Micro-electro-mechanical oscillator
By simplifying the vibration circuit structure in the microelectromechanical oscillator, directly outputting the frequency signal, solving the high power consumption problem caused by the complexity of the existing oscillator IC circuit, realizing power consumption reduction and stable output of frequency signals.
Patent Information
- Application Number
- CN202421899073.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-06
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-08-06
AI Technical Summary
The IC circuits in existing oscillators are too complex, resulting in high overall power consumption.
It provides a microelectromechanical oscillator, which uses TIA oscillation module to simplify the vibration circuit structure, and receives the oscillation signal output by the resonator through the TIA unit and the AGC unit, performs gain and converts it into a driving voltage, and directly outputs the frequency signal, without additional setup of back-end circuits such as phase lock loops.
It realizes a simplified circuit structure, reduces circuit power consumption, and maintains the resonator vibration and outputs a stable frequency signal.
Smart Images
Figure CN222996524U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of circuit technologies, and particularly to a microelectromechanical oscillator. Background Art
[0002] As one of the important units of an electronic system, oscillators have a very wide range of applications. Currently, there are various types of oscillators. For example, MEMS resonators and quartz resonators are both commonly used devices for forming oscillators in the prior art; a resonator makes a mechanical structure vibrate at its natural frequency, and a resonator paired with an IC circuit can form an oscillator. In recent years, oscillators have attracted more and more attention. However, the IC circuits in existing oscillators are often too complex, resulting in a relatively high overall power consumption. Summary of the Utility Model
[0003] In view of this, this application provides a microelectromechanical oscillator, which can simplify the circuit structure of the starting circuit in the microelectromechanical oscillator and reduce the circuit power consumption.
[0004] This application provides a microelectromechanical oscillator, which includes at least one resonator and a starting circuit corresponding to each resonator; the resonator is configured to receive a driving voltage corresponding to the starting circuit to output an oscillation signal; the starting circuit includes a TIA oscillation module, and the TIA oscillation module is configured to apply the driving voltage to the corresponding resonator and receive the oscillation signal output by the corresponding resonator to output a frequency signal.
[0005] Optionally, the TIA oscillation module includes a TIA unit and an AGC unit; the input end of the TIA unit is connected to the output end of the corresponding resonator, and the output end is respectively connected to the driving end of the resonator and the input end of the AGC unit. The TIA unit is configured to receive the oscillation signal, perform gain on the oscillation signal and convert it into the driving voltage; the output end of the AGC unit is connected to the current control end of the TIA unit, and is configured to adjust the bias current generated in the TIA unit according to the driving voltage.
[0006] Optionally, the TIA unit includes an inverter, a feedback resistor and a first current source; the input end of the inverter is respectively connected to the output end of the resonator and the first end of the feedback resistor. The control end of the inverter is connected to the output end of the first current source to receive the bias current provided by the first current source. The output end of the inverter is respectively connected to the second end of the feedback resistor and the input end of the AGC unit, and is configured to output the driving voltage; the input end of the first current source is configured to access a first preset voltage, and the current control end of the first current source is connected to the output end of the AGC unit.
[0007] Optionally, the AGC unit is configured to generate an adjustment current according to the driving voltage and output it to the current control terminal of the first current source, so as to adjust the bias current provided by the first current source to the inverter.
[0008] Optionally, the first current source is a current-controlled current source.
[0009] Optionally, the AGC unit includes a first MOS transistor, a second MOS transistor, a third MOS transistor, a second current source, a first resistor, a second resistor, a first capacitor, and a second capacitor; the source of the first MOS transistor is connected to the input terminal of the second current source and is configured to receive a second preset voltage, and the drain is used as the output terminal of the AGC unit and is respectively connected to the gate of the first MOS transistor and the drain of the second MOS transistor; the source of the second MOS transistor is grounded, and the gate is respectively connected to the first end of the first capacitor and the first end of the first resistor; the second end of the first capacitor is grounded; the drain of the third MOS transistor is respectively connected to the second end of the first resistor, the output terminal of the second current source, and the first end of the second resistor, the source is grounded, and the gate is respectively connected to the second end of the second resistor and the first end of the second capacitor; the second end of the second capacitor is used as the input terminal of the AGC unit.
[0010] Optionally, the TIA oscillation module further includes a level conversion unit; the input terminal of the level conversion unit is connected to the output terminal of the TIA unit, and the output terminal is configured to output an adjusted frequency signal. The level conversion unit is configured to convert the driving voltage output by the TIA unit to output a corresponding frequency signal.
[0011] Optionally, the level conversion unit is a level converter.
[0012] Optionally, the resonator is an electrostatic resonator; the starting oscillation circuit further includes a charge pump module; the charge pump module is configured to apply a bias voltage to the electrostatic resonator.
[0013] Optionally, the resonator includes a driving electrode, an oscillator for vibrating, and a sensing electrode. The microelectromechanical oscillator further includes two ground resistors. The driving electrode is grounded through one of the ground resistors, and the sensing electrode is grounded through the other ground resistor.
[0014] In the above-mentioned microelectromechanical oscillator provided by the present application, the TIA oscillation module can directly output the amplified voltage signal as a frequency signal, so that the starting oscillation circuit can maintain the vibration of the resonator and output a stable frequency signal with a simple circuit structure, without the need to additionally set a back-end circuit such as a phase-locked loop to optimize the relevant frequency signal to make it stably output, which can effectively reduce power consumption. Description of the Drawings
[0015] To more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0016] Figure 1 and Figure 2 shows the block diagram of the microelectromechanical oscillator in different embodiments of the present application;
[0017] Figure 3 shows the structural schematic diagram of the microelectromechanical oscillator in an embodiment of the present application;
[0018] Figure 4 shows the circuit structural schematic diagram of the microelectromechanical oscillator in an embodiment of the present application;
[0019] Figure 5 shows the circuit structural schematic diagram of the microelectromechanical oscillator in another embodiment of the present application;
[0020] Figure 6 shows the circuit structural schematic diagram of the AGC unit in an embodiment of the present application;
[0021] Figure 7 shows the circuit structural schematic diagram of the microelectromechanical oscillator in another embodiment of the present application. Detailed implementation manners
[0022] The following clearly and completely describes the technical solutions in the embodiments of the present application with reference to the drawings. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application. Without conflict, the following various embodiments and their technical features can be combined with each other.
[0023] The present application provides a microelectromechanical oscillator, which includes at least one resonator and an oscillation circuit corresponding to each resonator respectively. In some examples, referring to Figure 1 , the microelectromechanical oscillator 1 includes a resonator 10 and an oscillation circuit 20, and the resonator 10 and the oscillation circuit 20 are electrically connected. In other examples, two or more resonators can also be provided in the microelectromechanical oscillator 1. Similarly, an oscillation circuit is correspondingly provided for each resonator. Specifically, referring to Figure 2, within the same microelectromechanical oscillator 1, resonator 10A and resonator 10B are arranged. A starting circuit 20A is correspondingly set for resonator 10A, and a starting circuit 20B is correspondingly set for resonator 10B. Among them, the resonant frequencies of resonator 10A and resonator 10B can be the same or different; for example, the resonant frequency of resonator 10A can be in the MHz level, and the resonant frequency of resonator 10B can be in the KHz level. It can be seen that the microelectromechanical oscillator 1 can achieve dual-frequency or multi-frequency output.
[0024] In each group of resonator 10 and starting circuit 20 of the microelectromechanical oscillator 1, the resonator 10 is configured to be maintained by the starting circuit 20 to vibrate at its natural frequency. For example, the resonator 10 can receive the driving voltage V provided by the corresponding starting circuit 20 driver , and output an oscillation signal. The starting circuit 20 includes a TIA oscillation module 21. The TIA oscillation module 21 is used to apply a driving voltage V to the corresponding resonator 10 driver to drive the resonator 10 to vibrate, and receive the oscillation signal output by the corresponding resonator 10 to output a frequency signal CLK.
[0025] In this application, the resonator 10 can be a MEMS resonator (such as an electrostatic or piezoelectric resonator), or a quartz crystal resonator, etc. Optionally, refer to Figure 3 , when the resonator 10 is an electrostatic resonator, the starting circuit 20 can further include a charge pump module 22. The charge pump module 22 can be electrically connected to the resonator 10; the charge pump module 22 is used to apply a bias voltage V to the resonator 10 bias to facilitate the starting of the resonator 10.
[0026] Taking the MEMS electrostatic resonator as an example, the resonator 10 is specifically described. Refer to Figure 3 , the resonator 10 includes a driving electrode Driver, an oscillator Resonator for vibration, and a sensing electrode Sensor. When the microelectromechanical oscillator 1 works, an alternating current driving signal (such as an alternating voltage signal) is applied to the driving electrode Driver, and a bias voltage V (such as a direct current voltage signal) is applied to the oscillator Resonator. Opposite or the same charges are established between the driving electrode Driver and the oscillator Resonator to apply an electrostatic force. Under the drive of the electrostatic force, the oscillator Resonator vibrates back and forth, causing the capacitance between the sensing electrode Sensor and the oscillator Resonator to change, so that an alternating current I is generated on the sensing electrode Sensor bias (such as a direct current voltage signal). The electrostatic force is applied to cause the oscillator Resonator to vibrate back and forth, resulting in a change in the capacitance between the sensing electrode Sensor and the oscillator Resonator, thereby generating an alternating current I on the sensing electrode Sensor sense , this alternating current I sense is the oscillation signal output by the resonator 10. The input end of the TIA oscillation module 21 is electrically connected to the sensing electrode Sensor to receive this alternating current Isense Amplify (or gain) and convert it into a voltage signal V driver Output, and this voltage signal V driver Is the drive voltage V output by the oscillation circuit 20 driver Based on this drive voltage V driver The frequency signal CLK can be determined. The output terminal of the TIA oscillation module 21 is electrically connected to the drive electrode Driver in the resonator 10, and the drive electrode Driver receives this voltage signal V driver To be used as the drive signal V driver Maintain the vibration of the oscillator Resonator, thus forming a closed-loop system of "electrical energy → mechanical kinetic energy → electrical energy". Therefore, the resonator 10 of the microelectromechanical oscillator 1 can perform physical vibrations at a fixed frequency to generate an alternating current I sense .
[0027] In some embodiments, the TIA oscillation module 21' can adopt a Pierce circuit. For details, see Figure 4 , in the oscillator 1', the TIA oscillation module 21' includes an inverting amplifier U1, a feedback resistor R1, a capacitor C1, and a capacitor C2; wherein, the inverting amplifier U1 and the feedback resistor R1 are connected in parallel and are also connected in parallel with the resonator X1; one end of the capacitor C1 is connected to one electrode of the resonator X1, and the other end is grounded; one end of the capacitor C2 is connected to the other electrode of the resonator X1, and the other end is grounded. In this case, the inverting amplifier U1 cooperates with the feedback resistor R1 to convert the oscillation signal into a voltage signal for output, that is, the frequency signal F1. Among them, the inverting amplifier U1 provides a 180° phase shift in the loop, and the capacitor C1, the capacitor C2, and the resonator X1 together provide an additional 180° phase shift for the loop to meet the phase shift standard of oscillation (the loop phase shift should be 360° or 0°). Usually, the values of the capacitor C1 and the capacitor C2 are selected to be equal.
[0028] The inventor's research found that due to the poor output stability of the TIA oscillation module 21' in cooperation with the resonator X1, it is usually necessary to set up a clock circuit 22' to optimize the frequency signal F1 to obtain a stable frequency signal CLK1. Specifically, the clock circuit 22' often includes a phase-locked loop unit and a frequency division unit, etc. For example, the frequency signal F1 is phase-locked through the phase-locked loop unit to obtain a stable frequency signal CLK1. However, the setting of the clock circuit 22' significantly increases the circuit complexity and the power consumption of the circuit. However, compared with the existing more complex IC circuits, the circuit power consumption is relatively low and has certain advantages.
[0029] To address the problem of poor output stability of the oscillator 1', in another embodiment of the present application, the TIA oscillation module 21 can directly output the amplified voltage signal as the frequency signal CLK without setting additional backend circuits such as a clock circuit, which can effectively reduce the circuit power consumption.
[0030] In some embodiments, referring to Figure 5 , the TIA oscillation module 21 is electrically connected to the resonator 10. The TIA oscillation module 21 includes a TIA unit (transimpedance amplification unit) 211 and an AGC unit (automatic gain control unit) 212. The input end of the TIA unit 211 is connected to the output end of the corresponding resonator 10 (such as the sensing electrode Sensor), and the output end of the TIA unit 211 is respectively connected to the driving end of the resonator 10 (such as the driving electrode Driver) and the input end of the AGC unit 212. The TIA unit 211 can be used to receive the alternating current I sense (i.e., the oscillation signal), amplify it and convert it into an alternating voltage signal. On the one hand, this alternating voltage signal can be used as a driving signal (such as the driving voltage V driver ) and transmitted to the driving electrode Driver; on the other hand, it can be directly output as the frequency signal CLK. Optionally, this alternating voltage signal can be approximately a sine wave.
[0031] The output end of the AGC unit 212 is connected to the current control end of the TIA unit 211, and is used to adjust the bias current generated in the TIA unit 211 according to the alternating voltage signal, so that the bandwidth of the TIA unit 211 meets the working requirements of the resonator 10, maintain the stable vibration of the resonator 10, and thus enable the TIA unit 211 to output a stable frequency signal CLK.
[0032] In some examples, the TIA unit 211 includes an inverter U, a feedback resistor R B and a first current source A1. The input end of the inverter U can be used as the input end of the TIA unit 211, and is respectively connected to the output end of the resonator 10 and the first end of the feedback resistor R B . The control end of the inverter U is connected to the output end of the first current source A1 to receive the bias current provided by the first current source A1; the output end of the inverter U can be used as the output end of the TIA unit 211, and is respectively connected to the second end of the feedback resistor R B and the input end of the AGC unit 212, and is used to output an alternating voltage signal (such as Figure 5 shown as G MOut ), and this alternating voltage signal can be used as the driving voltage V driver ; the input end of the first current source A1 is used to connect to the first preset voltage, and the current control end of the first current source A1 is used as the current control end of the TIA unit 211 and is connected to the output end of the AGC unit 212.
[0033] Specifically, the first current source A1 is used to provide a bias current. If the bias current is small, the bandwidth of the TIA unit 211 is small and it can receive signals with lower frequencies, such as kHz-level signals; if the bias current is large, the bandwidth of the TIA unit 211 is large and it can receive signals with higher frequencies, such as MHz-level signals. Among them, the first current source A1 can be controlled by the AGC unit 212 to provide a bias current so that the bandwidth of the TIA unit 211 matches the operating requirements of the resonator 10. The inverter U and the feedback resistor R B are connected in parallel and are used to amplify the alternating current (such as Figure 5 shown as G MIn ) from the resonator 10 and convert it into an alternating voltage signal output using Ohm's law.
[0034] It can be understood that the resonator 10 has multiple resonant points with stable vibrations. For example, when vibrating at a resonant point, it can output kHz-level signals, or when vibrating at another resonant point, it can output MHz-level signals. By adjusting the magnitude of the bias current of the first current source A1, the operating requirements of the resonator 10 can be met.
[0035] In some examples, referring to Figure 6 , the AGC unit 212 includes a first MOS transistor M1, a second MOS transistor M2, a third MOS transistor M3, a second current source A2, a first resistor RM1, a second resistor RM2, a first capacitor Ca, and a second capacitor Cb. Among them, the first MOS transistor M1 can be a PMOS transistor, and the second MOS transistor M2 and the third MOS transistor M3 can be NMOS transistors; the resistance values of the first resistor RM1 and the second resistor RM2 are equal.
[0036] Specifically, the source of the first MOS transistor M1 is connected to the input end of the second current source A2 and is used to access a second preset voltage. The drain of the first MOS transistor M1 serves as the output end of the AGC unit 212 to output an adjustment current I out , the drain of the first MOS transistor M1 is respectively connected to the gate of the first MOS transistor M1 and the drain of the second MOS transistor M2; the source of the second MOS transistor M2 is grounded, and the gate of the second MOS transistor M2 is respectively connected to the first end of the first capacitor Ca and the first end of the first resistor RM1; the second end of the first capacitor Ca is grounded; the drain of the third MOS transistor M3 is respectively connected to the second end of the first resistor RM1, the output end of the second current source A2, and the first end of the second resistor RM2. The source of the third MOS transistor M3 is grounded, and the gate of the third MOS transistor M3 is respectively connected to the second end of the second resistor RM2 and the first end of the second capacitor Cb; the second end of the second capacitor Cb serves as the input end of the AGC unit 212 to receive the alternating voltage signal G MOut .
[0037] Based on the above structure, the AGC unit 212 receives the AC voltage signal G output by the TIA unit 211 MOut to generate an adjustment current I out . The first current source A1 in the TIA unit 211 can be a current-controlled current source, and the adjustment current I out as the control current of the first current source A1 can adjust the magnitude of the bias current provided by the first current source A1. In this case, the AGC unit 212 can, according to the AC voltage signal G MOut characterizing the drive voltage V driver determine the resonant point currently corresponding to the resonator 10, generate the adjustment current I input to the TIA unit 211 out , so as to adjust the magnitude of the bias current of the first current source A1 to meet the operating requirements of the resonator 10. Of course, it is not limited to this. The AGC unit 212 is an automatic gain control circuit, and other circuit structures can also be adopted, without too many restrictions.
[0038] In some embodiments, referring to Figure 7 , the TIA oscillation module 21 further includes a level conversion unit 213. The input end of the level conversion unit 213 is connected to the output end of the TIA unit 211 (such as the output end of the inverter U), and the output end of the level conversion unit 213 is used to output a frequency signal CLK. The level conversion unit 213 is used to convert the AC voltage signal G MOut output by the TIA unit 211 to obtain a corresponding frequency signal CLK. Specifically, the level conversion unit 213 can be a level converter (Level Shift, LS), which, by performing level detection and adjustment on the AC voltage signal G MOut , is used to convert the AC voltage signal G MOut into a required frequency signal CLK, such as a square wave signal or a sine wave signal, etc.
[0039] Optionally, as Figure 7 shown, the resonator includes a drive electrode Driver, an oscillator for vibration, and a sensing electrode Sensor. The microelectromechanical oscillator 1 further includes two resistors R G to ground, one resistor R G is provided between the drive electrode Driver and the ground terminal, and the other resistor R G is provided between the sensing electrode Sensor and the ground terminal. That is, the drive electrode Driver is grounded through a resistor R G to ground, and the sensing electrode Sensor is grounded through another resistor R G to ground. In this case, the DC biases of the sensing electrode Sensor and the drive electrode Driver are grounded through the resistor R G to ground, effectively reducing the influence of the DC operating point of the inverter U on the vibration of the oscillator.
[0040] In the above-mentioned microelectromechanical oscillator 1, the TIA oscillation module 21 can directly output the amplified voltage signal as the frequency signal CLK, enabling the starting circuit 20 to maintain the vibration of the resonator 10 and output a stable frequency signal CLK with a simple circuit structure. There is no need to additionally set up backend circuits such as phase-locked loops to optimize the relevant frequency signals for stable output, which can effectively reduce power consumption.
[0041] Although the present application has been shown and described with respect to one or more implementations, those skilled in the art will conceive of equivalent variations and modifications based on the reading and understanding of this specification and the drawings. The present application includes all such modifications and variations and is limited only by the scope of the appended claims. In particular, with respect to the various functions performed by the above components, the terms used to describe such components are intended to correspond to any component (unless otherwise indicated) that performs the specified function of the component (i.e., it is functionally equivalent), even if it is not structurally equivalent to the disclosed structure that performs the function in the exemplary implementations of this specification shown herein.
[0042] That is, the above description is only an embodiment of the present application and does not limit the patent scope of the present application. Any equivalent structural or equivalent process transformation made using the content of the specification and drawings of the present application, such as the mutual combination of technical features between various embodiments, or direct or indirect application in other related technical fields, is similarly included in the patent protection scope of the present application.
[0043] In addition, for structural elements with the same or similar characteristics, the present application may use the same or different reference numerals for identification. Furthermore, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of the present application, "a plurality" means two or more unless otherwise specifically defined.
[0044] In this application, the term "exemplary" is used to mean "serving as an example, instance, or illustration". Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or better than other embodiments. The foregoing description is provided to enable any person skilled in the art to make and use this application. In the foregoing description, various details are set forth for purposes of explanation. It will be understood by those of ordinary skill in the art that the application may be practiced without these specific details. In other instances, well-known structures and processes are not set forth in detail so as not to obscure the description of the application with unnecessary detail. Accordingly, the application is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
Claims
1. A micro-electromechanical oscillator, characterized in that: The micro-electromechanical oscillator comprises at least one resonator and an oscillation-starting circuit corresponding to each resonator; The resonator is used to receive a driving voltage corresponding to the oscillation circuit to output an oscillation signal; The oscillation circuit includes a TIA oscillation module, and the TIA oscillation module is used to apply the driving voltage to the corresponding resonator and receive the oscillation signal output by the corresponding resonator to output a frequency signal; The TIA oscillation module includes a TIA unit and an AGC unit; the input end of the TIA unit is connected to the output end of the corresponding resonator, and the output end is respectively connected to the driving end of the resonator and the input end of the AGC unit, and the TIA unit is used to receive the oscillation signal, gain the oscillation signal and convert it into the driving voltage; The output end of the AGC unit is connected to the current control end of the TIA unit, and is used to adjust the bias current generated in the TIA unit according to the driving voltage.
2. The micro-electromechanical oscillator according to claim 1, characterized in that: The TIA unit includes an inverter, a feedback resistor and a first current source; The input end of the inverter is respectively connected to the output end of the resonator and the first end of the feedback resistor, the control end of the inverter is connected to the output end of the first current source to receive the bias current provided by the first current source, and the output end of the inverter is respectively connected to the second end of the feedback resistor and the input end of the AGC unit, and is used to output the driving voltage; The input end of the first current source is used to access a first preset voltage, and the current control end of the first current source is connected to the output end of the AGC unit.
3. The micro-electromechanical oscillator according to claim 2, characterized in that: The AGC unit is used to generate a regulating current according to the driving voltage and output the regulating current to the current control terminal of the first current source, so as to regulate the bias current provided by the first current source to the inverter.
4. The micro-electromechanical oscillator according to claim 2 or 3, characterized in that: The first current source is a controlled current source that is current controlled.
5. The micro-electromechanical oscillator according to claim 1 or 3, characterized in that: The AGC unit includes a first MOS tube, a second MOS tube, a third MOS tube, a second current source, a first resistor, a second resistor, a first capacitor and a second capacitor; The source of the first MOS tube is connected to the input end of the second current source and is used to access the second preset voltage, and the drain serves as the output end of the AGC unit and is respectively connected to the gate of the first MOS tube and the drain of the second MOS tube; The source of the second MOS tube is grounded, and the gate is respectively connected to the first end of the first capacitor and the first end of the first resistor; the second end of the first capacitor is grounded; the drain of the third MOS tube is respectively connected to the second end of the first resistor, the output end of the second current source and the first end of the second resistor, the source is grounded, and the gate is respectively connected to the second end of the second resistor and the first end of the second capacitor; the second end of the second capacitor serves as the input end of the AGC unit.
6. The micro-electromechanical oscillator according to claim 1, characterized in that: The TIA oscillation module also includes a level conversion unit; The input end of the level conversion unit is connected to the output end of the TIA unit, and the output end is used to output the adjusted frequency signal. The level conversion unit is used to convert the driving voltage output by the TIA unit to output a corresponding frequency signal.
7. The micro-electromechanical oscillator according to claim 6, characterized in that: The level conversion unit is a level converter.
8. The micro-electromechanical oscillator according to claim 1, characterized in that: The resonator is an electrostatic resonator; the oscillation circuit further includes a charge pump module; the charge pump module is used to apply a bias voltage to the electrostatic resonator.
9. The micro-electromechanical oscillator according to claim 1, characterized in that: The resonator includes a driving electrode, a vibrator for vibration, and a sensing electrode. The micro-electromechanical oscillator also includes two ground resistors. The driving electrode is grounded via one of the ground resistors, and the sensing electrode is grounded via the other ground resistor.