Refrigerating system and testing equipment

Abstract

The utility model relates to a refrigerating system and testing equipment, the refrigerating system comprises a compressor, a condenser, a first throttling valve and an evaporator which are sequentially connected to form a circulation loop, the condenser comprises a cooling flow channel used for circulating external cooling liquid, and the cooling flow channel is provided with an adjusting valve. The refrigerating system further comprises a heat exchange flow path and a control valve, the heat exchange flow path is used for circulating a heating medium, and the control valve is used for controlling whether the heating medium heats the refrigerant entering the evaporator and / or the refrigerant flowing out of the evaporator or not. According to the technical scheme, when the return air of the compressor carries liquid, the heating medium can be controlled by the control valve to heat the refrigerant entering the evaporator and / or the refrigerant flowing out of the evaporator, so that the liquid phase component in the refrigerant is vaporized, the dryness of the refrigerant entering the evaporator and / or the dryness of the refrigerant flowing out of the evaporator are / is improved, the dryness of the return air refrigerant is improved, and the air quality of the compressor is improved. And air return liquid carrying of the compressor is improved.

Description

Technical Field

[0001] The present application relates to the field of refrigeration technology, and particularly to a refrigeration system and a testing device. Background Art

[0002] Chip testing is an important link in the chip manufacturing process, aiming to reduce the early potential failure rate of chips. Chip testing equipment is usually configured with a refrigeration system to create a test temperature environment. The test temperature of chip testing equipment is usually set within the range of -55°C to 150°C. When the heat load decreases, the liquid refrigerant in the refrigeration system cannot be fully evaporated, and it is easy to have liquid carried in the suction gas, resulting in a large amount of liquid refrigerant entering the compressor for compression. Long-term operation will cause damage to the compressor and reduce the service life of the compressor.

[0003] To avoid liquid carried in the suction gas of the compressor, an air-liquid separator is often added to the refrigeration system in the industry. When the two-phase refrigerant suction gas passes through the air-liquid separator, the air-liquid separator separates the gaseous refrigerant, liquid refrigerant and lubricating oil in the suction gas. The liquid refrigerant and lubricating oil are deposited at the bottom of it, and the lubricating oil flows back to the compressor through the oil return port of the air-liquid separator. When the system continuously carries liquid, the liquid refrigerant is easy to fill the air-liquid separator, resulting in the failure of the air-liquid separator to separate. Moreover, when the density of the refrigerant is greater than that of the lubricating oil, the lubricating oil will still carry liquid refrigerant when flowing back from the air-liquid separator to the compressor. Summary of the Utility Model

[0004] Based on this, it is necessary to provide a refrigeration system and a testing device for the problem of liquid carried in the suction gas of the compressor.

[0005] In a first aspect, the present application provides a refrigeration system, including:

[0006] A compressor, a condenser, a first throttling valve member and an evaporator that are connected in sequence to form a circulation loop. The condenser includes a cooling flow channel for circulating external coolant, and a regulating valve is provided on the cooling flow channel;

[0007] The refrigeration system further includes a heat exchange flow path and a control valve. The heat exchange flow path is used for circulating a heating medium; the control valve is used to control whether the heating medium heats the refrigerant entering the evaporator and / or the refrigerant flowing out of the evaporator.

[0008] In some embodiments, the refrigeration system includes a first flow path connecting the inlet end of the evaporator and the outlet end of the first throttling valve member, and a second flow path connecting the outlet end of the evaporator and the suction gas end of the compressor. The refrigeration system further includes a heat exchanger;

[0009] The heat exchanger is disposed on the first flow path and / or the second flow path, and the heat exchange flow path flows through the heat exchanger. The heat exchanger is configured to enable heat exchange between the first flow path or the second flow path where it is located and the heat exchange flow path.

[0010] In some embodiments, the circulation loop includes a first flow segment connected between the inlet end of the evaporator and the outlet end of the first throttling valve member, and a second flow segment connected between the outlet end of the evaporator and the suction end of the compressor;

[0011] Wherein, the first flow path is arranged in parallel with the first flow segment, and the control valve includes a first valve located on the first flow path and a second valve located on the first flow segment; and / or, the second flow path is arranged in parallel with the second flow segment, and the control valve includes a third valve located on the second flow path and a fourth valve located on the second flow segment.

[0012] In some embodiments, the first valve and the second valve are not opened simultaneously, and the third valve and the fourth valve are not opened simultaneously.

[0013] In some embodiments, the heat exchange flow path includes a first heat exchange flow path, which is connected between the discharge end of the compressor and the condenser. The first heat exchange flow path flows through the heat exchanger to exchange heat with the first flow path and / or the second flow path, and the heating medium flowing through the first heat exchange flow path is the high-temperature refrigerant discharged from the compressor.

[0014] In some embodiments, the circulation loop includes a third flow segment between the discharge end of the compressor and the condenser, and the third flow segment serves as the first heat exchange flow path;

[0015] The first flow path that exchanges heat with the first heat exchange flow path is arranged in parallel with the circulation loop, and the second flow path that exchanges heat with the first heat exchange flow path is arranged in parallel with the circulation loop.

[0016] In some embodiments, the heat exchange flow path includes a second heat exchange flow path, which flows through the heat exchanger to exchange heat with the first flow path and / or the second flow path. The second heat exchange flow path is connected to the outlet of the cooling channel, and the heating medium flowing through the second heat exchange flow path is the coolant that absorbs heat in the condenser.

[0017] In some embodiments, the heat exchange flow path includes a third heat exchange flow path, one end of which is connected to the discharge end of the compressor, and the other end is connected to the circulation loop between the inlet end of the evaporator and the first throttling valve member;

[0018] The control valve includes a second throttling valve member located in the third heat exchange flow path, and the heating medium flowing through the third heat exchange flow path is the high-temperature refrigerant discharged by the compressor.

[0019] In some embodiments, the refrigeration system further includes a superheat acquisition component and a controller. The superheat acquisition component is used to acquire the superheat of the compressor;

[0020] The controller is communicatively connected to the superheat acquisition component, the control valve, the first throttling valve member, and the regulating valve, and is capable of controlling the actions of the control valve, the first throttling valve member, and the regulating valve according to the acquisition result of the superheat acquisition component.

[0021] In a second aspect, the present application provides a testing device, including a testing terminal and the refrigeration system according to any one of the above embodiments. The refrigeration system is used to adjust the temperature of the testing terminal.

[0022] In the above refrigeration system and testing device, during actual application, when the compressor returns with liquid, the control valve can be used to control the heating medium to heat the refrigerant entering the evaporator and / or the refrigerant flowing out of the evaporator, so that the liquid-phase component in the refrigerant is gasified, in order to increase the dryness of the refrigerant entering the evaporator and / or increase the dryness of the refrigerant flowing out of the evaporator, thereby increasing the dryness of the return gas refrigerant and improving the situation of the compressor returning with liquid. Description of the Drawings

[0023] By reading the following detailed description of the preferred embodiments, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present application. Moreover, in all the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0024] Figure 1 It is a schematic diagram of the composition of the refrigeration system according to an embodiment of the present application.

[0025] Figure 2 It is a schematic diagram of the composition of the refrigeration system according to another embodiment of the present application.

[0026] Figure 3 It is a schematic diagram of the composition of the refrigeration system according to another embodiment of the present application.

[0027] Figure 4 It is a schematic diagram of the composition of the refrigeration system according to another embodiment of the present application.

[0028] Figure 5 It is a schematic diagram of the composition of the refrigeration system according to another embodiment of the present application.

[0029] The reference numerals in the specific embodiments are as follows:

[0030] 100, Refrigeration system; S, Circulation loop; S1, First flow section; S2, Second flow section; S3, Third flow section; 10, Compressor; 20, Condenser; 21, Cooling flow path; 22, Control valve; 30, First throttling valve component; 40, Evaporator; H, Heat exchange flow path; H1, First heat exchange flow path; H2, Second heat exchange flow path; H3, Third heat exchange flow path; 50, Control valve; 51, First valve; 52, Second valve; 53, Third valve; 54, Fourth valve; 55, Second throttling valve component; L1, First flow path; L2, Second flow path; 60, Heat exchanger; 70, Gas-liquid separator; 80, Superheat acquisition component; 90, Controller. Detailed implementation manner

[0031] To make the above objects, features, and advantages of the present application more obvious and understandable, the following will describe the detailed implementation manner of the present application in conjunction with the accompanying drawings. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0032] In the description of the present application, it should be understood that if present, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application.

[0033] In addition, if present, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0034] In this application, unless otherwise clearly defined and limited, if the terms "installed", "connected", "linked", "fixed", etc. appear, they should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] In this application, if it appears, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher level than the second feature in terms of horizontal height. The first feature being "under", "beneath" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower level than the second feature in terms of horizontal height.

[0036] It should be noted that if it appears, when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0037] In order to improve the problem of liquid carry - back in the compressor suction, the embodiments of this application first provide a refrigeration system.

[0038] Figure 1 It is a schematic diagram of the composition of the refrigeration system 100 according to an embodiment of this application. Figure 2 It is a schematic diagram of the composition of the refrigeration system 100 according to another embodiment of this application.

[0039] Combined with multiple embodiments of this application, please refer to Figure 1 and Figure 2, the refrigeration system 100 provided by the embodiments of the present application includes a compressor 10, a condenser 20, a first throttling valve member 30, and an evaporator 40 that are sequentially connected to form a circulation loop S. The condenser 20 includes a cooling flow channel 21 for circulating an external coolant, and a regulating valve 22 is provided on the cooling flow channel 21. The refrigeration system 100 further includes a heat exchange flow path H and a control valve 50. The heat exchange flow path H is used for circulating a heating medium, and the control valve 50 is used to control whether the heating medium heats the refrigerant entering the evaporator 40 and / or the refrigerant flowing out of the evaporator 40.

[0040] When the refrigeration system 100 refrigerates, the circulation process of the refrigerant on the circulation loop S is generally as follows: the compressor 10 discharges high-temperature and high-pressure gaseous refrigerant from its exhaust end. The high-temperature and high-pressure gaseous refrigerant exchanges heat with the coolant flowing in the cooling flow channel 21 at the condenser 20 and is cooled down. Then, it flows through the first throttling valve member 30, is throttled and cooled to become a low-temperature and low-pressure liquid refrigerant. The low-temperature and low-pressure liquid refrigerant cools the external heat load at the evaporator 40 and forms a low-temperature and low-pressure gaseous refrigerant. Finally, it returns to the suction end of the compressor 10 and is recompressed to form a high-temperature and high-pressure gaseous refrigerant, and so on in a cycle.

[0041] The coolant can be a coolant such as cooling water or fluorinated liquid. The regulating valve 22 is provided on the cooling flow channel 21 and is used to adjust the flow rate of the coolant on the cooling flow channel 21, thereby adjusting the condensation degree of the condenser 20 for the refrigerant. The regulating valve 22 generally selects a valve member with adjustable opening, and the specific type selection is not limited.

[0042] The heat exchange flow path H is used for circulating a heating medium. The heating medium can be but is not limited to hot water, a refrigerant with a higher temperature, etc. Optionally, the refrigeration system 100 further includes a heating medium supplier that is connected to the heat exchange flow path H and is used to supply a circulating heating medium to the heat exchange flow path H. The heating medium supplier can be a water heater or the like.

[0043] The heating medium flowing in the heat exchange flow path H can heat the refrigerant entering the evaporator 40 and / or the refrigerant flowing out of the evaporator 40. Specifically, the heating medium can indirectly heat the refrigerant by exchanging heat with the pipeline where the refrigerant to be heated is located through the heat exchange flow path H. At this time, the heating medium can be a refrigerant or hot water, etc. Specifically, the heating medium can also directly flow into the pipeline where the refrigerant to be heated is located through the heat exchange flow path H to directly heat the refrigerant. At this time, the heating medium is the same type of refrigerant as the refrigerant flowing in the circulation loop S, and it participates in the circulation of the refrigerant in the circulation loop S.

[0044] There are various setting positions for the control valve 50, and those skilled in the art can make an adaptive design for the layout position of the control valve 50 according to different settings of the heat exchange flow path H. In one example, the heat exchange pipeline is directly connected to the pipeline where the refrigerant to be heated is located, and the control valve 50 can be arranged on the heat exchange flow path H. In other examples, the heat exchange pipeline exchanges heat with the pipeline where the refrigerant to be heated is located without being connected, and the control valve 50 can be arranged on the pipeline where the refrigerant is located, or on the heat exchange pipeline.

[0045] In the above refrigeration system 100, during actual application, when the compressor 10 has liquid carried in the suction, the control valve 50 can be used to control the heating medium to heat the refrigerant entering the evaporator 40 and / or the refrigerant flowing out of the evaporator 40, so that the liquid-phase component in the refrigerant is vaporized, in order to increase the dryness of the refrigerant entering the evaporator 40 and / or increase the dryness of the refrigerant flowing out of the evaporator 40, thereby increasing the dryness of the suction refrigerant and improving the situation of the compressor 10 having liquid carried in the suction.

[0046] In other embodiments, the refrigeration system 100 may further include a gas-liquid separator 70, which is arranged on the circulation loop S and is connected to the suction end of the compressor 10. Regarding other configuration information of the refrigeration system 100, those skilled in the art can perform conventional designs to improve the operating stability of the refrigeration system 100, such as arranging an oil separator on the discharge side of the compressor 10, etc. For the specific selection of devices such as the compressor 10, the condenser 20, the first throttling valve member 30, and the evaporator 40, please refer to the conventional selection in the art and will not be limited here. It should be noted that the first throttling valve member 30 in the embodiments of the present application and the second throttling valve member 55 mentioned below can be selected from conventional components in the refrigeration field such as a throttle valve, an expansion valve, and an expansion throttle valve.

[0047] In some embodiments, the refrigeration system 100 includes a first flow path L1 connecting the inlet end of the evaporator 40 and the outlet end of the first throttling valve member 30, and a second flow path L2 connecting the outlet end of the evaporator 40 and the suction end of the compressor 10. The refrigeration system 100 further includes a heat exchanger 60. The heat exchanger 60 is arranged on the first flow path L1 and / or the second flow path L2, and the heat exchange flow path H flows through the heat exchanger 60. The heat exchanger 60 is used for the first flow path L1 or the second flow path L2 where it is located to exchange heat with the heat exchange flow path H.

[0048] Among them, the first flow path L1 and the second flow path L2 can be bypasses arranged in parallel with a certain flow segment on the circulation loop S respectively, or can be directly used as a certain flow segment on the circulation loop S.

[0049] At least one of the first flow path L1 and the second flow path L2 is provided with a heat exchanger 60. When the heat exchanger 60 is provided on the first flow path L1, the heat exchange flow path H exchanges heat with the first flow path L1 through the heat exchanger 60, realizing indirect heating of the refrigerant by the heating medium. Since the first flow path L1 is connected to the inlet end of the evaporator 40 and the outlet end of the first throttling valve member 30, when the heating medium in the heat exchange flow path H exchanges heat with the first flow path L1 through the heat exchanger 60, it can heat the refrigerant entering the evaporator 40, improve the dryness of the refrigerant entering the evaporator 40, and further improve the liquid carry-over in the suction of the compressor 10.

[0050] When the heat exchanger 60 is provided on the second flow path L2, the heat exchange flow path H exchanges heat with the second flow path L2 through the heat exchanger 60, realizing indirect heating of the refrigerant by the heating medium. Since the second flow path L2 is connected to the outlet end of the evaporator 40 and the suction end of the compressor 10, when the heating medium in the heat exchange flow path H exchanges heat with the second flow path L2 through the heat exchanger 60, it can heat the refrigerant flowing out of the evaporator 40, improve the dryness of the refrigerant flowing out of the evaporator 40, and further improve the liquid carry-over in the suction of the compressor 10.

[0051] Specifically in the embodiment, referring to Figure 1 and Figure 2 , the circulation loop S includes a first flow segment S1 connected between the inlet end of the evaporator 40 and the outlet end of the first throttling valve member 30, and a second flow segment S2 connected between the outlet end of the evaporator 40 and the suction end of the compressor 10. Among them, the first flow path L1 is arranged in parallel with the first flow segment S1, and the control valve 50 includes a first valve 51 located on the first flow path L1 and a second valve 52 located on the first flow segment S1; and / or, the second flow path L2 is arranged in parallel with the second flow segment S2, and the control valve 50 includes a third valve 53 located on the second flow path L2 and a fourth valve 54 located on the second flow segment S2.

[0052] In actual application, when the refrigeration system 100 is in a normal operating state, there is no liquid carry-over in the suction of the compressor 10, the second valve 52 and the fourth valve 54 are opened, and the first valve 51 and the third valve 53 are usually closed to enable the refrigerant to circulate normally in the circulation loop S. If the first valve 51 and the third valve 53 are not closed, a control valve 50 can be provided on the heat exchange flow path H to control the heating medium so that it cannot heat the refrigerant on the first flow path L1 and the second flow path L2.

[0053] When the compressor 10 has liquid carried in the suction line, the first valve 51 and / or the third valve 53 are opened, and the second valve 52 and the fourth valve 54 can be selectively closed, not closed, or the flow rate can be reduced, so that the refrigerant can flow into the first flow path L1 and / or the second flow path L2, realizing heat exchange between the heating medium in the heat exchange flow path H and the refrigerant flowing in the first flow path L1 and / or the second flow path L2, increasing the temperature of the refrigerant entering the evaporator 40 and / or increasing the temperature of the refrigerant flowing out of the evaporator 40, and improving the problem of liquid carried in the suction line of the compressor 10.

[0054] At this time, the first flow path L1 and the second flow path L2 are used as bypasses of the circulation loop S, with a simple structure, easy to implement, and will not affect the normal operation of the refrigeration system 100.

[0055] Specifically, in one embodiment, the first valve 51 and the second valve 52 are not opened simultaneously, and the third valve 53 and the fourth valve 54 are not opened simultaneously. When the compressor 10 has liquid carried in the suction line, the first valve 51 and the third valve 53 are opened, and the second valve 52 and the fourth valve 54 are closed. In this way, when the compressor has liquid carried in the suction line, all the refrigerant can be controlled to flow through the first flow path L1 and / or the second flow path L2, and the heat exchange effect of the heating medium on the refrigerant is good, which can better improve the problem of liquid carried in the suction line of the compressor 10.

[0056] Of course, in other embodiments, the first flow section S1 can be used as the first flow path L1, the second flow section S2 can be used as the second flow path L2, and the control valve 50 is arranged on the heat exchange flow path H, and the control valve 50 is usually not arranged on the first flow path L1 and the second flow path L2. In order not to affect the normal operation of the refrigeration system 100 and the normal circulation of the refrigerant on the circulation loop S, at this time, the heating medium (such as hot water) independently supplied by the heating medium supplier can flow in the heat exchange flow path H.

[0057] Figure 3 It is a schematic diagram of the composition of the refrigeration system 100 according to another embodiment of the present application.

[0058] Specifically, in one embodiment, referring to Figure 3 , the heat exchange flow path H includes a first heat exchange flow path H1, the first heat exchange flow path H1 is connected between the exhaust end of the compressor 10 and the condenser 20, the first heat exchange flow path H1 flows through the heat exchanger 60 and exchanges heat with the first flow path L1 and / or the second flow path L2, and the heating medium flowing through the first heat exchange flow path H1 is the high-temperature refrigerant discharged from the compressor 10.

[0059] Among them, the temperature of the high-temperature refrigerant discharged by the compressor 10 is higher than that of the refrigerant at other positions on the circulation circuit S. During the operation of the refrigeration system 100, if the compressor 10 sucks liquid, the high-temperature refrigerant discharged by the compressor 10 can flow into the first heat exchange flow path H1, and indirectly exchange heat with the refrigerant in the first flow path L1 and / or with the refrigerant in the second flow path L2 in the heat exchanger 60, thereby heating the refrigerant flowing into the evaporator 40 and / or the refrigerant flowing out of the evaporator 40.

[0060] At this time, the refrigeration system 100 does not need to be additionally equipped with a heating medium supplier, but directly uses the high-temperature refrigerant discharged by the compressor 10 as the heating medium, which can simplify the structure of the refrigeration system 100, reduce the configuration cost, and has high energy utilization rate.

[0061] Specifically in the embodiment, refer to Figure 3 , the circulation circuit S includes a third flow section S3 between the exhaust end of the compressor 10 and the condenser 20, and the third flow section S3 serves as the first heat exchange flow path H1. The first flow path L1 that exchanges heat with the first heat exchange flow path H1 is arranged in parallel with the circulation circuit S, and the second flow path L2 that exchanges heat with the first heat exchange flow path H1 is arranged in parallel with the circulation circuit S.

[0062] That is to say, directly using a certain flow section of the circulation circuit S as the first heat exchange flow path H1 can simplify the pipeline layout of the refrigeration system 100 and reduce the configuration cost of the refrigeration system 100.

[0063] It should be noted that when the third flow section S3 serves as the first heat exchange flow path H1, a control valve 50 may not be provided thereon, and the communication between the exhaust end of the compressor 10 and the condenser 20 is maintained. At this time, the first flow path L1 that exchanges heat with the first heat exchange flow path H1 serves as a bypass of the first flow section S1 in the circulation circuit S and is arranged in parallel with the first flow section S1, and the second flow path L2 that exchanges heat with the first heat exchange flow path H1 serves as a bypass of the second flow section S2 in the circulation circuit S and is arranged in parallel with the second flow section S2. In this way, when the compressor 10 does not suck liquid, the first flow path L1 and the second flow path L2 can be cut off by the control valve 50 thereon, while the first flow section S1 and the second flow section S2 are kept unblocked by the control valve 50 thereon to ensure normal refrigeration of the refrigeration system 100.

[0064] Of course, in other embodiments, if the first heat exchange flow path H1 is arranged in parallel with the third flow section S3, a control valve 50 may be provided on the first heat exchange flow path H1, and it is not limited whether the first flow path L1 and the second flow path L2 are arranged in parallel with the circulation circuit S.

[0065] Figure 4 It is a schematic diagram of the composition of the refrigeration system 100 according to another embodiment of the present application.

[0066] In some embodiments, please refer to Figure 4, the heat exchange flow path H includes a second heat exchange flow path H2. The second heat exchange flow path H2 flows through the heat exchanger 60 and exchanges heat with the first flow path L1 and / or the second flow path L2. The second heat exchange flow path H2 is connected to the outlet of the cooling flow channel 21. The heating medium flowing through the second heat exchange flow path H2 is the coolant that absorbs heat in the condenser 20.

[0067] The coolant flowing in the cooling flow channel 21 absorbs the heat of the high-temperature refrigerant discharged by the compressor 10 in the condenser 20 and then its temperature rises. The coolant with the increased temperature enters the second heat exchange flow path H2 and exchanges heat with the refrigerant in the first flow path L1 and / or the second flow path L2 through the heat exchanger 60, indirectly heating the refrigerant.

[0068] In this way, the heat of the coolant can be used to heat the refrigerant, and the energy utilization rate is high.

[0069] When indirectly heating the refrigerant with the heated coolant flowing in the second heat exchange flow path H2, if the first flow path L1 and the second flow path L2 are arranged in parallel with the circulation loop S as a bypass, since the first valve 51 and the third valve 53 are respectively arranged on the first flow path L1 and the second flow path L2, the control valve 50 is usually not arranged on the second heat exchange flow path H2. If the first flow path L1 and the second flow path L2 are part of the circulation loop S and the second heat exchange flow path H2 is only connected to the outlet end of the cooling flow channel 21 rather than being constituted by the cooling flow channel 21, the control valve 50 can be arranged on the second heat exchange flow path H2 to control whether the heating medium flows through the second heat exchange flow path H2 to heat the refrigerant. Correspondingly, the control valve 50 can be not arranged on the first flow path L1 and the second flow path L2.

[0070] Figure 5 It is a schematic diagram of the composition of the refrigeration system 100 according to another embodiment of the present application.

[0071] In some embodiments, please refer to Figure 5 , the heat exchange flow path H includes a third heat exchange flow path H3. One end of the third heat exchange flow path H3 is connected to the exhaust end of the compressor 10, and the other end is connected to the circulation loop S between the inlet end of the evaporator 40 and the first throttling valve member 30. The control valve 50 includes a second throttling valve member 55 located on the third heat exchange flow path H3. The heating medium flowing through the third heat exchange flow path H3 is the high-temperature refrigerant discharged by the compressor 10.

[0072] When the compressor 10 does not suck refrigerant with liquid, the second throttling valve member 55 can be controlled to close, and the high-temperature refrigerant discharged from the compressor 10 does not flow in the third heat exchange flow path H3. When the compressor 10 sucks refrigerant with liquid, the second throttling valve member 55 can be controlled to open. A part of the high-temperature refrigerant discharged from the compressor 10 flows to the third heat exchange flow path H3, and after being throttled and cooled by the second throttling valve member 55, the first refrigerant is obtained. Another part of the high-temperature refrigerant discharged from the compressor 10 flows to the condenser 20 to be cooled first, and then is throttled and cooled by the first throttling valve member 30 to obtain the second refrigerant. The temperature of the first refrigerant is higher than that of the second refrigerant. The two are mixed before entering the evaporator 40. The first refrigerant directly heats the second refrigerant, increasing the dryness of the refrigerant entering the evaporator 40 and improving the situation that the compressor 10 sucks refrigerant with liquid.

[0073] Since the first refrigerant is directly mixed with the second refrigerant, the second throttling valve member 55 provided on the third heat exchange flow path H3 serves as the control valve 50, which can prevent the temperature of the refrigerant in the circulation loop S from being too high, thereby avoiding too high a suction temperature of the compressor 10 and reducing the failure rate of the compressor 10.

[0074] In some embodiments, please refer to Figure 1 and Figure 2 , the refrigeration system 100 further includes a superheat acquisition member 80 and a controller 90. The superheat acquisition member 80 is used to acquire the superheat of the compressor 10. The controller 90 is communicatively connected to the superheat acquisition member 80, the control valve 50, the first throttling valve member 30, and the regulating valve 22, and can control the control valve 50, the first throttling valve member 30, and the regulating valve 22 to act according to the acquisition result of the superheat acquisition member 80.

[0075] The superheat acquisition member 80 is arranged on the suction pipe and / or the discharge pipe of the compressor 10. When the superheat acquisition member 80 is arranged on the suction pipe of the compressor 10, the suction superheat of the compressor 10 is acquired. When the superheat acquisition member 80 is arranged on the discharge pipe of the compressor 10, the discharge superheat of the compressor 10 is acquired. Specifically, the superheat acquisition member 80 may include a pressure acquisition part and a temperature acquisition part. The pressure acquisition part is used to acquire the pressure of the refrigerant in the pipeline where it is located, and the temperature acquisition part is used to acquire the temperature of the refrigerant in the pipeline where it is located. The value of the superheat can be determined by the difference between the temperature value acquired by the temperature acquisition part and the saturation temperature corresponding to the pressure value acquired by the pressure acquisition part.

[0076] The controller 90 can determine whether there is liquid carry - back in the suction of the compressor 10 based on the superheat of the compressor 10. Specifically, when the suction superheat of the compressor 10 is lower than the lower limit value of the suction superheat, or when the discharge superheat of the compressor 10 is lower than the lower limit value of the discharge superheat, the controller 90 can determine that there is liquid carry - back in the suction of the compressor 10. When there is liquid carry - back in the suction of the compressor 10, the controller 90 can control the actions of the control valve 50, the first throttling valve member 30, the regulating valve 22, etc., to improve the liquid carry - back in the suction of the compressor 10.

[0077] Specifically, when there is liquid carry - back in the suction of the compressor 10, the controller 90 can control the operation of each control valve 50 to heat the refrigerant entering the evaporator 40 or the refrigerant flowing out of the evaporator 40 with the heating medium. Figure 1 and Figure 2 The dashed lines in [figures] indicate the communication connection between the controller 90 and some components. For example, in Figure 3 and Figure 4 In the illustrated embodiment, the refrigeration system 100 includes a second flow path L2 and a second flow section S2 arranged in parallel. If there is liquid carry - back in the suction of the compressor 10, the controller 90 can control the third valve 53 to open and the fourth valve 54 to close, so that the heating medium in the heat exchange flow path H heats the refrigerant in the second flow path L2 through the heat exchanger 60, improving the liquid carry - back in the suction of the compressor 10. Another example, in Figure 5 In the illustrated embodiment, the refrigeration system 100 includes a third heat exchange flow path H3, and a second throttling valve member 55 is provided on the third heat exchange flow path H3. If there is liquid carry - back in the suction of the compressor 10, the controller 90 controls the second throttling valve member 55 to open. After the high - temperature refrigerant discharged from the compressor 10 is throttled and cooled by the second throttling valve member 55, the dryness of the refrigerant entering the evaporator 40 is increased, improving the liquid carry - back in the suction of the compressor 10.

[0078] Specifically, when there is liquid carry - back in the suction of the compressor 10, the controller 90 can also control the first throttling valve member 30 and / or the regulating valve 22 to reduce the opening degree. When the opening degree of the first throttling valve member 30 is reduced, the amount of refrigerant entering the evaporator 40 decreases, and further the amount of liquid refrigerant generated in the evaporator 40 can be reduced, improving the liquid carry - back in the suction of the compressor 10. When the opening degree of the regulating valve 22 is reduced, the heat exchange efficiency of the condenser 20 for the high - temperature and high - pressure gaseous refrigerant discharged from the compressor 10 decreases, and the refrigerant temperature in the refrigerant flowing out of the condenser 20 increases. In the refrigerant throttled and cooled by the self - throttling member, the content of gaseous refrigerant increases and the content of liquid refrigerant decreases, resulting in a decrease in the amount of liquid refrigerant entering the evaporator 40, and thus improving the liquid carry - back in the suction of the compressor 10.

[0079] In addition, the embodiment of the present application also provides a test device, including a test terminal and the refrigeration system 100 in any of the above - mentioned embodiments. The refrigeration system 100 is used to adjust the temperature of the test terminal. This test device has the beneficial effects in the above - mentioned embodiments and will not be elaborated here.

[0080] Generally, the test device further includes a heating device, which cooperates with the refrigeration system 100 to adjust the temperature of the test terminal through heat and cold confrontation. For the setting method of the heating device, please refer to the conventional setting, which is not limited herein.

[0081] The test device can be a sorting test device, a probe station device, an aging test device, etc., and is used for performance testing of semiconductor devices such as chips or wafers. The test terminal can be a test head, a test chamber, a preheating plate, a shuttle, a wafer carrier, etc. The test chamber is a cavity structure for providing a test space, and multiple chips or wafers can be stored in its test space. The evaporator 40 of the refrigeration system 100 can be arranged in the test space to adjust the test temperature of the test space. The test head refers to a head structure that can press down and abut against the chip, and directly contacts the chip to control the temperature of the chip. A refrigerant flow path can be arranged in the evaporator 40 of the refrigeration system 100, and the refrigerant flowing through the evaporator 40 is used to cool the refrigerant in the refrigerant flow path. The refrigerant flow path can be connected to the pipeline in the test head, and the temperature of the test head is adjusted through the refrigerant. The preheating plate refers to a structure for carrying the chip and adjusting the temperature of the chip. The refrigerant flow path can be connected to the pipeline in the preheating plate, and the temperature of the preheating plate is adjusted through the refrigerant. The shuttle refers to a structure for transporting the chip. The refrigerant flow path can be connected to the pipeline in the shuttle, and the temperature of the shuttle is adjusted through the refrigerant. The wafer carrier refers to a structure for carrying the wafer by adsorption. The refrigerant flow path can be connected to the pipeline in the wafer carrier, and the test temperature of the wafer is adjusted through the refrigerant.

[0082] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0083] The above-described embodiments only represent several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be construed as a limitation on the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several deformations and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A refrigeration system (100), characterized in that: include: A compressor (10), a condenser (20), a first throttle valve member (30) and an evaporator (40) are sequentially connected to form a circulation loop (S), wherein the condenser (20) comprises a cooling channel (21) for circulating an external cooling liquid, and a regulating valve (22) is provided on the cooling channel (21); The refrigeration system (100) further comprises a heat exchange flow path (H) and a control valve (50), wherein the heat exchange flow path (H) is used to circulate a heating medium; and the control valve (50) is used to control whether the heating medium heats the refrigerant entering the evaporator (40) and / or the refrigerant flowing out of the evaporator (40).

2. The refrigeration system (100) according to claim 1, characterized in that: The refrigeration system (100) comprises a first flow path (L1) connecting the inlet end of the evaporator (40) and the outlet end of the first throttle valve member (30), and a second flow path (L2) connecting the outlet end of the evaporator (40) and the return air end of the compressor (10), and the refrigeration system (100) further comprises a heat exchanger (60); The heat exchanger (60) is provided on the first flow path (L1) and / or the second flow path (L2), the heat exchange flow path (H) flows through the heat exchanger (60), and the heat exchanger (60) is used for heat exchange between the first flow path (L1) or the second flow path (L2) and the heat exchange flow path (H).

3. The refrigeration system (100) according to claim 2, characterized in that: The circulation loop (S) comprises a first flow section (S1) connected between the inlet end of the evaporator (40) and the outlet end of the first throttle valve member (30), and a second flow section (S2) connected between the outlet end of the evaporator (40) and the return air end of the compressor (10); The first flow path (L1) is arranged in parallel with the first flow section (S1), and the control valve (50) includes a first valve (51) located in the first flow path (L1) and a second valve (52) located in the first flow section (S1); and / or the second flow path (L2) is arranged in parallel with the second flow section (S2), and the control valve (50) includes a third valve (53) located in the second flow path (L2) and a fourth valve (54) located in the second flow section (S2).

4. The refrigeration system (100) according to claim 3, characterized in that: The first valve (51) and the second valve (52) are not opened at the same time, and the third valve (53) and the fourth valve (54) are not opened at the same time.

5. The refrigeration system (100) according to any one of claims 2 to 4, characterized in that: The heat exchange flow path (H) includes a first heat exchange flow path (H1), the first heat exchange flow path (H1) is connected between the exhaust end of the compressor (10) and the condenser (20), the first heat exchange flow path (H1) flows through the heat exchanger (60) and exchanges heat with the first flow path (L1) and / or the second flow path (L2), and the heating medium flowing through the first heat exchange flow path (H1) is the high-temperature refrigerant discharged from the compressor (10).

6. The refrigeration system (100) according to claim 5, characterized in that: The circulation loop (S) comprises a third flow section (S3) located between the exhaust end of the compressor (10) and the condenser (20), and the third flow section (S3) serves as the first heat exchange flow path (H1); The first flow path (L1) for exchanging heat with the first heat exchange flow path (H1) is arranged in parallel with the circulation loop (S), and the second flow path (L2) for exchanging heat with the first heat exchange flow path (H1) is arranged in parallel with the circulation loop (S).

7. The refrigeration system (100) according to any one of claims 2 to 4, characterized in that: The heat exchange flow path (H) includes a second heat exchange flow path (H2), the second heat exchange flow path (H2) flows through the heat exchanger (60) and exchanges heat with the first flow path (L1) and / or the second flow path (L2), the second heat exchange flow path (H2) is connected to the outlet of the cooling flow channel (21), and the heating medium flowing through the second heat exchange flow path (H2) is a cooling liquid that absorbs heat from the condenser (20).

8. The refrigeration system (100) according to any one of claims 1 to 4, characterized in that: The heat exchange flow path (H) comprises a third heat exchange flow path (H3), one end of the third heat exchange flow path (H3) is connected to the exhaust end of the compressor (10), and the other end is connected to the circulation loop (S) located between the inlet end of the evaporator (40) and the first throttle valve member (30); The control valve (50) includes a second throttle valve element (55) located in the third heat exchange flow path (H3), and the heating medium flowing in the third heat exchange flow path (H3) is the high-temperature refrigerant discharged from the compressor (10).

9. The refrigeration system (100) according to any one of claims 1 to 4, characterized in that: The refrigeration system (100) further comprises a superheat acquisition component (80) and a controller (90), wherein the superheat acquisition component (80) is used to acquire the superheat of the compressor (10); The controller (90) is communicatively connected with the superheat acquisition component (80), the control valve (50), the first throttle valve component (30), and the regulating valve (22), and is capable of controlling the operation of the control valve (50), the first throttle valve component (30), and the regulating valve (22) according to an acquisition result of the superheat acquisition component (80).

10. A testing device, characterized in that: It comprises a test terminal and a refrigeration system (100) according to any one of claims 1 to 9, wherein the refrigeration system (100) is used to adjust the temperature of the test terminal.

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