Automatic limiting mechanism for photoetching machine

Abstract

The utility model discloses an automatic limiting mechanism for a photoetching machine, and relates to the technical field of photoetching machines, the automatic limiting mechanism for the photoetching machine comprises a pair of vertical plates, automatic limiting assemblies are arranged on the sides, far away from each other, of the two vertical plates, and a transmission assembly is connected between the two automatic limiting assemblies; the utility model discloses an automatic limiting mechanism for a photoetching machine, which is characterized in that a second mounting hole and a clamping groove are arranged, so that a motor can be fixedly mounted, the motor can drive an automatic limiting assembly through a transmission assembly, and an objective table in the photoetching machine is fixedly mounted on a mounting seat in the automatic limiting assembly; therefore, the objective table can move up and down circularly, the objective table cannot be damaged due to excessive movement, meanwhile, the mounted motor is stored between the front vertical plate and the rear vertical plate, a storage effect is achieved, excessive space in the photoetching machine cannot be occupied, and the practicability is high.

Description

Technical Field

[0001] The utility model relates to the technical field of lithography machines, and specifically relates to an automatic limit mechanism for a lithography machine. Background Technique

[0002] A lithography machine is the core equipment for manufacturing chips. Its working principle is similar to photo printing. Through a series of complex optical systems and precise mechanical controls, the chip design pattern is projected onto a silicon wafer coated with photoresist, thereby forming a tiny circuit diagram on the silicon wafer.

[0003] The stage is a component inside the lithography machine. Its function is to carry and move the silicon wafer or other substrates to be lithographed to ensure that the pattern can be accurately projected onto the substrate during the lithography process. The stage of the lithography machine needs to move up and down to adjust its relative position with other components of the lithography machine (such as the mask holder) to ensure that the silicon wafer is in close contact with the mask during the exposure process. Although the lifting mechanism has the function of lifting, it does not have a good automatic limiting effect and cannot prevent the stage from being damaged due to excessive movement. Content of the Utility Model

[0004] The utility model provides an automatic limit mechanism for a lithography machine, which has the advantage of preventing the stage from moving excessively, so as to solve the problems raised in the background technique.

[0005] To solve the defect that the stage in the existing lithography machine does not have automatic limiting, the utility model provides the following technical solution: an automatic limit mechanism for a lithography machine, including a pair of vertical plates. Automatic limit components are arranged on the sides of the two vertical plates away from each other, and a transmission component is connected between the two automatic limit components;

[0006] The automatic limit component includes a frame-shaped lifting seat that is slidably connected to the vertical plate up and down. An installation seat is integrally connected to the top surface of the frame-shaped lifting seat. A toothed member is arranged inside the frame-shaped lifting seat and is horizontally slidably connected to it. A spur gear is rotatably connected to the sides of the two vertical plates away from each other. The spur gear is meshed and connected with the toothed member. A limiting member is fixedly connected to one side of the toothed member. Long strips matching the limiting member are welded to the sides of the two vertical plates away from each other.

[0007] As a preferred technical solution of the utility model, the limiting member is horizontally slidably connected to the frame-shaped lifting seat, and the limiting member always fits on the long strip.

[0008] As a preferred technical solution of the utility model, four reinforcing rods are welded between the front and rear vertical plates, and two mounting plates are integrally connected to the top surface of the vertical plates.

[0009] As a preferred technical solution of the present utility model, the transmission assembly includes a transmission shaft, a first bevel gear is welded on the transmission shaft, a second bevel gear is meshed and connected to one side of the first bevel gear, a connecting plate is welded between the two vertical plates, a rotating piece is rotatably connected to one side of the connecting plate, and a connecting shaft is fixedly connected between the rotating piece and the second bevel gear.

[0010] As a preferred technical solution of the present utility model, the front and rear ends of the transmission shaft are respectively fixedly connected to the two spur gears, and four first mounting holes are circumferentially distributed on the side wall of the rotating piece.

[0011] As a preferred technical solution of the present utility model, two second mounting holes are provided on one side of the vertical plate, and a clamping groove is provided on one side of the vertical plate.

[0012] Compared with the prior art, the present utility model provides an automatic limit mechanism for a lithography machine, which has the following beneficial effects: the provided second mounting holes and clamping grooves can realize the fixed installation of the motor, and the motor can drive the automatic limit assembly through the transmission assembly, while the stage in the lithography machine is fixedly installed on the mounting seat in the automatic limit assembly, so that the cyclic up and down movement of the stage can be realized, and the stage will not be damaged due to excessive movement. At the same time, the installed motor is received between the front and rear vertical plates, playing a role of receiving and not occupying too much space inside the lithography machine, and has strong practicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a perspective view of the present utility model;

[0014] Figure 2 is a side view of the present utility model;

[0015] Figure 3 is a top view of the present utility model;

[0016] Figure 4 is a front view of the present utility model.

[0017] In the figure:

[0018] 10. Vertical plate; 20. Automatic limit assembly; 21. Frame-shaped lifting seat; 22. Mounting seat; 23. Tooth part; 24. Spur gear; 25. Limiting part; 26. Long strip; 30. Transmission assembly; 31. Transmission shaft; 32. First bevel gear; 33. Second bevel gear; 34. Connecting plate; 35. Rotating piece; 36. Connecting shaft; 40. Reinforcing rod; 50. Mounting piece; 60. Second mounting hole; 70. Clamping groove. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0020] Please refer to Figures 1 - 4 , the present utility model discloses an automatic limit mechanism for a lithography machine, including a pair of vertical plates 10. Automatic limit components 20 are provided on the sides of the two vertical plates 10 away from each other, and a transmission component 30 is connected between the two automatic limit components 20;

[0021] The automatic limit component 20 includes a frame-shaped lifting seat 21 that is slidably connected to the vertical plate 10 up and down. A mounting seat 22 is integrally connected to the top surface of the frame-shaped lifting seat 21. A toothed member 23 is provided inside the frame-shaped lifting seat 21 and is horizontally slidably connected thereto. A spur gear 24 is rotatably connected to the sides of the two vertical plates 10 away from each other. The spur gear 24 is meshed with the toothed member 23. A limiting member 25 is fixedly connected to one side of the toothed member 23. Long strips 26 that match the limiting member 25 are welded to the sides of the two vertical plates 10 away from each other.

[0022] The spur gear 24 is meshed with the inner wall of the toothed member 23 in a circulating manner. At the same time, the limiting member 25 also moves in a circulating manner in contact with the long strip 26. For example, when the spur gear 24 rotates forward, if the spur gear 24 is meshed with one side inner wall of the toothed member 23 (close to the long strip 26), at this time the limiting member 25 is in contact with one side of the long strip 26, and the upward movement of the stage can be realized. If the spur gear 24 is meshed with the other side inner wall of the toothed member 23 (far from the long strip 26), at this time the limiting member 25 is in contact with the other side of the long strip 26, and the downward movement of the stage can be realized. The circulating up and down movement can be realized, so as to have the function of automatic limiting, and the stage will not be damaged due to excessive movement.

[0023] Specifically, the limiting member 25 is horizontally slidably connected to the frame-shaped lifting seat 21, and the limiting member 25 is always in contact with the long strip 26.

[0024] In this embodiment, the connection relationship between the limiting member 25 and the frame-shaped lifting seat 21 is disclosed, and the cooperation relationship between the limiting member 25 and the long strip 26 is also disclosed.

[0025] Specifically, four reinforcing rods 40 are welded between the front and rear vertical plates 10, and two mounting plates 50 are integrally connected to the top surface of the vertical plates 10.

[0026] In this embodiment, the reinforcing rods 40 can firmly connect two adjacent vertical plates 10 together. The setting of the mounting plates 50 facilitates the fixed installation of the vertical plates 10, and further facilitates the fixed installation of the entire automatic limit mechanism.

[0027] Specifically, the transmission assembly 30 includes a transmission shaft 31. A first bevel gear 32 is welded on the transmission shaft 31. A second bevel gear 33 is meshed and connected to one side of the first bevel gear 32. A connecting plate 34 is welded between the two vertical plates 10. A rotating piece 35 is rotatably connected to one side of the connecting plate 34. A connecting shaft 36 is fixedly connected between the rotating piece 35 and the second bevel gear 33. The front and rear ends of the transmission shaft 31 are respectively fixedly connected to the two spur gears 24. Four first mounting holes are circumferentially distributed on the side wall of the rotating piece 35.

[0028] In this embodiment, the output end of the motor can be fixedly installed on the rotating piece 35 through the first mounting hole. When the motor is started, the rotating piece 35 rotates. The rotating piece 35 drives the connecting shaft 36 to rotate. The connecting shaft 36 drives the second bevel gear 33 to rotate. The second bevel gear 33 drives the first bevel gear 32 to rotate. The second bevel gear 33 drives the transmission shaft 31 to rotate. The transmission shaft 31 drives the two spur gears 24 to rotate in the same direction, playing a role of transmission.

[0029] Specifically, two second mounting holes 60 are opened on one side of the vertical plate 10, and a clamping groove 70 is opened on one side of the vertical plate 10.

[0030] In this embodiment, the clamping groove 70 can position and clamp the base on the motor, realizing the positioning of the motor, facilitating the subsequent bolted fixed connection with the second mounting hole 60. The second mounting hole 60 can realize the fixed connection of the motor, and the installed motor is stored between the two vertical plates 10 without occupying extra space.

[0031] The working principle and usage process of the present utility model: When the motor is started, under the action of the transmission assembly 30, the two spur gears 24 can be driven to rotate at the same speed and in the same direction simultaneously. The spur gears 24 are meshed and connected with the tooth member 23, and the tooth member 23 horizontally slides transversely with the frame-shaped lifting seat 21. The frame-shaped lifting seat 21 is slidably connected with the vertical plate 10 up and down. Therefore, the frame-shaped lifting seat 21 can be driven to move up or down, and the frame-shaped lifting seat 21 will not always move up or always move down. It automatically moves back when reaching the set height, thus having the function of cyclic up and down movement, and the stage in the lithography machine will not be damaged due to excessive movement and collision.

[0032] It should be noted that in this article, terms such as "including", "comprising" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without more limitations, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0033] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. An automatic limit mechanism for a photolithography machine, characterized in that: It comprises a pair of vertical plates (10), wherein the two vertical plates (10) are each provided with an automatic limit assembly (20) on one side away from each other, and a transmission assembly (30) is connected between the two automatic limit assemblies (20); The automatic limit assembly (20) comprises a frame-shaped lifting seat (21) connected to the vertical plate (10) in an upward and downward sliding manner, the top surface of the frame-shaped lifting seat (21) is integrally connected with a mounting seat (22), a toothed member (23) connected to the frame-shaped lifting seat (21) in a horizontal and horizontal sliding manner is arranged inside the frame-shaped lifting seat (21), a spur gear (24) is rotatably connected to the side of the two vertical plates (10) away from each other, the spur gear (24) is meshingly connected to the toothed member (23), one side of the toothed member (23) is fixedly connected to a limit member (25), and a long strip (26) matching the limit member (25) is welded to the side of the two vertical plates (10) away from each other.

2. The automatic limit mechanism for a photolithography machine according to claim 1, characterized in that: The limiting member (25) is connected to the frame-shaped lifting seat (21) in a transverse and horizontal sliding manner, and the limiting member (25) is always attached to the long strip (26).

3. The automatic limit mechanism for a photolithography machine according to claim 1, characterized in that: Four reinforcement rods (40) are welded between the front and rear vertical plates (10), and the top surface of the vertical plate (10) is integrally connected with two mounting plates (50).

4. The automatic limit mechanism for a photolithography machine according to claim 1, characterized in that: The transmission assembly (30) comprises a transmission shaft (31), a first bevel gear (32) is welded to the transmission shaft (31), one side of the first bevel gear (32) is meshingly connected to a second bevel gear (33), a connecting plate (34) is welded between the two vertical plates (10), one side of the connecting plate (34) is rotatably connected to a rotating plate (35), and a connecting shaft (36) is fixedly connected between the rotating plate (35) and the second bevel gear (33).

5. The automatic limit mechanism for a photolithography machine according to claim 4, characterized in that: The front and rear ends of the transmission shaft (31) are respectively fixedly connected to the two spur gears (24), and the side wall of the rotating plate (35) is provided with four circumferentially distributed first mounting holes.

6. The automatic limit mechanism for a photolithography machine according to claim 1, characterized in that: Two second mounting holes (60) are provided on one side of the vertical plate (10), and a clamping slot (70) is provided on one side of the vertical plate (10).

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