Chip clamp for probe station

Abstract

The utility model discloses a chip clamp for a probe station, which comprises a base, the upper end of the base is rotatably connected with a rotating shaft, the upper end of the rotating shaft is fixedly connected with a rotating disc, and the upper end of the rotating disc is provided with a first rectangular inner groove; and the limiting mechanism comprises a two-way threaded rod, the two-way threaded rod is rotationally connected with the inner walls of the left side and the right side of the first rectangular inner groove, the two threaded ends of the two-way threaded rod are both in threaded connection with first connecting blocks, and the upper ends of the two first connecting blocks are both fixedly connected with limiting plates. In order to solve the use problem, the equipment is provided with a limiting mechanism, two positioning strips are matched with two limiting plates to stably clamp a chip, it can be ensured that the chip is located at the center point of a rotating disc, follow-up observation of the chip is facilitated, meanwhile, an anti-skid mechanism is arranged, and rotation of a two-way threaded rod and the rotating disc can be simply and rapidly controlled.

Description

Technical Field

[0001] The utility model relates to the technical field of chip jigs, in particular to a chip jig for a probe station. Background Art

[0002] The probe station is mainly applied to the testing of the semiconductor industry, optoelectronic industry, integrated circuits and packaging, and is widely used in the research and development of precise electrical measurement of complex and high-speed devices, aiming to ensure quality and reliability, and reduce the cost of research and development time and device manufacturing process;

[0003] At present, when using a probe station to operate a chip, it is often necessary to first use a jig to limit it under the microscope of the probe station, so as to facilitate subsequent various detections. When the existing chip jig limits and clamps the chip, it cannot ensure that the chip is directly below the microscope on the probe station, which affects subsequent observations. At the same time, its control of clamping and rotating operations is also relatively complex. Therefore, to solve the above problems, designing a chip jig for a probe station is what we need to consider. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the shortcomings existing in the prior art, and to propose a chip jig for a probe station, which, in view of the use problems, is provided with a limiting mechanism. The stable clamping of the chip can be realized by the cooperation of two positioning bars and two limiting plates, and it can ensure that the chip is at the center point of the rotating disk, which is convenient for subsequent observations. At the same time, an anti-slip mechanism is provided, which can control the rotation of the bidirectional threaded rod and the rotating disk relatively simply and quickly.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A chip jig for a probe station, comprising a base, a rotating shaft is rotatably connected to the upper end of the base, a rotating disk is fixedly connected to the upper end of the rotating shaft, and a first rectangular inner groove is opened on the upper end of the rotating disk; a limiting mechanism, the limiting mechanism includes a bidirectional threaded rod, the bidirectional threaded rod is rotatably connected to the left and right inner side walls of the first rectangular inner groove, first connecting blocks are both threadedly connected to the two threaded ends of the bidirectional threaded rod, limiting plates are fixedly connected to the upper ends of the two first connecting blocks, and first rubber pads are fixedly connected to the opposite sides of the two limiting plates; an anti-slip mechanism, the anti-slip mechanism is used to control the rotation of the bidirectional threaded rod and the rotating disk.

[0007] Preferably, both of the first connecting blocks are slidably connected to the inner wall of the first rectangular inner groove, and the right end of the bidirectional threaded rod penetrates through the right inner side wall of the first rectangular inner groove and extends to the right side of the rotating disk.

[0008] Preferably, the anti-slip mechanism includes a torsion block provided at the right end of the bidirectional threaded rod. A second rectangular inner groove is horizontally opened on the right side of the bidirectional threaded rod. A rectangular strip is fixedly connected to the left side of the torsion block. The left end of the rectangular strip is slidably connected to the second rectangular inner groove. The left end of the rectangular strip is elastically connected to the left inner wall of the second rectangular inner groove through a spring.

[0009] Preferably, an anti-slip plate is provided on the left side of the torsion block. A second rubber pad is fixedly connected to the left side of the anti-slip plate. The right end of the bidirectional threaded rod penetrates through the anti-slip plate and the second rubber pad. A ring-shaped rubber pad is fixedly connected to the left side of the torsion block.

[0010] Preferably, two positioning strips are fixedly connected to the upper end of the rotating disk. Two rollers are provided at the lower end of the rotating disk.

[0011] Preferably, the thread directions of the two threaded ends of the bidirectional threaded rod are opposite. The second rubber pad cooperates with the base and the rotating disk.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. A limiting mechanism is provided. The chip can be pre-positioned in the front-back direction through the two positioning strips. The bidirectional threaded rod is driven to drive the two limiting plates to move towards each other, so as to realize the stable clamping of the chip. At the same time, it can ensure that the chip is located at the center of the rotating disk, which is convenient for the staff to observe it with the microscope on the probe table in the subsequent use.

[0014] 2. An anti-slip mechanism is provided. The spring applies a leftward force to the torsion block, so that the second rubber pad fits with the housing and the rotating disk. The cooperation of the ring-shaped rubber pad and the anti-slip plate ensures that the bidirectional threaded rod and the rotating disk will not rotate by themselves. And when it is necessary to change the operation angle of the chip, the torsion block can be pulled to the right to rotate the rotating disk. The overall control of the rotation operation is simpler and faster. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic structural diagram of a chip fixture for a probe table proposed by the present utility model;

[0016] Figure 2 is Figure 1 the front view of;

[0017] Figure 3 is a schematic structural diagram of the limiting mechanism and the anti-slip mechanism;

[0018] Figure 4 is Figure 3 a partial cross-sectional view of.

[0019] In the figure: 1 base, 2 rotating shaft, 3 rotating disk, 4 positioning strip, 5 first rectangular inner groove, 6 bidirectional threaded rod, 7 first connecting block, 8 limiting plate, 9 first rubber pad, 10 torsion block, 11 second rectangular inner groove, 12 rectangular strip, 13 spring, 14 anti-slip plate, 15 second rubber pad, 16 roller, 17 annular rubber pad. Detailed implementation manner

[0020] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0021] Refer to Figures 1 - 4 , a chip fixture for a probe station, including a base 1, the upper end of the base 1 is rotatably connected to a rotating shaft 2, the upper end of the rotating shaft 2 is fixedly connected to a rotating disk 3, the upper end of the rotating disk 3 is fixedly connected to two positioning strips 4, the two positioning strips 4 can pre-position the chip in the front-back direction, a first rectangular inner groove 5 is opened at the upper end of the rotating disk 3, and two rollers 16 are arranged at the lower end of the rotating disk 3;

[0022] Among them, a limiting mechanism is further included. The limiting mechanism includes a bidirectional threaded rod 6, the bidirectional threaded rod 6 is rotatably connected to the left and right inner side walls of the first rectangular inner groove 5, the thread directions of the two threaded ends of the bidirectional threaded rod 6 are opposite, the right end of the bidirectional threaded rod 6 penetrates through the right inner side wall of the first rectangular inner groove 5 and extends to the right side of the rotating disk 3, first connecting blocks 7 are threadedly connected to the two threaded ends of the bidirectional threaded rod 6, the two first connecting blocks 7 are both slidably connected to the inner wall of the first rectangular inner groove 5, limiting plates 8 are fixedly connected to the upper ends of the two first connecting blocks 7, first rubber pads 9 are fixedly connected to the facing sides of the two limiting plates 8, and the first rubber pads 9 can prevent the chip from being damaged due to excessive clamping;

[0023] Among them, an anti-slip mechanism is further included. The anti-slip mechanism is used to control the rotation of the bidirectional threaded rod 6 and the rotating disk 3. The anti-slip mechanism includes a torsion block 10 arranged at the right end of the bidirectional threaded rod 6, a second rectangular inner groove 11 is horizontally opened on the right side of the bidirectional threaded rod 6, a rectangular strip 12 is fixedly connected to the left side of the torsion block 10, the left end of the rectangular strip 12 is slidably connected to the second rectangular inner groove 11, the left end of the rectangular strip 12 is elastically connected to the left inner side wall of the second rectangular inner groove 11 through a spring 13, an anti-slip plate 14 is arranged on the left side of the torsion block 10, a second rubber pad 15 is fixedly connected to the left side of the anti-slip plate 14, the right end of the bidirectional threaded rod 6 penetrates through the anti-slip plate 14 and the second rubber pad 15, the second rubber pad 15 cooperates with the base 1 and the rotating disk 3, and by fitting the second rubber pad 15 with the base 1 and the rotating disk 3, the rotation of the rotating disk 3 can be controlled. An annular rubber pad 17 is fixedly connected to the left side of the torsion block 10, and the annular rubber pad 17 cooperates with the second rubber pad 15 to control the rotation of the bidirectional threaded rod 6.

[0024] In the present utility model, when in use, the chip to be clamped is placed between the two positioning bars 4. The two positioning bars 4 can pre-position the chip in the front-back direction. Then, the torsion block 10 is pulled to the right, driving the rectangular strip 12 and the annular rubber pad 17 to move synchronously to the right. At the same time, the spring 13 will be stretched under force. At this time, the torsion block 10 is rotated, driving the bidirectional threaded rod 6 to rotate through the rectangular strip 12, driving the two first connection blocks 7 to move towards each other, and driving the two limiting plates 8 to move towards each other until the opposite sides of the two limiting plates 8 respectively stably limit the two sides of the chip. After the limiting is completed, the torsion block 10 is released. Due to the elastic force of the spring 13, a leftward force will be applied to the rectangular strip 12 and the torsion block 10, causing the torsion block 10 to apply a leftward force to the anti-slip plate 14. At this time, the second rubber pad 15 on the left side of the anti-slip plate 14 will be in contact with the right side of the base 1 and the right side of the rotating disk 3. At the same time, the annular rubber pad 17 on the left side of the torsion block 10 will be in contact with the right side of the anti-slip plate 14. In this way, it can be ensured that the bidirectional threaded rod 6 and the rotating disk 3 will not rotate by themselves. When it is necessary to change the operation angle of the chip according to the actual situation subsequently, the torsion block 10 can be pulled to the right and the rotating disk 3 can be rotated. After the rotation is completed, the torsion block 10 is released to re-limit the rotating disk 3. The whole process can conveniently clamp and limit the chip, and make the chip located at the center point position of the rotating disk 3, facilitating the subsequent observation of the chip by the microscope on the probe station by the staff. At the same time, the rotation of the bidirectional threaded rod 6 and the rotating disk 3 can be controlled by pulling the torsion block 10, and the overall operation is relatively simple and fast.

[0025] The above is only the preferred specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, makes equivalent replacements or changes, and all should be covered within the protection scope of the present utility model.

Claims

1. A chip fixture for a probe station, characterized in that: include: A base (1), the upper end of the base (1) being rotatably connected to a rotating shaft (2), the upper end of the rotating shaft (2) being fixedly connected to a rotating disk (3), and the upper end of the rotating disk (3) being provided with a first rectangular inner groove (5); A limiting mechanism, the limiting mechanism comprising a bidirectional threaded rod (6), the bidirectional threaded rod (6) being rotatably connected to the left and right inner walls of the first rectangular inner groove (5), the two threaded ends of the bidirectional threaded rod (6) being threadedly connected to a first connecting block (7), the upper ends of the two first connecting blocks (7) being fixedly connected to a limiting plate (8), and the facing sides of the two limiting plates (8) being fixedly connected to a first rubber pad (9); An anti-skid mechanism is used to control the rotation of the bidirectional threaded rod (6) and the rotating disk (3).

2. A chip fixture for a probe station according to claim 1, characterized in that: The two first connection blocks (7) are both slidably connected to the inner wall of the first rectangular inner groove (5), and the right end of the bidirectional threaded rod (6) passes through the right inner wall of the first rectangular inner groove (5) and extends to the right side of the rotating disk (3).

3. A chip fixture for a probe station according to claim 1, characterized in that: The anti-slip mechanism comprises a torsion block (10) arranged at the right end of a bidirectional threaded rod (6); a second rectangular inner groove (11) is horizontally opened on the right side of the bidirectional threaded rod (6); a rectangular strip (12) is fixedly connected to the left side of the torsion block (10); the left end of the rectangular strip (12) is slidably connected to the second rectangular inner groove (11); and the left end of the rectangular strip (12) is elastically connected to the left inner wall of the second rectangular inner groove (11) via a spring (13).

4. A chip fixture for a probe station according to claim 3, characterized in that: An anti-skid plate (14) is provided on the left side of the torsion block (10), a second rubber pad (15) is fixedly connected to the left side of the anti-skid plate (14), the right end of the bidirectional threaded rod (6) passes through the anti-skid plate (14) and the second rubber pad (15), and an annular rubber pad (17) is fixedly connected to the left side of the torsion block (10).

5. A chip fixture for a probe station according to claim 1, characterized in that: The upper end of the rotating disk (3) is fixedly connected to two positioning bars (4), and the lower end of the rotating disk (3) is provided with two rollers (16).

6. A chip fixture for a probe station according to claim 4, characterized in that: The thread directions of the two threaded ends of the bidirectional threaded rod (6) are opposite, and the second rubber pad (15) cooperates with the base (1) and the rotating disk (3).

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