "an embodiment", "embodiment", "exemplary embodiment", "some embodiments" mentioned in the specification indicate that the described embodiment may include specific features, structures or characteristics, but not every embodiment necessarily includes such specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. Moreover, when combining an embodiment to describe a specific feature, structure or characteristic, it is within the knowledge scope of those skilled in the art to implement such a feature, structure or characteristic in combination with other embodiments, whether explicitly or implicitly described.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A pressure relief device, characterized in that: Used in polysilicon cold hydrogenation process system; The pressure relief device comprises: A pressure relief filter, the inlet of which is connected to a silicon powder receiving tank and / or a silicon powder storage tank of the polysilicon cold hydrogenation process system; A pressure relief pipeline connected to the outlet of the pressure relief filter; Part of the wall of the pressure relief pipeline is a perspective observation portion, and the perspective observation portion constitutes a monitoring area for monitoring the inside of the pressure relief pipeline; A flow limiting orifice is provided in the pressure relief pipeline, and the flow limiting orifice is arranged on the downstream side of the perspective observation part.

2. A pressure relief device according to claim 1, characterized in that: The perspective observation part includes a perspective pipe section arranged on the pressure relief pipeline; The transparent pipe section is any pipe section connected in series on the pressure relief pipeline; and / or, The perspective pipe section is a pipe connected in parallel to any pipe section of the pressure relief pipe.

3. A pressure relief device according to claim 2, characterized in that: The flow limiting orifice is arranged at the downstream end of the perspective pipe section; The flow limiting orifice plate covers the cross section of the downstream end of the perspective pipe section, and a plurality of hollow flow limiting holes are arranged on the flow limiting orifice plate, and the hollow flow limiting holes communicate with the upstream and downstream sides of the flow limiting orifice plate.

4. A pressure relief device according to any one of claims 1 to 3, characterized in that: A joint is provided at the outlet of the pressure relief filter, and the joint is connected to the inlet end of the pressure relief pipeline; The connector and / or the pressure relief pipeline is provided with a perspective mirror, the perspective mirror is made of a transparent material, and the perspective mirror constitutes at least a part of the pipe wall of the connector or the pressure relief pipeline.

5. A pressure relief device according to claim 4, characterized in that: The pressure relief pipeline or the joint is connected with an air blowing pipeline, and the air blowing pipeline is connected to a gas B supply source; The air blowing pipeline is provided with a control valve for controllably opening and closing the air blowing pipeline; The connection between the air blowing pipeline and the pressure relief pipeline or the joint is located at the downstream side of the perspective mirror, and the pipe section where the air blowing pipeline is connected to the pressure relief pipeline or the joint is a connecting pipe section, and the connecting pipe section extends obliquely toward the perspective mirror.

6. A pressure relief device according to claim 4, characterized in that: The joint or the pressure relief pipeline is provided with a detection pipe section, the detection pipe section is a curved pipe whose axis extends along an arc, and the diameter of the detection pipe section is smaller than the diameter of the pressure relief pipeline; The detection pipe section is provided with a detector, and the detector monitors the wall thickness of the detection pipe section.

7. A polysilicon cold hydrogenation process system, characterized in that: include, The cyclone separator has an inlet for the gas A containing silicon powder to flow in, an outlet for the separated silicon powder to flow out, and an outlet for the separated gas to flow out; A silicon powder filter, having an inlet 2 connected to the gas outlet 1, having a filter element inside for filtering the silicon powder on the incoming gas, and also having a gas outlet 2 for the silicon powder filtered gas to flow out and a discharge port 2 for the filtered silicon powder to flow out; The silicon powder receiving tank is provided with an inlet 3 connected to the discharge port 2, a discharge port 3 for receiving silicon powder flowing out of the supply tank, and a gas outlet 3 for gas flowing out of the supply tank; The silicon powder storage tank is provided with an inlet 4 connected to the discharge port 1, a discharge port 4 for receiving silicon powder flowing out of the supply tank, and a gas outlet 4 for gas flowing out of the supply tank; The exhaust gas treatment equipment, the gas outlet three and the gas outlet four are connected to the exhaust gas treatment equipment via any one of the pressure relief devices described in claims 1 to 6.

8. The polysilicon cold hydrogenation process system according to claim 7, characterized in that: The pressure relief pipeline of the pressure relief equipment includes a first pressure relief branch, a second pressure relief branch and a pressure relief outlet pipeline; The first pressure relief filter is provided at three locations of the gas outlet of the silicon powder receiving tank, the outlet of the first pressure relief filter is the first outlet, and the first outlet is connected to the inlet of the first pressure relief branch; A second pressure relief filter is provided at four sides of the gas outlet of the silicon powder storage tank, the outlet of the second pressure relief filter is a second outlet, and the second outlet is connected to the inlet of the second pressure relief branch; The outlet of the first pressure relief branch and the outlet of the second pressure relief branch meet at the inlet of the pressure relief outlet pipeline, a perspective pipe section is arranged on the pressure relief outlet pipeline, and the outlet of the pressure relief outlet pipeline is connected to the exhaust gas treatment equipment.

9. A polysilicon cold hydrogenation process system according to claim 8, characterized in that: The inlet of the first pressure relief filter is a first inlet, and the first inlet is in three-phase communication with the air outlet of the silicon powder receiving tank; a first filter element is provided in the first pressure relief filter, and the first filter element filters silicon powder for the pressure relief airflow flowing through the first pressure relief filter; a first perspective mirror is provided at the connection between the first outlet and the first pressure relief branch; The inlet of the second pressure relief filter is the second inlet, and the second inlet is connected to the air outlet of the silicon powder storage tank. A second filter element is provided in the second pressure relief filter, and the second filter element filters the silicon powder on the pressure relief air flow flowing through the second pressure relief filter; a second perspective mirror is provided at the connection between the second outlet and the second pressure relief branch.

10. The polysilicon cold hydrogenation process system according to claim 9, characterized in that: The perspective tube section, and / or the first perspective mirror, and / or the second perspective mirror are provided with a monitoring camera; The monitoring camera monitors the inside of the pressure relief outlet pipeline through the perspective pipe section, and / or the inside of the first pressure relief branch through the first perspective mirror, and / or the inside of the second pressure relief branch through the second perspective mirror.

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