Coating device beneficial to growth of high-quality silicon carbide single crystals

Abstract

The utility model relates to the technical field of silicon carbide plate processing, in particular to a coating device beneficial to growth of high-quality silicon carbide single crystals, which comprises a bottom plate, a servo motor is fixedly connected to the center of the top of the bottom plate, a rotating rod is fixedly connected to the output end of the servo motor, and a connecting plate is fixedly connected to the end of the rotating rod. Folding plates are fixedly connected to the left side and the right side of the top of the connecting plate, a rotating plate is fixedly connected to the tops of the folding plates, roll shafts are arranged on the left side and the right side of the rotating plate, and the outer surfaces of the roll shafts are sleeved with a conveying belt. The silicon carbide single crystal wafer coating device has the advantages that the servo motor is arranged to drive the rotating plate to rotate, the rotating plate is provided with the roll shaft and the conveying belt, the silicon carbide single crystal wafer is placed on the conveying belt when the silicon carbide single crystal wafer coating device is used, and the silicon carbide single crystal wafer placed on the rotating plate and the conveying belt can conveniently move back and forth or rotate below the coating brush head through the rotatable rotating plate and the conveying belt. Therefore, sufficient coating work is carried out, and the use effect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide plate processing, in particular to a coating device which is beneficial to growing high-quality silicon carbide single crystals. Background Technique

[0002] Silicon carbide plates have good thermal conductivity, high thermal shock stability, do not deform, soften, or produce loose expansion during long-term use at high temperatures, can maintain the inherent high thermal conductivity of silicon carbide, and are used on high-temperature kilns as flame baffle plates, which can significantly increase the furnace temperature, save energy, increase production, and improve economic benefits. During production and processing, it is necessary to apply coatings back and forth, consuming a lot of labor. Common coating devices do not have the function of adjusting the position and size of the coating, and are not convenient to move. Therefore, the utility model hereby provides a coating device which is beneficial to growing high-quality silicon carbide single crystals. Summary of the Utility Model

[0003] The purpose of the utility model is to overcome the shortcomings of the prior art and provide a coating device which is beneficial to growing high-quality silicon carbide single crystals.

[0004] The purpose of the utility model is achieved by the following technical solutions: A coating device which is beneficial to growing high-quality silicon carbide single crystals, including a bottom plate, a servo motor is fixedly connected to the center of the top of the bottom plate, a rotating rod is fixedly connected to the output end of the servo motor, a connecting plate is fixedly connected to the end of the rotating rod, folding plates are fixedly connected to the left and right sides of the top of the connecting plate, a rotating plate is fixedly connected to the top of the folding plate, roller shafts are arranged on the left and right sides of the rotating plate, a conveyor belt is sleeved on the outer surface of the roller shafts, and a silicon carbide single crystal wafer is lapped on the top of the conveyor belt.

[0005] Preferably, support rods are fixedly connected to the four corners of the top of the bottom plate, a top plate is fixedly connected to the top of the support rods, vertical rods are fixedly connected to the diagonals of the top plate, a clamping groove is opened at the top of the vertical rod, a connecting rod is clamped in the clamping groove, and a coating brush head is arranged at the bottom of the connecting rod.

[0006] Preferably, sliding grooves are opened at the left and right ends of the support rods, L-shaped plates are movably connected in the sliding grooves, a spring is fixedly connected to one side of the L-shaped plate, the other end of the spring is fixedly connected to the support rod, a clamping groove adapted to the L-shaped plate is opened in the clamping groove, and the spring is a compression spring.

[0007] Preferably, the connecting plate is a circular plate, the connecting plate and the folding plate are connected by welding, the number of folding plates is two, the two folding plates are respectively located on the left and right sides of the conveyor belt, and the folding plate is fixedly connected to the rotating plate by screws.

[0008] Preferably, a connecting piece is welded to one side of the rotating plate close to the roller shaft. A bearing is fixedly connected inside the connecting piece. The roller shaft is fixedly connected to the connecting piece through the bearing. The conveyor belt is located at the center of the rotating plate, and the conveyor belt is made of stainless steel.

[0009] Preferably, an auxiliary roller is fixedly connected to the middle position of the rotating plate through a bearing. The auxiliary roller has the same structure as the roller shaft. The auxiliary rollers are linearly arranged at the middle position of the rotating plate. The conveyor belt is sleeved on the outer surfaces of the auxiliary rollers and the roller shaft.

[0010] The utility model has the following advantages:

[0011] The coating device beneficial to growing high-quality single-crystalline silicon carbide can drive the rotating plate to rotate by setting a servo motor. A roller shaft and a conveyor belt are arranged on the rotating plate. When in use, the single-crystalline silicon carbide wafer is placed on the conveyor belt. The rotatable rotating plate and the conveyor belt are arranged to facilitate the single-crystalline silicon carbide wafer placed thereon to move back and forth or rotate under the coating brush head, so as to carry out sufficient coating work, and the use effect is good. Description of the Drawings

[0012] Figure 1 is a schematic structural diagram of the utility model;

[0013] Figure 2 is a schematic structural diagram of the rotating plate of the utility model;

[0014] Figure 3 is a schematic structural diagram of the cross bar of the utility model;

[0015] Figure 4 is the utility model Figure 3 Internal structural schematic diagram of part A in.

[0016] In the figure: 1 - bottom plate, 2 - servo motor, 3 - rotating rod, 4 - connecting plate, 5 - folding plate, 6 - rotating plate, 7 - conveyor belt, 8 - single-crystalline silicon carbide wafer, 9 - spring, 10 - L-shaped plate, 11 - chute, 12 - coating brush head, 13 - cross bar, 14 - card slot, 15 - support rod, 16 - top plate, 17 - vertical rod. Detailed Embodiment

[0017] The following further describes the utility model with reference to the drawings, but the protection scope of the utility model is not limited to the following.

[0018] As Figures 1-4As shown in the figure, a coating device that is conducive to growing high-quality silicon carbide single crystals includes a bottom plate 1. At the center of the top of the bottom plate 1, a servo motor 2 is fixedly connected. The output end of the servo motor 2 is fixedly connected to a rotating rod 3. The end of the rotating rod 3 is fixedly connected to a connecting plate 4. On the left and right sides of the top of the connecting plate 4, folding plates 5 are fixedly connected. At the top of the folding plate 5, a rotating plate 6 is fixedly connected. On the left and right sides of the rotating plate 6, roller shafts are provided. A conveyor belt 7 is sleeved on the outer surface of the roller shafts. A silicon carbide single crystal wafer 8 is lapped on the top of the conveyor belt 7. By setting the servo motor, the rotating plate 6 can be driven to rotate, and the rotating plate 6 is provided with roller shafts and a conveyor belt 7. When in use, the silicon carbide single crystal wafer 8 is placed on the conveyor belt 7. Through the setting of the rotatable rotating plate 6 and the conveyor belt 7, the silicon carbide single crystal wafer 8 placed thereon can be conveniently moved back and forth or rotated under the coating brush head 12, so as to carry out sufficient coating work, and the use effect is good.

[0019] Please refer specifically to Figure 1 , at the four corners of the top of the bottom plate 1, support rods 15 are fixedly connected. At the top of the support rods 15, a top plate 16 is fixedly connected. At the diagonals of the top plate 16, vertical rods 17 are fixedly connected. At the top of the vertical rods 17, a clamping groove 14 is opened. A connecting rod 13 is clamped inside the clamping groove 14. A coating brush head 12 is arranged at the bottom of the connecting rod 13.

[0020] At the left and right ends of the support rod 15, sliding grooves 11 are opened. An L-shaped plate 10 is movably connected inside the sliding grooves 11. On one side of the L-shaped plate 10, a spring 9 is fixedly connected. The other end of the spring 9 is fixedly connected to the support rod 15. A clamping groove adapted to the L-shaped plate 10 is opened inside the clamping groove 14. The spring 9 is a compression spring.

[0021] The connecting plate 4 is a circular plate. The connection mode between the connecting plate 4 and the folding plate 5 is welding. The number of folding plates 5 is two. The two folding plates 5 are respectively located on the left and right sides of the conveyor belt 7. The folding plate 5 is fixedly connected to the rotating plate 6 by screws. A connecting piece is welded on the side of the rotating plate 6 close to the roller shaft. A bearing is fixedly connected inside the connecting piece. The roller shaft is fixedly connected to the connecting piece through the bearing. The conveyor belt 7 is located at the central position of the rotating plate 6. The material of the conveyor belt 7 is stainless steel. At the middle position of the rotating plate 6, an auxiliary roller is fixedly connected through a bearing. The auxiliary roller has the same structure as the roller shaft. The auxiliary rollers are linearly arrayed at the middle position of the rotating plate 6. The conveyor belt 7 is sleeved on the outer surfaces of the auxiliary roller and the roller shaft.

[0022] The working principle of the present utility model is as follows: By setting the servo motor, the rotating plate 6 can be driven to rotate, and the rotating plate 6 is provided with roller shafts and a conveyor belt 7. When in use, the silicon carbide single crystal wafer 8 is placed on the conveyor belt 7. Through the setting of the rotatable rotating plate 6 and the conveyor belt 7, the silicon carbide single crystal wafer 8 placed thereon can be conveniently moved back and forth or rotated under the coating brush head 12, so as to carry out sufficient coating work, and the use effect is good.

[0023] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A coating device that is conducive to growing high-quality silicon carbide single crystals, characterized in that: The invention comprises a bottom plate (1), a servo motor (2) is fixedly connected to the center of the top of the bottom plate (1), a rotating rod (3) is fixedly connected to the output end of the servo motor (2), a connecting plate (4) is fixedly connected to the end of the rotating rod (3), a folding plate (5) is fixedly connected to the left and right sides of the top of the connecting plate (4), a rotating plate (6) is fixedly connected to the top of the folding plate (5), a roller is provided on the left and right sides of the rotating plate (6), a conveyor belt (7) is sleeved on the outer surface of the roller, and a silicon carbide single crystal wafer (8) is overlapped on the top of the conveyor belt (7).

2. A coating device that is beneficial to the growth of high-quality silicon carbide single crystals according to claim 1, characterized in that: The four corners of the top of the bottom plate (1) are fixedly connected to support rods (15), the top of the support rods (15) is fixedly connected to a top plate (16), the diagonals of the top plate (16) are fixedly connected to vertical rods (17), a slot (14) is provided at the top of the vertical rod (17), a lever (13) is clamped inside the slot (14), and a coating brush head (12) is provided at the bottom of the lever (13).

3. A coating device that is beneficial to the growth of high-quality silicon carbide single crystals according to claim 2, characterized in that: The left and right ends of the support rod (15) are both provided with a slide groove (11), the interior of the slide groove (11) is movably connected with an L plate (10), one side of the L plate (10) is fixedly connected with a spring (9), the other end of the spring (9) is fixedly connected to the support rod (15), the interior of the clamping groove (14) is provided with a clamping groove adapted to the L plate (10), and the spring (9) is a compression spring.

4. A coating device that is beneficial to the growth of high-quality silicon carbide single crystals according to claim 1, characterized in that: The connecting plate (4) is a circular plate. The connecting plate (4) and the folding plate (5) are connected by welding. There are two folding plates (5). The two folding plates (5) are respectively located on the left and right sides of the conveyor belt (7). The folding plates (5) are fixedly connected to the rotating plate (6) by screws.

5. The coating device according to claim 1, which is beneficial to the growth of high-quality silicon carbide single crystals, is characterized in that: A connecting piece is welded on one side of the rotating plate (6) close to the roller shaft, a bearing is fixedly connected inside the connecting piece, the roller shaft is fixedly connected to the connecting piece via the bearing, the conveyor belt (7) is located at the center of the rotating plate (6), and the conveyor belt (7) is made of stainless steel.

6. The coating device according to claim 1, which is beneficial to the growth of high-quality silicon carbide single crystals, is characterized in that: The middle of the rotating plate (6) is fixedly connected to an auxiliary roller via a bearing. The auxiliary roller has the same structure as the roller shaft. The auxiliary rollers are linearly arrayed in the middle of the rotating plate (6). The conveyor belt (7) is sleeved on the outer surfaces of the auxiliary roller and the roller shaft.

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