Heating structure and heating system

Abstract

The utility model provides a heating structure and a heating system, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of short circuit caused by easy bending of a heating wire. The heating structure includes: an electrode assembly; the two ends of each heating wire are electrically connected with the electrode assembly; and each counterweight adjusting assembly is connected with the middle section of the corresponding heating wire and is configured to apply a downward pulling force to the middle section of the corresponding heating wire. The middle section of the heating wire comprises a balance weight section and two connecting sections located on the two sides of the balance weight section, the balance weight section is connected with the balance weight adjusting assembly, one end of each connecting section is connected with the balance weight section, and the other end of each connecting section is connected with one end of the heating wire. The two connecting sections can be kept in a tightened vertical state, so that bending in the heating process is avoided, and short circuit caused by contact with other metal structures in the vacuum chamber is avoided.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, and particularly relates to a heating structure and a heating system. Background Art

[0002] In the thin film production process of heterojunction (HJT) solar cells, chemical vapor deposition (CVD) equipment for film coating is divided into hot filament chemical vapor deposition (HFCVD) equipment (also known as catalytic chemical vapor deposition (CAT-CVD)) and plasma enhanced chemical vapor deposition (PECVD) equipment. The principle of CAT-CVD equipment is as follows: Process gases are introduced into the vacuum chamber of the vacuum cavity. Under the high temperature and catalytic action of the heating wire in the vacuum chamber, the process gases are cracked and then deposited on the surface of the silicon wafer, thereby obtaining the required process thin film. However, the heating wire is prone to bending during the heating process, causing the heating wire to come into contact with other metal structures in the vacuum chamber, resulting in a short circuit of the heating wire and inability to heat the process gases. Summary of the Utility Model

[0003] To solve the above technical problems, this application is proposed. An embodiment of this application provides a heating structure and a heating system.

[0004] In a first aspect, an embodiment of this application provides a heating structure applied to a vacuum cavity. The heating structure includes: an electrode assembly; at least one heating wire, each heating wire having two ends and a middle section located between the two ends of the heating wire, the two ends of each heating wire being electrically connected to the electrode assembly, and the electrode assembly being configured to supply power to multiple heating wires; at least one weight adjustment assembly, each weight adjustment assembly being correspondingly arranged with each heating wire, each weight adjustment assembly being connected to the middle section of the corresponding heating wire and being configured to apply a downward pulling force to the middle section of the corresponding heating wire.

[0005] In some embodiments, the weight adjustment assembly includes: a first adjustment block having a chute; at least two sliders, each slider partially extending into the chute so that the slider is slidably connected to the first adjustment block through the chute; at least two spacer rings, each spacer ring being connected to a slider, and the middle section of the heating wire being wound around at least two spacer rings; at least one weight member connected to the first adjustment block.

[0006] In some embodiments, the vacuum chamber has a vacuum cavity, and the heating structure further includes: a limiting block, disposed in the vacuum cavity, connected to the inner wall of the vacuum chamber, and located below the first adjusting block, configured to block the further descent of the first adjusting block after the first adjusting block descends to contact the limiting block.

[0007] In some embodiments, the limiting block has a first threaded portion; wherein, the heating structure further includes: a blocking block, disposed in the vacuum cavity and connected to the first adjusting block, the blocking block has a first waist-shaped hole extending in the vertical direction, and the blocking block is configured to support the first adjusting block when installing the heating wire to the spacer ring; a first screwing member, configured to pass through the first waist-shaped hole and be screwed with the first threaded portion.

[0008] In some embodiments, the electrode assembly includes: at least two electrode head assemblies, each electrode head assembly having a first input end and a first output end disposed opposite to each other, each heating wire is correspondingly disposed with two electrode head assemblies, one end of each heating wire is electrically connected to the first output end of a corresponding electrode head assembly, the other end of each heating wire is electrically connected to the first output end of another corresponding electrode head assembly, the first input end of one of the two electrode head assemblies corresponding to each heating wire is electrically connected to the positive pole of a power supply, and the first input end of the other of the two electrode head assemblies corresponding to each heating wire is electrically connected to the negative pole of the one power supply.

[0009] In some embodiments, the electrode head assembly includes: a power connection assembly, the top of the power connection assembly forms the first input end; an electrode rod, one end of the electrode rod is electrically connected to the power connection assembly; an insulating spacer assembly, sleeved outside the electrode rod, configured to isolate the electrode rod from the metal structure in the vacuum cavity; a graphite plate, disposed below the insulating spacer assembly and electrically connected to the other end of the electrode rod, the graphite plate forms the first output end, and one end of the heating wire is wound around the graphite plate.

[0010] In some embodiments, the bottom of the insulating spacer assembly has a second through hole, the bottom of the electrode rod has a fifth threaded portion, the graphite plate has a fourth waist-shaped hole extending in the horizontal direction and at least two heating wire holes extending in the vertical direction, and one end of the heating wire passes through the at least two heating wire holes; wherein, the electrode head assembly further includes: a fifth screwing member, sequentially passing through the fourth waist-shaped hole and the second through hole and being screwed with the fifth threaded portion, one end of the fifth screwing member is electrically connected to the other end of the electrode rod, and the other end of the fifth screwing member is electrically connected to the graphite plate.

[0011] In a second aspect, an embodiment of the present application provides a heating system, including: a vacuum chamber body having a vacuum cavity; the heating structure according to any one of the first aspects above, at least partially disposed in the vacuum cavity; a power supply assembly, disposed outside the vacuum chamber body and electrically connected to the heating structure, configured to supply power to the heating structure.

[0012] In some embodiments, the vacuum chamber has at least one observation window, and each observation window is correspondingly arranged with each heating wire in the heating structure; wherein, the power supply assembly includes: at least one power supply, arranged outside the vacuum chamber, each power supply is correspondingly arranged with each heating wire, and each power supply is electrically connected to the corresponding heating wire through the electrode assembly of the heating structure; wherein, the heating system further includes: at least one temperature measurement component, arranged outside the vacuum chamber and connected to the vacuum chamber, each temperature measurement component is correspondingly arranged with each heating wire and each observation window, and each temperature measurement component is configured to emit a detection beam towards the corresponding observation window, the detection beam passes through the observation window corresponding to the temperature measurement component, irradiates the heating wire corresponding to the temperature measurement component to form a reflected beam, and the reflected beam passes through the observation window corresponding to the temperature measurement component and is received by the temperature measurement component, so that the temperature measurement component determines the temperature of the corresponding heating wire based on the reflected beam; a controller, arranged outside the vacuum chamber, communicatively connected to at least one temperature measurement component and at least one power supply, and configured to control the output power of at least one power supply based on the temperature of the heating wire detected by at least one temperature measurement component.

[0013] In some embodiments, the temperature measurement component includes: a fixing component, arranged outside the vacuum chamber and connected to the vacuum chamber, the fixing component has a second threaded portion; a second adjusting block, having a second waist-shaped hole extending along a first direction and a third threaded portion; a second screwing member, passing through the second waist-shaped hole and screwed to the second threaded portion; a third adjusting block, having a third waist-shaped hole extending along a second direction, and an included angle exists between the first direction and the second direction; a third screwing member, passing through the third waist-shaped hole and screwed to the third threaded portion; a thermometer, rotatably connected to the third adjusting block, and configured to emit a detection beam towards the observation window corresponding to the temperature measurement component, the detection beam passes through the observation window corresponding to the temperature measurement component, irradiates the heating wire corresponding to the temperature measurement component to form a reflected beam, and the reflected beam passes through the observation window corresponding to the temperature measurement component and is received by the thermometer, so that the thermometer determines the temperature of the heating wire corresponding to the temperature measurement component based on the reflected beam.

[0014] In some embodiments, the third adjusting block has a fourth threaded portion; wherein, the temperature measurement component further includes: a rotating member, arranged outside the vacuum chamber and located on the side of the third adjusting block away from the second adjusting block, the rotating member is rotatably connected to the third adjusting block, the rotating member is connected to the thermometer, the rotating member has an adjusting hole, the cross-section of the adjusting hole in a first plane is circular arc-shaped, the center of the circular arc is located on the rotation axis of the rotating member, and the first plane is parallel to the first direction and the second direction; a fourth screwing member, passing through the adjusting hole and screwed to the fourth threaded portion.

[0015] The heating structure and heating system proposed in the embodiments of the present application fix both ends of the heating wire through an electrode assembly, and apply a downward pulling force to the middle section of the heating wire through a weight adjustment assembly, so that the heating wire can be stably fixed in the vacuum chamber in a "U" - shaped structure. Moreover, the middle section of the heating wire includes a weight section and two connecting sections. The weight section is connected to the weight adjustment assembly. The two connecting sections are respectively located on both sides of the weight section. One end of each connecting section is connected to the weight section, and the other end of each connecting section is connected to one end of the heating wire. Since the weight adjustment assembly applies a downward pulling force to the weight section, the two connecting sections can maintain a taut vertical state, thus avoiding bending during the heating process and contacting other metal structures in the vacuum chamber to cause a short - circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the drawings, the above - mentioned and other objects, features, and advantages of the present application will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application, and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The figure shows a schematic structural diagram of a heating system provided by an exemplary embodiment of the present application.

[0018] Figure 2 The figure shows a schematic structural diagram of a heating structure provided by an exemplary embodiment of the present application.

[0019] Figure 3 The figure shows a schematic structural diagram of a heating wire and a weight adjustment assembly provided by an exemplary embodiment of the present application.

[0020] Figure 4 The figure shows a schematic structural diagram of a temperature - measuring assembly provided by an exemplary embodiment of the present application.

[0021] Figure 5 The figure shows a schematic structural diagram of an electrode head assembly provided by an exemplary embodiment of the present application.

[0022] Figure 6 The figure shows a schematic structural diagram of a graphite plate provided by an exemplary embodiment of the present application.

[0023] Reference Numerals:

[0024] 100, Heating structure; 101, Vacuum chamber; 102, Electrode assembly; 1021, Electrode head assembly; 10211, First input terminal; 10212, First output terminal; 10213, Power connection assembly; 102131, Electrode head; 102132, Mounting block; 102133, Sealing ring; 10214, Electrode rod; 10215, Insulating sleeve assembly; 102151, Insulating sleeve; 102152, Insulating cap; 10216, Graphite plate; 102161, Fourth waist-shaped hole; 102162, Heating wire winding hole; 10217, Fifth screw member; 103, Power supply assembly; 1031, Power supply; 1032, Power cabinet; 1033, Conducting wire; 104, Heating wire; 1041, Both ends; 1042, Middle section; 10421, Counterweight section; 10422, Connection section; 105, Counterweight adjustment assembly; 1051, First adjustment block; 10511, Chute; 1052, Spacer ring; 1053, Counterweight; 106, Limit block; 107, Fixed sheet metal; 108, Stop block; 1081, First waist-shaped hole; 109, Observation window; 110, Temperature measurement assembly; 1101, Fixing assembly; 11011, Connection plate; 11012, Fixed block; 1102, Second adjustment block; 11021, Second waist-shaped hole; 1103, Third adjustment block; 11031, Third waist-shaped hole; 1104, Thermometer; 1105, Rotating part; 11051, Adjustment hole; 200, Heating system. Detailed implementation manners

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0026] Exemplary device

[0027] Figure 1 Shown is a schematic structural diagram of a heating system provided by an exemplary embodiment of the present application. Figure 2 Shown is a schematic structural diagram of a heating structure provided by an exemplary embodiment of the present application. Figure 3 Shown is a schematic structural diagram of a heating wire and a counterweight adjustment assembly provided by an exemplary embodiment of the present application.

[0028] As Figures 1 - 3As shown in the figure, an embodiment of the present application provides a heating structure 100, which is applied to a vacuum chamber 101. The heating structure 100 includes: an electrode assembly 102, at least one heating wire 104, and at least one weight adjustment assembly 105. Each heating wire 104 has two ends 1041 and an intermediate section 1042 located between the two ends 1041 of the heating wire 104. The two ends 1041 of each heating wire 104 are electrically connected to the electrode assembly 102, and the electrode assembly 102 is configured to supply power to multiple heating wires 104. Each weight adjustment assembly 105 is correspondingly arranged with each heating wire 104, and each weight adjustment assembly 105 is connected to the intermediate section of the corresponding heating wire 104 and is configured to apply a downward pulling force to the intermediate section of the corresponding heating wire 104.

[0029] In the above embodiment, the two ends 1041 of the heating wire 104 are fixed by the electrode assembly 102, and a downward pulling force is applied to the intermediate section 1042 of the heating wire 104 by the weight adjustment assembly 105, so that the heating wire 104 can be firmly fixed in the vacuum chamber in a "U" - shaped structure. And the intermediate section 1042 of the heating wire 104 includes a weight section 10421 and two connecting sections 10422. The weight section 10421 is connected to the weight adjustment assembly 105. The two connecting sections 10422 are respectively located on both sides of the weight section 10421. One end of each connecting section 10422 is connected to the weight section 10421, and the other end of each connecting section 10422 is connected to one end of the heating wire 104. Since the weight adjustment assembly 105 applies a downward pulling force to the weight section 10421, the two connecting sections 10422 can maintain a taut vertical state, thus avoiding bending during the heating process and contacting other metal structures in the vacuum chamber to cause a short - circuit.

[0030] In some embodiments, there are multiple heating wires 104, and the multiple heating wires 104 are arranged along a first direction. Among them, the first direction is exemplarily as Figure 2 shown by the X - direction in the figure.

[0031] In some embodiments, as Figure 3 shown, the weight adjustment assembly 105 includes a first adjustment block 1051, at least two sliders (not shown in the figure), at least two spacer rings 1052, and at least one weight 1053. The first adjustment block 1051 has a chute 10511. Each slider partially extends into the chute 10511 so that the slider is slidably connected to the first adjustment block 1051 through the chute 10511. Each spacer ring 1052 is connected to a slider, and the intermediate section 1042 of the heating wire 104 is wound around at least two spacer rings 1052. At least one weight 1053 is connected to the first adjustment block 1051.

[0032] Exemplarily, the slider is disposed in the chute 10511, and the size of the opening of the chute 10511 in the vertical direction is smaller than the size of the slider in the vertical direction, so that the slider can slide in the chute 10511 without coming out.

[0033] Exemplarily, the weight adjustment assembly 105 may further include a connecting member (such as a screw or a bolt). One end of the connecting member passes through the opening of the chute 10511 and is connected to the slider, and the other end of the connecting member is connected to the spacer ring 1052.

[0034] Exemplarily, there are two sliders. The two sliders are slidably connected to the first adjustment block 1051, and the two sliders are respectively connected to the two spacer rings 1052. The heating wire 104 is wound around the two spacer rings 1052.

[0035] Exemplarily, the spacer ring 1052 is made of an insulating material (such as ceramic).

[0036] With this structure, the gravity of at least one weight 1053, the gravity of at least two spacer rings 1052, and the gravity of the first adjustment block 1051 form a downward pulling force applied to the weight section 10421, so that the two connecting sections 10422 can be kept in a taut vertical state. Moreover, by adjusting the position of the slider in the chute 10511, the distance between the two connecting sections 10422 of the heating wire 104 can be flexibly adjusted.

[0037] In some embodiments, as Figure 3 shown, the vacuum chamber 101 has a vacuum chamber, which is exemplarily used to accommodate a sheet material for coating the sheet material. The sheet material is exemplarily a silicon wafer, a battery cell or a glass substrate. The heating structure 100 further includes: a limiting block 106, which is disposed in the vacuum chamber, connected to the inner wall of the vacuum chamber 101, and located below the first adjustment block 1051, and is configured to block the first adjustment block 1051 from further descending after the first adjustment block 1051 descends to contact the limiting block 106.

[0038] Specifically, the heating wire 104 will stretch and become longer when heated. By providing the limiting block 106, the maximum degree of stretching of the heating wire 104 can be limited, and when the heating wire 104 stretches to contact the first adjustment block 1051 with the limiting block 106, the first adjustment block 1051 can be supported, so as to prevent the heating wire 104 from breaking due to excessive stretching or long-term stretching.

[0039] In some embodiments, as Figure 2 and Figure 3 shown, the heating structure 100 further includes a fixing sheet metal 107. The fixing sheet metal 107 is connected to the inner wall of the vacuum chamber 101, and the limiting block 106 is connected to the fixing sheet metal 107.

[0040] In some embodiments, the limiting block 106 has a first threaded portion (for example, the limiting block 106 has a first threaded hole, and the first threaded portion is the thread in the first threaded hole). The heating structure 100 further includes a stop block 108 and a first screwing member (such as a screw or a bolt). The stop block 108 is disposed in the vacuum chamber and is connected to the first adjusting block 1051. The stop block 108 has a first waist-shaped hole 1081 extending in the vertical direction. The stop block 108 is configured to support the first adjusting block 1051 when installing the heating wire 104 on the spacer ring 1053. The first screwing member is configured to pass through the first waist-shaped hole 1081 and be screwed with the first threaded portion.

[0041] As a core component, the heating wire 104 needs to be replaced regularly after running for a certain period. In practical applications, when the heating wire 104 is not assembled, the stop block 108 supports the first adjusting block 1051. The first screwing member can be loosened first, and the stop block 108 can be moved up to a high position. Then the first screwing member is tightened, and the first adjusting block 1051 also moves to the high position with the stop block 108. Then the middle section of the heating wire 104 is wound around the spacer ring 1053. Finally, the first screwing member is loosened, so that the stop block 108 descends to a low position, and the stop block 108 is separated from the first adjusting block 1051. The support of the first adjusting block 1051 changes from being supported by the stop block 108 to being supported by the heating wire 104.

[0042] In order to improve the efficiency of photovoltaic cells and reduce the investment cost of new technologies, greater production capacity requirements and large silicon wafer adaptability requirements are put forward. The height and length dimensions of the plate-type vacuum chamber need to be further increased. Correspondingly, the number of heating wires also increases. The coating principle of the CAT-CVD equipment is to catalytically decompose the process gas into active groups through a heated metal wire (i.e., the heating wire), and these active groups fall on the surface of the silicon wafer to form a thin film. In this process, the most influential factor affecting the coating stability is the temperature of the heating wire.

[0043] In the related art, traditional heating wire heating uses one power supply. One power supply supplies power to a group of electrodes, and a group of electrodes supply power to all heating wires. However, during the coating process, the number of silicon wafers is relatively large and they are arranged in multiple rows. When a single power supply is heating, the temperature corresponding to each heating wire cannot be adjusted separately, which increases the difficulty of process debugging. And currently, the commonly used heating wire materials are mainly metals such as tantalum and tungsten. After long-term heating with special gas, a film will adhere to the surface of the heating wire. As time goes by, under the adjustment of the same power, the temperature of the heating wire will decrease significantly. Therefore, each heating wire needs to be adjusted more accurately and in real time.

[0044] In some embodiments, such as Figure 2As shown, the electrode assembly 102 includes at least two electrode head assemblies 1021. Each electrode head assembly 1021 has a first input end 10211 and a first output end 10212 that are oppositely arranged. Each heating wire 104 is correspondingly arranged with two electrode head assemblies 1021. One end of each heating wire 104 is electrically connected to the first output end 10212 of a corresponding electrode head assembly 1021, and the other end of each heating wire 104 is electrically connected to the first output end 10212 of another corresponding electrode head assembly 1021. The first input end of one of the two electrode head assemblies 1021 corresponding to each heating wire 104 is electrically connected to the positive pole of a power supply 1031, and the first input end of the other of the two electrode head assemblies 1021 corresponding to each heating wire is electrically connected to the negative pole of the power supply 1031.

[0045] With this structure, each heating wire 104 can be individually controlled by a corresponding power supply 1031, making the temperature adjustment of each heating wire 104 more flexible and controllable, and reducing the difficulty of process debugging.

[0046] Figure 5 The figure shows a schematic structural diagram of an electrode head assembly provided by an exemplary embodiment of the present application.

[0047] In some embodiments, as Figure 5 shown, the electrode head assembly 1021 includes a power connection assembly 10213, an electrode rod 10214, an insulating spacer assembly 10215, and a graphite plate 10216. The top of the power connection assembly 10213 forms the first input end 10211. One end of the electrode rod 10214 is electrically connected to the power connection assembly 10213. The insulating spacer assembly 10215 is sleeved outside the electrode rod 10214 and is configured to isolate the electrode rod 10214 from the metal structure in the vacuum chamber. The graphite plate 10216 is arranged below the insulating spacer assembly 10215 and is electrically connected to the electrode rod 10214. The graphite plate 10216 forms the first output end 10212, and one end of the heating wire 104 is wound around the graphite plate 10216.

[0048] Exemplarily, the top of the vacuum chamber 101 has a first through hole that communicates with the vacuum chamber. The power connection assembly 10213 can be arranged outside the vacuum chamber and is hermetically connected to the vacuum chamber body 101. One end of the electrode rod 10214 is electrically connected to the power connection assembly 10213, and the other end of the electrode rod 10214 passes through the first through hole and extends into the vacuum chamber.

[0049] Specifically, the insulating spacer assembly 10215 may include an insulating spacer 102151 and an insulating cap 102152. The insulating spacer 102151 and the insulating cap 102152 are made of insulating materials, such as ceramics. The insulating cap 102152 is sleeved on one end of the electrode rod 10214 and is connected to the insulating spacer 102151. The insulating spacer 102151 is sleeved on the remaining part of the electrode rod 10214 except the above-mentioned one end. Exemplarily, the insulating spacer 102151 has an external thread, and the insulating cap 102152 has an internal thread, and the internal thread is screwed with the external thread.

[0050] With this structure, the current of the power connection assembly 10213 can be transmitted to the heating wire 104 through the electrode rod 10214, and the insulating spacer assembly 10215 can prevent the electrode rod 10214 from arcing under the influence of the metal structure in the vacuum chamber during the heating process.

[0051] In some embodiments, as Figure 5 shown, the power connection assembly 10213 includes an electrode head 102131, a mounting block 102132, and a sealing ring 102133. The electrode head 102131 is disposed above the vacuum chamber 101, and the electrode head 102131 forms a first input end 10211. The mounting block 102132 is disposed above the vacuum chamber 101. The top of the mounting block 102132 is electrically connected to the electrode head 102131. There is a gap between the bottom of the mounting block 102132 and the vacuum chamber 101, and the sealing ring 102133 is disposed in this gap and is configured to seal this gap.

[0052] Figure 6 The figure shows a schematic structural diagram of a graphite plate provided by an exemplary embodiment of the present application.

[0053] In some embodiments, as Figure 6As shown, the bottom of the insulating spacer assembly 10215 has a second through hole, and the bottom of the electrode rod 10214 has a fifth threaded portion. Exemplarily, the bottom of the electrode rod 10214 has an internal thread, and the fifth threaded portion is the internal thread at the bottom of the electrode rod 10214. The graphite plate 10216 has a fourth waist-shaped hole 102161 extending in the horizontal direction and at least two heat wire winding holes 102162 extending in the vertical direction. One end of the heating wire 104 passes through the at least two heat wire winding holes 102162 and is thus wound around the graphite plate 10216. The electrode head assembly 1021 further includes a fifth screw member 10217 (such as a screw or a bolt). The fifth screw member 10217 sequentially passes through the fourth waist-shaped hole 102161 and the second through hole and is screwed to the fifth threaded portion. One end of the fifth screw member 10217 is electrically connected to the other end of the electrode rod 10214, and the other end of the fifth screw member 10217 is electrically connected to the graphite plate 10216, so that the current of the electrode rod 10214 can be transmitted to the graphite plate 10216 through the fifth screw member 10217.

[0054] With this structure, the graphite plate 10216 can be adjusted horizontally relative to the electrode rod 10214, thereby adjusting the horizontal position of the heating wire 104. Exemplarily, if there are multiple heating wires 104, the multiple heating wires 104 are arranged in sequence along the first direction, and the fourth waist-shaped hole 102161 can extend along the first direction. By adjusting the position of the graphite plate 10216 relative to the electrode rod 10214 in the first direction, the distance between the heating wires 104 can be adjusted.

[0055] Based on the same concept, the present application also provides a heating system 200. The heating system 200 includes: a vacuum chamber 101, the heating structure 100 of any one of the above embodiments, and a power supply assembly 103. The vacuum chamber 101 has a vacuum chamber. The heating structure 100 is at least partially disposed in the vacuum chamber. For example, the electrode assembly 102 is partially disposed in the vacuum chamber, and the heating wire 104, the weight adjustment assembly 105, the limit block 106, the fixed sheet metal 107, and the stop block 108 are disposed in the vacuum chamber. The power supply assembly 103 is disposed outside the vacuum chamber and is electrically connected to the heating structure 100 and is configured to supply power to the heating structure 100.

[0056] In some embodiments, as Figure 1 shown, the vacuum chamber 101 has at least one observation window 109, and each observation window 109 is correspondingly arranged with each heating wire 104. The power supply assembly 103 includes at least one power supply 1031. The at least one power supply 1031 is disposed outside the vacuum chamber, and each power supply 1031 is correspondingly arranged with each heating wire 104. Each power supply 1031 is electrically connected to the corresponding heating wire 104 through the electrode assembly 102 of the heating structure 100.

[0057] Specifically, the power supply 1031 has a positive electrode and a negative electrode. The positive electrode of each power supply 1031 is electrically connected to the first input end 10211 of one electrode head assembly 1021 corresponding to the corresponding heating wire 104, and the negative electrode of each power supply 1031 is electrically connected to the first input end 10211 of the other electrode head assembly 1021 corresponding to the corresponding heating wire 104.

[0058] In some embodiments, the power supply assembly 103 may further include at least two wires 1033. Each power supply 1031 is correspondingly arranged with two wires 1033. For the two wires 1033 corresponding to any power supply 1031, one end of one wire 1033 is electrically connected to the positive electrode of the power supply 1031, and the other end of one wire 1033 is electrically connected to the first input end 10211 of one electrode head assembly 1021 corresponding to the heating wire 104 corresponding to the power supply 1031. One end of the other wire 1033 is electrically connected to the negative electrode of the power supply 1031, and the other end of the other wire 1033 is electrically connected to the first input end 10211 of the other electrode head assembly 1021 corresponding to the heating wire 104 corresponding to the power supply 1031. Figure 1 Only the structure in which one power supply 1031 is electrically connected to two electrode head assemblies 1021 through two wires 1033 is shown as an example.

[0059] In some embodiments, as Figure 1 shown, the power supply assembly 103 further includes a power supply cabinet 1032. The power supply cabinet 1032 is arranged outside the vacuum chamber. The power supply cabinet 1032 has a placement space, and at least one power supply 1031 is arranged in the placement space.

[0060] In some embodiments, the heating system 200 further includes: at least one temperature measuring component 110 and a controller (such as a host computer). At least one temperature measuring component 110 is arranged outside the vacuum chamber and is connected to the vacuum cavity 101. Each temperature measuring component 110 is correspondingly arranged with each heating wire 104 and each observation window 109. Each temperature measuring component 110 is configured to emit a detection beam towards the corresponding observation window 109. The detection beam passes through the observation window 109 corresponding to the temperature measuring component 110 and irradiates the heating wire 104 corresponding to the temperature measuring component 110 to form a reflected beam. The reflected beam passes through the observation window 109 corresponding to the temperature measuring component 110 and is received by the temperature measuring component 110, so that the temperature measuring component 110 determines the temperature of the corresponding heating wire 104 based on the reflected beam. The controller is arranged outside the vacuum chamber and is communicatively connected to at least one temperature measuring component 110 and at least one power supply 1031, and is configured to control the output power of at least one power supply 1031 based on the temperature of the heating wire 104 detected by at least one temperature measuring component 110. Among them, Figure 1 only some observation windows 109 and some temperature measuring components 110 are shown as examples.

[0061] In practical applications, the temperature measurement component 110 can detect the temperature of each heating wire 104 and send the temperature of each heating wire 104 to the controller. The controller can adjust the delivery power of each power supply 1031 based on the temperature of each heating wire 104, so as to be able to control the temperature of each heating wire 104 in real time and accurately. Exemplarily, if the temperature of the heating wire 104 received by the controller is lower than the preset temperature, the controller controls the power supply 1031 to increase the output power to raise the temperature of the heating wire 104; if the temperature of the heating wire 104 received by the controller is higher than the preset temperature, the controller controls the power supply 1031 to decrease the output power to lower the temperature of the heating wire 104. With this structure, the temperature of the heating wire 104 can be kept constant, improving the coating effect; and usually, after the heating wire 104 is heated with special gas for a long time, a film will adhere to the surface of the heating wire 104, thus reducing the heating efficiency. In this way, the output power of the power supply 1031 can be increased in time to ensure the catalytic decomposition effect of the heating wire 104 on the special gas, thereby improving the coating efficiency of the sheet material.

[0062] Figure 4 The figure shows a schematic structural diagram of a temperature measurement component provided by an exemplary embodiment of the present application.

[0063] In some embodiments, as Figure 4 shown, the temperature measurement component 110 includes a fixing component 1101, a second adjusting block 1102, a second screwing member, a third adjusting block 1103, a third screwing member, and a thermometer 1104. The fixing component 1101 is arranged outside the vacuum chamber and is connected to the vacuum cavity 101. The fixing component 1101 has a second threaded portion. Exemplarily, the fixing component 1101 has a second threaded hole extending in the vertical direction, and the second threaded portion is the thread in the threaded hole. The fixing component 1101 exemplarily includes a connecting plate 11011 and a fixing block 11012. The fixing block 11012 is connected to the vacuum cavity 101, and the connecting plate 11011 is connected to the fixing block 11012. The connecting plate 11011 has a second threaded portion, and the connecting plate 11011 has a second threaded hole extending in the vertical direction, and the second threaded portion is the thread in the second threaded hole. The second adjusting block 1102 has a second waist-shaped hole 11021 extending in the first direction (i.e., Figure 4 the X direction in Figure 4a third kidney-shaped hole 11031 extending in the Y direction (in the figure), the first direction and the second direction form an angle, and the second direction is exemplarily another horizontal direction. The third screw member passes through the third kidney-shaped hole 11031 and is screwed to the third threaded portion. The thermometer 1104 is rotatably connected to the third adjusting block 1103 and is configured to emit a detection beam toward the observation window 109 corresponding to the temperature measurement assembly 110. The detection beam passes through the observation window 109 corresponding to the temperature measurement assembly 110 and irradiates the heating wire 104 corresponding to the temperature measurement assembly 110 to form a reflected beam. The reflected beam passes through the observation window 109 corresponding to the temperature measurement assembly 110 and is received by the thermometer 1104, so that the thermometer 1104 determines the temperature of the heating wire 104 corresponding to the temperature measurement assembly 110 based on the reflected beam.

[0064] With this structure, the second adjusting block 1102 can be adjusted relative to the fixed assembly 1101 in the first direction, and the third adjusting block 1103 can be adjusted relative to the second adjusting block 1102 in the second direction, so that the position of the thermometer 1104 can be adjusted, and the detection beam emitted by the thermometer 1104 can accurately irradiate the heating wire 104.

[0065] In some embodiments, as Figure 4 shown, the third adjusting block 1103 has a fourth threaded portion. Exemplarily, the third adjusting block 1103 has a fourth threaded hole extending in the vertical direction, and the fourth threaded portion is the thread in the fourth threaded hole. The temperature measurement assembly 110 further includes a rotating member 1105. The rotating member 1105 is disposed outside the vacuum chamber and is located on the side of the third adjusting block 1103 away from the second adjusting block 1102. The rotating member 1105 is rotatably connected to the third adjusting block 1103. The rotating member 1105 is connected to the thermometer 1104. The rotating member 1105 has an adjusting hole 11051. The cross-section of the adjusting hole 11051 in the first plane is circular arc-shaped, and the center of the circular arc is located on the rotation axis of the rotating member 1105. The first plane is parallel to the first direction and the second direction. The fourth screw member passes through the adjusting hole 11051 and is screwed to the fourth threaded portion. With this structure, by rotating the rotating member 1105, the position of the thermometer 1104 can be adjusted, and the detection beam emitted by the thermometer 1104 can accurately irradiate the heating wire 104.

[0066] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, and are not limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0067] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "comprising," "including," "having," etc. are open-ended terms that mean "including but not limited to" and can be used interchangeably with each other. The word "or" and "and" used herein refer to the phrase "and / or" and can be used interchangeably with it, unless the context clearly indicates otherwise. The phrase "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with it.

[0068] It should also be noted that in the devices, equipment, and methods of this application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of this application.

[0069] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0070] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A heating structure, characterized in that: Applied to a vacuum chamber, the heating structure comprises: Electrode assembly; at least one heating wire, each of the heating wires having two ends and a middle section between the two ends of the heating wire, the two ends of each heating wire being electrically connected to the electrode assembly, and the electrode assembly being configured to supply power to the plurality of heating wires; At least one counterweight adjustment component, each of which is arranged corresponding to each of the heating wires, and each of which is connected to the middle section of the corresponding heating wire, and is configured to apply downward pulling force to the middle section of the corresponding heating wire.

2. The heating structure according to claim 1, characterized in that: The counterweight adjustment assembly comprises: A first adjusting block, wherein the first adjusting block has a sliding groove; at least two sliders, each of which partially extends into the slide slot, so that the slider is slidably connected to the first adjustment block through the slide slot; At least two spacer rings, each spacer ring is connected to a slider, and the middle section of the heating wire is wound around at least two of the spacer rings; At least one counterweight is connected to the first adjusting block.

3. The heating structure according to claim 2, characterized in that: The vacuum chamber has a vacuum chamber, and the heating structure further comprises: The limit block is arranged in the vacuum chamber, connected to the inner wall of the vacuum chamber, and located below the first adjusting block, and is configured to prevent the first adjusting block from further descending after the first adjusting block descends to contact the limit block.

4. The heating structure according to claim 3, characterized in that: The limiting block has a first threaded portion; Wherein, the heating structure further comprises: a stopper, disposed in the vacuum chamber and connected to the first adjusting block, the stopper having a first waist-shaped hole extending in a vertical direction, and configured to support the first adjusting block when the heating wire is installed on the spacer ring; The first screw-connecting member is configured to pass through the first waist-shaped hole and be screw-connected with the first threaded portion.

5. The heating structure according to claim 1 or 2, characterized in that: The electrode assembly comprises: At least two electrode head assemblies, each of the electrode head assemblies having a first input end and a first output end arranged opposite to each other, each of the heating wires being arranged corresponding to the two electrode head assemblies, one end of each of the heating wires being electrically connected to the first output end of a corresponding electrode head assembly, the other end of each of the heating wires being electrically connected to the first output end of another corresponding electrode head assembly, the first input end of one of the two electrode head assemblies corresponding to each of the heating wires being electrically connected to the positive pole of a power supply, and the first input end of the other of the two electrode head assemblies corresponding to each of the heating wires being electrically connected to the negative pole of the power supply.

6. The heating structure according to claim 5, characterized in that: The vacuum chamber has a vacuum chamber, and the electrode head assembly includes: A power connection component, the top of which forms the first input terminal; An electrode rod, one end of which is electrically connected to the power connection assembly; An insulating sleeve assembly, sleeved outside the electrode rod, configured to isolate the electrode rod from a metal structure in the vacuum chamber; A graphite plate is arranged below the insulating spacer assembly and is electrically connected to the other end of the electrode rod. The graphite plate forms the first output end. One end of the heating wire is wound around the graphite plate.

7. The heating structure according to claim 6, characterized in that: The bottom of the insulating spacer assembly has a second through hole, the bottom of the electrode rod has a fifth threaded portion, the graphite plate has a fourth waist-shaped hole extending in the horizontal direction and at least two heating wire holes extending in the vertical direction, and one end of the heating wire passes through at least two of the heating wire holes; Wherein, the electrode head assembly further comprises: The fifth screw connector passes through the fourth waist-shaped hole and the second through hole in sequence and is screwed with the fifth threaded portion. One end of the fifth screw connector is electrically connected to the other end of the electrode rod, and the other end of the fifth screw connector is electrically connected to the graphite plate.

8. A heating system, characterized in that: include: A vacuum chamber having a vacuum chamber; The heating structure according to any one of claims 1 to 7 is at least partially disposed in the vacuum chamber; The power supply component is arranged outside the vacuum chamber, electrically connected to the heating structure, and configured to supply power to the heating structure.

9. The heating system according to claim 8, characterized in that The vacuum chamber has at least one observation window, and each of the observation windows is arranged corresponding to each of the heating wires in the heating structure; Wherein, the power supply component includes: At least one power supply is arranged outside the vacuum chamber, each of the power supplies is arranged corresponding to each of the heating wires, and each of the power supplies is electrically connected to the corresponding heating wire through the electrode assembly of the heating structure; Wherein, the heating system further comprises: At least one temperature measuring component is arranged outside the vacuum chamber and connected to the vacuum chamber body, each of the temperature measuring components is arranged corresponding to each of the heating wires and each of the observation windows, and each of the temperature measuring components is configured to emit a detection light beam to the corresponding observation window, the detection light beam passes through the observation window corresponding to the temperature measuring component, and irradiates the heating wire corresponding to the temperature measuring component to form a reflected light beam, and the reflected light beam passes through the observation window corresponding to the temperature measuring component and is received by the temperature measuring component, so that the temperature measuring component determines the temperature of the corresponding heating wire based on the reflected light beam; The controller is arranged outside the vacuum chamber, is communicatively connected with at least one of the temperature measuring components and at least one of the power supplies, and is configured to control the output power of at least one of the power supplies based on the temperature of the heating wire detected by at least one of the temperature measuring components.

10. The heating system according to claim 9, characterized in that The temperature measuring component comprises: A fixing assembly is disposed outside the vacuum chamber and connected to the vacuum chamber body, wherein the fixing assembly has a second threaded portion; A second adjusting block having a second waist-shaped hole and a third threaded portion extending along the first direction; A second screw connection member passes through the second waist-shaped hole and is screwed to the second threaded portion; A third adjusting block having a third waist-shaped hole extending along a second direction, wherein the first direction and the second direction form an angle; A third screw connection member passes through the third waist-shaped hole and is screwed to the third threaded portion; The thermometer is rotatably connected to the third adjustment block and is configured to emit a detection light beam to the observation window corresponding to the temperature measuring component, the detection light beam passes through the observation window corresponding to the temperature measuring component, and is irradiated to the heating wire corresponding to the temperature measuring component to form a reflected light beam, and the reflected light beam passes through the observation window corresponding to the temperature measuring component and is received by the thermometer, so that the thermometer determines the temperature of the heating wire corresponding to the temperature measuring component based on the reflected light beam.

11. The heating system according to claim 10, characterized in that The third adjusting block has a fourth threaded portion; Wherein, the temperature measurement component also includes: a rotating member, disposed outside the vacuum chamber and located on a side of the third adjusting block away from the second adjusting block, the rotating member being rotatably connected to the third adjusting block, the rotating member being connected to the temperature measuring instrument, the rotating member having an adjusting hole, the cross section of the adjusting hole on a first plane being an arc, the center of the arc being located on the rotation axis of the rotating member, and the first plane being parallel to the first direction and the second direction; A fourth threaded member passes through the adjustment hole and is threadedly connected to the fourth threaded portion.

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