Efficient adjustable air cooling mechanism of aluminum wire annealing furnace

Abstract

The utility model belongs to the technical field of air cooling, and particularly relates to an efficient adjustable air cooling mechanism of an aluminum wire annealing furnace, which comprises an annealing furnace body, an unwinding machine is arranged on the left side of the annealing furnace body, a winding machine is arranged on the right side of the annealing furnace body, and an aluminum wire is arranged between the unwinding machine and the winding machine. A preheating cavity is arranged in an inner cavity of the left side of the annealing furnace body, a heating cavity is arranged in an inner cavity of the middle of the annealing furnace body, a cooling cavity is arranged in an inner cavity of the right side of the annealing furnace body, the aluminum wire penetrates through the preheating cavity, the heating cavity and the cooling cavity, and a connecting pipe is arranged between the preheating cavity and the cooling cavity. According to the utility model, the heat taken away by the air cooling assembly is conveyed to the preheating cavity to preheat the aluminum wire, so that the heat on the aluminum wire can be utilized to avoid heat waste to a certain extent, in addition, the heating time of the aluminum wire can be shortened to a certain extent, and the efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of air cooling, in particular to a high-efficiency and adjustable air cooling mechanism for an aluminum wire annealing furnace. Background Art

[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. Thermal treatments are designed for different effects. Wafers can be heated to activate dopants, convert thin films to thin films or to the wafer substrate interface, densely deposit thin films, change the state of growing thin films, repair implanted damage, move dopants or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] At present, during the processing of aluminum wire, it is generally annealed, and after annealing, it needs to be cooled, but the existing cooling mechanism generally discharges the heat directly during the cooling process, and the heat cannot be utilized, which has limitations. Therefore, an efficient and adjustable air cooling mechanism for an aluminum wire annealing furnace is invented. Utility Model Content

[0004] In view of the above and / or existing problems in a high-efficiency adjustable air cooling mechanism of an existing aluminum wire annealing furnace, the present utility model is proposed.

[0005] Therefore, the purpose of the utility model is to provide an efficient and adjustable air cooling mechanism for an aluminum wire annealing furnace, which can solve the above-mentioned existing problems.

[0006] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0007] A highly efficient and adjustable air cooling mechanism for an aluminum wire annealing furnace comprises an annealing furnace body, an unwinder is provided on the left side of the annealing furnace body, a rewinder is provided on the right side of the annealing furnace body, and aluminum wire is provided between the unwinder and the rewinder, the left inner cavity of the annealing furnace body is set as a preheating cavity, the middle inner cavity of the annealing furnace body is set as a heating cavity, the right inner cavity of the annealing furnace body is set as a cooling cavity, the aluminum wire passes through the preheating cavity, the heating cavity and the cooling cavity, a connecting pipe is provided between the preheating cavity and the cooling cavity, and an air cooling component capable of transferring heat to the connecting pipe is provided in the cooling cavity.

[0008] As a preferred solution of the high-efficiency and adjustable air cooling mechanism of the aluminum wire annealing furnace described in the utility model, a circulation groove is provided on the annealing furnace body located directly above the preheating chamber, and one end of the connecting pipe is arranged in the circulation groove, and a plurality of through holes are provided on the annealing furnace body located between the circulation groove and the preheating chamber, and the through holes are connected with the circulation groove and the preheating chamber.

[0009] As a preferred solution of the efficient and adjustable air cooling mechanism of the aluminum wire annealing furnace described in the utility model, a first hollow tube is fixedly installed on the annealing furnace body located on the side of the preheating chamber, and a one-way valve is fixedly installed on one end of the first hollow tube.

[0010] As a preferred solution of the high-efficiency adjustable air cooling mechanism of the aluminum wire annealing furnace described in the utility model, an electric heating tube is fixedly installed in the heating chamber to heat the aluminum wire located in the heating chamber.

[0011] As a preferred solution of the high-efficiency adjustable air cooling mechanism of the aluminum wire annealing furnace described in the utility model, the air cooling component includes:

[0012] Second hollow tubes, a plurality of second hollow tubes are fixedly installed on the annealing furnace body at the top of the cooling chamber;

[0013] A third hollow tube is fixedly installed on the annealing furnace body located on the side of the cooling chamber, and a connecting tube is fixedly installed in the inner cavity of the third hollow tube;

[0014] A fan is fixedly installed in the second hollow tube.

[0015] As a preferred solution of the high-efficiency adjustable air cooling mechanism of the aluminum wire annealing furnace described in the utility model, wherein: a filter component is provided at the top end of the second hollow tube to filter impurities in the air.

[0016] As a preferred solution of the high-efficiency adjustable air cooling mechanism of the aluminum wire annealing furnace described in the utility model, the filter assembly includes:

[0017] A hollow circular plate, wherein the hollow circular plate is in contact with the second hollow tube;

[0018] A fourth hollow tube, wherein the fourth hollow tube is fixedly mounted on the bottom of the hollow circular plate and is threadedly connected to the top of the second hollow tube;

[0019] A filter screen is fixedly installed in the hollow circular plate.

[0020] Compared with existing technologies:

[0021] The aluminum wire is preheated by transferring the heat taken away by the air cooling component to the preheating chamber, so that the heat on the aluminum wire can be utilized to avoid heat waste to a certain extent. In addition, the heating time of the aluminum wire can be reduced to a certain extent, thereby improving efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a front view schematic diagram of the structure of the utility model;

[0023] Figure 2 For the present utility model Figure 1 Schematic enlarged view of the structure at position A in the present utility model;

[0024] Figure 3 Schematic diagram of the structure of the annealing furnace body of the present utility model;

[0025] Figure 4 Front view schematic diagram of the filter assembly of the present utility model.

[0026] In the figure: annealing furnace body 10, unwinder 11, rewinder 12, aluminum wire 13, preheating chamber 20, flow channel 21, through hole 22, first hollow tube 23, one-way valve 24, heating chamber 30, electric heating tube 31, cooling chamber 40, second hollow tube 41, third hollow tube 42, connecting pipe 43, fan 44, hollow circular plate 50, fourth hollow tube 51, filter screen 52. Specific embodiments

[0027] To make the purpose, technical solutions and advantages of the present utility model clearer, the following will further describe the embodiments of the present utility model in detail with reference to the accompanying drawings.

[0028] The present utility model provides an efficiently adjustable air-cooling mechanism for an aluminum wire annealing furnace. Please refer to Figures 1-4 , which includes an annealing furnace body 10. An unwinder 11 is provided on the left side of the annealing furnace body 10, a rewinder 12 is provided on the right side of the annealing furnace body 10, and an aluminum wire 13 is provided between the unwinder 11 and the rewinder 12. The left inner cavity of the annealing furnace body 10 is set as a preheating chamber 20, the middle inner cavity of the annealing furnace body 10 is set as a heating chamber 30, and the right inner cavity of the annealing furnace body 10 is set as a cooling chamber 40. The aluminum wire 13 passes through the preheating chamber 20, the heating chamber 30, and the cooling chamber 40. A connecting pipe 43 is provided between the preheating chamber 20 and the cooling chamber 40, and an air-cooling assembly capable of delivering heat to the connecting pipe 43 is provided in the cooling chamber 40. Among them, a sealing ring can be provided at the connection between the aluminum wire 13 and the annealing furnace body 10 according to requirements.

[0029] A flow channel 21 is opened on the annealing furnace body 10 directly above the preheating chamber 20, and one end of the connecting pipe 43 is provided in the flow channel 21. A plurality of through holes 22 are opened on the annealing furnace body 10 between the flow channel 21 and the preheating chamber 20, and the through holes 22 are communicated with the flow channel 21 and the preheating chamber 20. A first hollow tube 23 is fixedly installed on the annealing furnace body 10 on the side of the preheating chamber 20, and a one-way valve 24 is fixedly installed at one end of the first hollow tube 23.

[0030] An electric heating tube 31 is fixedly installed in the heating chamber 30 to be able to heat the aluminum wire 13 located in the heating chamber 30.

[0031] The air-cooling assembly includes: a second hollow tube 41, a third hollow tube 42, a connecting tube 43, and a blower 44;

[0032] A number of second hollow tubes 41 are fixedly installed on the annealing furnace body 10 at the top of the cooling chamber 40, a third hollow tube 42 is fixedly installed on the annealing furnace body 10 at the side of the cooling chamber 40, and a connecting tube 43 is fixedly installed in the inner cavity of the third hollow tube 42. The blower 44 is fixedly installed in the second hollow tube 41.

[0033] A filtering assembly is provided at the top of the second hollow tube 41 to filter impurities in the air;

[0034] The filtering assembly includes: a hollow circular plate 50, a fourth hollow tube 51, and a filter net 52;

[0035] The hollow circular plate 50 is in contact with the second hollow tube 41. The fourth hollow tube 51 is fixedly installed on the bottom of the hollow circular plate 50 and is threadedly connected to the top of the second hollow tube 41. The filter net 52 is fixedly installed in the hollow circular plate 50. When installing the filtering assembly, only need to threadedly connect the fourth hollow tube 51 to the top of the second hollow tube 41. In addition, a sealing ring can be provided between the hollow circular plate 50 and the fourth hollow tube 51 according to requirements.

[0036] When in specific use, the specific steps are as follows:

[0037] Step 1: Release the aluminum wire 13 through the unwinder 11 and wind the aluminum wire 13 through the winder 12 so that the aluminum wire 13 can move in the preheating chamber 20, the heating chamber 30, and the cooling chamber 40;

[0038] Step 2: When the aluminum wire 13 is in the heating chamber 30, the aluminum wire 13 can be heated through the electric heating tube 31;

[0039] Step 3: When the aluminum wire 13 is in the cooling chamber 40, the blower 44 can be used to make air flow through the filter net 52 and the second hollow tube 41 to the aluminum wire 13 in the cooling chamber 40 to cool the aluminum wire 13. At this time, the heat in the aluminum wire 13 will follow the air through the third hollow tube 42, the connecting tube 43, the flow channel 21, and the through hole 22 and flow into the preheating chamber 20 to preheat the aluminum wire 13 in the preheating chamber 20. Among them, during the cooling process, the blower 44 can be correspondingly started to correspondingly adjust the air-cooling effect of the air-cooling assembly according to the heat on the aluminum wire 13. In addition, the air flowing into the preheating chamber 20 will flow out through the first hollow tube 23 and the one-way valve 24.

[0040] Although the present utility model has been described above with reference to the embodiments, various improvements can be made to it and components therein can be replaced with equivalents without departing from the scope of the present utility model. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed by the present utility model can be combined with each other in any way. The exhaustive description of these combinations is not given in this specification only for the sake of saving space and resources. Therefore, the present utility model is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An efficient and adjustable air cooling mechanism for an aluminum wire annealing furnace, comprising an annealing furnace body (10), an unwinding machine (11) being arranged on the left side of the annealing furnace body (10), a winding machine (12) being arranged on the right side of the annealing furnace body (10), and an aluminum wire (13) being arranged between the unwinding machine (11) and the winding machine (12), characterized in that: The left inner cavity of the annealing furnace body (10) is set as a preheating cavity (20), the middle inner cavity of the annealing furnace body (10) is set as a heating cavity (30), and the right inner cavity of the annealing furnace body (10) is set as a cooling cavity (40). The aluminum wire (13) runs through the preheating cavity (20), the heating cavity (30) and the cooling cavity (40). A connecting pipe (43) is provided between the preheating cavity (20) and the cooling cavity (40), and an air cooling component capable of transferring heat to the connecting pipe (43) is provided in the cooling cavity (40).

2. The highly efficient and adjustable air cooling mechanism of an aluminum wire annealing furnace according to claim 1, characterized in that: A circulation groove (21) is provided on the annealing furnace body (10) located directly above the preheating chamber (20), and one end of the connecting pipe (43) is arranged in the circulation groove (21). A plurality of through holes (22) are provided on the annealing furnace body (10) located between the circulation groove (21) and the preheating chamber (20), and the through holes (22) are connected to the circulation groove (21) and the preheating chamber (20).

3. The highly efficient and adjustable air cooling mechanism of the aluminum wire annealing furnace according to claim 2 is characterized in that: A first hollow tube (23) is fixedly mounted on the annealing furnace body (10) located on the side of the preheating chamber (20), and a one-way valve (24) is fixedly mounted on one end of the first hollow tube (23).

4. The highly efficient and adjustable air cooling mechanism of an aluminum wire annealing furnace according to claim 1, characterized in that: An electric heating tube (31) is fixedly installed in the heating chamber (30) so as to heat the aluminum wire (13) located in the heating chamber (30).

5. The highly efficient and adjustable air cooling mechanism of the aluminum wire annealing furnace according to claim 1 is characterized in that: The air cooling component comprises: Second hollow tubes (41), a plurality of second hollow tubes (41) are fixedly installed on the annealing furnace body (10) located at the top end of the cooling chamber (40); A third hollow tube (42), the third hollow tube (42) is fixedly installed on the annealing furnace body (10) located on the side of the cooling chamber (40), and a connecting tube (43) is fixedly installed in the inner cavity of the third hollow tube (42); A fan (44), wherein the fan (44) is fixedly installed in the second hollow tube (41).

6. The highly efficient and adjustable air cooling mechanism of the aluminum wire annealing furnace according to claim 5, characterized in that: A filter assembly is provided at the top end of the second hollow tube (41) so as to filter impurities in the air.

7. The highly efficient and adjustable air cooling mechanism of the aluminum wire annealing furnace according to claim 6, characterized in that: The filter assembly comprises: A hollow circular plate (50), wherein the hollow circular plate (50) is in contact with the second hollow tube (41); A fourth hollow tube (51), wherein the fourth hollow tube (51) is fixedly mounted on the bottom of the hollow circular plate (50), and the fourth hollow tube (51) is threadedly connected to the top end of the second hollow tube (41); A filter screen (52) is fixedly installed in the hollow circular plate (50).

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