Wafer carrier warehousing system

Abstract

The utility model provides a wafer carrier warehousing system. The wafer carrier warehousing system comprises a warehousing body, a plurality of temporary storage carrying platform modules, a carrying robot, a transferring module and a control module. The storage body is provided with a loading port and an output port. The temporary storage platform deck module is arranged in the storage body and located above the loading port. The transfer robot is movably arranged in the storage body so as to move among the loading port, the temporary storage platform deck module and the output port. The transfer module is arranged at the loading port. The control module is electrically connected with the transfer robot and the transfer module. The loading port is adapted to various types of wafer carriers or various types of loading devices. The control module drives the transfer module and the transfer robot to move the wafer carrier to the temporary storage carrier module or the output port. According to the wafer carrier warehousing system provided by the utility model, various types of wafer carriers are integrated as conveying objects, so that the adaptation range and the compatibility are improved.

Description

Technical Field

[0001] The utility model relates to a warehousing system, and particularly to a wafer carrier warehousing system. Background Art

[0002] With the development of technology, the demand for semiconductor wafers is also increasing. Since semiconductor wafers are high-precision, small in size and easily damaged products, semiconductor wafers are usually received in a wafer cassette (wafer carrier) to improve the safety of semiconductor wafer distribution and transportation. Especially during the manufacture of semiconductors, semiconductor wafers go through several process steps, each of which is performed by a dedicated processing machine. The wafer cassette is used to transport semiconductor wafers from one machine to another to maintain a protected internal environment and prevent the wafers from being contaminated by the external environment.

[0003] Generally speaking, wafer cassettes have different types according to semiconductor process requirements, wafer types and sizes. However, the existing wafer cassette transportation system can only target a single type of wafer cassette, unable to provide sharing and thus limiting its transportation capacity. At the same time, it is not conducive to the collection of production lines for convenient deployment. Moreover, the transfer device set in the wafer cassette transportation system adopts non-linear transportation in order to shorten the travel distance, that is, the wafer cassette faces flipping during transportation, resulting in the wafers inside facing the state of up and down vibration and increasing the probability of damage. Summary of the Utility Model

[0004] The utility model provides a wafer carrier warehousing system, which integrates various types of wafer carriers as transfer objects to improve the adaptation range and compatibility.

[0005] A wafer carrier warehousing system of the utility model includes a warehousing body, a plurality of temporary storage stage modules, a handling robot, a transfer module and a control module. The warehousing body has a loading port and an output port. The temporary storage stage modules are arranged inside the warehousing body and above the loading port. The handling robot is movably arranged inside the warehousing body to move between the loading port, the temporary storage stage modules and the output port. The transfer module is arranged at the loading port. The control module is electrically connected to the handling robot and the transfer module. The loading port is adapted to various types of wafer carriers or various types of loading devices. The control module drives the transfer module and the handling robot to move the wafer carrier to the temporary storage stage module or the output port.

[0006] In an embodiment of the utility model, the above-mentioned various types of wafer carriers include: a Standard Mechanical Interface (SMIF) wafer cassette (Pod).

[0007] In an embodiment of the utility model, the above-mentioned various types of wafer carriers include: an open wafer cassette (Cassette).

[0008] In an embodiment of the present utility model, the above-mentioned storage body further has an intermediate bin, which is located between the loading port and the output port. The handling robot is movably arranged in the intermediate bin, and the temporary storage stage modules are located on opposite sides of the intermediate bin, so that a part of the temporary storage stage modules are located above the loading port, and the other part of the temporary storage stage modules are located above the output port.

[0009] In an embodiment of the present utility model, it further includes a fan filter unit, which is arranged on the top of the storage body and electrically connected to the control module. The fan filter unit provides a positive pressure air flow from top to bottom in the storage body.

[0010] In an embodiment of the present utility model, it further includes a safety gate module, which is electrically connected to the control module and movably arranged between the loading port and the intermediate bin of the storage body. The intermediate bin is located between the loading port and the output port. After the loading device is moved into the loading port and electrically docked with the control module, the control module opens the safety gate module to connect the loading port and the intermediate bin.

[0011] In an embodiment of the present utility model, it further includes a warning and protection module, which is electrically connected to the control module and integrates the signals of the various types of wafer carriers.

[0012] In an embodiment of the present utility model, the above-mentioned warning and protection module includes a button and a signal lamp group to adapt to the locking / unlocking function of a standard mechanized interface wafer cassette or the locking / unlocking function of an open wafer cassette.

[0013] In an embodiment of the present utility model, the above-mentioned warning and protection module includes a safety light curtain, and the control module senses and determines whether there is an external object at the loading port through the safety light curtain.

[0014] In an embodiment of the present utility model, it further includes an electrical docking interface, which is arranged at the loading port and electrically connected to the control module to electrically dock with the loading device when the loading device is moved into the loading port.

[0015] In an embodiment of the present utility model, it further includes a continuation device, which is arranged at the output port and complies with the Front-Opening Interface Mechanical Standard (FIMS).

[0016] In an embodiment of the present utility model, the above-mentioned transfer module includes an opening device, and the control module removes the outer box of the standard mechanized interface wafer cassette through the opening device.

[0017] Based on the above, the wafer carrier storage system has a loading port that is compatible with various types of wafer carriers. Therefore, after the loading device carrying the wafer carrier is moved into the loading port, the wafer carrier can be transferred to the required position through the transfer module. This improves the adaptability and compatibility of the storage system for wafer carriers and thus saves the design and manufacturing costs of the corresponding storage equipment.

[0018] To make the above features and advantages of the present invention more obvious and understandable, specific embodiments are hereinafter given and described in detail in conjunction with the accompanying drawings as follows. Description of the Drawings

[0019] Figure 1 is a wafer carrier storage system of the present invention;

[0020] Figure 2A and Figure 2B are wafer carriers of different types;

[0021] Figure 3A and Figure 3B are respectively front views of different types of wafer carrier transport sub-carts moving into the wafer carrier storage system;

[0022] Figure 4A and Figure 4B are respectively simple side view diagrams of the wafer carrier storage system;

[0023] Figure 5 show Figure 1 the electrical connection relationships of relevant components in the wafer carrier storage system. Detailed Description of the Embodiments

[0024] Figure 1 is a wafer carrier storage system of the present invention. Figure 2A and Figure 2B are wafer carriers of different types. Figure 3A and Figure 3B are respectively front views of different types of wafer carrier transport sub-carts moving into the wafer carrier storage system. Please first refer to Figure 1 、 Figure 2A and Figure 2B , in this embodiment, the wafer carrier storage system 100 includes a storage body 110, and a loading port 111 is provided on one side of the storage body 110 for receiving the loading device 200 or the loading device 300. Here, the loading device 200 loads the wafer carrier 400A, which is, for example, an open cassette, and the loading device 300 loads the wafer carrier 400B, which is, for example, a standard mechanical interface (SMIF) pod. That is, as Figure 1As indicated by the arrow, the loading port 111 can be adapted to different loading devices 200, 300 or wafer carriers 400A, 400B. Here, the loading devices 200, 300 are, for example, transport sub-carts. The loading device 200 or the loading device 300 first enters the loading port 111, and then places the corresponding wafer carrier 400A or wafer carrier 400B on the loading device 200 or the loading device 300 that has entered the loading port 111. Of course, in another embodiment, the loading device 200 (or 300) can also carry the corresponding wafer carrier 400A (or 400B) and move into the loading port 111 together. Here, the mode of moving the loading devices 200, 300 and the wafer carriers 400A, 400B into the loading port 111 is not limited. That is to say, the wafer carrier storage system 100 of this embodiment can accommodate various types of wafer carriers 400A or wafer carriers 400B through the loading port 111. After accommodation, it is as shown in Figure 3A , Figure 3B . In addition, as shown in Figure 2A and Figure 2B , the substantial difference between the wafer carriers 400A and 400B is that the wafer carrier 400B is equivalent to the wafer carrier 400A plus the outer box 410.

[0025] Figure 4A and Figure 4B are respectively simple side view diagrams of the wafer carrier storage system. Figure 5 shows Figure 1 the electrical connection relationship of relevant components in the wafer carrier storage system. Please first refer to Figure 4A and Figure 5 . In this embodiment, the wafer carrier storage system 100 further includes a plurality of temporary storage stage modules 120, a handling robot 130, a transfer module 140 and a control module CM. The control module CM is electrically connected to the handling robot 130 and the transfer module 140. After the loading device 200 carrying the wafer carrier 400A or the loading device 300 carrying the wafer carrier 400B enters the loading port 111, the control module CM drives the transfer module 140 to move the wafer carrier 400A or 400B into the intermediate warehouse 113 of the storage body 110. As shown in Figure 4A or Figure 4B , the storage body 110 also has an output port 112. The intermediate warehouse 113 is located between the loading port 111 and the output port 112 to allow the handling robot 130 to move along the intermediate warehouse 113.

[0026] Furthermore, the temporary storage stage modules 120 of this embodiment are located on opposite sides of the intermediate storage 113, such that a part of the temporary storage stage modules 120 is located above the loading port 111, and another part of the temporary storage stage modules 120 is located above the output port 112. In this way, the temporary storage stage modules 120, the loading port 111, and the output port 112 are substantially within the reach of the handling robot 130, enabling the handling robot 130 to smoothly move the wafer carrier 400A to the temporary storage stage module 120 or the output port 112.

[0027] In addition, the wafer carrier storage system 100 of this embodiment further includes a fan filter unit 160, a safety gate module 150, a warning and protection module 170, and a continuation device 500. Among them, as Figure 4A or Figure 4B shown (and referring to Figure 5 ), the fan filter unit 160, that is, the fan filter unit (FFU), is disposed on the top of the storage body 110 and electrically connected to the control module CM. The fan filter unit 160 provides a downward positive pressure airflow within the storage body 110 to filter dust particles in the air, adjust the temperature of the clean room, and maintain a positive pressure environment within the storage body 110, providing an airflow circulation for the operating environment required by the wafers, and also providing clean air that can reduce the pollution source. The warning and protection module 170 is electrically connected to the control module CM and integrates signals of various types of wafer carriers 400A or 400B, which will be further described later.

[0028] In this embodiment, the safety gate module 150 is electrically connected to the control module CM and is movably disposed between the loading port 111 and the intermediate storage 113 of the storage body 110. When the loading device 200 or 300 is moved into the loading port 111 and electrically docked with the control module CM, the control module CM opens the safety gate module 150 to connect the loading port 111 and the intermediate storage 113. Here, the wafer carrier storage system 100 is through the safety grating 172 of the warning and protection module 170, as Figure 1 , Figure 3A and Figure 3B shown, to enable the control module CM to sense whether there is an external object (such as the operator's hand) through the safety grating 172 to determine whether the loading device 200 or 300 has been moved into the loading port 111. That is to say, when the control module CM determines that the loading device 200 or 300 has been moved into the loading port 111 as described above, it is necessary to first confirm that the operator has left the loading port 111 or there are no other external objects at the loading port 111, and then perform the action of opening the safety gate module 150. In one embodiment, the safety grating 172 is composed of multiple optical sensors, as Figure 1As shown, by being shielded or not, the control module CM can determine whether the wafer carriers 400A or 400B on the loading devices 200 or 300 have completely entered the loading port 111. Simply put, subsequent actions can only be carried out when it is confirmed that the safety light curtain 172 is completely unshielded.

[0029] It should also be mentioned that the wafer carrier storage system 100 can be provided with a docking module (not shown) at the loading port 111, which is electrically connected to the control module CM, so that the control module CM can thereby grasp the docking status of the transfer sub-vehicles 200 or 300 at the loading port 111.

[0030] In addition, the warning and protection module 170 also includes a button and signal lamp group 171 and a warning module 173, as Figure 1 、 Figure 3A and Figure 3B shown. Among them, the button and signal lamp group 171 integrates relevant information of various types of wafer carriers 400A and 400B. For example, it can be used to adapt to the locking / unlocking function of a standard mechanized interface wafer cassette (SMIF Pod), or to adapt to the locking / unlocking function of an open wafer cassette (Cassette). In other words, the button and signal lamp group 171 can be used to provide the operator with relevant information about the wafer carriers 400A or 400B on the loading devices 200 or 300 located at the loading port 111 at this time, for the convenience of the operator to identify. The warning module 173 includes an equipment operation warning lamp and a buzzer, which provide the operator with the operation status of the current wafer carrier storage system 100, or provide a warning signal or sound when the above-mentioned abnormality is sensed.

[0031] On the other hand, please refer again to Figure 1 、 Figure 3A (or Figure 3B ) and Figure 5 . The wafer carrier storage system 100 of this embodiment also includes an electrical docking interface 180 and an operation interface 190, which are respectively electrically connected to the control module CM. Among them, the electrical docking interface 180 is used for electrical docking with the loading devices 200 or 300 (when moving into the loading port 111), so that the control module CM can obtain information about the loading devices 200 or 300 and the wafer carriers 400A or 400B thereon. The operation interface 190 is, for example, a touch screen, which is used for the operator to provide corresponding operation instructions to the wafer carrier storage system 100.

[0032] Please refer again to Figure 4A and Figure 4B . The difference between them is that the wafer carriers 400A and 400B moved in belong to different types. Taking Figure 4A as an example, the wafer carrier 400A carried (as Figure 2AThe loading device 200 of the open wafer cassette shown, so the transfer module 140 can directly transfer it from the loading device 200 to the intermediate storage 113 where the handling robot 130 is located, and then the handling robot 130 transfers it to the temporary storage stage module 120 or the output port 112. On the contrary Figure 4B , what is shown is the loading device 300 carrying the wafer carrier 400B (such as Figure 2B the SMIF Pod shown) moving into the loading port 111. As Figure 2B shown, the wafer carrier 400B has an outer box 410, so the transfer module 140 of this embodiment further includes an open cover device 141. After lifting and removing the Figure 2B outer box 410 shown, the wafer carrier 400B is moved into the intermediate storage 113 where the robot 130 is located.

[0033] On the other hand, in the wafer carrier storage system 100 of this embodiment, the subsequent device 500 located at the output port 112 conforms to the Front-Opening Interface Mechanical Standard (FIMS), so that the wafer carrier storage system 100 can be directly connected to another semiconductor processing device. Of course, in another embodiment not shown, the output port 112 can also be changed to place a loading device for transporting the wafer carrier 400A.

[0034] In summary, in the above embodiments of the present invention, the wafer carrier storage system is compatible with various types of wafer carriers at its loading port. Therefore, after the loading device carrying the wafer carrier is moved into the loading port, the wafer carrier can be transferred to the required position through the transfer module. Further, the wafer carrier storage system determines the type of the wafer carrier entering the loading port through the mutual cooperation of modules such as the warning protection module, the safety gate module, and the electrical interface. After confirming that the loading device has completely moved into the loading port, the control module can perform corresponding subsequent actions based on relevant information. This can effectively improve the adaptability and compatibility of the storage system for wafer carriers, and thus save the design and manufacturing costs of the corresponding storage equipment.

[0035] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A wafer carrier storage system, characterized in that: include: The storage body has a loading port and an output port; A plurality of temporary storage platform modules are arranged in the storage body and located above the loading port; A handling robot, movably disposed in the storage body, to move between the loading port, the plurality of temporary storage platform modules and the output port; A transfer module, arranged at the loading port; as well as A control module electrically connects the transport robot and the transfer module. The loading port is adapted to various types of wafer carriers or various types of loading devices, and the control module drives the transfer module and the handling robot to move the wafer carrier to the temporary storage stage module or the output port.

2. The wafer carrier storage system according to claim 1, characterized in that: The various types of wafer carriers include: standard mechanized interface wafer cassettes.

3. The wafer carrier storage system according to claim 1, characterized in that: The various types of wafer carriers include: open wafer cassettes.

4. The wafer carrier storage system according to claim 1, characterized in that: The storage body also has an intermediate warehouse, which is located between the loading port and the output port. The transport robot is movably arranged in the intermediate warehouse. The multiple temporary storage platform modules are located on opposite sides of the intermediate warehouse, so that a part of the multiple temporary storage platform modules are located above the loading port, and another part of the multiple temporary storage platform modules are located above the output port.

5. The wafer carrier storage system according to claim 1, characterized in that: It also includes a fan filter unit, which is arranged on the top of the storage body and electrically connected to the control module. The fan filter unit provides a positive pressure airflow from top to bottom in the storage body.

6. The wafer carrier storage system according to claim 1, characterized in that: It also includes a safety gate module, which is electrically connected to the control module and is movably arranged between the loading port and the intermediate warehouse of the storage body, and the intermediate warehouse is located between the loading port and the output port. After the loading device moves into the loading port and electrically docks with the control module, the control module opens the safety gate module to connect the loading port and the intermediate warehouse.

7. The wafer carrier storage system according to claim 1, characterized in that: The device also includes a warning protection module which is electrically connected to the control module and integrates the signals of the various types of wafer carriers or the signals of the various types of loading devices.

8. The wafer carrier storage system according to claim 7, characterized in that: The warning protection module includes a button and a signal light group to adapt to the locking / unlocking function of a standard mechanized interface wafer box, or to adapt to the locking / unlocking function of an open wafer box.

9. The wafer carrier storage system according to claim 7, characterized in that: The warning and protection module includes a safety light barrier, and the control module senses and determines whether there is a foreign object in the loading port through the safety light barrier.

10. The wafer carrier storage system according to claim 1, characterized in that: It also includes an electrical docking interface, which is arranged on the loading port and electrically connected to the control module. When the loading device moves into the loading port, the electrical docking interface electrically docks with the loading device.

11. The wafer carrier storage system according to claim 1, characterized in that: It also includes a successor device, which is arranged at the output port and complies with the mechanical standard of the front-opening interface.

12. The wafer carrier storage system according to claim 1, characterized in that: The transfer module comprises a cover opening device, and the control module removes the outer box of the standard mechanized interface wafer box through the cover opening device.

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