Integrated circuit film forming optical detection equipment

Abstract

The utility model discloses integrated circuit film forming optical detection equipment, which relates to the field of optical detection, and comprises a feeding mechanism and a detection mechanism for performing optical detection on a substrate on the feeding mechanism, the feeding mechanism comprises a base and a first sliding table arranged on the base in a sliding manner, a first sliding table is arranged on the base, a second sliding table is arranged on the first sliding table in a sliding mode, a first limiting block is fixedly connected to the base, a second limiting block is arranged on the second sliding table, a first fixing piece is arranged between the first sliding table and the base, and a second fixing piece is arranged between the second sliding table and the first sliding table. According to the integrated circuit film forming optical detection equipment provided by the utility model, when the first limiting block and the second limiting block are attached to the edge position of the substrate, the first fixing piece automatically fixes the position of the first sliding table, and the second fixing piece automatically fixes the position of the second sliding table, so that the position of the second limiting block is automatically fixed; therefore, the position of the substrate is fixed conveniently and quickly.

Description

Technical Field

[0001] The utility model relates to the field of optical detection, and particularly relates to an integrated circuit film forming optical detection device. Background Art

[0002] As is known, the film forming technology is to prepare the connection lines between passive components and circuit components on a ceramic substrate (silicon wafer). Generally, during the manufacturing process, many identical independent small circuits are neatly arrayed on a ceramic substrate. In order to ensure the normal operation of the circuits, it is necessary to perform microscopic detection on the circuits inside the substrate. In order to improve the stability of the detection, it is usually necessary to use a clamping member to fix the position of the substrate.

[0003] For example, in a Chinese patent document with the authorization announcement number CN215894430U, the announcement date of February 22, 2022, and the name of "An Integrated Circuit Film Forming Optical Detection Variable Material Supporting Platform Device", it includes a fixed limit block, a movable limit block, an X-axis adjustment slide, a material supporting platform bottom plate, a Y-axis adjustment slide, and a support column pin; fixed limit blocks are installed on both sides of the material supporting platform bottom plate, the fixed limit blocks are fixed on the bottom plate through support column pins, an X-axis adjustment slide is installed on the upper part of the material supporting platform bottom plate, a Y-axis adjustment slide is installed on the upper part of the X-axis adjustment slide, and movable limit blocks are installed on both sides of the Y-axis adjustment slide. The movable limit blocks correspond to the fixed limit blocks to form a guardrail for the integrated circuit film forming substrate, which is used to limit and fix and protect the detected integrated circuit film forming ceramic substrate.

[0004] The disadvantage of the above prior art is that when moving the movable limit block to a position where it fits with the substrate, it is necessary to fix the position of the movable limit block through a fixing structure such as a bolt or a pin, and the process is relatively cumbersome. Summary of the Utility Model

[0005] The purpose of the utility model is to provide an integrated circuit film forming optical detection device to solve the above-mentioned deficiencies in the prior art.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] An integrated circuit film forming optical detection device, which includes a feeding mechanism and a detection mechanism for optically detecting the substrate on the feeding mechanism. The feeding mechanism includes a base and a first slide slidably arranged on the base. A second slide is slidably arranged on the first slide. A first limit block is fixedly connected to the base. A second limit block is arranged on the second slide. A first fixing member is arranged between the first slide and the base. A second fixing member is arranged between the second slide and the first slide.

[0008] The above-mentioned integrated circuit film-forming optical detection device, the first fixing member includes a first blocking block, the first blocking block is elastically arranged on the base, a first abutting portion is arranged at the bottom of the first sliding table, and the first blocking block is located on the movement stroke of the first abutting portion.

[0009] The above-mentioned integrated circuit film-forming optical detection device, the second fixing member includes a second blocking block, the second blocking block is slidably arranged on the first blocking block, a second abutting portion is arranged at the bottom of the second sliding table, and the second blocking block is located on the movement stroke of the second abutting portion.

[0010] The above-mentioned integrated circuit film-forming optical detection device, a slide rail is arranged on the second blocking block, a chute is opened on the first blocking block, and the slide rail is connected to the chute.

[0011] The above-mentioned integrated circuit film-forming optical detection device, the length of the slide rail is greater than the movement stroke of the first sliding table.

[0012] The above-mentioned integrated circuit film-forming optical detection device, an unlocking member is slidably arranged on the base, and the unlocking member is fixedly connected to the first blocking block.

[0013] The above-mentioned integrated circuit film-forming optical detection device, a first spring is arranged between the first sliding table and the base.

[0014] The above-mentioned integrated circuit film-forming optical detection device, a second spring is arranged between the second sliding table and the first sliding table.

[0015] The above-mentioned integrated circuit film-forming optical detection device further includes a third limiting block, and the third limiting block is fixedly connected to the base.

[0016] The above-mentioned integrated circuit film-forming optical detection device, a limiting groove adapted to the substrate is opened on the first limiting block.

[0017] In the above technical solution, for the integrated circuit film-forming optical detection device provided by the present utility model, when both the first limiting block and the second limiting block are in contact with the edge position of the substrate, the first fixing member automatically fixes the position of the first sliding table, and the second fixing member automatically fixes the position of the second sliding table, so that the position of the second limiting block is automatically fixed, thereby fixing the position of the substrate, which is convenient and fast. Description of the Drawings

[0018] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings.

[0019] Figure 1 Schematic diagram of the overall structure provided by the embodiment of the present utility model;

[0020] Figure 2 Top view structure schematic diagram provided by the embodiment of the present utility model;

[0021] Figure 3 For Figure 2 Schematic diagram of the sectional structure at a-a in

[0022] Figure 4 For Figure 2 Schematic diagram of the sectional structure at b-b in

[0023] Figure 5 Schematic diagram of the connection structure between the first blocking block and the second blocking block provided by the embodiment of the present utility model;

[0024] Figure 6 For Figure 3 Schematic diagram of the enlarged partial structure at A in

[0025] Figure 7 For Figure 3 Schematic diagram of the enlarged partial structure at B in

[0026] Figure 8 For Figure 4 Schematic diagram of the enlarged partial structure at C in

[0027] Explanation of reference numerals:

[0028] 1. Base; 2. First sliding table; 3. Second sliding table; 4. First limiting block; 5. Second limiting block; 6. First blocking block; 7. First abutting portion; 8. First card slot; 9. Lifting groove; 10. Return spring; 11. Second blocking block; 12. Second abutting portion; 13. Second card slot; 14. Slide rail; 15. Slide groove; 16. Unlocking member; 17. First spring; 18. Second spring; 19. Third limiting block; 20. Limiting groove; 21. First abutting rod; 22. Push plate; 23. Second abutting rod; 24. Transverse groove; 25. Third spring; 26. Substrate. Detailed implementation manners

[0029] In order to enable those skilled in the art to better understand the technical solutions of the present utility model, the following will further introduce the present utility model in detail in conjunction with the drawings.

[0030] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "lateral", "length", "width", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0031] Referring to Figures 1-8 , an integrated circuit film-forming optical detection device provided by an embodiment of the present utility model includes a loading mechanism and a detection mechanism (not shown in the figure) for optically detecting a substrate on the loading mechanism. The loading mechanism includes a base 1 and a first slide 2 slidably disposed on the base 1. A second slide 3 is slidably disposed on the first slide 2. A first limit block 4 is fixedly connected to the base 1, and a second limit block 5 is disposed on the second slide 3. A first fixing member is disposed between the first slide 2 and the base 1, and a second fixing member is disposed between the second slide 3 and the first slide 2.

[0032] Specifically, the detection mechanism is a configuration of a high-pixel optical color industrial camera and an optical illumination system. The optical illumination system provides brightness, and then the camera takes pictures for recognition to find defects existing in the substrate 26. The substrate 26 has a square plate-like structure. Slide rods are provided on both the base 1 and the first slide table 2. The first slide table 2 and the second slide table 3 are respectively slidably connected to a plurality of slide rods, and the first slide table 2 and the second slide table 3 are arranged perpendicular to each other in the horizontal direction. The sliding direction of the first slide table 2 is the X direction, and the sliding direction of the second slide table 3 is the Y direction, so as to facilitate adjusting the horizontal position of the second limit block 5. After the second limit block 5 moves to the target position, the positions of the second slide table 3 and the second limit block 5 are fixed by structures such as pins or bolts. Both the first limit block 4 and the second limit block 5 are L-shaped, so as to fix the substrate 26 between the first limit block 4 and the second limit block 5, and then send it to the detection mechanism for optical detection. This is the prior art and will not be elaborated (specifically, please refer to the patent document with the authorization announcement number CN215894430U). One of the core innovations of the embodiment of the present invention is that a first fixing member is provided between the first slide table 2 and the base 1, and a second fixing member is provided between the second slide table 3 and the first slide table 2. Both the first fixing member and the second fixing member can be reciprocating drive components such as electric push rods, which are used to adjust the horizontal positions of the first slide table 2 and the second slide table 3. The function of such a setting is that when both the first limit block 4 and the second limit block 5 are in contact with the edge position of the substrate 26, the first fixing member automatically fixes the position of the first slide table 2, and the second fixing member automatically fixes the position of the second slide table 3, so as to automatically fix the position of the second limit block 5, thereby automatically fixing the position of the substrate 26, which is convenient and fast.

[0033] Preferably, the first fixing member includes a first blocking block 6, the first blocking block 6 is elastically arranged on the base 1, a first abutting portion 7 is arranged at the bottom of the first sliding table 2, and the first blocking block 6 is located on the movement stroke of the first abutting portion 7. Specifically, the cross-section of the first blocking block 6 is trapezoidal, a first avoiding groove is formed at the bottom of the first sliding table 2, the first abutting portion 7 is located on the inner top wall of the first avoiding groove, and the cross-section of the first abutting portion 7 is a right triangle. A first clamping groove 8 adapted to the first blocking block 6 is formed between the first abutting portion 7 and the first avoiding groove. A lifting groove 9 is formed inside the base 1. The elastic arrangement means that a return spring 10 is arranged between the first blocking block 6 and the lifting groove 9. The function of such an arrangement is that when adjusting the X-direction position of the second limiting block 5, the first sliding table 2 is pushed. The first sliding table 2 will drive the inclined surface of the first abutting portion 7 to abut against the inclined surface of the first blocking block 6, so that the first blocking block 6 moves downward and compresses the return spring 10. After the inclined surfaces of the two abut against each other, the elastic force of the return spring 10 is released, so that the first blocking block 6 is inserted into the second clamping groove 13, thereby passively fixing the position of the first sliding table 2, and thus completing the fixing of the second limiting block 5 in the X direction.

[0034] Preferably, the second fixing member includes a second blocking block 11, the second blocking block 11 is slidably arranged on the first blocking block 6, a second abutting portion 12 is arranged at the bottom of the second sliding table 3, and the second blocking block 11 is located on the movement stroke of the second abutting portion 12. Specifically, the second blocking block 11 is slidably arranged on the side surface of the first blocking block 6, so that the second blocking block 11 and the first blocking block 6 can slide relative to each other in the X direction, but cannot slide relative to each other in the Y direction and the vertical direction. The cross-section of the second blocking block 11 is also trapezoidal. A second avoiding groove is formed at the bottom of the second sliding table 3. The second abutting portion 12 is located on the inner top wall of the second avoiding groove, and the cross-section of the second abutting portion 12 is a right triangle. A second clamping groove 13 adapted to the second blocking block 11 is formed between the second abutting portion 12 and the second avoiding groove. The function of such an arrangement is that when adjusting the Y-direction position of the second limiting block 5, the second sliding table 3 is pushed. The second sliding table 3 will drive the inclined surface of the second abutting portion 12 to abut against the inclined surface of the second blocking block 11, so that the second blocking block 11 moves downward and compresses the return spring 10. After the inclined surfaces of the two abut against each other, the elastic force of the return spring 10 is released, so that the second blocking block 11 is inserted into the second clamping groove 13, thereby passively fixing the position of the second sliding table 3, and thus completing the fixing of the second limiting block 5 in the Y direction.

[0035] It should be noted that when the first blocking block 6 is engaged with the first card slot 8 and the second blocking block 11 is engaged with the second card slot 13, the space between the first limiting block 4 and the second limiting block 5 is adapted to the size of the substrate 26, and a protective structure such as a rubber pad is provided at the position where components such as the first limiting block 4 and the second limiting block 5 are in direct contact with the substrate 26.

[0036] Preferably, a slide rail 14 is provided on the second blocking block 11, and a slide groove 15 is formed on the first blocking block 6. The slide rail 14 is connected to the slide groove 15. Through the sliding connection of the slide rail 14 and the slide groove 15, on the one hand, when the second blocking block 11 moves downward, the first blocking block 6 can also squeeze the return spring 10 to facilitate the reset of the second blocking block 11. On the other hand, it can prevent interference between the first blocking block 6 and the second blocking block 11 when adjusting the position of the first slide table 2, so that the first slide table 2 can slide normally.

[0037] Furthermore, the length of the slide rail 14 is greater than the movement stroke of the first slide table 2. In this way, during the sliding of the first slide table 2 in the X direction, the first blocking block 6 and the second blocking block 11 can always maintain a sliding connection state.

[0038] Furthermore, an unlocking member 16 is slidably provided on the base 1, and the unlocking member 16 is fixedly connected to the first blocking block 6. Specifically, the unlocking member 16 is in the shape of a vertically arranged button, and it is fixedly connected to the first blocking block 6 through a connecting rod. A return spring 10 is also provided between the connecting rod and the lifting groove 9. The function of this setting is that when the detection of the substrate 26 is completed and the substrate 26 needs to be removed, press the unlocking member 16. Under the action of the connecting rod, it will drive the first blocking block 6 and the second blocking block 11 to move downward synchronously, so that the first blocking block 6 is away from the first abutting portion 7, and the second blocking block 11 is away from the second abutting portion 12, so that the first slide table 2 and the second slide table 3 are in a slidable state. Then, push the first slide table 2 and the second slide table 3 in the reverse direction to make the second limiting block 5 away from the substrate 26, so that the substrate 26 can be removed.

[0039] Furthermore, a first spring 17 is provided between the first slide table 2 and the base 1. When the first slide table 2 slides to fix the substrate 26 in the X direction, it will squeeze the first spring 17. When the unlocking member 16 controls the first blocking block 6 to be away from the first abutting portion 7, the elastic force of the first spring 17 is released, so that the first slide table 2 automatically resets.

[0040] Further, a second spring 18 is disposed between the second slide table 3 and the first slide table 2. When the second slide table 3 slides to fix the substrate 26 in the Y direction, the second spring 18 will be compressed. When the unlocking member 16 controls the second blocking block 11 and the second abutting portion 12 to move away from each other, the elastic force of the second spring 18 is released, so that the second slide table 3 automatically resets.

[0041] Further, a third limiting block 19 is further included, and the third limiting block 19 is fixedly connected to the base 1. The third limiting block 19 is also L-shaped, and is disposed at the corner of the substrate 26 away from the first limiting block 4 and towards the second limiting block 5, so as to surround the substrate 26 and improve the stability of the substrate 26 during placement.

[0042] Further, a limiting groove 20 adapted to the substrate 26 is formed in the first limiting block 4. Specifically, the limiting groove 20 is formed on the side wall of the first limiting block 4. After the position of the substrate 26 is fixed, one side of the substrate 26 will be inserted into the limiting groove 20, so as to play a role in limiting the vertical direction of the substrate 26 and improve the stability of the fixation of the substrate 26.

[0043] Further, a first abutting rod 21 is provided on the connecting rod, a push plate 22 is slidably provided on the first limiting block 4, a second abutting rod 23 is provided on the push plate 22, and the second abutting rod 23 is located on the movement stroke of the first abutting rod 21. Specifically, the first abutting rod 21 is fixedly connected to the end of the connecting rod, and the end thereof away from the connecting rod penetrates through the top wall of the lifting groove 9 and extends above the base 1, and a wedge surface is provided at this end. A return spring 10 is also provided between the first abutting rod 21 and the lifting groove 9. A transverse groove 24 is formed inside the first limiting block 4, the push plate 22 is slidably provided in the transverse groove 24, the second abutting rod 23 is fixedly connected to the lower part of the push plate 22, and a wedge surface is also provided at the end away from the push plate 22. The wedge surface of the second abutting rod 23 is located on the movement stroke of the wedge surface of the first abutting rod 21. The distance between the wedge surface on the first abutting rod 21 and the wedge surface on the second abutting rod 23 is greater than the vertical distance between the inclined surfaces of the first blocking block 6 and the second blocking block 11. A third spring 25 is provided between the second abutting rod 23 and the side wall of the transverse groove 24. The function of such a setting is that when the unlocking member 16 is pressed, there are two strokes. One is the unlocking stroke of driving the first blocking block 6 and the second blocking block 11. The second is to continue pressing the unlocking member 16, so as to drive the wedge surface on the first abutting rod 21 to abut against the wedge surface on the second abutting rod 23, and compress the return spring 10, so that the first abutting rod 21 and the push plate 22 slide horizontally, and compress the third spring 25, so that the substrate 26 can be pushed out of the limiting groove 20, avoiding the substrate 26 being stuck in the limiting groove 20, so as to realize the function of assisting in blanking. When the blanking of the substrate 26 is completed, the unlocking member 16 is released, and the first blocking block 6, the second blocking block 11 and the first abutting rod 21 are automatically reset under the action of the return spring 10, and the push plate 22 and the second abutting rod 23 are automatically reset under the action of the third spring 25.

[0044] Only some exemplary embodiments of the present invention have been described by way of illustration above. Undoubtedly, for those of ordinary skill in the art, without departing from the spirit and scope of the present invention, the described embodiments can be modified in various different ways. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An integrated circuit film optical inspection device, comprising a feeding mechanism and an inspection mechanism for optically inspecting a substrate on the feeding mechanism, wherein the feeding mechanism comprises a base and a first slide slidably arranged on the base, a second slide slidably arranged on the first slide, and characterized in that: A first limiting block is fixedly connected to the base, a second limiting block is arranged on the second slide, a first fixing member is arranged between the first slide and the base, and a second fixing member is arranged between the second slide and the first slide.

2. The integrated circuit film optical inspection device according to claim 1, characterized in that: The first fixing member includes a first blocking block, which is elastically arranged on the base. A first abutting portion is arranged at the bottom of the first slide, and the first blocking block is located on the movement stroke of the first abutting portion.

3. The integrated circuit film optical inspection device according to claim 2, characterized in that: The second fixing member includes a second blocking block, the second blocking block is slidably disposed on the first blocking block, a second abutting portion is disposed at the bottom of the second slide, and the second blocking block is located on the movement stroke of the second abutting portion.

4. The integrated circuit film optical inspection device according to claim 3, characterized in that: The second blocking block is provided with a slide rail, the first blocking block is provided with a slide groove, and the slide rail is connected to the slide groove.

5. The integrated circuit film optical inspection device according to claim 4, characterized in that: The length of the slide rail is greater than the movement stroke of the first slide table.

6. The integrated circuit film optical inspection device according to claim 3, characterized in that: An unlocking piece is slidably arranged on the base, and the unlocking piece is fixedly connected to the first blocking block.

7. The integrated circuit film optical inspection device according to claim 1, characterized in that: A first spring is arranged between the first slide table and the base.

8. The integrated circuit film optical inspection device according to claim 1, characterized in that: A second spring is arranged between the second slide table and the first slide table.

9. The integrated circuit film optical inspection device according to claim 1, characterized in that: It also includes a third limiting block, which is fixed to the base.

10. The integrated circuit film optical inspection device according to claim 1, characterized in that: The first limiting block is provided with a limiting groove matched with the substrate.

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