MPCVD microwave resonance device

Abstract

The utility model discloses an MPCVD microwave resonance device, which relates to the technical field of microwave resonance, and comprises a first cylindrical shell and a second cylindrical shell positioned in the first cylindrical shell, and a microwave channel is arranged between the first cylindrical shell and the second cylindrical shell. A microwave generator is mounted at the top of the first cylindrical shell; an arc-shaped cavity is formed in the bottom of the second cylindrical shell, an arc-shaped reflection component is arranged in the arc-shaped cavity, and a lifting assembly used for driving the height of the arc-shaped reflection component to be adjusted is installed in the first cylindrical shell. The lifting assembly comprises a first screw rod, a first internal thread sleeve, a second internal thread sleeve, a first connecting rod, a second connecting rod and an arc-shaped reflection part, the first screw rod is sleeved with the first internal thread sleeve, and the height of the arc-shaped reflection part can be changed so that microwave tuning can be conducted. The specific structure of the lifting assembly is operated to complete up-and-down displacement of the arc-shaped reflection component so as to realize uniform distribution of plasmas.

Description

Technical Field

[0001] The utility model relates to the technical field of microwave resonance, in particular to an MPCVD microwave resonance device. Background Art

[0002] Microwave Plasma Chemical Vapor Deposition (MPCVD) is a chemical technology. This technology mainly uses one or several gaseous compounds or elements containing thin film elements to carry out chemical reactions on the substrate surface to form a thin film. It can be used to form diamond films from diamond, and diamond films can be used in fields such as high-power semiconductor devices, high-power microwave windows, high-performance speaker diaphragms, surface acoustic wave devices, and infrared optical window materials. With numerous excellent properties, diamond has a wide range of applications, which also brings extensive application requirements.

[0003] At present, although several different domestic and foreign high-power MPCVD diamond film deposition devices operating at 2.45 GHz can all work under the power condition of 6 - 8 kW, they all have some problems more or less. For example, the microwave input power of the ellipsoidal resonator type MPCVD device is limited by the quartz bell jar, the cavity surface focusing ability is insufficient, and the formation of a strong field area in the cavity easily leads to unstable positions of the excited plasma, resulting in etching and pollution of the cavity and prone to deposits. Summary of the Utility Model

[0004] Based on this, in view of the above problems, it is necessary to provide an MPCVD microwave resonance device, in which the height of the arc-shaped reflecting component can be changed to perform microwave tuning and reduce the instability of the position of the excited plasma.

[0005] An MPCVD microwave resonance device includes a first cylindrical outer shell and a second cylindrical outer shell located inside the first cylindrical outer shell. There is a microwave channel between the first cylindrical outer shell and the second cylindrical outer shell. A microwave generator is installed on the top of the first cylindrical outer shell. The bottom of the second cylindrical outer shell has an arc-shaped cavity, and an arc-shaped reflecting component is arranged in the arc-shaped cavity. A lifting assembly for driving the height adjustment of the arc-shaped reflecting component is installed inside the first cylindrical outer shell.

[0006] The lifting assembly includes a first screw rod, a first internal thread sleeve, a second internal thread sleeve, a first connecting rod, and a second connecting rod. Both ends of the first screw rod are rotatably connected to the inner wall of the first cylindrical outer shell. The first internal thread sleeve and the second internal thread sleeve are sleeved on the first screw rod that is threadedly engaged therewith. The bottom ends of the first connecting rod and the second connecting rod are connected to the arc-shaped reflecting component through the same hinge seat. The top end of the first connecting rod is hinged to the first internal thread sleeve, and the top end of the second connecting rod is hinged to the second internal thread sleeve.

[0007] As a preferred solution, a driving assembly for driving the first screw rod to rotate is provided at the top of the first cylindrical housing. The driving assembly includes a first motor, a first transmission wheel, a second transmission wheel, a synchronous belt, and an L-shaped support frame. The first motor is fixedly connected to the first cylindrical housing. The first transmission wheel is installed on the rotating shaft of the first motor. The second transmission wheel is installed at one end of the first screw rod passing through the first cylindrical housing. The first transmission wheel and the second transmission wheel are connected by a synchronous belt.

[0008] As a preferred solution, a substrate is provided below the arc-shaped reflecting component. A deposition table is installed at the bottom of the substrate. The deposition table is connected to the first cylindrical housing.

[0009] As a preferred solution, a positioning assembly for positioning the substrate is installed at the bottom of the cavity of the first cylindrical housing. There are four positioning assemblies, and the four positioning assemblies are distributed in a matrix at the four corners of the substrate.

[0010] As a preferred solution, each of the four positioning assemblies includes a turntable, a first vertical rod, a second horizontal rod, and a T-shaped bolt. The turntable is rotatably connected to the bottom of the cavity of the first cylindrical housing. A first vertical rod is eccentrically arranged on the turntable. A second horizontal rod is installed on the first vertical rod. A threaded hole is provided on the second horizontal rod. A T-shaped bolt that is in threaded fit with it is vertically installed in the threaded hole. One end of the T-shaped bolt passing through the threaded hole abuts against the upper surface of the substrate.

[0011] As a preferred solution, a corrugated pipe is installed in the cavity of the first cylindrical housing. An arc-shaped reflecting component is installed at the bottom of the corrugated pipe.

[0012] The beneficial effects of the present utility model are as follows:

[0013] The arc-shaped reflecting component is arranged at the bottom of the second cylindrical housing with an arc-shaped cavity, which strengthens the tuning means of the microwave resonator cavity, can optimize the plasma distribution in real time, and realizes the preparation of diamond films with high quality and high efficiency. The bottom of the second cylindrical housing has an arc-shaped cavity for reflecting and converging microwaves. The microwave channel between the first cylindrical housing and the second cylindrical housing is used to introduce microwaves into the arc-shaped reflecting component. The microwave input port of the microwave channel is connected to a microwave generator. The height of the arc-shaped reflecting component can be changed for microwave tuning. According to the actual situation, the specific structure of the lifting assembly can be operated to complete the up and down displacement of the arc-shaped reflecting component to realize the plasma distribution. Description of the Drawings

[0014] Figure 1 is a schematic diagram of the overall structure;

[0015] Figure 2 is Figure 1Enlarged schematic diagram at position A in [device name];

[0016] Figure 3 is Figure 1 Enlarged schematic diagram at position B in [device name];

[0017] Icon: 1. First cylindrical housing; 2. Second cylindrical housing; 3. Microwave channel; 4. Microwave generator; 5. Bellows; 6. First internal thread sleeve; 7. First screw; 8. Second internal thread sleeve; 9. First connecting rod; 10. Second connecting rod; 11. Arc-shaped reflecting component; 12. Deposition table; 13. Substrate; 14. Positioning component; 141. Turntable; 142. First vertical rod; 143. Second cross bar; 144. T-shaped bolt; 15. Driving component; 151. First motor; 152. First transmission wheel; 153. Second transmission wheel; 154. Timing belt; 155. L-shaped support frame. Detailed implementation manners

[0018] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following will describe in detail the specific implementation manners of the present utility model with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0019] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation manner.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present utility model belongs. The terms used in the description of the present utility model herein are only for the purpose of describing specific implementation manners and are not intended to limit the present utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0021] As Figures 1 - 3 shown,

[0022] As an optional embodiment of an MPCVD microwave resonance device,

[0023] An MPCVD microwave resonance device includes a first cylindrical outer shell 1 and a second cylindrical outer shell 2 located inside the first cylindrical outer shell 1. There is a microwave channel 3 between the first cylindrical outer shell 1 and the second cylindrical outer shell 2. A microwave generator 4 is installed at the top of the first cylindrical outer shell 1; the bottom of the second cylindrical outer shell 2 has an arc-shaped cavity, and an arc-shaped reflection component 11 is arranged in the arc-shaped cavity. A lifting component for driving the height adjustment of the arc-shaped reflection component 11 is installed inside the first cylindrical outer shell 1;

[0024] The arc-shaped reflection component 11 is arranged in the arc-shaped cavity at the bottom of the second cylindrical outer shell 2, which strengthens the tuning means of the microwave resonance cavity, can optimize the plasma distribution in real time, and realizes the preparation of diamond films with high quality and high efficiency. The arc-shaped cavity at the bottom of the second cylindrical outer shell 2 is used to reflect and converge microwaves. The microwave channel 3 between the first cylindrical outer shell 1 and the second cylindrical outer shell 2 is used to introduce microwaves into the arc-shaped reflection component 11. The microwave input port of the microwave channel 3 is connected to the microwave generator 4, and the height of the arc-shaped reflection component 11 can be changed to perform microwave tuning;

[0025] And the following specific structure is designed for the lifting component to further complete the up and down displacement of the arc-shaped reflection component 11:

[0026] The lifting component includes a first screw rod 7, a first internal thread sleeve 6, a second internal thread sleeve 8, a first connecting rod 9 and a second connecting rod 10; both ends of the first screw rod 7 are rotatably connected to the inner wall of the first cylindrical outer shell 1. The first internal thread sleeve 6 and the second internal thread sleeve 8 are sleeved on the first screw rod 7 that is in threaded cooperation with them. The bottoms of the first connecting rod 9 and the second connecting rod 10 are connected to the arc-shaped reflection component 11 through the same hinge seat. The top of the first connecting rod 9 is hinged to the first internal thread sleeve 6, and the top of the second connecting rod 10 is hinged to the second internal thread sleeve 8.

[0027] When the first screw rod 7 rotates, it can drive the first internal thread sleeve 6 and the second internal thread sleeve 8 to approach each other, and the included angle between the first connecting rod 9 and the second connecting rod 10 decreases, then the downward movement of the arc-shaped reflection component 11 can be completed; conversely, when the first internal thread sleeve 6 and the second internal thread sleeve 8 move away from each other, the included angle between the first connecting rod 9 and the second connecting rod 10 increases, then the upward movement of the arc-shaped reflection component 11 can be completed; subsequently, by controlling the distance between the first internal thread sleeve 6 and the second internal thread sleeve 8, the range of the up and down movement of the arc-shaped reflection component 11 can be controlled.

[0028] Based on the above-mentioned "set first screw 7", in order to facilitate the control of its rotation, the following driving part is designed: The driving assembly 15 includes a first motor 151, a first transmission wheel 152, a second transmission wheel 153, a synchronous belt 154 and an L-shaped support frame 155. The first motor 151 is fixedly connected to the first cylindrical housing 1. The first transmission wheel 152 is installed on the rotating shaft of the first motor 151. The second transmission wheel 153 is installed at one end of the first screw 7 passing through the first cylindrical housing 1. The first transmission wheel 152 and the second transmission wheel 153 are connected by the synchronous belt 154.

[0029] As Figure 1 and Figure 2 shown, the first motor 151 drives the rotation of the first transmission wheel 152, and drives the rotation of the second transmission wheel 153 through the synchronous belt 154. The second transmission wheel 153 is integrally connected to the first screw 7, so as to drive the rotation of the first screw 7, and finally realize the up and down movement of the arc-shaped reflecting component 11.

[0030] As Figure 1 and Figure 3 shown, a substrate 13 is arranged below the arc-shaped reflecting component 11. A deposition table 12 is installed at the bottom of the substrate 13. The deposition table 12 is connected to the first cylindrical housing 1. Regarding the substrate 13, it is detachably connected to the bottom of the cavity of the first cylindrical housing 1, which is more convenient for subsequent replacement of the substrate 13.

[0031] Based on this, for the design that the substrate 13 is detachably connected to the bottom of the cavity of the first cylindrical housing 1, the following positioning assembly 14 is designed:

[0032] A positioning assembly 14 for positioning the substrate 13 is installed at the bottom of the cavity of the first cylindrical housing 1. There are four positioning assemblies 14, and the four positioning assemblies 14 are distributed in a matrix at the four corners of the substrate 13. The four positioning assemblies 14 each include a turntable 141, a first vertical rod 142, a second cross rod 143 and a T-shaped bolt 144. The turntable 141 is rotatably connected to the bottom of the cavity of the first cylindrical housing 1. A first vertical rod 142 is eccentrically arranged on the turntable 141. A second cross rod 143 is installed on the first vertical rod 142. A threaded hole is opened on the second cross rod 143, and a T-shaped bolt 144 threadedly engaged therewith is vertically installed in the threaded hole. One end of the T-shaped bolt 144 passing through the threaded hole abuts against the upper surface of the substrate 13.

[0033] Among them, the turntable 141 is rotatably connected to the bottom of the cavity of the first cylindrical housing 1, and the two can be connected through a bearing member, that is, the turntable 141 can rotate around its own central axis, and the first vertical rod 142 is eccentrically fixed on the turntable 141. When the substrate 13 needs to be disassembled later, the turntable 141 can be rotated to disconnect the second cross bar 143 connected to the first vertical rod 142 from above the substrate 13, so as to facilitate the replacement of the old and new substrates 13; after replacement, the turntable 141 is rotated again to place the second cross bar 143 connected to the first vertical rod 142 above the substrate 13, and the T-shaped bolt 144 is screwed to pass through the threaded hole and abut against the upper surface of the substrate 13.

[0034] As Figure 1 shown, a bellows 5 is installed in the cavity of the first cylindrical housing 1, an arc-shaped reflecting member 11 is installed at the bottom of the bellows 5, the bellows 5 is used for gas inlet and outlet, an air inlet pipe and an exhaust pipe can be inserted into the bellows 5, and the bellows 5 can change its own length in response to the height change of the arc-shaped reflecting member 11. The input gas flows uniformly above the deposition table 12 and is fully ionized, which is beneficial to form a plasma with a higher density between the deposition table 12 and the arc-shaped reflecting member 11.

[0035] The above embodiments only represent several implementation manners of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the utility model patent shall be subject to the appended claims.

Claims

1. An MPCVD microwave resonance device, characterized in that: The invention comprises a first cylindrical shell (1) and a second cylindrical shell (2) located inside the first cylindrical shell (1); a microwave channel (3) is provided between the first cylindrical shell (1) and the second cylindrical shell (2); a microwave generator (4) is installed on the top of the first cylindrical shell (1); a curved cavity is provided at the bottom of the second cylindrical shell (2); a curved reflecting component (11) is provided in the curved cavity; and a lifting assembly for driving the height adjustment of the curved reflecting component (11) is installed inside the first cylindrical shell (1); The lifting assembly comprises a first screw rod (7), a first internally threaded sleeve (6), a second internally threaded sleeve (8), a first connecting rod (9) and a second connecting rod (10); both ends of the first screw rod (7) are rotatably connected to the inner wall of the first cylindrical shell (1); the first internally threaded sleeve (6) and the second internally threaded sleeve (8) are sleeved on the first screw rod (7) threadedly matched therewith; the bottom ends of the first connecting rod (9) and the second connecting rod (10) are connected to the arc-shaped reflection component (11) through the same hinge seat; the top end of the first connecting rod (9) is hinged on the first internally threaded sleeve (6); the top end of the second connecting rod (10) is hinged on the second internally threaded sleeve (8).

2. The MPCVD microwave resonance device according to claim 1, characterized in that: A driving assembly (15) for driving the first screw rod (7) to rotate is arranged at the top of the first cylindrical shell (1), and the driving assembly (15) comprises a first motor (151), a first transmission wheel (152), a second transmission wheel (153), a synchronous belt (154) and an L-shaped support frame (155), wherein the first motor (151) is fixedly connected to the first cylindrical shell (1), the first transmission wheel (152) is mounted on the rotating shaft of the first motor (151), the second transmission wheel (153) is mounted on one end of the first screw rod (7) passing through the first cylindrical shell (1), and the first transmission wheel (152) and the second transmission wheel (153) are connected via a synchronous belt (154).

3. The MPCVD microwave resonance device according to claim 1, characterized in that: A substrate (13) is arranged below the arc-shaped reflection component (11), a deposition platform (12) is installed at the bottom of the substrate (13), and the deposition platform (12) is connected to the first cylindrical housing (1).

4. The MPCVD microwave resonance device according to claim 3, characterized in that: A positioning assembly (14) for positioning the substrate (13) is installed at the bottom of the cavity of the first cylindrical housing (1), and four positioning assemblies (14) are provided. The four positioning assemblies (14) are distributed in a matrix at the four corners of the substrate (13).

5. The MPCVD microwave resonance device according to claim 4, characterized in that: The four positioning components (14) each comprise a turntable (141), a first vertical rod (142), a second cross rod (143) and a T-bolt (144); the turntable (141) is rotatably connected to the bottom of the cavity of the first cylindrical shell (1); a first vertical rod (142) is eccentrically arranged on the turntable (141); a second cross rod (143) is mounted on the first vertical rod (142); a threaded hole is provided on the second cross rod (143); a T-bolt (144) threadedly matched with the threaded hole is vertically mounted in the threaded hole; one end of the T-bolt (144) passes through the threaded hole and abuts against the upper surface of the base plate (13).

6. The MPCVD microwave resonant device according to claim 1, characterized in that: A bellows (5) is installed in the cavity of the first cylindrical shell (1), and an arc-shaped reflection component (11) is installed at the bottom of the bellows (5).

Images