Refeeding device of splicing structure for single crystal furnace

Abstract

The utility model provides a re-throwing device of a splicing structure for a single crystal furnace, which comprises a connecting component, a first re-throwing sub-cylinder connected with the connecting component and a second re-throwing sub-cylinder connected with the connecting component, the first re-throwing sub-cylinder and the second re-throwing sub-cylinder are respectively arranged on two sides of the connecting component, the connecting component is provided with a mounting groove, and the mounting groove is arranged in the mounting groove. The first re-throwing sub-cylinder and the second re-throwing sub-cylinder are each provided with a connecting structure, the connecting structure of the first re-throwing sub-cylinder and the connecting structure of the second re-throwing sub-cylinder are both arranged in the mounting groove, and the first re-throwing sub-cylinder and the second re-throwing sub-cylinder are fixed through the connecting assembly. The re-throwing device has the advantages that the first re-throwing sub-cylinder or the second re-throwing sub-cylinder can be replaced after being damaged, the service life of the re-throwing device is prolonged, and cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon single crystal preparation, and particularly relates to a refeeding device with a splicing structure for a single crystal furnace. Background Technique

[0002] In the production process of solar silicon single crystals, in order to increase the feeding amount and reduce the production cost, multiple feeding and refeeding are required. Among them, a feeding device, namely a refeeder, is used. With the intensification of market competition, the requirements for the quality of single crystals are also more stringent. Therefore, current single crystal silicon manufacturers require higher quality.

[0003] Currently, a conventional inner-lifting quartz refeeder is used. The service life of the quartz cylinder is short and the lower end is easily damaged, which will cause the silicon material to carry quartz into the melt in the single crystal furnace. The silicon solution will react with quartz (Si(liquid)+SiO2(solid)=2SiO(liquid)), increasing the oxygen content of the silicon solution. Eventually, the oxygen content of the drawn single crystal silicon increases, and the quality of the single crystal deteriorates. Summary of the Invention

[0004] In view of the above problems, the utility model provides a refeeding device with a splicing structure for a single crystal furnace to solve the above or other previous problems existing in the prior art.

[0005] To solve the above technical problems, the technical solution adopted by the utility model is: a refeeding device with a splicing structure for a single crystal furnace, including a connection component, a first refeeding sub-cylinder connected to the connection component, and a second refeeding sub-cylinder connected to the connection component. The first refeeding sub-cylinder and the second refeeding sub-cylinder are respectively arranged on both sides of the connection component. The connection component is provided with an installation groove. Both the first refeeding sub-cylinder and the second refeeding sub-cylinder are provided with connection structures, and the connection structures of the first refeeding sub-cylinder and the second refeeding sub-cylinder are both arranged in the installation groove. The connection component fixes the first refeeding sub-cylinder and the second refeeding sub-cylinder.

[0006] Further, the connection component includes a first connecting piece and a second connecting piece connected to each other. The opposite surfaces of the first connecting piece and the second connecting piece are respectively provided with a first groove and a second groove, and the first groove and the second groove correspond to each other to form an installation groove structure.

[0007] Further, the first connecting piece is sleeved on the first refeeding sub-cylinder, and the second connecting piece is sleeved on the second refeeding sub-cylinder; or, the first connecting piece is sleeved on the second refeeding sub-cylinder, and the second connecting piece is sleeved on the first refeeding sub-cylinder.

[0008] Further, the second connecting piece at least includes a first splicing piece and a second splicing piece connected to each other. The first splicing piece and the second splicing piece are sequentially arranged along the circumferential direction of the first refeeding sub-cylinder or the second refeeding sub-cylinder.

[0009] Furthermore, at least two connecting parts are provided on the same side of the first splicing part and the second splicing part. The connecting part of the first splicing part is connected to the corresponding connecting part of the second splicing part. The connecting part is provided with a through hole, and the through hole is arranged along the circumferential direction of the first splicing part or the second splicing part.

[0010] Furthermore, a plurality of first mounting holes are provided on the first connecting part, and the plurality of first mounting holes are arranged in sequence along the circumferential direction of the first connecting part.

[0011] Furthermore, the connecting structure of the first re-injection cylinder is arranged at any one end. The connecting structure of the first re-injection cylinder is a first connecting boss arranged along the radial direction of the first re-injection cylinder. The outer diameter of the first connecting boss is larger than the outer diameter of the first re-injection cylinder, and the first connecting boss is arranged in the first groove or the second groove.

[0012] Furthermore, the connecting structure of the second re-injection cylinder is arranged at any one end. The connecting structure of the second re-injection cylinder is a second connecting boss arranged along the radial direction of the second re-injection cylinder. The outer diameter of the second connecting boss is larger than the outer diameter of the second re-injection cylinder, and the second connecting boss is arranged in the second groove or the first groove.

[0013] Furthermore, the material of the first re-injection cylinder is different from that of the second re-injection cylinder.

[0014] Furthermore, the material of the first re-injection cylinder is quartz, and the material of the second re-injection cylinder is silicon nitride.

[0015] Due to the above technical solutions, the re-injection device with a splicing structure for a single crystal furnace includes a first re-injection cylinder and a second re-injection cylinder connected by a connecting component, so that the first re-injection cylinder or the second re-injection cylinder can be replaced after being damaged, extending the service life of the re-injection device and reducing costs; the materials of the first re-injection cylinder and the second re-injection cylinder are different, and the material of the second re-injection cylinder is silicon nitride. Compared with the quartz material, the silicon nitride material has better wear resistance and fatigue resistance, extending the service life of the second re-injection cylinder and also preventing quartz impurities from entering the silicon solution when the second re-injection cylinder is damaged, and will not affect the quality of the single crystal; the connecting component includes a first connecting part and a second connecting part. The first connecting part is provided with a first groove, and the second connecting part is provided with a second groove. When the first connecting part and the second connecting part are connected, the first groove and the second groove form an installation groove. The first connecting boss of the first re-injection cylinder and the second connecting boss of the second re-injection cylinder are in contact and cooperate and are located in the installation groove, realizing the connection and fixation of the first re-injection cylinder and the second re-injection cylinder, making the assembly of the first re-injection cylinder and the second re-injection cylinder convenient and fast. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of the re-injection device of the present invention;

[0017] Figure 2 is a schematic structural diagram of a first connecting member of an embodiment of the present utility model;

[0018] Figure 3 is a schematic structural diagram of a splicing member of a second connecting member of an embodiment of the present utility model;

[0019] Figure 4 is a schematic structural diagram of a first re-injection sub-cylinder of an embodiment of the present utility model;

[0020] Figure 5 is a schematic structural diagram of a second re-injection sub-cylinder of an embodiment of the present utility model.

[0021] In the figure:

[0022] 1. First re-injection sub-cylinder 2. Second re-injection sub-cylinder 3. Connection assembly

[0023] 30. Second connecting member 31. First connecting member 300. Second groove

[0024] 301. Connection part 310. First groove 311. First mounting hole

[0025] 10. First connection boss 20. Second connection boss Detailed implementation manner

[0026] The present utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0027] Figure 1 shows a schematic structural diagram of an embodiment of the present utility model. This embodiment relates to a re-injection device with a splicing structure for a single crystal furnace, which is used for re-injection during the process of pulling a single crystal directly. The re-injection device has a first re-injection sub-cylinder and a second re-injection sub-cylinder connected by a connection assembly, so that the first re-injection sub-cylinder or the second re-injection sub-cylinder can be replaced after being damaged, extending the service life of the re-injection device and reducing production costs.

[0028] A re-injection device with a splicing structure for a single crystal furnace, as Figure 1As shown in the figure, it includes a connecting component 3, a first re-injection cylinder 1 connected to the connecting component 3, and a second re-injection cylinder 2 connected to the connecting component 3. The first re-injection cylinder 1 and the second re-injection cylinder 2 are respectively arranged on both sides of the connecting component 3. The first re-injection cylinder 1 and the second re-injection cylinder 2 are connected together through the connecting component 3 to form the overall structure of the re-injection device, enabling the detachable assembly of the first re-injection cylinder 1 and the second re-injection cylinder 2. During the use of the re-injection device, when the first re-injection cylinder 1 or the second re-injection cylinder 2 is damaged, the first re-injection cylinder 1 or the second re-injection cylinder 2 can be replaced, so that the re-injection device can continue to be used, extending the service life of the re-injection device and reducing the production and preparation cost. Both the first re-injection cylinder 1 and the second re-injection cylinder 2 are provided with connection structures for the first re-injection cylinder 1 and the second re-injection cylinder 2 to be respectively connected to the connecting component.

[0029] As Figure 1-3 shown in the figure, the above-mentioned connecting component 3 is provided with an installation groove. The connection structures of the first re-injection cylinder 1 and the second re-injection cylinder 2 are both arranged in the installation groove to fix the first re-injection cylinder 1 and the second re-injection cylinder 2 by the connecting component 3. Specifically, the connecting component 3 includes a first connecting piece 31 and a second connecting piece 30 connected to each other. An installation groove is formed at the contact position between the first connecting piece 31 and the second connecting piece 30. The connection structures of the first re-injection cylinder 1 and the second re-injection cylinder 2 are both arranged in the installation groove. The connecting component 3 fixes the connection structures of the first re-injection cylinder 1 and the second re-injection cylinder 2, and then connects the first re-injection cylinder 1 and the second re-injection cylinder 2 together. When the first re-injection cylinder 1 and the second re-injection cylinder 2 are assembled, the first re-injection cylinder 1 and the second re-injection cylinder 2 are coaxially arranged, and one end of the first re-injection cylinder 1 is in contact with one end of the second re-injection cylinder 2. The connection structures of the first re-injection cylinder 1 and the second re-injection cylinder 2 are in contact with each other and are arranged in the installation groove of the connecting component 3. The installation groove accommodates the connection structures of the first re-injection cylinder 1 and the second re-injection cylinder 2. The connecting component 3 fixes and positions the first re-injection cylinder 1 and the second re-injection cylinder 2, and connects the first re-injection cylinder 1 and the second re-injection cylinder 2 together to form the overall structure of the re-injection device.

[0030] As Figure 4As shown, the above-mentioned first refeeding sub-cylinder 1 is a cylindrical structure with a certain length and can hold the re-fed silicon material. The length of the first refeeding sub-cylinder 1 is selected according to actual needs and no specific requirements are made here. The connecting structure of the first refeeding sub-cylinder 1 is provided at either end, and the connecting structure is the first connecting boss 10. The outer diameter of the first connecting boss 10 is larger than the outer diameter of the first refeeding sub-cylinder 1, that is, the first connecting boss 10 protrudes from the outer side wall of the first refeeding sub-cylinder 1. The setting of the first connecting boss 10 facilitates the connection between the first refeeding sub-cylinder 1 and the connecting component 3. The first connecting boss 10 is formed by extending from the end of either end of the first refeeding sub-cylinder 1 towards the outside. That is, the first connecting boss 10 is an annular plate structure and is arranged on the outer side wall of one end of the first refeeding sub-cylinder 10 along the radial direction of the first refeeding sub-cylinder 1. The inner diameter side of the first connecting boss 10 is fixedly connected to the outer side wall of the end of the first refeeding sub-cylinder 1. The outer diameter side of the first connecting boss 10 is arranged outside the first refeeding sub-cylinder 1, and the first connecting boss 10 is perpendicular to the axis of the first refeeding sub-cylinder 1. One side of the other end of the first connecting boss 10 away from the first refeeding sub-cylinder 1 is flush with the end face of the adjacent first refeeding sub-cylinder 1, so as to facilitate the contact and cooperation between the first refeeding sub-cylinder 1 and the second refeeding sub-cylinder 2. The thickness and width of the first connecting boss 10 are selected according to actual needs and no specific requirements are made here.

[0031] In some feasible embodiments, the preferred fixed connection method between the first connecting boss 10 and the first refeeding sub-cylinder 1 is integral molding.

[0032] In some feasible embodiments, preferably, the cross-sectional shape of the first refeeding sub-cylinder 1 is circular, and the shape of the first connecting boss 10 is circular ring-shaped.

[0033] As Figure 5As shown, the above-mentioned second refeeding cylinder 2 is a cylindrical structure with a certain length and can hold the re-fed silicon material. The length of the second refeeding cylinder 2 is selected according to actual needs and no specific requirements are made here. The connecting structure of the second refeeding cylinder 2 is provided at either end, and this connecting structure is the second connecting boss 20. The outer diameter of the second connecting boss 20 is larger than the outer diameter of the second refeeding cylinder 2, that is, the second connecting boss 20 protrudes from the outer side wall of the second refeeding cylinder 2. The setting of the second connecting boss 20 facilitates the connection between the second refeeding cylinder 2 and the connecting component 3. The second connecting boss 20 is formed by extending from the end of either end of the second refeeding cylinder 2 towards the outside. That is, the second connecting boss 20 is an annular plate-like structure and is arranged on the outer side surface of one end of the second refeeding cylinder 2 along the radial direction of the second refeeding cylinder 2. The inner diameter side of the second connecting boss 20 is fixedly connected to the outer side surface of the end of the second refeeding cylinder 2. The outer diameter side of the second connecting boss 20 is arranged outside the second refeeding cylinder 2, and the second connecting boss 20 is perpendicular to the axis of the second refeeding cylinder 2. One side surface of the other end of the second connecting boss 20 away from the second refeeding cylinder 2 is flush with the end surface of the adjacent second refeeding cylinder 2, so as to facilitate the contact and cooperation between the second refeeding cylinder 2 and the first refeeding cylinder 1. The thickness and width of the second connecting boss 20 are selected according to actual needs and no specific requirements are made here.

[0034] In some feasible embodiments, the preferred fixed connection method between the second connecting boss 20 and the second refeeding cylinder 2 is integral molding.

[0035] In some feasible embodiments, preferably, the cross-sectional shape of the second refeeding cylinder 2 is circular, and the shape of the second connecting boss 20 is circular ring-shaped.

[0036] To facilitate the connection between the first refeeding cylinder 1 and the second refeeding cylinder 2 and the connecting component 3 respectively, preferably, the outer diameter of the first connecting boss 10 is adapted to the outer diameter of the second connecting boss 20, so as to design the structure of the connecting component 3 and facilitate the installation of the first connecting boss 10 and the second connecting boss 20.

[0037] Such as Figure 1-3As shown, the above-mentioned first connecting member 31 is an annular structure, and its shape is adapted to the shape of the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2, so that the first connecting member 31 is connected to the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2. The inner diameter dimension of the first connecting member 31 is adapted to the outer diameter of the first duplicate throwing cylinder 1 or the outer diameter of the second duplicate throwing cylinder 2. Then, the inner diameter dimension of the first connecting member 31 is smaller than the outer diameter dimension of the first connecting boss 10 or the outer diameter dimension of the second connecting boss 20. When the first connecting member 31 is assembled and connected to the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2, the first connecting member 31 is sleeved on the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2. The first connecting member 31 is assembled from the end of the first duplicate throwing cylinder 1 where the first connecting boss 10 is not provided or the end of the second duplicate throwing cylinder 2 where the second connecting boss 20 is not provided, and moves along the axial direction of the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2 until the other end of the first duplicate throwing cylinder 1 or the other end of the second duplicate throwing cylinder 2 contacts the first connecting boss 10 or the second connecting boss 20, and the first connecting member 31 stops moving. The first connecting member 31 is sleeved and connected to the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2.

[0038] In order to facilitate the connection and cooperation between the first connecting member 31 or the second connecting member 30 and the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2, first grooves 310 and second grooves 300 are respectively provided on the opposite surfaces of the first connecting member 31 and the second connecting member 30. The first grooves 310 and the second grooves 300 correspond to each other, constructing an installation groove structure. Specifically, a first groove 310 is provided on the side surface of the first connecting member 31 facing the second connecting member 30. That is, a first groove 310 is provided at the position where the first connecting member 31 contacts the first duplicate throwing cylinder 1 or the second duplicate throwing cylinder 2 to position and install the first connecting boss 10 or the second connecting boss 20. The first groove 310 is a groove structure formed by the inward depression of the side surface of the first connecting member 31 facing the second connecting member 30, and the first groove 310 communicates with the inner diameter hole of the first connecting member 31, so that the first connecting boss 10 or the second connecting boss 20 can enter the first groove 310.

[0039] In some feasible embodiments, preferably, the cross-sectional shape of the first groove 310 is L-shaped, and the depth of the first groove 310 is adapted to the thickness of the first connecting boss 10 or the thickness of the second connecting boss 20.

[0040] The above-mentioned second connecting member 30 is of an annular structure, and its shape is adapted to the shape of the second multiple casting cylinder 2 or the first multiple casting cylinder 1, so that the second connecting member 30 can be connected to the second multiple casting cylinder 2 or the first multiple casting cylinder 1. The inner diameter dimension of the second connecting member 30 is adapted to the outer diameter of the second multiple casting cylinder 2 or the outer diameter of the first multiple casting cylinder 1. Then, the inner diameter dimension of the second connecting member 30 is smaller than the outer diameter dimension of the second connecting boss 20 or the outer diameter dimension of the first connecting boss 10, so that the second connecting member 30 can be connected to the second connecting boss 20 or the first connecting boss 10. The first connecting member 31 and the second connecting member 30 can be selectively connected to the first connecting boss 10 or the second connecting boss 20. If the first connecting member 31 is connected to the first connecting boss 10, then the second connecting member 30 is connected to the second connecting boss 20. On the contrary, if the first connecting member 31 is connected to the second connecting boss 20, then the second connecting member 30 is connected to the first connecting boss 10. The specific connection method is selected according to actual needs.

[0041] In order to facilitate the installation of the first connecting boss 10 or the second connecting boss 20, a second groove 300 is provided on one side of the second connecting member 30 facing the first connecting member 31. That is to say, a second groove 300 is provided at the position where the second connecting member 30 contacts the second multiple casting cylinder 2 or the first multiple casting cylinder 1, which is convenient for the arrangement of the second connecting boss 20 or the first connecting boss 10. The second groove 300 is a groove structure formed by the inward depression of one side of the second connecting member 30 facing the first connecting member 31, and the second groove 300 communicates with the inner diameter hole of the second connecting member 30, so that the second connecting boss 20 or the first connecting boss 10 can enter the second groove 300.

[0042] In some implementable embodiments, preferably, the cross-sectional shape of the second groove 300 is L-shaped, and the depth of the second groove 300 is adapted to the thickness of the second connecting boss 20 or the thickness of the first connecting boss 10.

[0043] When the first connecting member 31 is in contact and connected with the second connecting member 30, the position of the first groove 310 corresponds to the position of the second groove 300. The first groove 310 and the second groove 300 form an installation groove structure to accommodate the first connecting boss 10 and the second connecting boss 20. The first connecting member 31 and the second connecting member 30 restrict the axial movement of the first multiple casting cylinder 1 and the second multiple casting cylinder 2, so that the first multiple casting cylinder 1 and the second multiple casting cylinder 2 cannot perform axial movement, realizing the connection of the first multiple casting cylinder 1 and the second multiple casting cylinder 2 together to form the overall structure of the multiple casting device.

[0044] The second connecting member 30 may be an integral structure, which is an integral annular structure. The second connecting member 30 can move along the axial direction of the second or first re-throwing cylinder 2 or 1 from one end of the second or first re-throwing cylinder 2 or 1 for sleeving. In this structure, the first connecting member 31 is provided with a plurality of first mounting holes 311, and the plurality of first mounting holes 311 are all arranged on the side wall of the first groove 310. The plurality of first mounting holes 311 are sequentially arranged along the circumferential direction of the first connecting member 31. The second connecting member 30 is provided with a plurality of second mounting holes, and the plurality of second mounting holes are all arranged on the side wall of the second groove 300. The plurality of mounting holes are sequentially arranged along the circumferential direction of the second connecting member 30. The number of the first mounting holes 311 is consistent with the number of the second mounting holes and corresponds one by one. Connecting members such as bolts sequentially pass through the corresponding first mounting holes 311 and second mounting holes to connect the first connecting member 31 and the second connecting member 30 together;

[0045] Alternatively, the second connecting member 30 may also be a split structure. The second connecting member 30 at least includes a first splicing member and a second splicing member that are detachably connected. The first splicing member and the second splicing member are sequentially arranged along the circumferential direction of the first or second re-throwing cylinder 1 or 2 and are connected end to end to form the annular second connecting member 30. The arrangement of the first splicing member and the second splicing member facilitates the assembly of the connecting component 3. When the second connecting member 30 includes two splicing members, both splicing members (such as the first splicing member and the second splicing member) are semi-circular structures. When the second connecting member 30 includes three or more splicing members, each splicing member is an arc-shaped structure, and three or more splicing members are joined together to form the annular second connecting member 30. The number of splicing members is selected according to actual needs and there are no specific requirements here. Here, an example in which the second connecting member 30 has two splicing members will be used for illustration.

[0046] Both the first splicing piece and the second splicing piece are provided with a second groove 300. The second groove 300 is arranged on the same side of the first splicing piece and the second splicing piece, and is arranged on the side of the first splicing piece and the second splicing piece facing the first connecting piece 31. The structure of the second groove 300 is the same as that of the above-mentioned second groove 300. At least two connecting parts 301 are arranged on the same side of the first splicing piece and the second splicing piece for connecting the first splicing piece and the second splicing piece together. The connecting part on the first splicing piece is connected to the corresponding connecting part on the second splicing piece. In some feasible embodiments, preferably, the number of the connecting parts 301 on the first splicing piece is two, which are respectively arranged at the two ends of the first splicing piece. The connecting part 301 is a block structure. One end of the connecting part 301 is fixedly connected to one side surface of the first splicing piece, and this side surface is preferably the top surface of the side wall of the second groove 300 to avoid blocking the second groove 300. One side surface of the connecting part 301 is flush with the end surface of the first splicing piece. Similarly, the number of the connecting parts 301 on the second splicing piece is two, which are respectively arranged at the two ends of the second splicing piece. One end of the connecting part 301 is fixedly connected to one side surface of the second splicing piece, and this side surface is preferably the top surface of the side wall of the second groove 300 to avoid blocking the second groove 300. One side surface of the connecting part 301 is flush with the end surface of the second splicing piece; a through hole is arranged on the connecting part 301, and the through hole is arranged along the circumferential direction of the first splicing piece or the second splicing piece. When the first splicing piece and the second splicing piece are connected, the two end surfaces of the first splicing piece are in contact with the two end surfaces of the second splicing piece, and the side surfaces of the corresponding connecting parts 301 are in contact. The through holes of the two contacting connecting parts 301 are communicated, so that the two contacting connecting parts 301 are connected by a connecting piece such as a bolt to connect the first splicing piece and the second splicing piece together. Under this structure, a receiving groove is arranged on the first connecting piece 31. When the first connecting piece 31 is connected to the second connecting piece 30, the two connected connecting parts 301 can be located in the receiving groove. At the same time, the first splicing piece and the first connecting piece 31 are connected by a connecting piece such as a bolt, and the second splicing piece and the first connecting piece 31 are connected by a connecting piece such as a bolt, so that the corresponding side surfaces of the first connecting piece 31 and the second connecting piece 30 are in contact, and the first groove 310 and the second groove 300 form a structure of an installation groove to fix the first re-throwing cylinder 1 and the second re-throwing cylinder 2.

[0047] Of course, the receiving groove may not be provided on the first connecting member 31. The connecting portions of the first splicing member and the second splicing member are provided on a side surface away from the first connecting member 31. The second groove 300 is provided on the side surfaces of the first splicing member and the second splicing member facing the first connecting member 31. The first splicing member and the first connecting member 31 are connected by a connecting member such as a bolt, and the second splicing member and the first connecting member 31 are connected by a connecting member such as a bolt. The connecting portions will not interfere with the connection of the first splicing member and the second splicing member to the first connecting member 31 respectively.

[0048] The first mounting hole 311 on the first connecting member 31 is a slotted hole, so as to adjust the distance between the first splicing member and the second splicing member when the first splicing member and the second splicing member are mounted to the first connecting member 31.

[0049] The material of the first re-injection cylinder 1 is different from that of the second re-injection cylinder 2. The material of the first re-injection cylinder 1 is quartz, and the material of the second re-injection cylinder 2 is silicon nitride. Compared with the first re-injection cylinder 1 made of quartz, when the second re-injection cylinder 2 made of silicon nitride is damaged, no quartz impurities will be brought into the silicon solution, which will not affect the quality of the single crystal. At the same time, the silicon nitride material has better wear resistance and fatigue resistance than the quartz material. As the material of the re-injection cylinder, the service life of the second re-injection cylinder 2 can be extended. When the re-injection device performs re-injection, it is selected to

[0050] The second re-injection cylinder 2 is used as the lower half part of the re-injection device. The second re-injection cylinder 2 can extend into the main chamber of the single crystal furnace during the re-injection process. During the re-injection process, the re-injected silicon material near the inner wall of the second re-injection cylinder 2 falls along the inner wall of the second re-injection cylinder 2. The re-injected silicon material in the middle part of the axis of the second re-injection cylinder 2 moves towards the inner wall of the second re-injection cylinder 2 and then drops. The re-injected silicon material contacts the inner wall of the second re-injection cylinder 2 and collides, so the second re-injection cylinder 2 is easily damaged and the first re-injection cylinder 1 is not easily damaged. When the second re-injection cylinder 2 is damaged, a new second re-injection cylinder 2 can be replaced, and the first re-injection cylinder 1 does not need to be replaced, thus extending the service life of the re-injection device.

[0051] Hereinafter, the connection between the first connecting member 31 and the second re-injection cylinder 2, and the connection between the second connecting member 30 and the first re-injection cylinder 1 will be taken as an example for description.

[0052] When the multiple-charge device with a splicing structure for the single-crystal furnace is in use, the first connecting piece 31 is sleeved on the second multiple-charge sub-cylinder 2. One end of the second multiple-charge sub-cylinder 2 without the second connecting boss 20 passes through the inner diameter hole of the first connecting piece 31. Move the first connecting piece 31, and the first connecting piece 31 moves along the axial direction of the second multiple-charge sub-cylinder 2 until the first connecting piece 31 contacts the second connecting boss 20. Then the first connecting piece 31 stops moving, and the second connecting boss 20 is located in the first groove 310. Sleeve the second connecting piece 30 on the first multiple-charge sub-cylinder 1. The first splicing piece is arranged on one side of the end of the first multiple-charge sub-cylinder 1 with the first connecting boss 10, and the first connecting boss 10 is located in the second groove 300 of the first splicing piece. The second splicing piece is arranged on the other side of the first multiple-charge sub-cylinder 1 with the first connecting boss 10, and the first connecting boss 10 is located in the second groove 300 of the second splicing piece. Then make the connecting parts 301 of the first splicing piece and the second splicing piece correspond and contact, and connect the first splicing piece and the second splicing piece together through connecting parts such as bolts. Then make the first connecting boss 10 of the first multiple-charge sub-cylinder 1 contact the second connecting boss 20 of the second multiple-charge sub-cylinder 2, so that the first multiple-charge sub-cylinder 1 and the second multiple-charge sub-cylinder 2 are coaxially arranged. At this time, the first connecting piece 31 contacts the second connecting piece 30, and connect the first connecting piece 31 and the second connecting piece 30 together through connecting parts such as bolts to form the overall structure of the multiple-charge device for multiple-charge operation.

[0053] Due to the above technical solutions, the multiple-charge device with a splicing structure for the single-crystal furnace includes a first multiple-charge sub-cylinder and a second multiple-charge sub-cylinder connected by a connection assembly, enabling the replacement of the first multiple-charge sub-cylinder or the second multiple-charge sub-cylinder after damage, extending the service life of the multiple-charge device and reducing costs. The materials of the first multiple-charge sub-cylinder and the second multiple-charge sub-cylinder are different. The material of the second multiple-charge sub-cylinder is silicon nitride, which has better wear resistance and anti-fatigue performance compared with quartz material, extending the service life of the second multiple-charge sub-cylinder and also preventing quartz impurities from entering the silicon solution when the second multiple-charge sub-cylinder is damaged, thus not affecting the quality of the single crystal. The connection assembly includes a first connecting piece and a second connecting piece. The first connecting piece is provided with a first groove, and the second connecting piece is provided with a second groove. When the first connecting piece and the second connecting piece are connected, the first groove and the second groove form an installation groove. The first connecting boss of the first multiple-charge sub-cylinder and the second connecting boss of the second multiple-charge sub-cylinder are in contact and located in the installation groove, realizing the connection and fixation of the first multiple-charge sub-cylinder and the second multiple-charge sub-cylinder, making the assembly of the first multiple-charge sub-cylinder and the second multiple-charge sub-cylinder convenient and fast.

[0054] The above has described the embodiments of the present utility model in detail, but the above content is only the preferred embodiments of the present utility model and cannot be considered as limiting the scope of implementation of the present utility model. Any equivalent changes and improvements made within the scope of the application of the present utility model shall still fall within the scope covered by the patent of the present utility model.

Claims

1. A re-investment device of a splicing structure for a single crystal furnace, characterized in that: It includes a connecting component, a first re-throw sub-tube connected to the connecting component, and a second re-throw sub-tube connected to the connecting component, the first re-throw sub-tube and the second re-throw sub-tube are respectively arranged on both sides of the connecting component, the connecting component is provided with a mounting groove, the first re-throw sub-tube and the second re-throw sub-tube are both provided with a connecting structure, the connecting structure of the first re-throw sub-tube and the connecting structure of the second re-throw sub-tube are both arranged in the mounting groove, and the connecting component fixes the first re-throw sub-tube and the second re-throw sub-tube.

2. The re-investment device of the splicing structure for a single crystal furnace according to claim 1, characterized in that: The connection assembly includes a first connection member and a second connection member connected to each other. The first connection member and the second connection member have opposite surfaces provided with a first groove and a second groove respectively. The first groove corresponds to the second groove to form the installation groove structure.

3. The re-investment device of the splicing structure for a single crystal furnace according to claim 2, characterized in that: The first connecting piece is sleeved on the first re-throwing sub-tube, and the second connecting piece is sleeved on the second re-throwing sub-tube; or, the first connecting piece is sleeved on the second re-throwing sub-tube, and the second connecting piece is sleeved on the first re-throwing sub-tube.

4. The re-investment device of the splicing structure for a single crystal furnace according to claim 2 or 3, characterized in that: The second connecting piece at least includes a first splicing piece and a second splicing piece connected to each other, and the first splicing piece and the second splicing piece are sequentially arranged along the circumferential direction of the first re-throwing sub-tube or the second re-throwing sub-tube.

5. The re-investment device of the splicing structure for a single crystal furnace according to claim 4, characterized in that: The same side of the first splicing piece and the second splicing piece are provided with at least two connecting parts, the connecting parts of the first splicing piece are connected to the corresponding connecting parts of the second splicing piece, the connecting parts are provided with through holes, and the through holes are arranged along the circumferential direction of the first splicing piece or the second splicing piece.

6. The re-investment device of the splicing structure for a single crystal furnace according to claim 4, characterized in that: The first connecting member is provided with a plurality of first mounting holes, and the plurality of first mounting holes are sequentially arranged along the circumferential direction of the first connecting member.

7. The recharging device of the splicing structure for a single crystal furnace according to any one of claims 2-3 and 5-6, characterized in that: The connection structure of the first re-throw sub-tube is arranged at either end, and the connection structure of the first re-throw sub-tube is a first connection boss arranged along the radial direction of the first re-throw sub-tube, and the outer diameter of the first connection boss is larger than the outer diameter of the first re-throw sub-tube, and the first connection boss is arranged in the first groove or the second groove.

8. The re-investment device of the splicing structure for a single crystal furnace according to claim 7, characterized in that: The connection structure of the second re-throw sub-tube is arranged at either end, and the connection structure of the second re-throw sub-tube is a second connection boss arranged along the radial direction of the second re-throw sub-tube, and the outer diameter of the second connection boss is larger than the outer diameter of the second re-throw sub-tube, and the second connection boss is arranged in the second groove or the first groove.

9. The re-investment device of the splicing structure for a single crystal furnace according to claim 1, characterized in that: The material of the first multiple-throw sub-tube is different from the material of the second multiple-throw sub-tube.

10. The re-investment device of the splicing structure for a single crystal furnace according to claim 9, characterized in that: The material of the first multiple-throw sub-tube is quartz, and the material of the second multiple-throw sub-tube is silicon nitride.

Images