Quartz side plate clamping jig

Abstract

The utility model provides a quartz side plate clamping jig which comprises a base, a clamping mechanism, a positioning mechanism and a pressing mechanism, the clamping mechanism comprises a first clamp, a second clamp, a first propelling module and a second propelling module, the first clamp and the second clamp are oppositely arranged, the first propelling module is connected with the first clamp, and the second propelling module is connected with the second clamp. The second propelling module is connected with the second clamp; the positioning mechanism comprises a lifting module and a positioning block, the lifting module is arranged on the base, the positioning block is arranged on the lifting module in a lifting mode, and a positioning groove is formed in the positioning block; the pressing mechanism comprises a rack, a pressing module and a pressing head, the pressing module is arranged on the rack in the vertical direction, and the pressing head is arranged on the pressing module in a lifting mode and located above the positioning groove. The clamping mechanism, the positioning mechanism and the moving mechanism are matched to clamp the quartz side plate, the fixing effect is good, the positioning precision is high, the device can adapt to the quartz side plates of different models, the compatibility is good, and the use flexibility is high.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz product preparation, in particular to a clamping fixture for a quartz side plate. Background Art

[0002] In the processing of photovoltaic and semiconductor products, CVD (Chemical Vapor Deposition) technology is usually used, which is mainly used for processes such as material deposition and diffusion. Since quartz materials have good high-temperature resistance, thermal stability and light transmittance, they are usually used as the cavity material or loading fixture of the CVD process furnace. For example, quartz boats are usually used as the carriers for loading silicon wafers in diffusion furnaces.

[0003] In the manufacture of quartz boats, other quartz boat accessories need to be welded to the quartz side plates. In the traditional welding process, manual fixation of the quartz side plates is required, resulting in poor welding positioning accuracy, high labor costs, and the operators are easily affected by high temperatures, with low safety. Therefore, mechanical devices are currently mostly used to fix the quartz side plates. However, these mechanical devices are generally designed according to specific models of quartz side plates and cannot be compatible with different models of quartz side plates, with poor flexibility in use. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the deficiencies existing in the prior art, and to propose a clamping fixture for a quartz side plate, which can effectively position the quartz side plate and is compatible with different models of quartz side plates.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A clamping fixture for a quartz side plate, the clamping fixture for a quartz side plate includes a base, and a clamping mechanism, a positioning mechanism and a pressing mechanism arranged on the base, and the positioning mechanism is located between the clamping mechanism and the pressing mechanism.

[0007] The clamping mechanism includes a first fixture, a second fixture, a first propulsion module and a second propulsion module. The first fixture and the second fixture are arranged opposite to each other. The first propulsion module is connected to the first fixture, and the first propulsion module is used to drive the first fixture to move along a first direction; the second propulsion module is connected to the second fixture, and the second propulsion module is used to drive the second fixture to move along the first direction.

[0008] The positioning mechanism includes a lifting module and a positioning block. The lifting module is arranged on the base along the vertical direction, the positioning block is arranged on the lifting module in a liftable manner, and a positioning groove is arranged on the positioning block.

[0009] The pressing mechanism includes a frame, a pressing module, and a pressing head. The frame is disposed on the base. The pressing module is disposed on the frame in the vertical direction. The pressing head is disposed on the pressing module in a liftable manner, and the pressing head is located above the positioning groove.

[0010] Preferably, first flexible pads are respectively provided on the opposite side surfaces of the first clamp and the second clamp.

[0011] Preferably, a second flexible pad is provided in the positioning groove.

[0012] Preferably, a third flexible pad is provided at the bottom of the pressing head.

[0013] Preferably, first moving modules are respectively provided at the bottoms of the first clamp and the second clamp. The first moving modules are arranged along the first direction, and the first clamp and the second clamp are respectively movably disposed on the corresponding first moving modules.

[0014] Preferably, the quartz side plate clamping fixture further includes a moving mechanism. The moving mechanism includes a moving plate and a second moving module. The second moving module is disposed on the base along the second direction. The moving plate is movably disposed on the second moving module, and the clamping mechanism is disposed on the moving plate.

[0015] Preferably, the first propulsion module, the second propulsion module, the lifting module, and the pressing module are respectively cylinders.

[0016] Preferably, the quartz side plate is of a symmetric structure. First positioning surfaces are respectively provided on both sides of the top of the quartz side plate. Support feet are respectively provided on both sides of the bottom of the quartz side plate. Second positioning surfaces are provided on the inner sides of the support feet. The structure of the pressing head matches the structure of the first positioning surface, and the structure of the positioning groove matches the structure of the second positioning surface.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows: The present utility model uses the clamping mechanism, the positioning mechanism, and the moving mechanism to cooperate to clamp the quartz side plate, with good fixing effect, high positioning accuracy, and the ability to adapt to quartz side plates of different models, good compatibility, and strong use flexibility. Description of the Drawings

[0018] Figure 1 It is a schematic structural diagram of the clamping fixture according to some embodiments of the present utility model;

[0019] Figure 2 It is a schematic structural diagram of the quartz side plate according to some embodiments of the present utility model;

[0020] Figure 3 It is a schematic structural diagram of the quartz side plate fixed to the clamping fixture according to some embodiments of the present utility model;

[0021] Figure 4 Structural schematic diagram of the clamping mechanism in some other embodiments of the present utility model;

[0022] Figure 5 Structural schematic diagram of the positioning mechanism in some other embodiments of the present utility model;

[0023] Figure 6 Structural schematic diagram of the pressing mechanism in some other embodiments of the present utility model;

[0024] Figure 7 Structural schematic diagram of the clamping jig in some other embodiments of the present utility model;

[0025] Figure 8 Structural schematic diagram of the clamping mechanism and the moving mechanism in some other embodiments of the present utility model.

[0026] In the figure, 100 - clamping jig, 10 - base, 20 - clamping mechanism, 21 - first fixture, 22 - second fixture, 23 - first propulsion module, 24 - second propulsion module, 25 - first flexible pad, 26 - first moving module, 30 - positioning mechanism, 31 - lifting module, 32 - positioning block, 33 - positioning groove, 34 - second flexible pad, 40 - pressing mechanism, 41 - frame, 42 - pressing module, 43 - pressing head, 44 - second flexible pad, 50 - moving mechanism, 51 - moving plate, 52 - second moving module, 200 - quartz side plate, 201 - first positioning surface, 202 - second positioning surface, 203 - support foot. Detailed implementation manners

[0027] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the described embodiments of the present utility model fall within the protection scope of the present utility model. It can be understood that, without conflict, some technical means described in the various embodiments herein may be replaced or combined with each other.

[0028] In the description of the present utility model, if there are terms such as "first", "second", etc., they are only used to distinguish the described objects and do not have any sequential or technical meaning. Thus, the objects defined with "first", "second", etc. may explicitly or implicitly include one or more of such objects. And, words such as "one" or "a" do not represent a quantity limitation, but rather indicate the existence of at least one, and "multiple" means not less than two.

[0029] In the description of the specification of the present utility model, references to "an embodiment" or "some embodiments" etc. mean that in one or more embodiments of the present utility model, specific features, structures or characteristics described in connection with that embodiment are included. Thus, statements such as "in an embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments" etc. that appear in different places in this specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0030] Referring to Figure 2 , the quartz side plate 200 is a symmetric structure. On both sides of the top of the quartz side plate 200, first positioning surfaces 201 are respectively provided. On both sides of the bottom of the quartz side plate 200, support feet 203 are respectively provided. On the inner sides of the support feet 203, second positioning surfaces 202 are provided.

[0031] The present utility model provides a quartz side plate clamping fixture for clamping the quartz side plate 200, ensuring the processing accuracy of the quartz side plate 200 and being compatible with quartz side plates 200 of different models. Referring to Figure 1 , the quartz side plate clamping fixture 100 includes a base 10, and a clamping mechanism 20, a positioning mechanism 30 and a pressing mechanism 40 provided on the base 10. The positioning mechanism 30 is located between the clamping mechanism 20 and the pressing mechanism 40. The clamping mechanism 20, the positioning mechanism 30 and the pressing mechanism 40 cooperate to clamp and fix the quartz side plate 200.

[0032] Specifically, the clamping mechanism 20 includes a first clamp 21, a second clamp 22, a first propulsion module 23 and a second propulsion module 24. The first clamp 21 and the second clamp 22 are arranged oppositely. The first propulsion module 23 is connected to the first clamp 21, and the first propulsion module 23 is used to drive the first clamp 21 to move along the first direction X. The second propulsion module 24 is connected to the second clamp 22, and the second propulsion module 24 is used to drive the second clamp 22 to move along the first direction X. Among them, the first direction X is perpendicular to the vertical direction Z.

[0033] The positioning mechanism 30 includes a lifting module 31 and a positioning block 32. The lifting module 31 is arranged on the base 10 along the vertical direction Z. The positioning block 32 is arranged on the lifting module 31 in a liftable manner. A positioning groove 33 is provided on the positioning block 32, and the structure of the positioning groove 33 matches the structure of the second positioning surface 202.

[0034] The pressing mechanism 40 includes a frame 41, a pressing module 42 and a pressing head 43. The frame 41 is arranged on the base 10. The pressing module 42 is arranged on the frame 41 along the vertical direction Z. The pressing head 43 is arranged on the pressing module 42 in a liftable manner, and the pressing head 43 is located above the positioning groove 33. The structure of the pressing head 43 matches the structure of the first positioning surface 201.

[0035] Referring to Figure 2 and Figure 3 In application, one end of the quartz side plate 200 is placed between the first fixture 21 and the second fixture 22, the support feet 203 at the other end of the quartz side plate 200 are placed in the positioning grooves 33, and the second positioning surface 202 is in contact with the bottom of the positioning grooves 33. The first propulsion module 23 and the second propulsion module 24 can push the first fixture 21 and the second fixture 22 towards each other, so that the first fixture 21 and the second fixture 22 clamp the quartz side plate 200; the pressing module 42 can drive the pressing head 43 to descend, so that the pressing head 43 abuts against the first positioning surface 201 of the quartz side plate 200. In this way, the clamping mechanism 20, the positioning mechanism 30 and the pressing mechanism 40 cooperate with each other to effectively clamp and fix the quartz side plate 200, with good fixing effect and high positioning accuracy; in addition, the distance between the first fixture 21 and the second fixture 22, the height of the positioning block 32, and the height of the pressing head 43 can all be adjusted, so as to be compatible with quartz side plates of different models, with good compatibility and strong use flexibility.

[0036] It should be noted that the above first propulsion module 23, second propulsion module 24, lifting module 31, and pressing module 42 can respectively adopt products such as guide rail modules or cylinders in the prior art, as long as they can achieve their respective corresponding functions. Referring to Figure 1 In some embodiments, the first propulsion module 23, the second propulsion module 24, the lifting module 31, and the pressing module 42 are respectively cylinders. Among them, the first propulsion module 23 is arranged along the first direction X, and the piston rod of the first propulsion module 23 is connected to the first fixture 21; the second propulsion module 24 is arranged along the first direction X, and the piston rod of the second propulsion module 24 is connected to the second fixture 22; the lifting module 31 is arranged along the vertical direction Z, and the piston rod of the lifting module 31 is connected upward to the positioning block 32; the pressing module 42 is arranged along the vertical direction Z, and the piston rod of the pressing module 42 is connected downward to the pressing block 43.

[0037] Referring to Figure 4 In other embodiments, first flexible pads 25 are respectively provided on the opposite sides of the first fixture 21 and the second fixture 22. The first flexible pads 25 can be made of materials such as high-temperature resistant rubber, and the first flexible pads 25 can avoid damaging the quartz side plate 200 during clamping.

[0038] Further, first moving modules 26 are respectively provided at the bottoms of the first fixture 21 and the second fixture 22. The first moving modules 26 are arranged along the first direction X. The first fixture 21 and the second fixture 22 are respectively movably arranged on the corresponding first moving modules 26. The first moving modules 26 can adopt the guide rail module products in the prior art. When the first propulsion module 23 drives the first fixture 21 to move along the first direction X and the second propulsion module 24 drives the second fixture 22 to move along the first direction X, the first moving modules 26 can ensure the linearity and stability of the first fixture 21 and the second fixture 22, thereby improving the reliability of the clamping jig 100.

[0039] Referring to Figure 5 , in some other embodiments, a second flexible pad 34 is provided in the positioning groove 33. The second flexible pad 34 can be made of materials such as high-temperature resistant rubber. The second flexible pad 34 can avoid damaging the quartz side plate 200 during positioning.

[0040] Referring to Figure 6 , in some other embodiments, a third flexible pad 44 is provided at the bottom of the pressing head 43. The third flexible pad 44 can be made of materials such as high-temperature resistant rubber. The third flexible pad 44 can avoid damaging the quartz side plate 200 during pressing.

[0041] Referring to Figure 7 and Figure 8 , in still some other embodiments, the quartz side plate clamping jig further includes a moving mechanism 50. The moving mechanism 50 includes a moving plate 51 and a second moving module 52. The second moving module 52 is arranged along the second direction Y on the base 10. The moving plate 51 is movably arranged on the second moving module 52. The clamping mechanism 20 is arranged on the moving plate 51. Among them, the second direction Y is perpendicular to the first direction X and the vertical direction Z. The second moving module 52 can adopt the guide rail module products in the prior art. The second moving module 52 can drive the moving plate 51 to move along the second direction Y, thereby adjusting the position of the clamping mechanism 20 in the second direction Y to adapt to quartz side plates of different lengths and improving the compatibility of the clamping jig.

[0042] In summary, the present utility model provides a quartz side plate clamping jig, which uses the cooperation of the clamping mechanism, the positioning mechanism and the moving mechanism to clamp the quartz side plate, has a good fixing effect, high positioning accuracy, can adapt to quartz side plates of different models, has good compatibility and strong use flexibility.

[0043] The present utility model has been described by the above related embodiments. However, the above embodiments are only examples for implementing the present utility model. It must be pointed out that the disclosed embodiments do not limit the scope of the present utility model. On the contrary, any changes and modifications made without departing from the spirit and scope of the present utility model fall within the scope of the patent protection of the present utility model.

Claims

1. A quartz side plate clamping fixture, characterized in that: The quartz side plate clamping fixture comprises a base and a clamping mechanism, a positioning mechanism and a pressing mechanism arranged on the base, wherein the positioning mechanism is located between the clamping mechanism and the pressing mechanism; The clamping mechanism includes a first clamp, a second clamp, a first propulsion module and a second propulsion module, the first clamp and the second clamp are arranged opposite to each other, the first propulsion module is connected to the first clamp, and the first propulsion module is used to drive the first clamp to move along a first direction; the second propulsion module is connected to the second clamp, and the second propulsion module is used to drive the second clamp to move along the first direction; The positioning mechanism comprises a lifting module and a positioning block, wherein the lifting module is arranged on the base in a vertical direction, the positioning block is arranged on the lifting module in a liftable manner, and a positioning groove is arranged on the positioning block; The clamping mechanism includes a frame, a clamping module and a pressing head. The frame is arranged on the base, the clamping module is arranged on the frame along the vertical direction, and the pressing head is arranged on the clamping module in a levitation manner, and the pressing head is located above the positioning groove.

2. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: First flexible pads are respectively disposed on opposite sides of the first clamp and the second clamp.

3. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: A second flexible pad is arranged in the positioning groove.

4. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: A third flexible pad is provided at the bottom of the pressure head.

5. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: The first clamp and the second clamp are respectively provided with a first movable module at the bottom, the first movable module is arranged along the first direction, and the first clamp and the second clamp are respectively movably arranged on the corresponding first movable module.

6. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: The quartz side plate clamping fixture also includes a moving mechanism, which includes a moving plate and a second moving module. The second moving module is arranged on the base along the second direction, the moving plate is movably arranged on the second moving module, and the clamping mechanism is arranged on the moving plate.

7. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: The first propulsion module, the second propulsion module, the lifting module, and the pressing module are cylinders respectively.

8. The quartz side plate clamping fixture as claimed in claim 1, characterized in that: The quartz side plate has a symmetrical structure, with first positioning surfaces respectively provided on both sides of the top of the quartz side plate, supporting feet respectively provided on both sides of the bottom of the quartz side plate, and second positioning surfaces respectively provided on the inner side of the supporting feet; the structure of the pressure head matches the structure of the first positioning surface, and the structure of the positioning groove matches the structure of the second positioning surface.

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