Sheet coating blocking device

Abstract

The utility model relates to a sheet coating blocking device which comprises a blocking frame, the blocking frame comprises a first end and a containing space used for containing a sheet to be coated, the edge size of the containing space is gradually increased in the direction of the first end, and a first inclined part located on the side wall of the containing space is formed; and a to-be-coated sheet is placed between the first inclined parts. According to the sheet coating blocking device, spraying materials can be prevented from adhering to the sides, not needing to be sprayed, of the sheets, and therefore the processing efficiency of the sheets is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of blocking devices, in particular to a sheet coating blocking device. Background Art

[0002] During the processing of silicon wafers, a masking material needs to be coated on one side of the silicon wafer surface. Currently, the masking material is mainly coated on the silicon wafer through a spraying process. To ensure that one side of the silicon wafer can be completely sprayed, the spraying area of the spraying equipment is relatively large. Therefore, after spraying, there will be residues of the masking material on the edges of the silicon wafer. Since the masking material has fluidity, some of the masking material will stick to the side of the silicon wafer that does not need to be sprayed, resulting in the need to remove the excess masking material before the silicon wafer undergoes the next processing step, thereby reducing the processing efficiency of the silicon wafer. Summary of the Utility Model

[0003] Therefore, the technical problem to be solved by the utility model is to provide a sheet coating blocking device that can prevent the spraying material from sticking to the side of the sheet that does not need to be sprayed, thereby improving the processing efficiency of the sheet.

[0004] To solve the above technical problem, the utility model provides a sheet coating blocking device, including: a blocking frame, the blocking frame includes a first end and a receiving space for placing the sheet to be coated, the edge size of the receiving space gradually increases in the direction of the first end and forms a first inclined portion on the side wall of the receiving space, and the first inclined portions are used to place the sheet to be coated.

[0005] In an embodiment of the utility model, the blocking frame is annular, and the receiving space is located in the space surrounded by the blocking frame.

[0006] In an embodiment of the utility model, the first inclined portion is arranged to surround the side wall of the blocking frame for one week.

[0007] In an embodiment of the utility model, the blocking frame further includes a second end, the second end is arranged opposite to the first end, the second end is provided with a groove, the groove forms a flow channel, the side wall of the blocking frame is provided with a through hole communicated with the flow channel, and the through hole is communicated with a collection component through a pipeline.

[0008] In an embodiment of the utility model, the groove is arranged to surround the side wall of the blocking frame for one week.

[0009] In an embodiment of the utility model, the thickness of the side wall of the groove close to the receiving space gradually decreases in the direction of the second end, and the side wall of the groove close to the receiving space is provided with a second inclined portion.

[0010] In an embodiment of the present utility model, the minimum distance between the through hole and the first end is less than the distance between the bottom of the groove and the first end.

[0011] In an embodiment of the present utility model, the bottom of the groove inclines towards the through hole, and the groove forms a flow channel through which liquid can flow towards the through hole.

[0012] In an embodiment of the present utility model, there are a plurality of through holes, and through holes are provided on multiple side walls of the blocking frame.

[0013] In an embodiment of the present utility model, the collection assembly includes a heating member, a condensation member, and a storage member. The heating member is communicated with the pipeline, the condensation member is communicated with the heating member, and there are a plurality of storage members which are respectively communicated with the heating member and the condensation member.

[0014] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0015] For a sheet coating blocking device of the present utility model, through the blocking of the excess spraying material by the blocking frame, when the spraying device sprays the sheet to be coated, one side of the sheet to be coated can be completely coated, and at the same time, the spraying material will not adhere to the side of the sheet to be coated that does not need to be sprayed. After the sheet to be coated is completed with coating, there is no need to remove the excess spraying material, which improves the processing efficiency of the sheet. Through the cooperation of the groove and the collection assembly, the excess spraying material that does not spray onto the sheet to be coated can flow through the flow channel and the pipeline into the collection assembly, so that the spraying material can be reused, reducing the spraying cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to the specific embodiments of the present utility model in conjunction with the drawings, where

[0017] Figure 1 is a schematic structural diagram of a sheet coating blocking device of the present utility model;

[0018] Figure 2 is a schematic bottom structure diagram of the blocking frame;

[0019] Figure 3 is a schematic top structure diagram of the blocking frame;

[0020] Figure 4 is Figure 3 a partial enlarged view of part A in

[0021] Description of the reference numerals in the drawings: 1. Blocking frame; 2. Collection assembly; 11. First inclined portion; 12. Through hole; 13. Accommodating space; 14. Groove; 15. Second inclined portion; 21. Pipe. Detailed implementation manners

[0022] The present utility model will be further described below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the exemplified embodiments shall not be construed as limiting the present utility model.

[0023] Referring to Figure 1 and Figure 2 As shown, a sheet coating blocking device of the present utility model includes: a blocking frame 1, the blocking frame 1 includes a first end portion and an accommodating space 13 for placing a sheet to be coated, the edge size of the accommodating space 13 gradually increases in the direction of the first end portion and forms a first inclined portion 11 on the side wall of the accommodating space 13, and the first inclined portions 11 are for placing the sheet to be coated.

[0024] In a sheet coating blocking device of this embodiment, after placing the sheet to be coated at the spraying position, the blocking frame 1 is placed around the sheet to be coated, and the first end portion of the blocking frame 1 abuts against the plane where the sheet to be coated is located, so that the sheet to be coated is located in the accommodating space 13 and between the first inclined portions 11. The opening size formed by the end of the blocking frame 1 opposite to the first end portion is slightly larger than the size of the sheet to be coated, so that when the spraying device sprays the sheet to be coated, one side of the sheet to be coated can be completely coated, and at the same time, the blocking frame 1 can block the excess spraying material, thereby preventing the spraying material from sticking to the side of the sheet to be coated that does not need to be sprayed. After the sheet to be coated is completed with coating, there is no need to remove the excess spraying material, which improves the processing efficiency of the sheet.

[0025] The blocking frame 1 includes a first end portion and a receiving space 13 for placing the sheet to be coated. Specifically, the blocking frame 1 is integrally annular, and the receiving space 13 is located within the annular surrounding space of the blocking frame 1. The first end portion is the bottom of the blocking frame 1, and the edge dimension of the receiving space 13 gradually increases in the direction of the first end portion and forms a first inclined portion 11 on the side wall of the receiving space 13, that is, the first inclined portion 11 is located on the inner side wall of the blocking frame 1, and the first inclined portions 11 are for placing the sheet to be coated. Preferably, the annular shape of the blocking frame 1 corresponds to the shape of the sheet to be coated. In this embodiment, the annular shape of the blocking frame 1 is rectangular, and it can also be set as circular, triangular, pentagonal, etc. Preferably, the first inclined portion 11 is arranged in a circle along the side wall of the blocking frame 1, that is, the inner side wall of the blocking frame 1 is provided with the first inclined portion 11, and the first inclined portion 11 is arranged from the middle position of the inner side wall of the blocking frame 1 in the direction of the first end portion. The setting of the first inclined portion 11 makes the edge dimension of the receiving space 13 gradually increase in the direction of the first end portion, thereby preventing the side wall of the blocking frame 1 from rubbing against the sheet to be coated, and it can also enable the blocking frame 1 to place sheets to be coated with different sizes. When the sheet to be coated is placed on the tooling, the overall tooling can be placed in the receiving space 13, so that the sheet to be coated can also be sprayed. The blocking frame 1 further includes a second end portion, and the second end portion is the top end of the blocking frame 1. The second end portion is arranged opposite to the first end portion. The opening formed by the blocking frame 1 at the second end portion is slightly larger than the size of the sheet to be coated, so that when the spraying device sprays the sheet to be coated, one side of the sheet to be coated can be completely coated. At the same time, the blocking frame 1 can block the excess spraying material, so that only a very small part of the spraying material is sprayed onto the edge of the sheet to be coated, and a very small part of the spraying material will not flow to the side of the sheet to be coated that does not need to be sprayed, thereby preventing the spraying material from sticking to the side of the sheet to be coated that does not need to be sprayed.

[0026] Refer to Figure 3 and Figure 4As shown, a groove 14 is further provided on the end face of the second end portion of the blocking frame 1. The groove 14 constitutes a flow channel for the spraying material to flow. A through hole 12 communicating with the flow channel is provided on the side wall of the blocking frame 1, and the through hole 12 is communicated with the collecting assembly 2 through a pipeline 21. The cooperation of the groove 14 and the collecting assembly 2 enables the excess spraying material that has not been sprayed onto the sheet to be coated to flow into the collecting assembly 2 through the flow channel and the pipeline 21, so that the spraying material can be reused, reducing the spraying cost. Preferably, the groove 14 is arranged to surround the side wall of the blocking frame 1 for one week, and the position of the groove 14 corresponds to the spraying range of the spraying device, so that the excess spraying material at the second end portion can enter the groove 14 to the maximum extent. Preferably, the thickness of the side wall of the groove 14 close to the accommodating space 13 gradually decreases in the direction of the second end portion. A second inclined portion 15 is provided on the side wall of the groove 14 close to the accommodating space 13. The second inclined portion 15 is arranged to surround the side wall of the groove 14 for one week. The setting of the second inclined portion 15 enables the spraying material on the second end portion of the blocking frame 1 to flow into the groove 14. Preferably, the minimum distance between the through hole 12 and the first end portion is less than the distance between the bottom of the groove 14 and the first end portion, that is, the end portion at the bottom of the groove 14 corresponds to the through hole 12, so that the spraying material at the bottom of the groove 14 can flow out through the through hole 12, preventing the spraying material from accumulating in the groove 14. Preferably, the bottom of the groove 14 is inclined towards the through hole 12, and the groove 14 constitutes a flow channel through which the liquid can flow towards the through hole 12, that is, the spraying material can quickly flow out through the inclined bottom of the groove 14 through the through hole 12. Preferably, a plurality of through holes 12 are provided, and the through holes 12 are provided on the side walls of the blocking frame 1, so that the spraying liquid can flow out through the plurality of through holes 12 on the side walls, and further enables the spraying material in the groove 14 to flow out quickly.

[0027] The collecting assembly 2 includes a heating member, a condensing member and a storage member. Among them, the heating member is communicated with the pipeline 21, the condensing member is communicated with the heating member, and a plurality of storage members are provided and are respectively communicated with the heating member and the condensing member. Specifically, the spraying material is composed of two solvents mixed, and the two solvents are a first solvent and a second solvent respectively. The spraying material enters the heating member through the pipeline 21. Since the second solvent has strong volatility, after the heating member heats the spraying material, the second solvent forms solvent vapor and enters the condensing member. After the condensing member cools the solvent vapor, the second solvent is formed, and then the second solvent enters one storage member. After the spraying material is heated, only the first solvent remains, and the first solvent enters another storage member. Preferably, filter members are provided between the heating member and the condensing member and the storage member, and the filter members can filter pollutants.

[0028] In use, after placing the sheet to be coated at the spraying position, place the blocking frame 1 around the sheet to be coated, and make the first end of the blocking frame 1 abut against the plane where the sheet to be coated is located, so that the sheet to be coated is located in the accommodating space 13, between the first inclined portions 11, and the sheet to be coated corresponds to the opening of the second end; then the spraying device sprays the sheet to be coated. During the spraying process, the excess spraying material enters the groove 14 and flows along the groove 14 until the spraying material enters the collection assembly 2 through the pipeline 21.

[0029] A sheet coating blocking device of the present utility model can completely coat one side of the sheet to be coated when the spraying device sprays the sheet to be coated by blocking the excess spraying material by the blocking frame 1. At the same time, the spraying material will not adhere to the side of the sheet to be coated that does not need to be sprayed. After the sheet to be coated is completed with coating, there is no need to remove the excess spraying material, which improves the processing efficiency of the sheet. Through the cooperation of the groove 14 and the collection assembly 2, the excess spraying material that does not reach the sheet to be coated can flow into the collection assembly 2 through the flow channel and the pipeline 21, so that the spraying material can be reused again, reducing the spraying cost.

[0030] Obviously, the above embodiments are only examples clearly described and not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the creation of the present utility model.

Claims

1. A sheet coating blocking device, characterized in that: include: The blocking frame includes a first end and a receiving space for placing the sheet to be coated, the edge size of the receiving space gradually increases toward the first end and forms a first inclined portion located on the side wall of the receiving space, and the sheet to be coated is placed between the first inclined portions.

2. The sheet coating blocking device according to claim 1, characterized in that: The blocking frame is annular, and the accommodating space is located in the space surrounded by the blocking frame.

3. The sheet coating blocking device according to claim 2, characterized in that: The first inclined portion is arranged around a side wall of the blocking frame.

4. The sheet coating blocking device according to claim 1, characterized in that: The blocking frame also includes a second end portion, which is arranged opposite to the first end portion, and is provided with a groove, which constitutes a flow channel, and a side wall of the blocking frame is provided with a through hole connected to the flow channel, and the through hole is connected to the collection component through a pipeline.

5. The sheet coating blocking device according to claim 4, characterized in that: The groove is arranged around the side wall of the blocking frame.

6. The sheet coating blocking device according to claim 4, characterized in that: The thickness of the side wall of the groove close to the accommodating space gradually decreases toward the second end, and the side wall of the groove close to the accommodating space is provided with a second inclined portion.

7. The sheet coating blocking device according to claim 4, characterized in that: The minimum distance between the through hole and the first end is smaller than the distance between the bottom of the groove and the first end.

8. The sheet coating blocking device according to claim 4, characterized in that: The bottom of the groove is inclined toward the through hole, and the groove forms a flow channel through which liquid can flow toward the through hole.

9. The sheet coating blocking device according to claim 4, characterized in that: The through hole is provided, and the through holes are provided on a plurality of side walls of the blocking frame.

10. The sheet coating blocking device according to claim 4, characterized in that: The collecting component comprises a heating element, a condensing element and a storage element. The heating element is connected to the pipeline, the condensing element is connected to the heating element, and a plurality of storage elements are provided and are respectively connected to the heating element and the condensing element.

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