Device for realizing mass spectrum multistage vacuum sealing

Abstract

The utility model belongs to the technical field of mass spectrometers, and particularly relates to a device for realizing mass spectrum multistage vacuum sealing, which comprises a vacuum cavity, a first extraction opening and a second extraction opening are respectively arranged on the rear side wall of the vacuum cavity, the first extraction opening is positioned at the right end of the second extraction opening, a partition plate is arranged in the vacuum cavity, and the partition plate is positioned at the right end of the second extraction opening. Uniformly distributed connecting rods are fixed to the left side wall of the partition plate, sleeves are arranged outside the uniformly distributed connecting rods in a sliding and sleeving mode, and a driven ring is jointly fixed to the left ends of the uniformly distributed sleeves. Through cooperation of an end face cam driving structure and uniformly distributed balls, the strength is small, but the extrusion force is large, the deformation of a sealing piece is remarkable, and the sealing effect is good. The sealing effect is good, and the result controllability is high; and when the shapes of the cavity sections are different, the shapes of related devices can be customized without being limited in a circular inner cavity, so that the practicability is better.

Description

Technical Field

[0001] The utility model relates to the technical field of mass spectrometers, and particularly relates to a device for realizing multi-stage vacuum sealing of a mass spectrometer. Background Technique

[0002] A mass spectrometer, also known as a mass spectrograph, is an instrument for separating and detecting different isotopes. That is, based on the principle that charged particles can be deflected in an electromagnetic field, it is a class of instruments that separates and detects the composition of substances according to the mass differences of atomic, molecular, or molecular fragment of substances. In some types of mass spectrometers, the vacuum is divided into multiple chambers with different vacuum levels required for different chambers.

[0003] In the current technology, many seals are achieved by using O-ring seals, which are sleeved on the cylindrical surface of a circular plate with grooves. The inner vacuum cavity that mates with it is mostly a circular shape with a variable size that transitions from a large diameter to a small diameter through a conical shape. The circular plate with the O-ring is pushed in from the large opening and squeezed towards the small opening through the cone. When passing through the cone, the O-ring deforms under force and fits tightly against the vacuum cavity wall at the small diameter to achieve sealing.

[0004] In this way, two chambers are separated on both sides of the circular plate, and multi-stage vacuum can be achieved by evacuating each chamber separately. The first drawback is that the installation and removal processes are difficult to master, and factors such as the elasticity of the O-ring and the machining dimensions of the parts will affect the force required during installation. The second drawback is that the sealing result is not easy to control, being either too loose or too tight. The third drawback is that it is extremely prone to wear during repeated use, resulting in sealing failure.

[0005] Therefore, a device for realizing multi-stage vacuum sealing of a mass spectrometer is proposed to solve the above-mentioned problems. Content of the Utility Model

[0006] The purpose of the utility model is to provide a device for realizing multi-stage vacuum sealing of a mass spectrometer to solve the problems raised in the above background technique.

[0007] To achieve the above object, the present utility model provides the following technical solution: A device for realizing multi-stage vacuum sealing of a mass spectrometer, including a vacuum chamber. The rear side wall of the vacuum chamber is respectively provided with a first air extraction port and a second air extraction port. The first air extraction port is located at the right end of the second air extraction port. A partition is arranged inside the vacuum chamber. Uniformly arranged connecting rods are fixed on the left side wall of the partition. The outer parts of the uniformly arranged connecting rods are all slidably sleeved with sleeves. The left ends of the uniformly arranged sleeves are jointly fixed with a passive ring. The left end of the vacuum chamber is fixed with a chamber cover. A driving wheel is rotatably arranged in the middle of the chamber cover. A locking ring is fixed on the left side wall of the chamber cover outside the driving wheel. An end face cam is fixed on the right side wall of the driving wheel. A groove is arranged on the left side wall of the passive ring. Uniformly arranged balls are arranged inside the groove. The left ends of the uniformly arranged balls are in contact with the end face cam. A sealing member is fixed on the edge of the left side wall of the partition. A first inclined surface is arranged on the left side wall of the sealing member. Ball tops are arranged around the sealing member. An extrusion ring is jointly slidably arranged on the outer parts of the uniformly arranged connecting rods. A second inclined surface is arranged on the edge side wall of the extrusion ring.

[0008] Preferably, a sealing ring is arranged between the chamber cover and the driving wheel.

[0009] Preferably, the left side wall of the extrusion ring is in contact with the right side walls of the uniformly arranged sleeves.

[0010] Preferably, the first inclined surface and the second inclined surface are adapted to each other.

[0011] Preferably, the ball tops of the sealing member are in contact with the inner wall of the vacuum chamber.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] In this application, through the cooperation of the end face cam driving structure and the uniformly arranged balls, the force used is small but the extrusion force is large. The sealing member is significantly deformed, the sealing effect is good, and the result controllability is strong; when the cross-sectional shape of the chamber is different, the shapes of related devices can be customized, not limited to a circular inner cavity, and the practicability is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic structural diagram of the present utility model;

[0015] Figure 2 is a schematic structural diagram of the chamber cover, driving wheel, extrusion ring and sleeve;

[0016] Figure 3 is Figure 1 the cross-sectional structural diagram of;

[0017] Figure 4 is Figure 3 the partial enlarged structural diagram of part A in;

[0018] Figure 5 It is a schematic structural diagram of a locking ring and an end face cam.

[0019] In the figure: 1 vacuum chamber, 2 chamber cover, 3 partition board, 4 connecting rod, 5 seal, 6 driving wheel, 7 extrusion ring, 8 driven ring, 9 ball, 10 sleeve, 11 locking ring, 12 sealing ring, 1.1 first air extraction port, 1.2 second air extraction port, 5.1 first inclined surface, 5.2 ball top, 6.1 end face cam, 7.1 second inclined surface, 8.1 groove. Specific implementation manners

[0020] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0021] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0022] Embodiment:

[0023] Please refer to Figures 1-5 , the present invention provides a technical solution:

[0024] A device for realizing multi-stage vacuum sealing of a mass spectrometer, comprising a vacuum chamber 1. The rear side wall of the vacuum chamber 1 is respectively provided with a first air extraction port 1.1 and a second air extraction port 1.2. The first air extraction port 1.1 is located at the right end of the second air extraction port 1.2. A partition plate 3 is arranged inside the vacuum chamber 1. A uniformly arranged connecting rod 4 is fixed on the left side wall of the partition plate 3. A sleeve 10 is slidably sleeved outside each of the uniformly arranged connecting rods 4. By moving the sleeve to the right end, the extrusion ring 7 can be driven to move to the right end. The left ends of the uniformly arranged sleeves 10 are jointly fixed with a passive ring 8. A chamber cover 2 is fixed at the left end of the vacuum chamber 1. A driving wheel 6 is rotatably arranged in the middle of the chamber cover 2. By rotating the driving wheel 6, the end face cam 6.1 on the right side wall is driven to rotate. The end face cam 6.1 extrudes the ball 9, thereby driving the passive ring 8 to move to the right end. A locking ring 11 is fixed on the left side wall of the chamber cover 2 outside the driving wheel 6. The end face cam 6.1 is fixed on the right side wall of the driving wheel 6. A groove 8.1 is formed on the left side wall of the passive ring 8. A uniformly arranged ball 9 is arranged inside the groove 8.1. The left ends of the uniformly arranged balls 9 are in contact with the end face cam 6.1. A sealing member 5 is fixed at the edge of the left side wall of the partition plate 3. A first inclined surface 5.1 is arranged on the left side wall of the sealing member 5. A spherical top 5.2 is arranged around the sealing member 5. An extrusion ring 7 is slidably arranged outside the uniformly arranged connecting rods 4 together. A second inclined surface 7.1 is arranged on the edge side wall of the extrusion ring 7. By the cooperation of the end face cam 6.1 driving structure and the uniformly arranged balls 9, the force is small but the extrusion force is large, the sealing member 5 is significantly deformed, the sealing effect is good, and the result controllability is strong.

[0025] A sealing ring 12 is arranged between the chamber cover 2 and the driving wheel 6 to ensure the sealing between the chamber cover 2 and the driving wheel 6.

[0026] The left side wall of the extrusion ring 7 is in contact with the right side wall of the uniformly arranged sleeves 10.

[0027] The first inclined surface 5.1 and the second inclined surface 7.1 are adapted to each other. By setting two inclined surfaces, they can be completely attached and extruded when contacting each other.

[0028] The spherical top 5.2 of the sealing member 5 is in contact with the inner wall of the vacuum chamber 1. When the first inclined surface 5.1 and the second inclined surface 7.1 are mutually extruded, the spherical top 5.2 will fit with the inner wall of the vacuum chamber 1 to ensure sealing.

[0029] Working principle:

[0030] The vacuum chamber 1 has two first air extraction ports 1.1 and a second air extraction port 1.2. In the middle part thereof, a partition plate 3 is provided and fixed to the chamber cover 2 by several parallel connecting rods 4. The chamber cover 2 is fixed to one end face of the vacuum chamber 1. A large through hole is provided in the middle of the chamber cover 2, and the driving wheel 6 passes through it and can rotate. A sealing ring 12 is provided between the driving wheel 6 and the chamber cover 2. A locking ring 11 is screwed on the driving wheel 6 outside the chamber cover 2 to fix the driving wheel 6. A sleeve 10 is sleeved outside the connecting rod 4. One end of the sleeve 10 abuts against the passive ring 8. The passive ring 8 is close to the side of the chamber cover 2 and is provided with a through hole which is worn on the connecting rod 4 and can move back and forth along the slide rail formed by the connecting rod 4. A set of grooves 8.1 are provided on the other side of the passive ring 8. There is a ball 9 in each groove. The other side of the ball 9 contacts the end face cam 6.1 on the driving wheel 6. The other end of the sleeve 10 abuts against the extrusion ring 7. The extrusion ring 7 is also provided with a through hole which is worn on the connecting rod 4 and can move back and forth along the slide rail formed by the connecting rod 4. One end of the extrusion ring 7 has an inclined surface second 7.1. The seal 5 is installed on the partition plate 3. Between it and the extrusion ring 7, the contact surface between the seal 5 and the extrusion ring 7 is also a first inclined surface 5.1. When being extruded by it, it will deform, and then the ball top 5.2 is pressed to be in close contact with the wall of the vacuum chamber 1.

[0031] After the installation is completed, all parts are in a relaxed state. At this time, the driving wheel 6 is rotated, so that the end face cam 6.1 drives the ball 9 to lift. Due to the limitation of the connecting rod 4, the passive ring 8 can only move forward and upward accordingly. Furthermore, the passive ring 8 presses against the sleeve 10, and the sleeve 10 presses against the extrusion ring 7 to move forward together along the direction of the connecting rod 4. The inclined surface 7.1 presses against the inclined surface 5.1, thereby lifting the ball top 5.2 and realizing the isolation and sealing on both sides of the partition plate 3.

[0032] The above shows and describes the basic principles, main features and advantages of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to embrace all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention, and any reference signs in the claims should not be regarded as limiting the claims involved.

[0033] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for realizing multi-stage vacuum sealing of mass spectrometer, comprising a vacuum chamber (1), characterized in that: The rear side wall of the vacuum chamber (1) is respectively provided with a first air suction port (1.1) and a second air suction port (1.2), the first air suction port (1.1) being located at the right end of the second air suction port (1.2), a partition (3) being arranged inside the vacuum chamber (1), the left side wall of the partition (3) being fixed with evenly arranged connecting rods (4), the outsides of the evenly arranged connecting rods (4) being slidably sleeved with sleeves (10), the left ends of the evenly arranged sleeves (10) being commonly fixed with a passive ring (8), the left end of the vacuum chamber (1) being fixed with a chamber cover (2), the middle part of the chamber cover (2) being rotatably provided with a driving wheel (6), and the left side wall of the chamber cover (2) being located outside the driving wheel (6) being fixed with a A locking ring (11), an end face cam (6.1) is fixed to the right side wall of the driving wheel (6), a groove (8.1) is provided on the left side wall of the passive ring (8), evenly arranged balls (9) are arranged inside the groove (8.1), the left ends of the evenly arranged balls (9) are in contact with the end face cam (6.1), a sealing member (5) is fixed to the edge of the left side wall of the partition (3), the left side wall of the sealing member (5) is provided with a first inclined surface (5.1), and the sealing member (5) is provided with a ball top (5.2) around it, and an extrusion ring (7) is slidably provided on the outside of the evenly arranged connecting rods (4), and the edge side wall of the extrusion ring (7) is provided with a second inclined surface (7.1).

2. The device for realizing multi-stage vacuum sealing of mass spectrometer according to claim 1, characterized in that: A sealing ring (12) is provided between the cavity cover (2) and the driving wheel (6).

3. The device for realizing multi-stage vacuum sealing of mass spectrometer according to claim 1, characterized in that: The left side wall of the extrusion ring (7) contacts the right side wall of the evenly arranged sleeves (10).

4. The device for realizing multi-stage vacuum sealing of mass spectrometer according to claim 1, characterized in that: The first inclined surface (5.1) and the second inclined surface (7.1) are adapted to each other.

5. The device for realizing multi-stage vacuum sealing of mass spectrometer according to claim 1, characterized in that: The spherical top (5.2) of the sealing element (5) contacts the inner wall of the vacuum chamber (1).

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