Preparation device for purifying disilane

Abstract

The utility model discloses a preparation device for purifying disilane, which comprises a preparation box, a purification component and a collection component, the purification component is fixedly arranged in the preparation box, the collection component is fixedly arranged on one side of the preparation box, the purification component is arranged to facilitate the purification of disilane, and the collection component is arranged on the other side of the preparation box. Waste gas generated after purification is collected and used through a collection assembly, the purification assembly comprises a collection box, a condenser, a partition plate, a refrigerator, a temperature probe and a temperature measurer, the collection box is fixedly installed in the preparation box, and the condenser is fixedly installed on one side of the collection box; according to the device, gas is guided into the preparation box, the spiral guide plate is used for removing impurities in the slowly entering gas, the gas enters the preparation box and then is subjected to primary purification through the collection box so as to remove heavy component impurities, hydrogen is further separated from the gas by using the adsorption filter screen, and then secondary purification is carried out, so that the purity of the gas is improved. Therefore, disilane with better purity is obtained.

Description

Technical Field

[0001] The utility model relates to the technical field of disilane preparation equipment, in particular to a preparation device for disilane purification. Background Art

[0002] Disilane is mainly used in aspects such as solar cells, photosensitive drums, amorphous silicon films, epitaxial growth, chemical vapor deposition, etc. When used as a deposition source, the deposited layer is silicon oxide or silicon nitride. Compared with silane, disilane has the characteristics of faster deposition speed and lower deposition temperature, can prevent the generation of spherical protrusions in amorphous silicon, and can improve the uniformity of deposition. It is mainly used in the manufacture of high-end chips below 20 nanometers;

[0003] In the existing document CN115006959A, the existing disilane purification and filtration only use a single adsorbent for adsorption and filtration, with poor filtration effect and low gas purity obtained. Moreover, traditional purification devices usually rely on basic distillation towers and manual or semi-automatic control systems for the separation and purification of substances. Therefore, the utility model proposes a preparation device for disilane purification to solve the problems existing in the prior art. Summary of the Utility Model

[0004] Aiming at the above problems, the purpose of the utility model is to propose a preparation device for disilane purification. The preparation device for disilane purification introduces gas into a preparation box, uses a spiral guide plate to remove impurities from the slowly entering gas, and after entering the preparation box, it is first purified through a collection box to remove heavy component impurities. Then, by using an adsorption filter screen, hydrogen in the gas is further separated, and then secondary purification is carried out to obtain disilane with better purity.

[0005] To achieve the purpose of the utility model, the utility model is realized through the following technical solutions: A preparation device for disilane purification includes a preparation box, a purification component, and a collection component. The purification component is fixedly installed inside the preparation box, and the collection component is fixedly installed on one side of the preparation box. The setting of the purification component facilitates the purification and use of disilane, and the collection component is used to collect the waste gas generated after purification. The purification component includes a collection box, a condenser, a partition plate, a refrigerator, a temperature probe, and a temperature measuring device. The collection box is fixedly installed inside the preparation box, the condenser is fixedly installed on one side of the collection box, the partition plate is fixedly installed inside the collection box, the refrigerator is fixedly installed below the condenser, the partition plate divides the interior of the collection box, the temperature probe is fixedly installed inside the collection box, and the temperature measuring device is fixedly installed outside the preparation box. The temperature probe and the temperature measuring device are electrically connected to each other.

[0006] A further improvement lies in that: the collection component includes an exhaust gas tank, a connecting pipe, and a control valve. An exhaust gas tank is fixedly installed on one side of the preparation tank. One side of the collection tank is fixedly connected to the connecting pipe. The connecting pipe connects the exhaust gas tank and the collection tank to each other. A control valve is fixedly installed on the surface of the connecting pipe.

[0007] A further improvement lies in that: an electromagnetic valve is fixedly installed inside the partition and at the bottom of the collection tank.

[0008] A further improvement lies in that: a gas storage tank is fixedly installed at the bottom of the collection tank.

[0009] A further improvement lies in that: an adsorption filter screen is fixedly installed below the gas storage tank.

[0010] A further improvement lies in that: a gas guide tank is fixedly installed on the top of the preparation tank. A spiral guide plate is fixedly installed inside the gas guide tank. An inlet pipe is fixedly installed on the top of the gas guide tank. An inlet valve is fixedly installed on the surface of the inlet pipe. The spiral guide plate is communicated with the inlet pipe.

[0011] A further improvement lies in that: a storage tank is movably installed at the bottom of the preparation tank.

[0012] The beneficial effects of the present utility model are as follows: The present utility model introduces gas into the preparation tank, uses the spiral guide plate to remove impurities from the slowly entering gas. After entering the preparation tank, it undergoes primary purification through the collection tank to remove heavy component impurities. By using the adsorption filter screen, the gas is further separated to obtain hydrogen, and then undergoes secondary purification to obtain silane with better purity. By combining adsorption filtration and the traditional rectification process, not only the utilization rate of reaction raw materials is improved, but also the rectification energy consumption problem caused by the low boiling points of silane and hydrogen is effectively reduced, achieving an energy-saving effect, thereby reducing the production cost of silane. And through the setting of the temperature probe and the temperature measuring device, the precise temperature and pressure control system ensures the uniformity and controllability of the purification process, thereby improving the purity and quality of the product. Description of the Drawings

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 It is a front sectional view of the present utility model;

[0015] Figure 2 It is a schematic diagram of the collection tank of the present utility model.

[0016] Wherein: 1. Preparation box; 2. Collection box; 3. Condenser; 4. Partition board; 5. Refrigerator; 6. Temperature probe; 7. Temperature measurer; 8. Exhaust gas box; 9. Connecting pipe; 10. Control valve; 11. Solenoid valve; 12. Gas storage box; 13. Adsorption filter screen; 14. Air guide box; 15. Spiral guide plate; 16. Intake pipe; 17. Intake valve; 18. Storage box. Specific implementation mode

[0017] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

[0018] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0019] According to Figure 1 、 Figure 2As shown in the figure, this embodiment provides a preparation device for disilane purification, which includes a preparation tank 1, a purification component, and a collection component. The purification component is fixedly installed inside the preparation tank 1, and the collection component is fixedly installed on one side of the preparation tank 1. Through the setting of the purification component, it is convenient to purify disilane, and through the collection component, the exhaust gas generated after purification is collected. The purification component includes a collection tank 2, a condenser 3, a partition 4, a refrigerator 5, a temperature probe 6, and a temperature measurer 7. The collection tank 2 is fixedly installed inside the preparation tank 1. By introducing disilane into the collection tank 2, the condenser 3 is fixedly installed on one side of the collection tank 2. Through the condenser 3, the newly entered disilane is cooled at the first stage to condense and filter the mixture in the disilane. The partition 4 is fixedly installed inside the collection tank 2. Through the setting of the partition 4, the interior of the collection tank 2 is divided into two parts, and then it is introduced into the next stage for secondary cooling to effectively remove the water molecules therein. The refrigerator 5 is fixedly installed below the condenser 3 for secondary purification. The partition 4 divides the interior of the collection tank 2. The temperature probe 6 is fixedly installed inside the collection tank 2, and the temperature measurer 7 is fixedly installed outside the preparation tank 1. The temperature probe 6 and the temperature measurer 7 are electrically connected to each other. Because the volatilization ability of water molecules in these compounds is enhanced, it can be effectively removed through the separation process of multiple cooling in the collection tank 2. Through the setting of the temperature probe 6, the temperature inside the collection tank 2 is measured and displayed through the temperature measurer 7, which is convenient for effectively controlling the temperature inside the collection tank 2.

[0020] The collection component includes an exhaust gas tank 8, a connecting pipe 9, and a control valve 10. The exhaust gas tank 8 is fixedly installed on one side of the preparation tank 1. Through the setting of the exhaust gas tank 8, the exhaust gas generated after purification inside the collection tank 2 is collected. One side of the collection tank 2 is fixedly connected to the connecting pipe 9. The connecting pipe 9 connects the exhaust gas tank 8 and the collection tank 2 to each other. The control valve 10 is fixedly installed on the surface of the connecting pipe 9. By driving the control valve 10, the connecting pipe 9 is driven to introduce the exhaust gas into the exhaust gas tank 8.

[0021] An electromagnetic valve 11 is fixedly installed between the interior of the partition 4 and the bottom of the collection tank 2. By driving the electromagnetic valve 11 to open the air outlet inside the collection tank 2, it is convenient to export the purified disilane.

[0022] A gas storage tank 12 is fixedly installed at the bottom of the collection tank 2. Through the setting of the gas storage tank 12, the purified disilane is temporarily stored for subsequent processing and use.

[0023] An adsorption filter screen 13 is fixedly installed below the gas storage tank 12. Through the setting of the adsorption filter screen 13, the gas in the gas storage tank 12 is exported for adsorption and filtration, further improving the purification effect.

[0024] A gas guide box 14 is fixedly installed on the top of the preparation box 1. The spiral guide plate 15 is installed through the gas guide box 14. The spiral guide plate 15 is fixedly installed inside the gas guide box 14. An air inlet pipe 16 is fixedly installed on the top of the gas guide box 14. The gas is introduced through the air inlet pipe 16 for use. An air inlet valve 17 is fixedly installed on the surface of the air inlet pipe 16. The spiral guide plate 15 is communicated with the air inlet pipe 16. The moving distance is increased through the spiral guide plate 15, so that the filtration and adsorption are more thorough, and the purification effect is improved. Driving the air inlet valve 17 can open the air inlet pipe 16 for air intake use.

[0025] A storage box 18 is movably installed at the bottom of the preparation box 1. The setting of the storage box 18 facilitates the storage and use of the purified disilane.

[0026] When the disilane purification preparation device is in use, the purification assembly is provided to facilitate the purification of disilane. The waste gas generated after purification is collected through the collection assembly. The disilane is introduced into the collection box 2. The inside of the collection box 2 is divided into two parts through the setting of the partition plate 4. The newly entered disilane is cooled at the first stage by the condenser 3 to condense and filter the mixture in the disilane, and then introduced into the next stage for secondary cooling to effectively remove the water molecules therein. This is because the volatilization ability of the water molecules in these compounds is enhanced and can be effectively removed through the separation process of multiple coolings in the collection box 2. The temperature inside the collection box 2 is measured through the setting of the temperature probe 6 and displayed through the temperature measuring device 7, which is convenient for effectively controlling the temperature inside the collection box 2. The waste gas generated after purification inside the collection box 2 is collected through the setting of the waste gas box 8. The waste gas is introduced into the waste gas box 8 by driving the control valve 10 to drive the connecting pipe 9. The purified disilane is exported by driving the solenoid valve 11 to open the air outlet inside the collection box 2. The purified disilane is temporarily stored through the setting of the gas storage box 12 for subsequent processing use. The gas in the gas storage box 12 is exported through the setting of the adsorption filter screen 13 for adsorption and filtration use to further improve the purification effect. The spiral guide plate 15 is installed through the gas guide box 14. The gas is introduced through the air inlet pipe 16 for use. The moving distance is increased through the spiral guide plate 15, so that the filtration and adsorption are more thorough, and the purification effect is improved. Driving the air inlet valve 17 can open the air inlet pipe 16 for air intake use. The setting of the storage box 18 facilitates the storage and use of the purified disilane.

[0027] The basic principles, main features and advantages of the present utility model have been shown and described above. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A preparation device for purifying disilane, comprising a preparation box (1), a purification component and a collection component, characterized in that: A purification component is fixedly installed inside the preparation box (1), and a collection component is fixedly installed on one side of the preparation box (1). The purification component includes a collection box (2), a condenser (3), a partition (4), a refrigerator (5), a temperature probe (6) and a temperature measuring device (7). A collection box (2) is fixedly installed inside the preparation box (1), and a condenser (3) is fixedly installed on one side of the collection box (2). A partition (4) is fixedly installed inside the collection box (2), and a refrigerator (5) is fixedly installed below the condenser (3). The partition (4) divides the interior of the collection box (2). A temperature probe (6) is fixedly installed inside the collection box (2), and a temperature measuring device (7) is fixedly installed on the outside of the preparation box (1).

2. A preparation device for purifying disilane according to claim 1, characterized in that: The collecting assembly comprises a waste gas box (8), a connecting pipe (9) and a control valve (10); the waste gas box (8) is fixedly mounted on one side of the preparation box (1); the connecting pipe (9) is fixedly connected to one side of the collecting box (2); the connecting pipe (9) connects the waste gas box (8) and the collecting box (2) to each other; and the control valve (10) is fixedly mounted on the surface of the connecting pipe (9).

3. A preparation device for purifying disilane according to claim 1, characterized in that: A solenoid valve (11) is fixedly installed inside the partition (4) and at the bottom of the collection box (2).

4. A preparation device for purifying disilane according to claim 1, characterized in that: A gas temporary storage box (12) is fixedly mounted on the bottom of the collection box (2).

5. A preparation device for purifying disilane according to claim 4, characterized in that: An adsorption filter screen (13) is fixedly installed below the gas temporary storage box (12).

6. The preparation device for purifying disilane according to claim 1, characterized in that: An air guide box (14) is fixedly mounted on the top of the preparation box (1), a spiral guide plate (15) is fixedly mounted inside the air guide box (14), an air intake pipe (16) is fixedly mounted on the top of the air guide box (14), an air intake valve (17) is fixedly mounted on the surface of the air intake pipe (16), and the spiral guide plate (15) and the air intake pipe (16) are in communication with each other.

7. The preparation device for purifying disilane according to claim 1, characterized in that: A storage box (18) is movably mounted on the bottom of the preparation box (1).

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