3D profiling photoetching equipment

Abstract

The utility model discloses 3D (three-dimensional) profiling photoetching equipment and relates to the field of photoetching equipment. Comprising a rack, and a workbench is fixedly installed on the rack; a moving mechanism is fixedly installed at the left end of the upper side of the workbench, a rotating DD motor is connected to the moving mechanism in a driving mode, and a product jig is fixedly installed at a rotor of the rotating DD motor. A laser is fixedly mounted on the workbench, is arranged on the right side of the translation mechanism, and is aligned with the product jig to perform profiling photoetching; compared with a traditional mode of photoetching on a plane, the three-dimensional photoetching device can realize three-dimensional photoetching and is wider in application range.

Description

Technical Field

[0001] The utility model relates to the field of lithography equipment, in particular to a 3D profiling lithography equipment. Background Art

[0002] Laser engraving machines can improve the engraving efficiency, make the surface of the engraved part smooth and round, quickly reduce the temperature of the non-metallic material to be engraved, and reduce the deformation and internal stress of the object to be engraved; they can be widely used in the field of fine engraving of various non-metallic materials.

[0003] In the prior art (Publication No.: CN208743930U. Publication Date: April 16, 2019), a laser engraving machine is disclosed, which is provided with a dust collector that can suck the waste residues and dust generated during engraving into the dust collection box, avoiding the waste residues remaining in the machine body, reducing the cleaning difficulty, and also reducing the impact on engraving. Therefore, the technical effect of the utility model is to improve the cleanliness and working efficiency of the laser engraving machine.

[0004] In the prior art (Publication No.: CN202517194U, Publication Date: November 7, 2012), a roll material automatic feeding laser etching machine is disclosed, which automatically feeds the roll material and then performs lithography, with high automation and high production efficiency.

[0005] In the prior art (Publication No.: CN206991021U, Publication Date: February 9, 2018), a maskless lithography equipment is disclosed, which fixes the object to be lithographed on the support plate through a support rotation mechanism and drives the support plate to rotate through a driving mechanism, thereby realizing the lithography of the object to be lithographed; it does not require complex image software algorithms, can reduce production costs, and improve efficiency and quality.

[0006] In the prior art (Publication No.: CN202517193U, Publication Date: November 7, 2012), a double-station touch screen ITO film laser etching machine is disclosed, which uses a CCD positioning system and a lifting mechanism to make the laser head perform translational lithography on the adsorption platform, achieving the effect of high-efficiency lithography.

[0007] However, the above solutions and existing laser engraving machines all perform engraving on a plane and cannot achieve the effect of 3D stereoscopic engraving, resulting in the inability to realize 3D profiling lithography. Therefore, it is necessary to design a 3D profiling lithography equipment to solve this technical problem. Summary of the Utility Model

[0008] The utility model provides a technical solution that can solve the above problems to overcome the above deficiencies.

[0009] A 3D profiling lithography device, comprising a frame, on which a workbench is fixedly installed; at the left end of the upper side of the workbench, a moving mechanism is fixedly installed, and a rotary direct drive (DD) motor is driven and connected to the moving mechanism, and a product fixture is fixedly installed at the rotor of the rotary DD motor; a laser is fixedly installed on the workbench, the laser is arranged on the right side of the translation mechanism, and the laser is aligned with the product fixture for profiling lithography.

[0010] Furthermore: The moving mechanism includes a Z-axis lifting module and a Y-axis translation module. The Z-axis lifting module is fixedly installed on the workbench, the Z-axis lifting module drives the Y-axis translation module to lift and move, and the Y-axis translation module drives the rotary DD motor to move back and forth.

[0011] Furthermore: A lifting block is driven and connected to the side of the Z-axis lifting module, the middle part of the Y-axis translation module is fixedly installed on the lifting block, two first photoelectric sensors are fixedly installed on the side of the Z-axis lifting module, and a first L-shaped block is fixedly installed on the lifting block, and the first L-shaped block is arranged between the two first photoelectric sensors.

[0012] Furthermore: A first U-shaped groove is formed on the side of the first photoelectric sensor, and the outer end of the first L-shaped block is arranged in clearance fit through the first U-shaped groove.

[0013] Furthermore: A slide is driven and connected to the side of the Y-axis translation module, the rotary DD motor is fixedly installed on the slide, two second photoelectric sensors are fixedly installed on the side of the Y-axis translation module, and a second L-shaped block is fixedly installed on the slide, and the second L-shaped block is arranged between the two second photoelectric sensors.

[0014] Furthermore: A second U-shaped groove is formed on the side of the second photoelectric sensor, and the outer end of the second L-shaped block is arranged in clearance fit through the second U-shaped groove.

[0015] Furthermore: Both the Z-axis lifting module and the Y-axis translation module respectively adopt a screw rod slider mechanism.

[0016] Furthermore: A positioning boss is fixedly installed in the middle of the upper side of the workbench, the positioning boss is arranged horizontally, and the bottoms of the moving mechanism and the laser are both fixedly installed on the positioning boss through screws.

[0017] Furthermore: Lifting column feet and universal wheels are fixedly installed at the four ends of the bottom side of the frame, and the universal wheels are arranged corresponding to the inside of the lifting column feet one by one.

[0018] Compared with the prior art, the beneficial effects of the present utility model are as follows: The product to be processed is installed in the product fixture. The lithography position of the product can be adjusted by the moving mechanism, and the lithography angle of the product can be adjusted by rotating the DD motor. The laser can be aligned with the product for 3D profiling lithography. During lithography, the moving mechanism and the rotating DD motor are driven numerically, so that the product rotates and moves to a suitable position for lithography, thereby achieving the effect of 3D lithography.

[0019] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0021] Figure 1 is a schematic structural diagram of the present utility model;

[0022] Figure 2 is a schematic structural diagram of another perspective of the present utility model;

[0023] Figure 3 is a schematic structural diagram of the moving mechanism;

[0024] Figure 4 is a schematic structural diagram of another perspective of the moving mechanism.

[0025] As shown in the figure: 1, frame; 2, workbench; 3, moving mechanism; 31, Z-axis lifting module; 311, lifting block; 312, first photoelectric sensor; 313, first L-shaped block; 314, first U-shaped groove; 32, Y-axis translation module; 321, sliding table; 322, second photoelectric sensor; 323, second L-shaped block; 324, second U-shaped groove; 4, rotating DD motor; 5, product fixture; 6, laser; 7, positioning boss; 8, lifting column foot; 9, universal wheel. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] The following will clearly and completely describe the technical solutions of the present utility model with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments.

[0027] The components of the embodiments of the present utility model, which are usually described and shown in the accompanying drawings here, can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model claimed, but merely represents the selected embodiments of the present utility model.

[0028] All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the scope of protection of the present utility model.

[0029] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0030] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0031] As Figures 1-4 shown, a 3D profiling lithography device of the present utility model includes a frame 1, and a workbench 2 is fixedly installed on the frame 1; a moving mechanism 3 is fixedly installed at the left end on the upper side of the workbench 2, a rotary direct drive (DD) motor 4 is driven and connected to the moving mechanism 3, and a product fixture 5 is fixedly installed at the rotor of the rotary DD motor 4; a laser 6 is fixedly installed on the workbench 2, the laser 6 is arranged to the right of the translation mechanism, and the laser 6 is aligned with the product fixture 5 for profiling lithography.

[0032] The principle is as follows: The product to be processed is installed in the product fixture 5. The lithography position of the product can be adjusted by the moving mechanism 3, and the lithography angle of the product can be adjusted by the rotating DD motor 4. The laser 6 can be aligned with the product for 3D profiling lithography. During lithography, the moving mechanism 3 and the rotating DD motor 4 are driven numerically controlled, so that the product rotates and moves to a suitable position for lithography, thereby achieving the effect of 3D lithography. Compared with the traditional method of lithography on a plane, the present utility model can achieve 3D lithography and has a wider range of use.

[0033] Furthermore: The moving mechanism 3 includes a Z-axis lifting module 31 and a Y-axis translation module 32. The Z-axis lifting module 31 is fixedly installed on the workbench 2. The Z-axis lifting module 31 drives the Y-axis translation module 32 to lift and move, and the Y-axis translation module 32 drives the rotating DD motor 4 to move back and forth; height adjustment and front-back position adjustment can be achieved, and 3D stereolithography of the product can be realized in cooperation with the rotating DD motor 4 during the lithography process.

[0034] Furthermore: A lifting block 311 is driven and connected to the side of the Z-axis lifting module 31. The middle part of the Y-axis translation module 32 is fixedly installed on the lifting block 311. Two first photoelectric sensors 312 are fixedly installed on the side of the Z-axis lifting module 31. A first L-shaped block 313 is fixedly installed on the lifting block 311, and the first L-shaped block 313 is arranged between the two first photoelectric sensors 312; stable lifting and moving can be achieved. At the same time, when rising or falling to the limit position, the first photoelectric sensor 312 will sense the first L-shaped block 313, realizing real-time judgment of the height position and reducing errors.

[0035] Furthermore: A first U-shaped groove 314 is formed on the side of the first photoelectric sensor 312. The outer end of the first L-shaped block 313 is arranged in clearance fit through the first U-shaped groove 314; the first photoelectric sensor 312 can detect by the way that the first L-shaped block 313 passes through the first U-shaped groove 314, achieving the effect of accurately judging the real-time height and reducing errors.

[0036] Furthermore: A slide table 321 is driven and connected to the side of the Y-axis translation module 32. The rotating DD motor 4 is fixedly installed on the slide table 321. Two second photoelectric sensors 322 are fixedly installed on the side of the Y-axis translation module 32. A second L-shaped block 323 is fixedly installed on the slide table 321, and the second L-shaped block 323 is arranged between the two second photoelectric sensors 322; stable back-and-forth movement can be achieved. At the same time, when moving forward or backward to the limit position, the second photoelectric sensor 322 will sense the second L-shaped block 323, realizing real-time judgment of the front-back position and reducing errors.

[0037] Further: A second U-shaped groove 324 is formed on the side of the second photoelectric sensor 322, and the outer end of the second L-shaped block 323 is arranged to pass through the second U-shaped groove 324 with a clearance fit; the second photoelectric sensor 322 can be detected by the second L-shaped block 323 passing through the second U-shaped groove 324, achieving the effect of accurately judging the real-time front and rear positions and reducing errors.

[0038] Further: The Z-axis lifting module 31 and the Y-axis translation module 32 both adopt screw rod slider mechanisms respectively; the screw rod slider is used for driving, with high stability, thereby ensuring the lithography accuracy.

[0039] Further: A positioning boss 7 is fixedly installed in the middle of the upper side of the workbench 2. The positioning boss 7 is arranged horizontally, and the bottoms of the moving mechanism 3 and the laser 6 are both fixedly installed on the positioning boss 7 by screws; the installation positions of the moving mechanism 3 and the laser 6 can be adjusted by removing the screws, so as to be applicable to product jigs 5 of different specifications, facilitating 3D lithography processing of products of different specifications.

[0040] Further: Lifting column feet 8 and universal wheels 9 are fixedly installed at the four ends of the bottom side of the frame 1, and the universal wheels 9 are arranged corresponding to the inside of the lifting column feet 8 one by one; when in use and placement, the lifting column feet 8 are adjusted to a height lower than that of the universal wheels 9, thereby achieving stable placement on the ground. When it is necessary to move, the lifting column feet 8 are adjusted to a height higher than that of the universal wheels 9, so that the universal wheels 9 are in contact with the ground, facilitating the movement and handling of the entire frame 1.

[0041] This embodiment does not impose any formal restrictions on the shape, material, structure, etc. of the present invention. Any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention all fall within the protection scope of the technical solution of the present invention.

Claims

1. A 3D profiling lithography device, comprising a frame, on which a workbench is fixedly mounted; Features: A moving mechanism is fixedly installed on the left end of the upper side of the workbench, and a rotating DD motor is driven and connected to the moving mechanism, and a product fixture is fixedly installed on the rotor of the rotating DD motor; A laser is fixedly mounted on the workbench and arranged on the right side of the translation mechanism. The laser is aligned with the product jig for profiling photolithography.

2. A 3D profiling lithography apparatus according to claim 1, characterized in that: The moving mechanism includes a Z-axis lifting module and a Y-axis translation module. The Z-axis lifting module is fixedly installed on the workbench. The Z-axis lifting module drives the Y-axis translation module to move up and down, and the Y-axis translation module drives the rotating DD motor to move forward and backward.

3. A 3D profiling lithography apparatus according to claim 2, characterized in that: The side of the Z-axis lifting module is connected to a lifting block, the middle of the Y-axis translation module is fixedly installed on the lifting block, two first photoelectric sensors are fixedly installed on the side of the Z-axis lifting module, and a first L-shaped block is fixedly installed on the lifting block, and the first L-shaped block is arranged between the two first photoelectric sensors.

4. A 3D profiling lithography apparatus according to claim 3, characterized in that: A first U-shaped groove is formed on the side of the first photoelectric sensor, and the outer end of the first L-shaped block is arranged to pass through the first U-shaped groove with clearance fit.

5. The 3D profiling lithography apparatus according to claim 2, characterized in that: The side of the Y-axis translation module is connected to a slide, the rotary DD motor is fixedly installed on the slide, two second photoelectric sensors are fixedly installed on the side of the Y-axis translation module, a second L-shaped block is fixedly installed on the slide, and the second L-shaped block is arranged between the two second photoelectric sensors.

6. A 3D profiling lithography apparatus according to claim 5, characterized in that: A second U-shaped groove is formed on the side of the second photoelectric sensor, and the outer end of the second L-shaped block is arranged to pass through the second U-shaped groove with clearance fit.

7. The 3D profiling lithography apparatus according to claim 2, characterized in that: The Z-axis lifting module and the Y-axis translation module both adopt screw slider mechanisms.

8. A 3D profiling lithography apparatus according to any one of claims 1 to 7, characterized in that: A positioning boss is fixedly installed in the middle of the upper side of the workbench. The positioning boss is arranged horizontally, and the bottom ends of the moving mechanism and the laser are fixedly installed on the positioning boss by screws.

9. The 3D profiling lithography apparatus according to claim 1, characterized in that: The four ends of the bottom side of the frame are fixedly mounted with lifting column feet and universal wheels, and the universal wheels are arranged on the inner side of the lifting column feet in a one-to-one correspondence.

Images