Clamping device
By designing a clamping device including a frame, a clamping assembly, an elastic member and a cover, the impurity contamination caused by the exposure of the elastic members of the clamping device in the prior art is solved, and a higher cleanliness and yields are achieved.
Patent Information
- Application Number
- CN202421836874.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-31
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-07-31
AI Technical Summary
In the existing soft film imprinting technology, the elastic parts of the clamping device are exposed to easily accumulate impurities, resulting in particle contamination, and affecting the cleanliness and yield of the imprinting process.
A clamping device is designed, adopting a structure of frame, clamping assembly, elastic member and cover. Through the design of the slide chute and slide block, the flexible film is clamped and tightened by the telescopic action of the elastic member, and the sliding chute is closed through the cover to prevent impurity particles from scattering.
It effectively reduces the number of elastic parts required for the clamping device, avoids the accumulation and dispersion of impurity particles, and improves the cleanliness and product yield of the imprinting process.
Smart Images
Figure CN222995376U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor soft film preparation, in particular to a clamping device. Background Technique
[0002] Soft imprint lithography technology can use a soft material as a template for contact imprinting. This technology has the remarkable characteristics of flexible operation, simplicity, low cost, etc. Therefore, it is widely used in the manufacturing and pattern transfer of micro-nano structures in the semiconductor field.
[0003] In the existing soft imprint lithography technology, when clamping a soft film, the soft film is clamped by a frame. The frame includes four rods, and these rods are connected to each other to form a rectangular frame. The four sides of the soft film are respectively fixed on these rods of the frame. After the imprinting process is completed, the soft film needs to be separated from the wafer to complete the imprinting process. Since the soft film material is relatively thin, when the soft film enters and is installed and fixed, the soft film is easily in a loose or wrinkled state and cannot maintain good flatness with the substrate below. It is necessary to use multiple elastic members to stretch the rods at both ends to tighten the soft film before imprinting to ensure the imprinting effect. And the exposed multiple elastic members of the fixture are prone to dirt and accumulation of particles. These impurity particles are easily scattered onto the soft film during the imprinting process, affecting the cleanliness during the imprinting process and causing particle contamination and affecting the yield. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a clamping device to reduce the number of elastic members required for the clamping device and avoid the accumulation of impurities on the exposed elastic members to contaminate the soft film.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] A clamping device, which includes:
[0007] A frame, the frame includes a first frame and a second frame arranged oppositely, and sliding grooves are provided on one side of the first frame and the second frame close to each other;
[0008] A clamping assembly, the clamping assembly includes a first clamping member and a second clamping member arranged at intervals along the length directions of the first frame and the second frame. Sliders are provided at both ends of the second clamping member, and the two sliders are respectively arranged in the two sliding grooves in a one-to-one correspondence;
[0009] An elastic member, which is disposed in the sliding groove. One end of the elastic member is connected to the end of the sliding groove, and the other end of the elastic member is connected to the slider. The telescopic movement of the elastic member can move the second clamping member towards the first clamping member to clamp the soft film, and under the action of the elastic restoring force of the elastic member, the second clamping member moves away from the first clamping member to tighten the soft film;
[0010] A cover, which is disposed on one side of the sliding groove close to the second clamping member. The cover is used to close the sliding groove between the first clamping member and the second clamping member.
[0011] Preferably, a clamping groove is provided at one end of the cover close to the slider, and the clamping groove is clamped with the slider so that the cover is disposed at one end of the sliding groove close to the first clamping member.
[0012] Preferably, the cover is a rolling curtain structure. One end of the rolling curtain structure is connected to the slider, and the other end is connected to one end of the sliding groove close to the first clamping member.
[0013] Preferably, the elastic member is disposed at one end of the sliding groove close to the first clamping member. By compressing the elastic member, the second clamping member moves towards the first clamping member to clamp the soft film, and under the action of the elastic restoring force of the elastic member, the second clamping member moves away from the first clamping member to tighten the soft film.
[0014] Preferably, the elastic member is a spring. A first fixing post is provided on one side of the slider close to the first clamping member, and a second fixing post is provided on the inner wall of the sliding groove close to the first clamping member. The two ends of the spring are respectively sleeved on the first fixing post and the second fixing post.
[0015] Preferably, a groove is provided on each of the sides of the first frame and the second frame that are close to each other, and the groove forms the sliding groove.
[0016] Preferably, the first clamping member includes a fixing member and a first clamping plate, the first clamping plate is connected to the fixing member, the second clamping member includes a sliding member and a second clamping plate, the second clamping plate (45) is connected to the sliding member, one end of the soft film is clamped between the first clamping plate and the fixing member, and the other end is clamped between the second clamping plate and the sliding member.
[0017] Preferably, the fixing member and the sliding member include a first locking surface and a second locking surface which are oppositely arranged. Connecting holes are provided at one ends of the first locking surface and the second locking surface which are far away from each other. The first clamping plate can be fixed on the first locking surface by cooperating with the connecting hole on the first locking surface through a first connecting member. The second clamping plate can be fixed on the second locking surface by cooperating with the connecting hole on the second locking surface through a second connecting member.
[0018] Preferably, limiting protrusions are provided at one ends of the first clamping member and the second clamping member which are far away from each other. One sides of the first clamping plate and the second clamping plate which are far away from each other can be abutted against the limiting protrusions for limiting.
[0019] Preferably, the frame further includes a third frame. One end of the second clamping member far away from the first clamping member includes a through hole. The third frame passes through the through hole, and two ends of the third frame are respectively connected with the first frame and the second frame.
[0020] Beneficial effects:
[0021] The clamping device provided by the present utility model is provided with a frame, a clamping assembly, an elastic member and a cover. The first frame and the second frame are oppositely arranged. The first clamping member and the second clamping member are arranged at intervals between the first frame and the second frame, and a soft film is clamped by the first clamping member and the second clamping member. By providing sliders at two ends of the second clamping member, and providing sliding grooves on one sides of the first frame and the second frame which are close to each other, the sliders are slidably arranged in the sliding grooves through the elastic member. The elastic member expands and contracts to enable the second clamping member to move towards the direction close to the first clamping member to clamp the soft film. After clamping the soft film, under the action of the restoring force of the elastic member, the second clamping member moves towards the direction far away from the first clamping member, and can tighten the soft film to ensure the embossing effect. Further, the elastic member enables the two ends of the second clamping member to be evenly stressed, avoiding deflection of the second clamping member due to uneven stress and affecting the tightening effect on the soft film. The cover closes one side of the sliding groove close to the second clamping member and closes the sliding groove between the first clamping member and the second clamping member, so as to prevent impurity particles accumulated in the elastic member and around it in the sliding groove from flying to the soft film during the embossing process and contaminating the soft film, affecting the product yield. Description of the Drawings
[0022] Figure 1 is an overall schematic diagram of the clamping device provided by the present utility model without placing the first clamping plate and the second clamping plate;
[0023] Figure 2 is a schematic diagram of the second frame of the clamping device provided by the present utility model;
[0024] Figure 3 is a front view of the sliding member of the clamping device provided by the present utility model;
[0025] Figure 4 is a side view of the sliding member of the clamping device provided by the present utility model;
[0026] Figure 5 is a partial schematic view of the cooperation between the frame and the sliding member of the clamping device provided by the present utility model;
[0027] Figure 6 is a partial schematic view of the cooperation between the frame and the sliding member of the clamping device provided by the present utility model to cover and seal the sliding groove;
[0028] Figure 7 is a schematic view of the cover of the clamping device provided by the present utility model;
[0029] Figure 8 is a schematic view of the clamping device provided by the present utility model;
[0030] Figure 9 is a schematic view of the cooperation between the third frame and the sliding member of the clamping device provided by the present utility model.
[0031] In the figure: 1 - first frame; 2 - second frame; 3 - first clamping member; 31 - first locking surface; 32 - first clamping plate; 4 - second clamping member; 41 - slider; 42 - first fixing post; 43 - second locking surface; 44 - through hole; 45 - second clamping plate; 5 - sliding groove; 51 - second fixing post; 6 - elastic member; 7 - cover; 71 - clamping groove; 8 - connection hole; 9 - third frame. Detailed implementation manners
[0032] The following further elaborates on the present utility model in conjunction with the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are merely for explaining the present utility model and not for limiting the present utility model. Additionally, it should be noted that for the sake of description, only parts related to the present utility model rather than all structures are shown in the accompanying drawings.
[0033] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0034] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may also include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.
[0035] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0036] As Figures 1-9 shown, this embodiment provides a clamping device, which includes a frame, a clamping assembly 、 an elastic member 6 and a cover 7. Specifically, the frame includes a first frame 1 and a second frame 2 which are oppositely arranged. On one side where the first frame 1 and the second frame 2 are close to each other, chutes 5 are provided. The clamping assembly includes a first clamping member 3 and a second clamping member 4 which are arranged at intervals along the length direction of the first frame 1 and the second frame 2. At both ends of the second clamping member 4, sliders 41 are provided, and the two sliders 41 are correspondingly arranged in the two chutes 5. The elastic member 6 is arranged in the two chutes 5. One end of the elastic member 6 is connected to the end of the chute 5, and the other end of the elastic member 6 is connected to the slider 41. The telescopic movement of the elastic member 6 can make the second clamping member 4 move towards the first clamping member 3 to clamp the soft film, and under the action of the elastic restoring force of the elastic member 6, the second clamping member 4 moves away from the first clamping member 3 to tighten the soft film. The cover 7 is used to close the chute 5 between the first clamping member 3 and the second clamping member 4.
[0037] Specifically, under the action of the elastic restoring force of the elastic member 6, the second clamping member 4 will apply a force in the direction away from the first clamping member 3 to one end of the soft film it clamps. Therefore, the soft film will apply a pulling force in the direction away from the first clamping member 3 to the first clamping member 3. According to Newton's third law, at this time, the first clamping member 3 will generate a pulling force in the opposite direction on the other end of the soft film to be clamped by it. Therefore, the two ends of the soft film will be subjected to forces away from each other and thus be tightened. The purpose of the clamping device to tighten the soft film is achieved only by two elastic members 6. At the same time, the elastic members 6 at both ends respectively provide elastic forces of the same magnitude in the direction away from the first clamping member 3 to the sliders 41 at both ends of the second clamping member 4, that is, by setting two elastic members 6, the forces on both ends of the second clamping member 4 are evenly distributed, avoiding deflection of the second clamping member 4 due to uneven force and causing wrinkles on the soft film, which affects the tightening effect on the soft film. Further, the elastic member 6 is arranged in the chute 5 and a cover 7 is provided, so that the elastic member 6 is isolated from the outside in the chute 5, avoiding the accumulation of impurity particles on the elastic member 6. At the same time, it also avoids the accumulation of impurity particles on the chute 5 itself located between the first clamping member 3 and the second clamping member 4. Even if there are impurity particles at the elastic member 6 and the chute 5, during the pressing process of the soft film, the impurity particles cannot fly to the soft film to cause pollution.
[0038] Specifically, a clamping groove 71 is provided at one end of the cover 7 close to the slider 41, and the clamping groove 71 is clamped with the slider 41 so that the cover 7 is covered on one end of the chute 5 close to the first clamping member 3. Specifically, the frame and the clamping assembly of the above-mentioned clamping device are both placed horizontally for use. Further, the slider 41 is a cuboid slider, and the upper and lower surfaces of the chute 5 are attached to the upper and lower surfaces of the slider 41. When using the above-mentioned clamping device, both ends of the clamping groove 71 are respectively clamped to the upper surface and the lower surface of the slider 41 and are relatively fixed to the slider 41. When using this clamping assembly, the cover 7 can isolate the chute 5 from the outside to avoid the entry of impurity particles. After the pressing process is completed, the surface of the cover 7 can be directly cleaned or a clean cover 7 can be replaced, reducing the cleaning difficulty near the elastic member 6.
[0039] Specifically, the cover 7 is snap-fitted and fixed to the slider 41, so the cover 7 and the slider 41 are relatively stationary. When the clamping assembly clamps the soft film, when the second clamping member 4 first moves towards the first clamping member 3 and clamps the end of the soft film between the first clamping member 3 and the second clamping member 4, the slider 41 drives the cover 7 to move towards the first clamping member 3. Since the cover 7 is disposed on the chute, one end of the cover 7 is connected to the chute 5, and the other end is closer to the first clamping member 3 than the end of the chute 5 closer to the first clamping member 3. At this time, when the cover 7 moves towards the first clamping member 3, it can still be ensured that it is disposed on the chute 5, thereby ensuring the isolation effect on the chute 5. After clamping and fixing, when the clamping assembly tightens the soft film, the movement process of the slider 41 and the cover 7 is the reverse process of the above movement process. In some other embodiments, the cover 7 may not be always snap-fitted to the slider 41, but the cover 7 is installed after the two-end clamps tighten the soft film to prevent the soft film from being contaminated during the pressing process.
[0040] Furthermore, the cover 7 can also be a rolling curtain structure. One end of the rolling curtain structure is connected to the slider 41, and the other end is connected to the end of the chute 5 closer to the first clamping member 3. When the second clamping member 4 slides in the chute 5, the rolling curtain structure can adjust its own cover 7 area along with the sliding of the second clamping assembly to isolate the chute 5 from the outside and prevent impurity particles from contaminating the soft film.
[0041] Specifically, the elastic member 6 is disposed at the end of the chute 5 closer to the first clamping member 3. By compressing the elastic member 6, the second clamping member 4 moves towards the first clamping member 3 to clamp the soft film, and under the elastic restoring force of the elastic member 6, the second clamping member 4 moves away from the first clamping member 3 to tighten the soft film. At this time, the compressed elastic member 6 is located in the chute 5 and is in a compressed state. Therefore, the elastic member 6 will generate a thrust on the slider 41 in the direction away from the first clamping member 3, that is, the elastic restoring force of the elastic member 6 will generate a thrust on the second clamping member 4 in the direction away from the first clamping member 3. At the same time, the two ends of the elastic member 6 are respectively in contact with the side of the slider 41 closer to the first clamping member 3 and the inner wall of the chute 5 closer to the first clamping member 3 to generate a thrust, and there is no need to fix the two ends of the elastic member 6 to the slider 41 and the chute 5 by welding, bonding or other means.
[0042] In some other embodiments, the elastic member 6 can also be arranged at one end of the sliding groove 5 away from the first clamping member 3. By stretching the elastic member 6, the second clamping member 4 moves towards the first clamping member 3 to clamp the soft film. Under the action of the elastic restoring force of the elastic member 6, the second clamping member 4 moves away from the first clamping member 3 to tighten the soft film. At this time, the elastic member 6 is located in the sliding groove 5 and is in a stretched state. Therefore, the elastic member 6 will generate a pulling force on the slider 41 in the direction away from the first clamping member 3, that is, the elastic restoring force generated by the elastic member 6 will generate a pulling force on the second clamping member 4 in the direction away from the first clamping member 3. At this time, both ends of the elastic member 6 need to be relatively fixed to the slider 41 and the sliding groove 5 so that the elastic member 6 can provide a pulling force for the slider 41 and the sliding groove 5. At this time, the second clamping member 4 itself can isolate the elastic member 6 from the outside world, and the cover 7 can isolate the other end of the sliding groove 5 to avoid the accumulation of impurity particles.
[0043] Further, the elastic member 6 is a spring. A first fixing post 42 is arranged on the side of the slider 41 close to the first clamping member 3, and a second fixing post 51 is arranged on the inner wall of the sliding groove 5 close to the first clamping member 3. Both ends of the spring are respectively sleeved on the first fixing post 42 and the second fixing post 51. After the spring is sleeved on the two fixing posts at both ends, the fixing posts can limit the radial movement of the spring, so that the spring can only be axially stretched or compressed, avoiding the spring from coming out of the sliding groove 5, and ensuring that the springs at both ends of the second clamping member 4 can provide an elastic force in the direction away from the first clamping member 3 for the second clamping member 4.
[0044] Specifically, a groove is provided on each of the sides of the first frame 1 and the second frame 2 close to each other, and the groove forms the sliding groove 5. At this time, the openings of the two sliding grooves 5 are arranged opposite to each other, which is convenient for the sliders 41 at both ends of the second clamping member 4 to simultaneously extend into the two sliding grooves 5. At the same time, since each sliding groove 5 on the frame only has one side opening, it is convenient to arrange the cover 7 only on the side where the two frames are close to each other to isolate the spring and its surrounding space. If the sliding groove 5 is a through groove and the cover 7 is only arranged on the side where the first frame 1 and the second frame 2 are close to each other, the spring will still be exposed on the side where the two frames are away from each other. Impurity particles generated in the soft film pressing process are easily scattered into the spring and the sliding groove 5 from the exposed part. In the next pressing process, due to the telescopic deformation of the spring itself, it is easy for the impurity particles around it to fly onto the soft film and cause pollution.
[0045] Specifically, the first clamping member 3 includes a fixing member and a first clamping plate 32. The first clamping plate 32 is connected to the fixing member. The second clamping member 4 includes a sliding member and a second clamping plate 45. The second clamping plate 45 is connected to the sliding member. One end of the soft film is clamped between the first clamping plate 32 and the fixing member, and the other end is clamped between the second clamping plate 45 and the sliding member. The first clamping plate 32 and the second clamping plate 45 are respectively located on the side where the first clamping member 3 and the second clamping member 4 are close to each other. When clamping the soft film, the fixing member and the first clamping plate 32 jointly clamp one end of the soft film, and the sliding member and the second clamping plate 45 jointly clamp the other end of the soft film. When the spring provides an elastic force to the second clamping member 4, the first clamping member 3 and the second clamping member 4 will provide a pulling force away from each other to the two ends of the soft film, thereby tightening the soft film for embossing.
[0046] Further, the fixing member and the sliding member include a first locking surface 31 and a second locking surface 43 which are oppositely arranged. Connecting holes 8 are provided at the ends of the first locking surface 31 and the second locking surface 32 that are away from each other. The first clamping plate 32 can be fixed to the first locking surface 31 by cooperating with the connecting hole 8 on the first locking surface 31 through a first connecting member. The second clamping plate 45 can be fixed to the second locking surface 43 by cooperating with the connecting hole 8 on the second locking surface 43 through a second connecting member. Even further, the connecting hole 8 is a threaded hole, and the first connecting member and the second connecting member are screws. The screw can pass through the first clamping plate 32 and the second clamping plate 45 and be screwed into the threaded hole. The head of the screw abuts against the upper surfaces of the first clamping plate 32 and the second clamping plate 45 to fix the two clamping plates. At the same time, the side where the locking surfaces are close to each other can be used to place the end of the soft film, facilitating clamping of the soft film. Even further, there are three threaded holes on each of the first locking surface 31 and the second locking surface 43, and the threaded holes are evenly arranged along the length direction of the first clamping plate 32 and the second clamping plate 45. At this time, only six threaded holes and six screws are required for the clamping members on both sides to meet the clamping requirements, reducing the threaded holes and screws required for the overall clamping device and reducing the possibility of impurity particles accumulating in the screw holes.
[0047] In some other embodiments, studs corresponding to the connecting holes 8 can be provided on the sides of the first clamping plate 32 and the second clamping plate 45 that are away from each other. The above studs can pass through the connecting holes 8, and a nut can be screwed to the stud on the other side of the connecting hole 8 and tightened to fix the first clamping plate 32 and the second clamping plate 45 and clamp the soft film.
[0048] Further, limiting protrusions are provided at the ends of the first clamping member 3 and the second clamping member 4 that are away from each other. The sides of the first clamping plate 32 and the second clamping plate 45 that are away from each other can abut against the limiting protrusions for limiting. Specifically, the arrangement of the limiting protrusions forms a stepped shape on the fixing member and the sliding member, and the first locking surface 31 and the second locking surface 43 are located at the lower part of the stepped shape. Further still, the limiting protrusions on both sides further include side walls that are spaced apart along the direction in which the first frame 1 and the second frame 2 approach or move away from each other to limit the first clamping plate 32 and the second clamping plate 45 in this direction. Therefore, when the two clamping plates are placed on the locking surfaces, the limiting protrusions can limit the two clamping plates, facilitating the placement of the two clamping plates at a preset position for cooperation and fixation with the connection holes 8.
[0049] Specifically, the frame further includes a third frame 9. One end of the second clamping member 4 away from the first clamping member 3 includes a through hole 44. The third frame 9 passes through the through hole 44, and both ends of the third frame 9 are respectively connected to the first frame 1 and the second frame 2. The arrangement of the third frame 9 can enhance the overall structural strength of the above-mentioned clamping device. Further, the length of the through hole 44 in the direction in which the first clamping member 3 and the second clamping member 4 approach or move away from each other is greater than the length of the third frame 9 in this direction, providing a certain movement margin for the movement of the second clamping member 4; at the same time, the two side walls of the through hole 44 in this direction can also limit the second clamping member 4, preventing the maximum movement distance of the second clamping member 4 from being too large and causing the soft film to be damaged due to excessive tension. The length of the through hole 44 perpendicular to the direction in which the first clamping member 3 and the second clamping member 4 approach or move away from each other is slightly greater than the length of the third frame 9 in this direction. After the third frame 9 passes through the through hole 44, the second clamping member 4 will not move in this direction.
[0050] Obviously, the above-mentioned embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.
Claims
1. A clamping device, characterized in that: include: A frame, the frame comprising a first frame (1) and a second frame (2) arranged opposite to each other, wherein a sliding groove (5) is provided on a side of the first frame (1) and the second frame (2) close to each other; A clamping assembly, the clamping assembly comprising a first clamping member (3) and a second clamping member (4) arranged at intervals along the length direction of the first frame (1) and the second frame (2), wherein both ends of the second clamping member (4) are provided with sliders (41), and the two sliders (41) are arranged in a one-to-one correspondence in the two slide grooves (5); an elastic member (6), wherein the elastic member (6) is arranged in the slide groove (5), one end of the elastic member (6) is connected to the end of the slide groove (5), and the other end of the elastic member (6) is connected to the slider (41); the elastic member (6) can extend and retract to enable the second clamping member (4) to move toward the first clamping member (3) to clamp the soft film, and under the elastic restoring force of the elastic member (6), the second clamping member (4) moves away from the first clamping member (3) to tighten the soft film; A cover (7) is arranged on a side of the slide groove (5) close to the second clamping member (4), and the cover (7) is used to close the slide groove (5) between the first clamping member (3) and the second clamping member (4).
2. The clamping device according to claim 1, characterized in that: A clamping groove (71) is provided at one end of the cover (7) close to the slider (41), and the clamping groove (71) is clamped with the slider (41) so that the cover (7) is covered on one end of the slide groove (5) close to the first clamping member (3).
3. The clamping device according to claim 1, characterized in that: The cover (7) is a rolling curtain structure, one end of which is connected to the slider (41), and the other end of which is connected to an end of the slide groove (5) close to the first clamping member (3).
4. The clamping device according to claim 1, characterized in that: The elastic member (6) is arranged at one end of the slide groove (5) close to the first clamping member (3), and the elastic member (6) is compressed, so that the second clamping member (4) moves in a direction close to the first clamping member (3) to clamp the soft film. Under the action of the elastic restoring force of the elastic member (6), the second clamping member (4) moves in a direction away from the first clamping member (3) to tighten the soft film.
5. The clamping device according to claim 4, characterized in that: The elastic member (6) is a spring, a first fixing column (42) is provided on a side of the sliding block (41) close to the first clamping member (3), a second fixing column (51) is provided on an inner wall of the sliding groove (5) close to the first clamping member (3), and two ends of the spring are respectively sleeved on the first fixing column (42) and the second fixing column (51).
6. The clamping device according to claim 1, characterized in that: A groove is provided on each side of the first frame (1) and the second frame (2) that are close to each other, and the groove forms the sliding groove (5).
7. The clamping device according to claim 1, characterized in that: The first clamping member (3) includes a fixing member and a first clamping plate (32), the first clamping plate (32) being connected to the fixing member, the second clamping member (4) includes a sliding member and a second clamping plate (45), the second clamping plate (45) being connected to the sliding member, one end of the soft film is clamped between the first clamping plate (32) and the fixing member, and the other end is clamped between the second clamping plate (45) and the sliding member.
8. The clamping device according to claim 7, characterized in that: The fixing member and the sliding member include a first locking surface (31) and a second locking surface (43) arranged opposite to each other, and a connecting hole (8) is provided at one end of the first locking surface (31) and the second locking surface (43) which are away from each other. The first clamping plate (32) can be fixed to the first locking surface (31) by means of a first connecting member cooperating with the connecting hole (8) on the first locking surface (31), and the second clamping plate (45) can be fixed to the second locking surface (43) by means of a second connecting member cooperating with the connecting hole (8) on the second locking surface (43).
9. The clamping device according to claim 8, characterized in that: A limiting protrusion is provided at one end of the first clamping member (3) and the second clamping member (4) that is away from each other, and a side of the first clamping plate (32) and the second clamping plate (45) that is away from each other can abut against the limiting protrusion for limiting position.
10. The clamping device according to claim 1, characterized in that: The frame further comprises a third frame (9); an end of the second clamping member (4) away from the first clamping member (3) comprises a through hole (44); the third frame (9) passes through the through hole (44); and two ends of the third frame (9) are respectively connected to the first frame (1) and the second frame (2).