Novel getter structure of ceramic tube shell
By adopting a longitudinally arranged getter tablet structure in the ceramic tube shell, the problem of improving the bottleneck of the performance of traditional getters per unit area is solved, and more efficient vacuum degree maintenance and thermal uniformity are achieved.
Patent Information
- Application Number
- CN202421608685.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-09
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-07-09
AI Technical Summary
In the existing ceramic shell and tube packaging, the improvement of the unit area performance of getter has entered a bottleneck period, making it difficult to maintain a high vacuum state for a long time, and the traditional ring-mounted structure cannot take into account both miniaturization and thermal uniformity.
Using a longitudinally arranged getter tablet structure, the surface area and utilization efficiency of getter tablets are increased through the combination of electrode blocks and getter tablets, and the assembly process is simplified by groove design.
It improves the vacuum retention capability inside the ceramic tube shell, enhances the space utilization efficiency, simplifies the assembly process, and improves thermal uniformity.
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Figure CN222996975U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of material support, and particularly to a getter structure for a new type of ceramic package. Background Art
[0002] At present, infrared device products tend to be miniaturized, and have very high requirements for performance and lifespan. It is necessary to maintain a vacuum degree of 5 Pa or higher inside the device for a long time. How to effectively maintain the vacuum degree of a vacuum device for a long time to meet its performance and extend its service life has become a technical problem. In order to maintain the vacuum degree inside an infrared device, a getter is usually installed inside the device to absorb internal exhaust gas for vacuum maintenance. At present, the improvement of the performance per unit area of the getter has entered a bottleneck period. If improvement is required, the R & D and material costs will be very high. Therefore, to make the device maintain a high vacuum state for a long time, increasing the usage area of the getter will have obvious improvement. Chinese Patent No.: CN105271101A discloses a design of a ceramic package, which adds bosses around the inside of the package for supporting a ring-shaped getter. However, this ring-shaped structure design cannot take into account the miniaturization of the product, and because the getter is in a ring shape around the package for one week, such a getter is too long, and thermal non-uniformity will occur in the middle and at the edges during the electro-activation process. Therefore, currently, maintaining the vacuum degree inside a vacuum device has become an important topic in the industry. Summary of the Utility Model
[0003] Based on this, in order to solve the problem of maintaining the vacuum degree inside a vacuum device, this embodiment provides a getter structure for a new type of ceramic package, including a ceramic package, an infrared detection chip, a getter structure, and a cover plate. The ceramic package is provided with an installation surface and a back surface. The infrared detection chip and the getter structure are arranged on the installation surface between the ceramic package and the cover plate. The getter structure includes an electrode block and a getter sheet. The getter sheet is installed on the electrode block, and the end face with the largest surface area of the getter sheet intersects with the installation surface of the ceramic package.
[0004] Preferably, the electrode block includes a first electrode block and a second electrode block, and the getter sheet is installed between the first electrode block and the second electrode block.
[0005] Preferably, first electrode block slots are provided on the end faces of the first electrode block and the second electrode block parallel to the installation surface, and second electrode block slots are provided on the opposite end faces of the first electrode block and the second electrode block. The first electrode block slots communicate with the second electrode block slots.
[0006] Preferably, the number of the first electrode block slots and the second electrode block slots is not less than 2.
[0007] Preferably, the number of the getter sheets is not less than 2.
[0008] Preferably, the end face with the largest surface area of the getter sheet is perpendicular to the mounting surface of the ceramic envelope.
[0009] Preferably, the slot width of the first electrode block and the second electrode block is 0.1 - 0.2 mm.
[0010] Preferably, the opening width of the slot of the first electrode block and the slot of the second electrode block is greater than the depth width of the slot of the first electrode block and the slot of the second electrode block.
[0011] Compared with the prior art, the advantages of the present application are as follows:
[0012] (1). By arranging the getter sheets longitudinally, multiple groups of getter sheets can be arranged. Compared with the traditional horizontally mounted getter sheets, the surface area of the getter sheets is increased, the utilization efficiency of the internal space of the envelope by the getter sheets is improved, and thus the vacuum degree inside the ceramic envelope is ensured.
[0013] (2). For different operating conditions, flexible assembly can be carried out, and only the number of getters needs to be increased or decreased, and the operation is simpler. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The present application will be further described below with reference to the drawings and embodiments:
[0015] Figure 1 It is a schematic structural diagram of one embodiment of the getter structure of a novel ceramic envelope of the present application;
[0016] Figure 2 It is a schematic overall structural diagram of the getter structure of a novel ceramic envelope of the present application;
[0017] Figure 3 It is a partial schematic diagram of the getter structure of a novel ceramic envelope of the present application;
[0018] Figure 4 It is a partial schematic diagram of the getter structure of a novel ceramic envelope of the present application.
[0019] Wherein, 1. Ceramic envelope, 11. Mounting surface;
[0020] 2. Infrared detection chip;
[0021] 3. Getter structure, 31. Electrode block, 32. Getter sheet, 311. First electrode block, 312. Second electrode block, 311A. Slot of the first electrode block, 311B. Slot of the second electrode block. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0022] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings. Obviously, the described embodiments are only one embodiment of this application, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without creative efforts fall within the scope of protection of this application.
[0023] As used herein, an "embodiment" refers to a specific feature, structure, or characteristic that may be included in at least one implementation of this application. In the description of the embodiments of this application, it should be understood that terms such as "first," "second," and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first," "second," and "third" etc. may explicitly or implicitly include one or more of such features. Moreover, terms such as "first," "second," and "third" etc. are used to distinguish similar objects and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of this application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "be" and any variations thereof are intended to cover non-exclusive inclusion.
[0024] As Figure 1 shown, this embodiment provides a packaging structure for a ceramic package, including a ceramic package 1. The ceramic package 1 is provided with a mounting surface 11 and a back surface. An infrared detection chip 2 is provided on the mounting surface 11, and the infrared detection chip 2 is welded to the mounting surface 11. A getter structure 3 is also provided on the mounting surface 11. A cover plate is further provided on the ceramic package 1. A cavity is formed between the cover plate and the ceramic package, and the infrared detection chip 2 and the getter structure 3 are accommodated in this cavity. After the cover plate and the ceramic package 1 are encapsulated, a vacuum cavity needs to be formed in this cavity, and the function of the getter structure 3 is to adsorb the air in the cavity. In this embodiment, the getter structure is arranged horizontally in parallel, generally only one layer can be designed, and its surface area is fixed, which often cannot meet the requirements for devices with higher vacuum requirements.
[0025] As Figure 2 shown, this embodiment provides a new type of getter structure, including electrode blocks 31 and getter sheets 32. The number of electrode blocks 31 is 2. A getter sheet 32 is provided between a pair of electrode blocks 31. The end face with the largest surface area of the getter sheet 32 intersects with the mounting surface 11 of the ceramic package. Thus, multiple getter sheets 32 can be arranged longitudinally in the cavity of the ceramic package.
[0026] As Figures 3 - 4As shown, the electrode block 31 includes a first electrode block 311 and a second electrode block 312. A plurality of getter sheets 32 are longitudinally arranged between the first electrode block 311 and the second electrode block 312. One end face of the first electrode block 311 is mounted on the mounting surface 11. A first electrode block slot 311A is formed on the other end face of the first electrode block 311 parallel to the mounting surface 11. A second electrode block slot 311B is formed on one end face of the first electrode block 311 opposite to the second electrode block 312. The first electrode block slot 311A communicates with the second electrode block 312B. Thus, the getter sheet 32 can be inserted into the first electrode block slot 311A and the second electrode block slot 311B. The second electrode block 312 is arranged in a mirror image of the first electrode block 311. The getter sheet 32 can be fixedly installed between the relatively arranged first electrode block 311 and the second electrode block 312.
[0027] In another embodiment of the present application, 2 first electrode block slots 311A and 2 second electrode block slots 311B are provided on the first electrode block 311. The second electrode block 312 is arranged in a mirror image of the first electrode block 311. Thus, 2 getter sheets 32 can be installed between the first electrode block 311 and the second electrode block 312. The end faces with the largest surface area of the 2 getter sheets 32 are perpendicular to the mounting surface 11, which better realizes the absorption of the gas inside the ceramic package cavity during the encapsulation process. According to different product requirements, more first electrode block slots 311A and second electrode block slots 311B can be provided between the first electrode block 311 and the second electrode block 312 to accommodate more getter sheets 32. The maximum number of the getter sheets 32 can be set to 9, meeting more usage conditions.
[0028] The slot width dimension of the first electrode block slot 311A is 0.1 - 0.2 mm. In one embodiment of the present application, the opening width of the first electrode block slot 311A is greater than the depth width of the first electrode block slot 311A, which is used to ensure that the getter sheet 32 can be easily inserted into the first electrode block 311 and can be relatively stably fixed on the first electrode block 311. The slot width dimension of the second electrode block slot 311B is the same as that of the first electrode block slot 311A, and the opening width of the second electrode block slot 311B is greater than its depth width, thereby ensuring the stability of the getter sheet 32.
[0029] In this embodiment, a portion of the first electrode block slot 311A that is 0.5 - 2 mm away from the mounting surface 11 is not slotted to provide a limiting function. For two outermost getter sheets 32 among the plurality of getter sheets 32, a portion that is 0.5 - 2 mm away from the edge of the first electrode block 311 is not slotted to provide a limiting function. The material of the electrode block 31 is kovar alloy, and the surface coating is Ni: 1 - 22 μm, Au ≥ 0.2 μm. Without welding, it ensures that the getter sheet can be better activated.
[0030] The getter structure of a novel ceramic package provided by this application solves the problem that in the prior art, during the encapsulation process of a ceramic package, the inside of the cavity cannot be completely absorbed by arranging a plurality of vertically installed getter sheets 32. It further increases the surface area of the getter and has good application prospects.
[0031] The above embodiments are only used to illustrate the technical concept and characteristics of this application. The purpose is to enable those who are familiar with this technology to understand the content of this application and implement it accordingly, and it should not be used to limit the protection scope of this application. For those skilled in the art, it is obvious that this application is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of this application, this application can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non - restrictive. The scope of this application is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in this application.
Claims
1. A novel getter structure of a ceramic tube shell, comprising a ceramic tube shell, an infrared detection chip, a getter structure and a cover plate, wherein the ceramic tube shell is provided with a mounting surface and a back surface, and the infrared detection chip and the getter structure are arranged on the mounting surface between the ceramic tube shell and the cover plate, characterized in that: The getter structure comprises an electrode block and a getter sheet, wherein the getter sheet is mounted on the electrode block, and an end surface of the getter sheet with the largest surface area intersects with a mounting surface of the ceramic tube shell.
2. A novel getter structure for a ceramic tube shell according to claim 1, characterized in that: The electrode blocks include a first electrode block and a second electrode block, and the getter sheet is installed between the first electrode block and the second electrode block.
3. A novel getter structure for a ceramic tube shell according to claim 2, characterized in that: One end face of each of the first electrode block and the second electrode block is mounted on the mounting surface, a first electrode block groove is provided on an end face of the first electrode block and the second electrode block parallel to the mounting surface, a second electrode block groove is provided on an end face opposite to the first electrode block and the second electrode block, and the first electrode block groove is connected to the second electrode block groove.
4. A novel getter structure for a ceramic tube shell according to claim 3, characterized in that: The number of the first electrode block slots and the number of the second electrode block slots are no less than 2.
5. A novel getter structure for a ceramic tube shell according to any one of claims 1 to 4, characterized in that: The number of the getter sheets is not less than 2.
6. A novel getter structure for a ceramic tube shell according to any one of claims 1 to 4, characterized in that: The end surface of the getter sheet having the largest surface area is perpendicular to the mounting surface.
7. The novel getter structure of a ceramic tube shell according to claim 3, characterized in that: The slot widths of the first electrode block and the second electrode block are 0.1-0.2 mm.
8. A novel getter structure for a ceramic tube shell according to claim 7, characterized in that: The opening widths of the first electrode block groove and the second electrode block groove are greater than the depth widths of the first electrode block groove and the second electrode block groove.
Citation Information
Patent Citations
MEMS high-vacuum packaging structure based on getter
CN105271101A