Chemical source cabinet

Abstract

The utility model belongs to the technical field of thin film preparation, and discloses a chemical source cabinet. The chemical source cabinet comprises an outer cabinet, a first sealing piece, an inner cabinet, a second sealing piece, an air draft mechanism and a heating piece, the outer cabinet comprises an outer cabinet body and an outer cabinet door, and the outer cabinet body is provided with a first containing cavity; the outer cabinet door is arranged on the outer cabinet body in an openable manner; the first sealing element is arranged between the outer cabinet body and the outer cabinet door; the inner cabinet is arranged in the first containing cavity and comprises an inner cabinet body and an inner cabinet door, and the inner cabinet body is provided with a second containing cavity used for containing the source bottle; the inner cabinet door is arranged in the inner cabinet body in an openable and closable manner; the second sealing element is arranged between the inner cabinet body and the inner cabinet door; the air draft mechanism is arranged on the outer cabinet body, and the heating piece is arranged in the second containing cavity. According to the chemical source cabinet, the air draft mechanism is separated from the source bottle, so that the difference value between the actual temperature of the source bottle and the required set temperature is small, and the influence on the coating effect can be reduced. In addition, the sealing performance is good.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film preparation, in particular to a chemical source cabinet. Background Art

[0002] Atomic layer deposition is a technology for self-limiting thin film deposition growth by alternately introducing gaseous reactants into a cavity and performing alternating surface saturation reactions. Atomic layer deposition has the advantages of high bonding strength, good film layer uniformity, good composition uniformity, etc., and has now been widely applied to many fields such as semiconductor thin films and optical thin films.

[0003] The gaseous reactants, i.e., chemical sources, are generally stored in source bottles, and the source bottles can be stored through a chemical source cabinet. Before the chemical source enters the reaction chamber of the atomic layer deposition device, it must be heated to a set supply temperature. Therefore, the source bottle also needs to be heated through the chemical source cabinet. The existing chemical source cabinet includes a cabinet body and a heating component. The source bottle is arranged in the cabinet body, and the source bottle can be heated through the heating component. In addition, since the chemical source may be a gas harmful to the human body, in order to prevent the chemical source from overflowing outside the cabinet body and causing danger, the chemical source cabinet also includes an exhaust component for exhausting the inner cavity of the cabinet body. However, the presence of the exhaust component will reduce the temperature of the source bottle, resulting in a large difference between the actual temperature of the source bottle and the required set temperature, which may affect the coating effect. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a chemical source cabinet, so that the difference between the actual temperature of the source bottle and the required set temperature is small, and the influence on the coating effect can be reduced.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A chemical source cabinet, comprising:

[0007] An outer cabinet, including an outer cabinet body and an outer cabinet door. The outer cabinet body is provided with a first accommodation cavity, and the outer cabinet door is movably arranged on the outer cabinet body;

[0008] A first sealing member, arranged between the outer cabinet body and the outer cabinet door;

[0009] An inner cabinet, arranged in the first accommodation cavity. The inner cabinet includes an inner cabinet body and an inner cabinet door. The inner cabinet body is provided with a second accommodation cavity for accommodating the source bottle; the inner cabinet door is movably arranged on the inner cabinet body;

[0010] A second sealing member, arranged between the inner cabinet body and the inner cabinet door;

[0011] An exhaust mechanism, arranged on the outer cabinet body for extracting the gas in the first accommodation cavity;

[0012] The heating element is disposed in the second accommodation cavity and is configured to heat the source bottle.

[0013] In some possible embodiments, the chemical source cabinet further includes a sliding guide rail assembly and a placement member. The sliding guide rail assembly is disposed in the inner cabinet and is located in the second accommodation cavity. The placement member is fixed on the sliding guide rail assembly and is used for placing the source bottle. The sliding guide rail assembly can enable the placement member to slide in a first direction and sequentially pass through the opening of the inner cabinet and the opening of the outer cabinet.

[0014] In some possible embodiments, the heating element is fixedly connected to the inner cabinet, and the heating element surrounds and fits against the source bottle.

[0015] In some possible embodiments, the first sealing member is disposed on the outer cabinet door. When the outer cabinet door is closed with the outer cabinet, the first sealing member fits against the outer wall of the outer cabinet door; and / or,

[0016] The second sealing member is disposed on the inner cabinet door. When the inner cabinet door is closed with the inner cabinet, the second sealing member fits against the outer wall of the inner cabinet door.

[0017] In some possible embodiments, the chemical source cabinet further includes a heat preservation component, and the heat preservation component covers the wall of the second accommodation cavity.

[0018] In some possible embodiments, the heat preservation component includes a first heat preservation member and a second heat preservation member. The first heat preservation member is heat-insulating cotton, and the second heat preservation member is a heat-reflecting plate. The first heat preservation member is disposed between the second heat preservation member and the wall of the second accommodation cavity, and the second heat preservation member can press the first heat preservation member against the wall of the second accommodation cavity.

[0019] In some possible embodiments, the heat preservation component covers the side wall of the inner cabinet door close to the second accommodation cavity.

[0020] In some possible embodiments, the chemical source cabinet further includes a smoke detector. The smoke detector is disposed in the outer cabinet, and the detection head of the smoke detector is located in the first accommodation cavity.

[0021] In some possible embodiments, the chemical source cabinet further includes a tail gas detector. The tail gas detector is disposed in the outer cabinet, and the detection head of the tail gas detector is located in the first accommodation cavity and is used for detecting whether the chemical source in the source bottle leaks into the first accommodation cavity.

[0022] In some possible embodiments, the chemical source cabinet further includes a first safety lock and a second safety lock. The first safety lock is disposed on the outer cabinet door, and the second safety lock is disposed on the inner cabinet door; and / or,

[0023] The outer cabinet door is provided with an outer observation window for observing the internal situation of the first accommodation cavity; the inner cabinet door is provided with an inner observation window for observing the internal situation of the second accommodation cavity.

[0024] Advantages of the present utility model:

[0025] The chemical source cabinet provided by the present utility model includes an outer cabinet, a first seal, an inner cabinet, a second seal, an air extraction mechanism, and a heating element. By arranging the inner cabinet in the first accommodation cavity of the outer cabinet, arranging the air extraction mechanism on the outer cabinet body to extract the gas in the first accommodation cavity, and arranging the heating element and the source bottle in the second accommodation cavity of the inner cabinet to separate the air extraction mechanism from the source bottle, the influence of the air extraction mechanism on the temperature of the source bottle is reduced, so that the difference between the actual temperature of the source bottle and the required set temperature is small, and the influence on the coating effect can be reduced. By providing the first seal and the second seal, the chemical source cabinet has good sealing performance and improved safety during use. In addition, by providing the second seal, the influence of the air extraction mechanism on the temperature of the source bottle can be further reduced. Description of the Drawings

[0026] Figure 1 is the front view of the chemical source cabinet (the outer cabinet door and the inner cabinet door are in the unopened state) provided by the present utility model;

[0027] Figure 2 is the left view of the chemical source cabinet (the outer cabinet door and the inner cabinet door are in the opened state) provided by the present utility model;

[0028] Figure 3 is Figure 2 the enlarged view of part A in

[0029] In the figure:

[0030] 1. Outer cabinet; 11. Outer cabinet body; 12. Outer cabinet door; 13. First safety lock; 14. Outer observation window;

[0031] 2. Inner cabinet; 21. Inner cabinet body; 22. Inner cabinet door; 23. Second safety lock; 24. Inner observation window;

[0032] 3. Air extraction mechanism; 4. Sliding guide rail assembly; 41. Outer guide rail; 42. Middle guide rail; 43. Inner guide rail; 44. Ball; 5. Placing member; 6. Heat preservation assembly; 7. Smoke detector; 8. Tail gas detector; 9. Differential pressure gauge. Detailed Embodiments

[0033] The following further describes the present utility model in detail with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. Additionally, it should be noted that for the convenience of description, only parts related to the present utility model rather than all structures are shown in the drawings.

[0034] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0035] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature can include the direct contact between the first and second features, or can also include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above and to the right of", and "on the upper surface of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below and to the left of", and "on the lower surface of" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0036] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0037] Such as Figures 1 to 3As shown in the figure, the present utility model provides a chemical source cabinet, which can be applied to the field of atomic layer deposition coating. The chemical source cabinet includes an outer cabinet 1, a first seal, an inner cabinet 2, a second seal, an air extraction mechanism 3 and a heating element. The outer cabinet 1 includes an outer cabinet body 11 and an outer cabinet door 12. The outer cabinet body 11 is provided with a first accommodation cavity. The outer cabinet door 12 is movably provided on the outer cabinet body 11. The first seal is provided between the outer cabinet body 11 and the outer cabinet door 12. In order to facilitate the opening of the outer cabinet door 12, in this embodiment, the outer cabinet door 12 is rotatably connected to the outer cabinet body 11. In other embodiments, the outer cabinet door 12 can be detachably connected to the outer cabinet body 11. The inner cabinet 2 is arranged in the first accommodation cavity. The inner cabinet 2 includes an inner cabinet body 21 and an inner cabinet door 22. The inner cabinet body 21 is provided with a second accommodation cavity for accommodating the source bottle. The inner cabinet door 22 is movably provided on the inner cabinet body 21. The second seal is provided between the inner cabinet body 21 and the inner cabinet door 22. In order to facilitate the opening of the outer cabinet door 12, in this embodiment, the inner cabinet door 22 is rotatably connected to the inner cabinet body 21. In other embodiments, the inner cabinet door 22 can be detachably connected to the inner cabinet body 21. The air extraction mechanism 3 is arranged on the outer cabinet body 11 for extracting the gas in the first accommodation cavity. The gas in the first chamber is extracted to the gas purification treatment cabinet by the air extraction mechanism 3. While ensuring negative pressure in the cabinet, it is convenient to discharge the possibly leaked chemical source to the gas purification treatment cabinet. The heating element is arranged in the second accommodation cavity for heating the source bottle. By arranging the inner cabinet 2 in the first accommodation cavity of the outer cabinet 1, arranging the air extraction mechanism 3 on the outer cabinet body 11 to extract the gas in the first accommodation cavity, and arranging the heating element and the source bottle in the second accommodation cavity of the inner cabinet 2, the air extraction mechanism 3 is separated from the source bottle, reducing the influence of the air extraction mechanism 3 on the temperature of the source bottle, making the difference between the actual temperature and the required set temperature of the source bottle smaller, and further reducing the influence on the coating effect. By arranging the first seal and the second seal, the sealing performance of the chemical source cabinet is good, and the safety during use is improved. In addition, by arranging the second seal, the influence of the air extraction mechanism 3 on the temperature of the source bottle can be further reduced.

[0038] Optionally, in this embodiment, the chemical source cabinet further includes a sliding guide rail assembly 4 and a placement member 5. The sliding guide rail assembly 4 is disposed in the inner cabinet 21 and located in the second accommodation cavity. The placement member 5 is fixed on the sliding guide rail assembly 4 for placing the source bottle. The sliding guide rail assembly 4 can make the placement member 5 slide in the first direction and sequentially pass through the opening of the inner cabinet 21 and the opening of the outer cabinet 11. By using the sliding guide rail assembly 4, the placement member 5 is made to slide in the first direction and sequentially pass through the opening of the inner cabinet 21 and the opening of the outer cabinet 11, so that the source bottle can be moved outside the chemical source cabinet to replace a new source bottle, improving the convenience of operation. Specifically, the sliding guide rail assembly 4 includes two sets of sliding guide rails. The two sets of sliding guide rails are oppositely arranged in the second accommodation cavity. Each set of sliding guide rails includes an outer guide rail 41, a middle guide rail 42, and an inner guide rail 43. The outer guide rail 41 is fixed on the inner side wall of the inner cabinet 21. The middle guide rail 42 is slidably connected to the outer guide rail 41 in the first direction. The inner guide rail 43 is slidably connected to the middle guide rail 42 in the first direction. The two ends of the placement member 5 are respectively fixed on the two inner guide rails 43. In addition, balls 44 are provided between the outer guide rail 41 and the middle guide rail 42 and between the middle guide rail 42 and the inner guide rail 43 to reduce the friction between the guide rails and make the sliding smoother. In other embodiments, the sliding guide rail assembly 4 may not be provided, and the placement member 5 may be directly fixed on the wall of the second accommodation cavity, and the source bottle is placed on the placement member 5, which is not limited to this embodiment.

[0039] Optionally, the heating member is fixedly connected to the inner cabinet 21, and the heating member surrounds and fits the source bottle. With this arrangement, the contact area between the heating member and the source bottle is increased, and the heating effect on the source bottle is better. In other embodiments, the heating member may also be fixedly connected to the placement member 5.

[0040] Optionally, the first sealing member is disposed on the outer cabinet door 12. When the outer cabinet door 12 is closed with the outer cabinet 11, the first sealing member fits on the outer wall of the outer cabinet door 12. Specifically, the first sealing member is a quadrilateral frame structure. With this arrangement, the outer cabinet door 12 and the outer cabinet 11 are completely sealed, and the sealing performance is better. Optionally, the second sealing member is disposed on the inner cabinet door 22. When the inner cabinet door 22 is closed with the inner cabinet 21, the second sealing member fits on the outer wall of the inner cabinet door 22. Specifically, the second sealing member is a quadrilateral frame structure. With this arrangement, the inner cabinet door 22 and the inner cabinet 21 are completely sealed, and the sealing performance is better.

[0041] Optionally, in this embodiment, the chemical source cabinet further includes a heat preservation component 6, and the heat preservation component 6 covers the cavity wall of the second accommodation cavity. By providing the heat preservation component 6, heat loss from the second accommodation cavity is avoided, and the influence of the air extraction mechanism 3 on the temperature of the source bottle can be further reduced. Optionally, the heat preservation component 6 includes a first heat preservation member and a second heat preservation member. The first heat preservation member is heat-insulating cotton, and the second heat preservation member is a heat-reflecting plate. The first heat preservation member is disposed between the second heat preservation member and the cavity wall of the second accommodation cavity, and the second heat preservation member can press the first heat preservation member tightly against the cavity wall of the second accommodation cavity. The first heat preservation member being heat-insulating cotton can achieve heat preservation while avoiding damage to the cavity wall of the second accommodation cavity. The second heat preservation member is a heat-reflecting plate. While fixing the heat-insulating cotton, since the heat-reflecting plate has the function of heat preservation and heat insulation, it can also reduce the influence of the air extraction mechanism 3 on the temperature of the source bottle. Optionally, in this embodiment, the heat preservation component 6 covers the side wall of the inner cabinet door 22 close to the second accommodation cavity, resulting in better heat preservation effect and further avoiding heat loss from the second accommodation cavity. Optionally, the chemical source cabinet further includes screws, which pass through the second heat preservation member and the first heat preservation member in sequence and are threadedly connected to the inner cabinet body 21 to press the first heat preservation member tightly against the cavity wall of the second accommodation cavity.

[0042] Optionally, the chemical source cabinet further includes a smoke detector 7. The smoke detector 7 is disposed in the outer cabinet 1, and the detection head of the smoke detector 7 is located in the first accommodation cavity. By providing the smoke detector 7, the flame or smoke generated in the outer cabinet 1 can be sensed in a timely manner, and an alarm signal is emitted to remind the staff, ensuring the safety of the chemical source cabinet. In this embodiment, the smoke detector 7 is disposed on the inner wall of the outer cabinet body 11. In other embodiments, the smoke detector 7 can be disposed on the outer wall of the inner cabinet body 21 or the outer cabinet door 12. In this embodiment, the smoke detector 7 is an optoelectronic smoke fire detector with good detection effect. In addition, the generated smoke can be exhausted through the air extraction mechanism 3.

[0043] Optionally, in this embodiment, the chemical source cabinet further includes a tail gas detector 8. The tail gas detector 8 is disposed in the outer cabinet 1, and the detection head of the tail gas detector 8 is located in the first accommodation cavity, and is used to detect whether the chemical source in the source bottle leaks into the first accommodation cavity. By providing the tail gas detector 8, it can be detected whether the chemical source in the source bottle leaks, further ensuring the safety of the chemical source cabinet.

[0044] Optionally, in this embodiment, the chemical source cabinet further includes a first safety lock 13 and a second safety lock 23. The first safety lock 13 is arranged on the outer cabinet door 12, and the second safety lock 23 is arranged on the inner cabinet door 22. By providing the first safety lock 13 and the second safety lock 23, dangerous situations caused by misoperation of the operator can be avoided. Optionally, in this embodiment, the outer cabinet door 12 is provided with an outer observation window 14 for observing the internal situation of the first accommodation cavity; the inner cabinet door 22 is provided with an inner observation window 24 for observing the internal situation of the second accommodation cavity. In addition, the materials of the outer observation window 14 and the inner observation window 24 are both explosion-proof glass, which facilitates observing the situation inside the cavity and makes the chemical source cabinet safer and more reliable.

[0045] Optionally, in this embodiment, both the outer cabinet body 11 and the inner cabinet body 21 are provided with first wire outlet holes to facilitate leading the wires out of the cabinet. The chemical source in the source bottle can be led to the reaction chamber through an air pipe. Both the outer cabinet body 11 and the inner cabinet body 21 are provided with first air pipe outlet holes to facilitate leading the air pipe out of the cabinet. In addition, the chemical source cabinet further includes a first fixing panel and a second fixing panel. The first fixing panel is fixed on the outer wall of the outer cabinet body 11. The first fixing panel is provided with a second wire outlet hole, and the wire passes through the first wire outlet hole and the second wire outlet hole in sequence from inside to outside; the second fixing panel is fixed on the outer wall of the outer cabinet body 11. The second fixing panel is provided with a second air pipe outlet hole, and the air pipe passes through the first air pipe outlet hole and the second air pipe outlet hole in sequence from inside to outside. By providing the first fixing panel, it plays a further supporting role for the wire and also plays a certain decorative role. By providing the second fixing panel, it plays a further supporting role for the air pipe and also plays a certain decorative role.

[0046] In addition, in this embodiment, the outer wall of the outer cabinet body 11 is provided with a chemical source label and a safety warning label. The chemical source label is used to indicate the type of chemical source in the source bottle, and the safety warning label is used to remind the operator to pay attention to safety. In order to facilitate the operator to understand the negative pressure situation inside the cabinet, a differential pressure gauge 9 is provided on the side wall of the outer cabinet door 12 close to the first accommodation cavity, which is used to detect the differential pressure to judge whether the first accommodation cavity is always in negative pressure to prevent the chemical source from diffusing outside the outer cabinet 1.

[0047] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention and are not limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A chemical source cabinet, characterized in that: include: An outer cabinet (1) comprises an outer cabinet body (11) and an outer cabinet door (12), wherein the outer cabinet body (11) is provided with a first accommodating cavity, and the outer cabinet door (12) is arranged on the outer cabinet body (11) in an openable and closable manner; A first sealing member is arranged between the outer cabinet body (11) and the outer cabinet door (12); An inner cabinet (2) is arranged in the first accommodating cavity, the inner cabinet (2) comprising an inner cabinet body (21) and an inner cabinet door (22), the inner cabinet body (21) being provided with a second accommodating cavity for accommodating a source bottle; the inner cabinet door (22) being arranged on the inner cabinet body (21) in an openable and closable manner; A second sealing member is disposed between the inner cabinet body (21) and the inner cabinet door (22); An air extraction mechanism (3) is arranged on the outer cabinet (11) and is used to extract the gas in the first accommodating chamber; A heating element is disposed in the second accommodating chamber and is used to heat the source bottle.

2. The chemical source cabinet according to claim 1, characterized in that: The chemical source cabinet further comprises a sliding guide rail assembly (4) and a placement piece (5); the sliding guide rail assembly (4) is arranged on the inner cabinet body (21) and is located in the second accommodating cavity; the placement piece (5) is fixed on the sliding guide rail assembly (4) and is used to place the source bottle; the sliding guide rail assembly (4) enables the placement piece (5) to slide along a first direction and pass through the opening and closing opening of the inner cabinet body (21) and the opening and closing opening of the outer cabinet body (11) in sequence.

3. The chemical source cabinet according to claim 2, characterized in that: The heating element is fixedly connected to the inner cabinet (21), and the heating element surrounds and fits the source bottle.

4. The chemical source cabinet according to claim 1, characterized in that: The first sealing member is arranged on the outer cabinet door (12), and when the outer cabinet door (12) and the outer cabinet body (11) are closed, the first sealing member is attached to the outer wall of the outer cabinet door (12); and / or, The second sealing member is arranged on the inner cabinet door (22); when the inner cabinet door (22) and the inner cabinet body (21) are closed, the second sealing member is attached to the outer wall of the inner cabinet door (22).

5. The chemical source cabinet according to claim 1, characterized in that: The chemical source cabinet further comprises a heat preservation component (6), wherein the heat preservation component (6) covers the cavity wall of the second accommodating cavity.

6. The chemical source cabinet according to claim 5, characterized in that: The thermal insulation component (6) comprises a first thermal insulation component and a second thermal insulation component, wherein the first thermal insulation component is thermal insulation cotton, and the second thermal insulation component is a heat reflecting plate, the first thermal insulation component is arranged between the second thermal insulation component and the cavity wall of the second accommodating cavity, and the second thermal insulation component can press the first thermal insulation component against the cavity wall of the second accommodating cavity.

7. The chemical source cabinet according to claim 5, characterized in that: The side wall of the inner cabinet door (22) close to the second accommodating cavity is covered with the heat preservation component (6).

8. The chemical source cabinet according to claim 1, characterized in that: The chemical source cabinet further comprises a smoke detector (7), wherein the smoke detector (7) is arranged in the outer cabinet (1), and the detection head of the smoke detector (7) is located in the first accommodating cavity.

9. The chemical source cabinet according to claim 1, characterized in that: The chemical source cabinet further comprises an exhaust gas detector (8), which is arranged in the outer cabinet (1). The detection head of the exhaust gas detector (8) is located in the first accommodating cavity and is used to detect whether the chemical source in the source bottle leaks into the first accommodating cavity.

10. The chemical source cabinet according to claim 1, characterized in that: The chemical source cabinet further comprises a first safety lock (13) and a second safety lock (23), wherein the first safety lock (13) is arranged on the outer cabinet door (12), and the second safety lock (23) is arranged on the inner cabinet door (22); and / or, The outer cabinet door (12) is provided with an outer observation window (14) for observing the internal conditions of the first accommodating chamber; the inner cabinet door (22) is provided with an inner observation window (24) for observing the internal conditions of the second accommodating chamber.

Images