Furnace tube

Abstract

The utility model discloses a furnace tube which comprises an outer furnace tube, an inner furnace tube, an upper furnace cover and a lower furnace door, the upper furnace cover is mounted at the upper end of the outer furnace tube, the upper end of the inner furnace tube is hung on the upper furnace cover, the lower end of the inner furnace tube is opened, and a supporting table top is arranged at the opening, so that the inner furnace tube can be upwards inserted into the outer furnace tube from the bottom of the outer furnace tube for mounting; the lower furnace door is installed at the lower ends of the outer furnace tube and the inner furnace tube, a center hole is formed in the middle of the lower furnace door and used for penetrating through a supporting base of the inner furnace tube, and an axially-through magnetic fluid sealing assembly is installed at the lower ends of the lower furnace door and the inner furnace tube in a sealed mode. The opening is formed in the lower end of the inner furnace tube, the connecting piece is arranged at the upper end of the inner furnace tube, and the supporting base can be installed at the lower end of the inner furnace tube, so that the inner furnace tube can be inserted from the bottom of the vertical furnace to complete installation, meanwhile, the upper end of the inner furnace tube is directly connected with the upper furnace cover in a hoisting mode, sealing of the upper furnace cover and the outer furnace tube is convenient, and the installation mode is more convenient. Meanwhile, the sealing requirement is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of solar energy, in particular to a furnace tube. Background Art

[0002] With the current spread of the photovoltaic industry, there are two types of vertical furnaces and horizontal furnaces in the processes of diffusion, oxidation, doping, PECVD, LPCVD, etc. The structures of both types require wafers to be loaded into specific carriers and transferred into the reaction cavity for processing. By introducing specific reaction gases, specific coating, diffusion, oxidation, and thin film deposition processes can be achieved on the wafers. In the existing two-layer furnace tube design, the two ends of the double-layer furnace tube are sealed respectively by a base and a top wall to form a straight-through cavity. The wafers to be processed are placed in the straight-through cavity, and the straight-through cavity is heated by the heating layer on the double-layer furnace tube, or the furnace body is set as an inner and outer furnace body with the inner furnace cavity closed.

[0003] In the prior art, when installing the inner and outer furnace tubes, due to the structural limitations of the inner furnace tube, for example, in the existing patent CN116499251B, the top of the inner furnace tube is open and the bottom is closed and is equipped with heating elements. In order to avoid damaging the heating components, only the inner furnace tube can be hoisted from the top and inserted into the outer furnace tube from the top. However, if the height space at the existing processing site is limited, the hoisting difficulty during the installation of the inner furnace tube increases or normal installation cannot be carried out, greatly increasing the assembly difficulty. Summary of the Utility Model

[0004] In order to solve the technical problem that the inner furnace tube can only be hoisted downward from the top of the outer furnace tube in the above-mentioned prior art, the utility model provides a furnace tube.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The utility model provides a furnace tube, which includes an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door, and a rotating device;

[0007] The upper furnace cover is installed at the upper end of the outer furnace tube, the inner furnace tube is installed inside the outer furnace tube, the upper end of the inner furnace tube is hoisted on the upper furnace cover, and the lower end of the inner furnace tube is open and a support table is arranged at the opening, so that the inner furnace tube can be inserted into the outer furnace tube from the bottom upward for installation and support;

[0008] The lower furnace door is installed at the lower ends of the outer furnace tube and the inner furnace tube. A central hole is provided in the middle of the lower furnace door for passing through the support base of the inner furnace tube. A magnetohydrodynamic sealing assembly with an axially penetrating seal is installed between the lower furnace door and the lower end of the inner furnace tube. The upper and lower ends of the accommodation space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber. Heating sources for heating the sealed chamber are provided on the inner furnace tube and the outer furnace tube. The rotating device is provided with a plurality of carrier placement positions with adjustable positions and angles corresponding to the sealed chamber. The transmission component that drives the carrier to rotate in the sealed chamber of the rotating device is connected to the transmission shaft of the magnetohydrodynamic sealing assembly.

[0009] In the first embodiment, the upper end of the inner furnace tube is open, and a ring of support flanges is provided on the inner wall. The support flanges are hoisted and connected to the upper furnace cover.

[0010] In the second embodiment, the upper end of the inner furnace tube is closed and protrudes upward to form a hemispherical top cover. An annular connecting seat is provided on the outer wall surface of the top cover and extends upward. A ring of support flanges is provided on the inner wall of the connecting seat. The support flanges are hoisted and connected to the upper furnace cover.

[0011] Preferably, the lower end face of the inner furnace tube is flush with the lower end face of the outer furnace tube, or the lower end face of the inner furnace tube exceeds the lower end face of the outer furnace tube, or the lower end face of the outer furnace tube exceeds the lower end face of the inner furnace tube.

[0012] Furthermore, a ring of annular steps protrudes from the inner wall at the open end of the lower end of the inner furnace tube, or a support flange is provided to form the support table surface.

[0013] Preferably, a hanging seat is connected between the upper end of the inner furnace tube and the upper furnace cover.

[0014] Furthermore, an outer sealing flange is provided on the outer wall of the upper end of the outer furnace tube. The upper furnace cover covers the upper end faces of the outer furnace tube and the inner furnace tube, and its outer edge is sealingly connected to the outer sealing flange; the outer edge of the lower furnace door is sealingly connected to the step at the lower end of the outer furnace tube, and the inner edge is sealingly connected to the magnetohydrodynamic sealing assembly.

[0015] Furthermore, the outer ends of the upper furnace cover and the lower furnace door, which are away from the accommodation space, protrude outward to form spherical protrusions. A cavity is provided inside the upper furnace cover, and a plurality of reinforcing ribs are connected between the upper and lower inner walls of the cavity.

[0016] The rotating device includes: a boat support base provided in the sealed chamber of the furnace tube and having a plurality of carrier placement positions. The boat support base is connected to the transmission shaft of the magnetohydrodynamic sealing assembly; a rotation power source located outside the sealed chamber and connected to the transmission shaft to drive the boat support base to rotate.

[0017] In the first embodiment, the boat support base includes:

[0018] A rotating base, which is located at the bottom of the sealed chamber and is connected to the transmission shaft;

[0019] A hanging plate, which is vertically arranged on the rotating base, and a plurality of vehicle placement positions for hanging the vehicle are arranged on the hanging plate.

[0020] In the second embodiment, the boat support base includes:

[0021] A rotating base, which has a plurality of vehicle placement positions for the vehicle boat to pass through or be placed, and is connected to the transmission shaft;

[0022] Multiple pairs of bearing members, each pair of bearing members is located on both side edges of a vehicle placement position and is foldably arranged on the rotating base;

[0023] When the bearing member is switched to the folded state, the vehicle can pass through the corresponding vehicle placement position of the bearing member from the bottom upwards; when the bearing member is switched to the unfolded state, the vehicle can be placed on the bearing member.

[0024] The magnetic fluid sealing assembly is annular, and a corresponding central hole is also provided in the middle, and it is divided into an inner ring part, an outer ring part, and a transmission shaft in an annular shape located between the inner ring part and the outer ring part; its inner ring part is hermetically connected to the support base at the bottom of the inner furnace tube, the outer ring part is hermetically connected to the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

[0025] Furthermore, a plurality of furnace openings penetrating the lower furnace door are provided on the lower furnace door, the size and shape of the furnace openings match the size and shape of the side surface of the vehicle, and a furnace cover is provided corresponding to each furnace opening, and the furnace cover is connected with a driving structure, and the driving structure is used to drive the furnace cover to open or close relative to the furnace opening.

[0026] Furthermore, an inner heat source is provided inside the inner furnace tube, an outer heat source is provided outside the outer furnace tube, the inner heat source is divided into multiple groups of independent heating sections, and a heat dissipation device is correspondingly provided around the outer heat source and the inner heat source.

[0027] Compared with the prior art, the present utility model has the following advantages:

[0028] 1. By providing an opening at the lower end of the inner furnace tube and a connecting piece at the upper end of the inner furnace tube, the support base can be installed at its lower end, so that the inner furnace tube can be inserted from the bottom of the vertical furnace for installation. At the same time, the upper end of the inner furnace tube is directly hoisted and connected to the upper furnace cover, which is convenient for the sealing between the upper furnace cover and the outer furnace tube. The installation method is more convenient, and at the same time, the sealing requirement is reduced.

[0029] 2. The carrier inside the furnace tube is placed on a rotatable boat support base, enabling the carrier to adjust its position and angle inside the furnace. When reaction gas is introduced into the sealed chamber or there are temperature differences during heating, the gas field and thermal field inside the sealed chamber can be made uniform, improving the overall process yield.

[0030] 3. The lower furnace door and the upper furnace cover are designed as outwardly convex drum surfaces, with better pressure-bearing capacity and not easily deformed.

[0031] 4. The bottom is sealed by a magnetohydrodynamic sealing component, which can place the driving components of the boat support base outside, while ensuring that the sealed chamber through which the reaction gas passes remains sealed.

[0032] 5. The lower furnace door is provided with multiple small furnace doors. When loading and unloading the carrier, a single small furnace door can be opened, avoiding heat loss inside the furnace and affecting the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0034] Figure 1 It is the front view in the embodiment of the present invention;

[0035] Figure 2 It is the A-A cross-sectional view in the embodiment of the present invention;

[0036] Figure 3 It is the cross-sectional view of the furnace tube part in the embodiment of the present invention;

[0037] Figure 4 It is the cross-sectional view of the furnace tube part in the embodiment of the present invention;

[0038] Figure 5 It is the cross-sectional view of the furnace tube part in the embodiment of the present invention;

[0039] Figure 6 It is the present invention Figure 2 The enlarged view of the lower part;

[0040] Figure 7 It is the position relationship diagram of the furnace tube heating source and the heat dissipation device from the perspective of the horizontal cross-section of the present invention;

[0041] Figure 8 It is the front view in the first embodiment of the boat support base of the present invention;

[0042] Figure 9Structural diagram of the second embodiment of the boat support base of the present utility model;

[0043] Figure 10 Stereoscopic structural diagram of the second embodiment of the boat support base of the present utility model;

[0044] Figure 11 Stereoscopic structural diagram of the bottom view of the present utility model;

[0045] Figure 12 Stereoscopic structural diagram of the lower furnace door in the embodiment of the present utility model;

[0046] Figure 13 Structural diagram of the lower furnace door and the driving structure in the embodiment of the present utility model;

[0047] Figure 14 Stereoscopic structural diagram of the driving structure cooperating with the furnace cover in the embodiment of the present utility model;

[0048] Figure 15 Structural diagram of the driving structure cooperating with the furnace cover in the embodiment of the present utility model;

[0049] Figure 16 Structural diagram of the driving structure cooperating with the furnace tube in the embodiment of the present utility model;

[0050] 1. Furnace tube;

[0051] 11. Outer furnace tube; 111. Bracket flange; 112. Outer sealing flange; 12. Inner furnace tube; 121. Support flange; 122. Annular step; 123. Annular heat insulation pad; 125. Top cover; 126. Connection seat; 13. Sealed chamber;

[0052] 2. Upper furnace cover;

[0053] 21. Reinforcing rib; 22. Lower layer plate; 23. Inner side layer plate; 24. Outer side layer plate;

[0054] 3. Lower furnace door;

[0055] 31. Furnace opening; 311. First convex block; 312. Annular cavity;

[0056] 32. Furnace cover; 321. Second convex block; 322. Mounting plate; 323. First guide post; 324. Weight reduction hole;

[0057] 33. Driving structure; 331. Rotating driving device; 332. Coupling; 333. Rotating shaft; 334. Rotating plate; 335. Pushing and pulling driving device; 336. Installation area; 337. Second guiding column; 338. First electrical interface; 339. Second electrical interface; 340. Connecting plate; 341. First partition; 342. Second partition; 343. Third partition; 344. First accommodating space; 345. Second accommodating space;

[0058] 5. Boat support base; 50. Carrier; 591. Gear;

[0059] 51. Rotating base; 52. Fixed ring; 53. Hanging plate; 54. Hook hole;

[0060] 501. Carrier placement position; 55. Bearing member; 551. Bearing fixing part; 552. Bearing movable part; 553. Rotating shaft;

[0061] 6. Magnetic fluid sealing assembly;

[0062] 61. Outer ring part; 62. Inner ring part; 59. Transmission shaft;

[0063] 71. External heat source; 72. Internal heat source; 73. Heat dissipation device; 74. Water cooling interface. Detailed implementation manners

[0064] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0065] The principle and structure of the present utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0066] Existing vertical furnaces generally have inner and outer double-layer furnace tubes. When installing the inner and outer furnace tubes, due to the structural limitations of the inner furnace tube, for example, in the existing patent CN116499251B, the top of the inner furnace tube is open and the bottom is closed, and at the same time, a heating element is installed at the bottom. The inner furnace tube can only be hoisted at the top opening and inserted into the outer furnace tube from the top. However, if the height space at the existing processing site is limited, the hoisting difficulty during the installation of the inner furnace tube increases or normal installation cannot be carried out, greatly increasing the assembly difficulty.

[0067] In response to this, as Figure 1 , 2 , Figures 7 and 7 show, the present utility model proposes a furnace tube 1, including an outer furnace tube 11, an inner furnace tube 12, an upper furnace cover 2, a lower furnace door 3 and a rotating device;

[0068] Both the inner and outer furnace tubes are circular tubes. The upper and lower ends of the outer furnace tube 11 are open, and the inner furnace tube 12 is installed inside. After installation, a containment space is formed between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube;

[0069] The lower end of the inner furnace tube 12 is open. An internal heating source 72 is provided inside the inner furnace tube 12. A connecting member for hoisting connection with the upper furnace cover 2 is provided at its upper end, and a support table is provided at the lower end opening. The support table can install a support base, so that the inner furnace tube 12 can be inserted into the outer furnace tube 11 from the bottom of the outer furnace tube 11 for installation;

[0070] The upper furnace cover 2 and the lower furnace door 3 are respectively installed at the upper and lower ends of the outer furnace tube 11 and the inner furnace tube 12, and are used to seal the upper and lower ends of the containment space between the inner furnace tube 12 and the outer furnace tube 11 to form a sealed chamber 13 (while a sealing component is required), so as to meet the process requirement of vacuum pumping; and an internal heating source 72 is provided inside the inner furnace tube 12, and an external heating source 71 is provided outside the outer furnace tube 11. The internal and external heating sources can heat the sealed chamber 13 inside the furnace tube 1 through the tube walls of the inner and outer furnace tubes;

[0071] The rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber. When the rotating device rotates, it drives the carriers on the carrier placement positions to adjust their positions and angles inside the sealed chamber, so as to make the wafers on the carriers heat evenly.

[0072] In the present utility model, by providing an inner furnace tube with an open lower end, and a connecting member at the upper end of the inner furnace tube, and a support table at the lower end opening for installing a support base, the installation of the inner furnace tube can be completed by inserting it from the bottom of the vertical furnace. At the same time, the upper end of the inner furnace tube is directly hoisted and connected to the upper furnace cover, which is convenient for the sealing between the upper furnace cover and the outer furnace tube. The installation method is more convenient, and at the same time, the sealing requirement is reduced. And the carriers inside the furnace tube are placed on a rotatable rotating device, so that the carriers can adjust their positions and angles inside the furnace. When reaction gas is introduced into the sealed chamber or there is a temperature difference during heating, the gas field and thermal field inside the sealed chamber are uniform, improving the overall process yield.

[0073] There are multiple embodiments for the upper end structure of the inner furnace tube. Now, two specific embodiments are proposed:

[0074] The first embodiment is as Figure 2 、 4As shown in the figure, the upper end of the inner furnace tube 12 is open, that is, the inner furnace tube is an axially penetrating furnace tube, and a ring of support flanges 121 is provided on the inner wall at the upper end opening of the inner furnace tube 12. The support flanges are connecting parts, enabling the inner furnace tube to be directly connected to a hanging seat (not shown in the figure) or a connector (not shown in the figure) on the support flange 121. The connector can be used for hoisting the inner furnace tube during installation. After hoisting is completed, the connector can be disassembled and then the hanging seat can be installed to be directly connected to the inner side of the upper furnace cover 2, so that the upper end of the inner furnace tube 12 is hung on the upper furnace cover 2, (or the connector is directly connected to the upper furnace cover).

[0075] It should be noted that although the connection relationship diagram between the inner furnace tube 12 and the upper furnace cover 2 is not directly shown in the figure, the bracket connected by screws and flanges can be easily implemented by those skilled in the art. The main purpose of the present invention is to show that the upper furnace cover 2 is directly and hermetically connected to the outer furnace tube 11, and the inner furnace tube 12 is located inside the upper furnace cover, thereby reducing the number of sealing connection components required at the upper end of the furnace tube and lowering the installation difficulty.

[0076] Specifically, a connector or a hanging seat for hanging is installed on the support flange by directly connecting with screws. The hanging seat is directly fixed to the inner side of the upper furnace cover 2 by screws to ensure that the entire inner furnace tube 12 is stably hung during use.

[0077] Second embodiment, as Figure 3 shown, the upper end of the inner furnace tube 12 is closed and has a hemispherical top cover 125 protruding upward. An annular connecting seat 126 protruding upward is provided on the outer wall surface of the top cover 125. A ring of support flanges (not shown in the figure) is provided on the inner wall of the connecting seat 126, and the support flanges are connected to the upper furnace cover by hoisting.

[0078] Specifically, as Figure 1 、 2 shown, a support flange 111 is provided at a position on the outer wall of the outer furnace tube 11 near the lower end face, and a bottom support (not shown in the figure) can be installed. The bottom support can be used to assist in fixing the peripheral components of the furnace tube, such as water-cooling pipes, etc., and can play a role in supporting the entire furnace tube during installation.

[0079] In specific embodiments, there are also various setting methods for the support table surface at the lower end of the inner furnace tube 12. Now, two specific implementation methods are given as examples;

[0080] First embodiment, as Figure 6 shown, a ring of annular steps 122 protrudes from the inner wall of the lower end of the inner furnace tube 12. The lower side surface of the annular steps 122 can be used as a support table surface for installing or connecting a support base that can stably place the bottom of the inner furnace tube.

[0081] In the second embodiment, a support flange (not shown in the figure) is installed on the inner wall of the inner furnace tube 12 near the lower end face, and the support base is connected through the support flange so that the bottom of the inner furnace tube can be supported.

[0082] In a further embodiment of the above two implementations, as Figure 2 shown, an annular heat insulation pad 123 can be installed on the annular step or the support flange. The annular heat insulation pad 123 can serve as the support base. At the same time, the lower end face of the annular heat insulation pad 123 exceeds the lower end of the inner furnace tube 12, which can not only play a supporting role but also play a heat insulation role.

[0083] Specifically, the annular heat insulation pad 123 is fixedly connected to the annular step or the support flange of the inner furnace tube 12 in a sealed connection manner, that is, the connection between the annular heat insulation pad 123 and the inner furnace tube is in a sealed state.

[0084] In a specific embodiment, as Figure 3 、 4 、5, 6, 11 shown, a central hole is provided in the middle of the lower furnace door 3. The central hole of the lower furnace door 3 can penetrate the lower end of the inner furnace tube 12, and the lower end face of the inner furnace tube is flush with the lower end face of the outer furnace tube, or the lower end face of the inner furnace tube exceeds the lower end face of the outer furnace tube, or the lower end face of the outer furnace tube exceeds the lower end face of the inner furnace tube, all within the protection scope of the present invention.

[0085] Specifically, as Figure 2 shown, the structure and specific implementation manner of the upper furnace cover 2 are as follows:

[0086] The outer end face of the upper furnace cover 2 away from the sealed chamber 13 bulges outwards to form a spherical protrusion. Since the sealed chamber 13 needs to be evacuated, setting the outer end face of the upper furnace cover to an upwardly convex spherical protrusion can withstand greater pressure and prevent it from being sucked and deformed during internal evacuation.

[0087] The inside of the upper furnace cover 2 is also provided with a lower layer plate 22, an outer layer plate 24 and an inner layer plate 23 that cooperate with the inner side of the outer end face to enclose a cavity. The lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are all annular, enclosing an annular cavity on the inner side of the outer end face of the upper furnace cover 2. Multiple reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are plate-shaped and have a plurality of through holes on the plate surface. The reinforcing ribs 21 are arranged at annular intervals in the annular cavity.

[0088] Preferably, the lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are hollow layer plates, and the inside of the hollow layer plates can be used as a water cooling channel or for installing water cooling components, such as installing water cooling pipes, etc., to prevent heat from dissipating from the upper furnace cover and affecting the processing.

[0089] As Figure 2As shown, the specific implementation examples of the sealing method at the top of the furnace tube are as follows:

[0090] An outer sealing flange 112 is provided on the outer wall at the upper end of the outer furnace tube 11 (the outer sealing flange is located above the support flange). The upper furnace cover 2 is integrally circular. The upper furnace cover 2 covers the upper end faces of the outer furnace tube and the inner furnace tube. Its outer edge buckles the upper end face of the outer furnace tube 11 and is hermetically connected to the outer sealing flange 112 of the outer furnace tube 11, directly sealing the upper end face of the entire furnace tube.

[0091] The specific sealing connection method between the sealing flange and the upper furnace cover is a conventional sealing means in the prior art. For example, screws, gaskets, sealing rings, etc. are also required. Those skilled in the art can fully reproduce it, and no repeated description is made in the present utility model.

[0092] As Figure 6 、 11 As shown, in a specific embodiment, a magneto - fluid sealing assembly is hermetically connected at the central hole of the lower furnace door for the rotational sealing of the rotating device. The vertical axis of the magneto - fluid sealing assembly is hollow, enabling the support base of the inner furnace tube to be supported by passing through the outer bracket of the magneto - fluid sealing assembly, making the overall structure stable and reliable.

[0093] Furthermore, the rotating device specifically includes: a boat support base and a rotating power source. The boat support base is arranged in the sealed chamber of the furnace tube and has a plurality of carrier placement positions. The inner edge at the bottom of the boat support base protrudes downward in a circle and is connected to the transmission shaft of the magneto - fluid sealing assembly, so that the boat support base rotates following the rotation of the rotating shaft; the rotating power source is directly connected to the lower end of the transmission shaft of the magneto - fluid sealing assembly outside the sealed chamber of the furnace tube, providing a power source outside the furnace tube to avoid the high temperature inside the furnace affecting the normal operation of the rotating power source. That is, because the temperature inside the furnace tube is about 500° or above, the motor serving as the rotating power source cannot operate normally at this temperature. Placing the rotating power source outside can ensure the normal operation of the rotating device.

[0094] By providing a rotatable boat support base 5, the position and angle of the carrier can be adjusted, so that when reaction gas is introduced into the sealed chamber or there are temperature differences during heating, the gas field and thermal field inside the sealed chamber are uniform, improving the overall process yield.

[0095] Specifically, as Figure 2As shown, the magneto-rheological fluid sealing assembly 6 is located at the bottom of the furnace tube 1. The magneto-rheological fluid sealing assembly 6 specifically includes an outer ring portion 61, an inner ring portion 62, and a transmission shaft 59 in a ring shape. The top surface of its outer ring portion 61 is hermetically connected to the edge of the central hole of the lower furnace door 3, and a first sealing ring 611 can be seen in the figure; the top surface of the inner ring portion 62 is hermetically connected to the lower end surface of the annular heat insulation pad 123 at the bottom of the inner furnace tube 12, and a second sealing ring 621 can be seen in the figure. The gap between the inner ring portion 62 and the outer ring portion 61 of the magneto-rheological fluid sealing assembly 6 is a ring-shaped rotating sealing space, and the transmission shaft 59 penetrates through this rotating sealing space of the magneto-rheological fluid sealing assembly 6;

[0096] The inner side of the boat support base 5 surrounds the inner furnace tube 12 and has a plurality of carrier placement positions 501. The rotating base 51 at the bottom is in a ring shape and penetrates through the central hole of the lower furnace door. The lower part of the rotating base 51 is connected to the annular transmission shaft 59. The upper end of the transmission shaft 59 is connected to the bottom of the rotating base 51 and penetrates through the rotating sealing space of the magneto-rheological fluid sealing assembly 6. The lower end of the transmission shaft 59 is located outside the furnace tube, and a gear or pulley is provided at the lower end and is rotationally connected to the rotating power source. Thus, the rotating power source drives the entire boat support base 5 to rotate around the inner furnace tube 12 through the transmission shaft 59.

[0097] Magneto-rheological fluid is provided in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion 62 of the magneto-rheological fluid sealing assembly (not shown in the figure). Specifically, multiple annular grooves can be provided on the inner wall surface of the transmission shaft 59 or multiple annular grooves can be provided on the outer wall surface of the inner ring portion of the magneto-rheological fluid sealing assembly to place the magneto-rheological fluid, forming multiple sealing rings in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion 62 of the magneto-rheological fluid sealing assembly 6;

[0098] Magneto-rheological fluid is also provided in the same way between the outer wall surface of the rotating shaft and the inner wall surface of the outer ring portion of the magneto-rheological fluid sealing assembly. Permanent magnets are provided inside both the outer ring portion 61 and the inner ring portion 62, and the magnetic poles serve as the inner wall of the rotating sealing space, enabling the magneto-rheological fluid to surround the transmission shaft 59, thereby forming multiple sealing rings in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring portion of the magneto-rheological fluid sealing assembly.

[0099] Specifically, the outer edge of the lower furnace door 3 is hermetically connected to the step at the bottom end of the outer furnace tube 11, and the inner edge of the lower furnace door 3 is hermetically connected to the outer ring portion 61 of the magneto-rheological fluid sealing assembly 6. That is, the annular heat insulation pad (support base) at the bottom of the inner furnace tube, the inner edge of the lower furnace door, and the transmission shaft (which can also be called a transmission tube) passing through the magneto-rheological fluid sealing assembly are directly hermetically connected through the magneto-rheological fluid sealing assembly, sealing the lower end of the sealed chamber 13 in the furnace tube 1.

[0100] In a specific embodiment, a gear 591 is provided in a circumferential manner on the outer wall surface of the drive shaft 59 passing through the rotational sealing space of the magneto-rheological fluid sealing assembly 6, and the rotational power source drives the internal boat support base to rotate in the form of external motor gear transmission.

[0101] In other embodiments, a pulley can also be sleeved on the outer wall surface of the drive shaft passing through the rotational sealing space of the magneto-rheological fluid sealing assembly, and the rotational power source drives the drive shaft to transmit power through the pulley transmission method.

[0102] As Figure 8 shown, the first embodiment of the boat support base is:

[0103] The boat support base includes: a rotating base 51, a fixing ring 52, and a hanging plate 53;

[0104] The rotating base 51 is disc-shaped, and multiple hanging plates are vertically and spacedly arranged in a circle along the circumferential edge of the upper surface of the base. The fixing ring 52 is connected to the top of the hanging plate 53 to fix the top of the hanging plate 53, so that the hanging plate 53 is in a stable vertical state; a plurality of hanging and taking positions (i.e., vehicle placement positions) are provided at intervals along the length direction of the outer side surface of the hanging plate 53 for hanging the vehicle. That is, multiple vehicles 50 can be hung on the hanging plate 53 in the height direction. Specifically, the vehicles 50 can be hung at different heights of the boat support base, so that the vehicles can be hung in multiple layers along the entire height direction of the boat support base;

[0105] The annular drive shaft 59 is connected in a circle along the inner edge of the rotating base 51, which can not only support the rotating base 51, but also drive the rotating base 51 to rotate around its center axis. When the rotating base 51 rotates, the vehicle 50 located on the outer side surface of the hanging plate 53 rotates around the central axis of the base following the rotating base 51, so that the position and angle of the vehicle can be changed during the processing;

[0106] In a specific embodiment, a hook hole 54 is provided at the hanging and taking position of the hanging plate 53 to hang the vehicle. The upper part of the hook hole 54 is wider and the lower part is narrower, which is convenient for the hook of the vehicle to be hung in;

[0107] The vehicle 50 is a vertical quartz boat, and a hook is provided on it that can be snapped downward into the hook hole. The hook of the vertical quartz boat is snapped into the hook hole, so that the vertical quartz boat is suspended at the hanging and taking position.

[0108] Specifically, two hooks are provided on the side surface of each vertical quartz boat in the height direction, and each two hook holes on the hanging plate correspond to hanging one vertical quartz boat. In a specific embodiment, each hanging plate 53 can hang two vertical quartz boats in the height direction, so that the quartz boats can be arranged in two circles up and down around the boat support base, so that various heating forms such as layered heating, local heating, and overall heating can be performed on the multiple vertical quartz boats hung on the boat support base.

[0109] AsFigure 9 , 10 As shown in 10 , the second embodiment of the boat support base is as follows:

[0110] The boat support base includes a rotating base 51 and multiple pairs of bearing members 55. The rotating base 51 has multiple vehicle placement positions 501 for the vehicle boats to pass through or be placed. Each pair of bearing members 55 is located at the two side edges of a vehicle placement position 501 and is foldably arranged on the rotating base 51. At the same time, each pair of bearing members 55 has a folded state and an unfolded state. If a vehicle 50 is to be placed, each pair of bearing members 55 switches to the folded state, so that the vehicle 50 can pass through the vehicle placement position 501 from the bottom upwards. When the bottom of the vehicle 50 moves above the horizontal plane of the vehicle placement position 501, each pair of bearing members 55 switches to the unfolded state, so that the vehicle 50 is placed on the bearing members. Subsequently, if the vehicle 50 is to be taken out, each pair of bearing members 55 switches to the folded state, so that the vehicle 50 can pass through the vehicle placement position 501 and be taken out from the furnace door downwards, thereby realizing the taking and placing of the vehicle boat.

[0111] In each pair of bearing members 55, each bearing member 55 includes a bearing fixing part 551 and a bearing movable part 552. The bearing fixing part 551 is fixedly arranged on the rotating base 51, and the bearing movable part 552 is rotatably arranged on the bearing fixing part 551. In each bearing member 55, a rotating shaft 553 is provided on the bearing fixing part. The bearing movable part 552 includes two opposite first bearing rods and a second bearing rod connected to the two first bearing rods. The ends of the two bearing rods far from the second bearing rod are sleeved on both ends of the rotating shaft. It can be understood that the rotating base further includes a driving member (not shown in the figure), and the driving member is used to drive the rotating shaft to rotate. The driving member can be a motor. And a self-locking support structure, such as motor self-locking (not shown in the figure), and the self-locking support structure is used to limit the rotation angle of the bearing movable part.

[0112] When each pair of bearing members 55 is in the folded state, the bearing movable part 552 in each bearing member 55 is arranged away from the vehicle placement position 501. When each pair of bearing members 55 is in the unfolded state, the bearing movable part 552 in each bearing member 55 faces the vehicle placement position and abuts against the vehicle.

[0113] Taking the rotation angle of the bearing movable part in each bearing member 55 as 90 degrees as an example, when each pair of bearing members 55 is in the folded state, the bearing movable part 552 in each bearing member 55 is in a vertical state. At this time, the bearing movable part 552 in each bearing member 55 will not block the vehicle placement position 501 of the rotating base 51, so it will not interfere with the up and down movement of the vehicle boat. When each pair of bearing members is in the unfolded state, the bearing movable part in each bearing member is in a horizontal state. At this time, the bearing movable part in each bearing member extends into the vehicle placement position of the rotating base, so as to be able to bear the vehicle boat.

[0114] In this embodiment, among any two adjacent pairs of carrier members, one carrier fixing portion belonging to one pair of carrier members is connected to one carrier fixing portion belonging to the other pair of carrier members. In practical applications, among any two adjacent pairs of carrier members, the two mutually connected carrier fixing portions can be integrally formed. Such a design can reduce the number of parts and also save installation time.

[0115] In this embodiment, the carrier placement position 501 is a notch provided on the rotating base 51. The shape and size of the carrier placement position 501 are adapted to the shape and size of the carrier boat, which can ensure that the carrier boat can pass through the carrier placement position smoothly. It can be understood that in other embodiments, the carrier placement position can be a through hole provided on the rotating base.

[0116] As Figure 10 shown, the carriers can be stacked in the height direction, that is, multiple carriers can be placed on one carrier placement position. At the same time, in order to prevent the carriers from tipping over, a circle of vertically upward guardrails can be provided along the outer edge of the rotating base. Since the inner edge of the rotating base is close to the outer wall of the inner furnace tube, the outer wall of the inner furnace tube and the guardrails can ensure that the stacked carriers will not tip over.

[0117] Specifically, as Figures 12 to 16 shown, the specific implementation manner of the lower furnace door structure is as follows:

[0118] In the first embodiment, the lower furnace door 3 is an integral body, and a central hole is provided in the middle. When opened, the entire lower furnace door is directly opened.

[0119] And the lower furnace door 3 protrudes downward to form a drum surface, that is, a spherical convex structure is provided. Similar to the function of the upper furnace cover, it can withstand greater pressure.

[0120] In the second embodiment, a central hole is provided in the middle of the lower furnace door 3. A plurality of small furnace doors, that is, furnace openings 31, and furnace covers 32 corresponding to each small furnace door are provided on the lower furnace door. The size and shape of the furnace opening 31 match the size and shape of the side surface of the carrier. Specifically, the shape of the furnace opening 31 can be the same as the shape of the side surface of the carrier, and the size is slightly larger than the size of the side surface of the carrier, so that the carrier can just pass through the furnace opening 31. The furnace cover 32 is connected with a driving structure 33, and the driving structure 33 is used to drive the furnace cover 32 to open or close relative to the furnace opening 31, so that the small furnace door can be opened separately, reducing the heat loss in the furnace tube.

[0121] In this embodiment, both the lower furnace door 3 and the furnace cover 32 are preferably spherical convex structures protruding downward. The lower furnace door and the furnace cover can withstand greater pressure, which can prevent the lower furnace door and the furnace cover from being sucked flat when the enclosed space in the furnace tube is evacuated, resulting in damage to the lower furnace door.

[0122] In order to enable the furnace cover 32 to better fit tightly with the corresponding furnace opening 31, improve the sealing performance, and reduce the heat loss in the furnace tube, a first convex block 311 is provided on one side of the furnace opening 31 facing the furnace cover 32. The first convex block 311 forms an annular cavity 312 around the circumference of the furnace opening 31, and the furnace opening 31 is completely located within the annular cavity 312.

[0123] A second convex block 321 is provided on one side of the furnace cover 32 matching the furnace opening 31 facing the furnace opening 31. The second convex block 321 can be inserted into the annular cavity 312 in a matching manner. In order to further improve the sealing performance between the furnace cover 132 and the corresponding furnace opening 31, a high-temperature resistant sealing strip can also be provided around the second convex block 321.

[0124] Specifically, the driving structure 33 includes a rotation driving device 331, a coupling 332, a rotating shaft 333, a rotating plate 334, a push-pull driving device 335, and a connecting plate 340;

[0125] Among them, the rotation driving device 331 is preferably a rotation motor, and the push-pull driving device 335 is preferably a push-pull motor.

[0126] On one side of the lower furnace door 3, a rotation driving device 331 is provided corresponding to each furnace opening 31. The rotating end of the rotation driving device 331 is connected to the rotating shaft 333 through the coupling 332. The end of the rotating shaft 333 is connected with a rotatable rotating plate 334. The rotating plate 334 is located in front of the furnace opening 31. The coupling 332 can firmly connect the rotating end of the rotation driving device 331 and the rotating shaft 333, so that the rotating end of the rotation driving device 331 and the rotating shaft 333 rotate together and transmit torque and motion, ensuring that during the transmission of motion and power, the relative position between the rotating end of the rotation driving device 331 and the rotating shaft 333 remains unchanged to achieve reliable transmission; and the coupling 332 can also compensate for the offset between the rotating end of the rotation driving device 331 and the rotating shaft 333, ensuring the continuity and smoothness of the transmission; and the coupling 332 can also relieve shock and absorb vibration, reduce the wear and failure risk of the rotating end of the rotation driving device 331 and the rotating shaft 333, and improve the stability and reliability of the driving structure 33.

[0127] The push-pull driving device 335 is bolted to the middle of the rotating plate 334. The push-pull end of the push-pull driving device 335 penetrates through the rotating plate 334 and is connected to the furnace cover 32.

[0128] Specifically, one end of the connecting plate 340 of the driving structure 33 is spaced apart from the first partition 341 and the second partition 342, and the other end of the connecting plate 340 is provided with a third partition 343; a first accommodation space 344 is formed between the first partition 341, the second partition 342 and the corresponding part of the connecting plate 340; a second accommodation space 345 is formed between the second partition 342, the third partition 343 and the corresponding part of the connecting plate 340; and a through hole (not shown, the same throughout the text) is provided at the same position of the first partition 341, the second partition 342 and the third partition 343. Among them, the rotational driving device 331 is fixed on the side of the third partition 343 away from the second partition 342, and then the rotating end of the rotational driving device 331 passes through the through hole of the third partition 343 and is connected to the coupling 332. The coupling 332 is located in the second accommodation space 345; one end of the rotating shaft 333 is rotatably connected in the through hole of the first partition 341, and the other end of the rotating shaft 333 passes through the through hole of the second partition 342 and is connected to the coupling 332, and the rotating plate 334 is sleeved on the rotating shaft 333 located in the first accommodation space 344. In this way, the first accommodation space 344 and the second accommodation space 345 can effectively isolate the space between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent accidental contact caused by mechanical failures or improper operations, reduce the potential risk of injury, and protect the safety of the staff and equipment; and the first accommodation space 344 and the second accommodation space 345 can reduce the mutual influence between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent the vibration and force generated when the rotational driving device 331 works from being transmitted between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, and improve the stability of the entire driving structure 33.

[0129] Among them, the lower furnace door further includes a control unit. The rotational driving device 331 is equipped with a first electrical interface 338, and the push-pull driving device 335 is equipped with a second electrical interface 339. Both the first electrical interface 338 and the second electrical interface 339 are used for electrically connecting to the control unit that controls the furnace door structure.

[0130] In this way, when it is necessary to open the furnace cover 32 relative to the furnace opening 31, the staff clicks "Start" on the operation panel corresponding to the control unit. Then, when the control unit receives the opening signal sent by the operation panel, it will first start the push-pull driving device 335, so that the push-pull driving device 335 controls the furnace cover 32 to move away from the corresponding furnace opening 31. When the furnace cover 32 is no longer in contact with the corresponding furnace opening 31, the control center closes the push-pull driving device 335 and simultaneously starts the rotation driving device 331. At this time, the rotation driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move outward away from the center of the furnace cover 32, so as to completely expose the corresponding furnace opening 31. Then the control unit closes the rotation driving device 331. Then the staff inserts the carrier on which the wafer to be processed is placed into the furnace opening 31 and then places it in the furnace tube 1, and then performs the process, that is, introducing a specific reaction gas into the furnace tube 1, so as to realize specific processes such as coating, diffusion, oxidation, and thin film deposition on the wafer to be processed.

[0131] When it is necessary to close the furnace cover 32 relative to the furnace opening 31, the staff clicks "Close" on the operation panel corresponding to the control unit. Then, when the control unit receives the closing signal sent by the operation panel, the control unit will first start the rotation driving device 331, so that the rotation driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move inward away from the center of the furnace cover 32 for resetting. Then the control center closes the rotation driving device 331 and simultaneously starts the push-pull driving device 335, so that the push-pull driving device 335 controls the furnace cover 32 to approach the corresponding furnace opening 31 until the second bump 321 of the furnace cover 32 is inserted into the annular cavity 312 of the corresponding furnace opening 31 in a matching manner, so that the furnace cover 32 completely covers the corresponding furnace opening 31, and then the control unit closes the push-pull driving device 335.

[0132] Wherein, a rectangular mounting plate 322 is further provided on one side of the furnace cover 32 facing the rotating plate 334. The push-pull end of the push-pull driving device 335 is connected to the middle of the mounting plate 322. The four sides of the mounting plate 322 are connected to the furnace cover 32 through the first guiding columns 323. The mounting plate 322 can share part of the weight and load between the furnace cover 32 and the push-pull driving device 335, enhancing the stability and reliability of the overall structure; and the mounting plate 322 can also absorb the vibration and impact force generated when the furnace cover 32 rotates, so as to reduce the damage to the furnace cover 32 and the push-pull driving device 335 and extend their service life; and the mounting plate 322 can be connected to the furnace cover 32 through the first guiding columns 323, so that the relative position between the furnace cover 32 and the push-pull driving device 335 can be better adjusted, ensuring the accuracy and stability of the rotation of the furnace cover 32.

[0133] Moreover, the mounting plate 322 is also provided with a plurality of weight-reducing holes 324, which can reduce the weight of the mounting plate 322 and enable the rotation driving device 331 and the push-pull driving device 335 to better control the movement of the furnace cover 32.

[0134] Wherein, a rectangular mounting area 336 is provided in the middle of the rotating plate 334, a push-pull driving device 335 is provided in the middle of the mounting area 336, and the periphery of the mounting area 336 is connected to the mounting plate 322 through second guiding columns 337.

[0135] In this embodiment, the second guiding columns 337 are exemplified by being installed at the four corners of the mounting area 336.

[0136] The second guiding columns 337 can ensure the precise alignment of the relative positions between the mounting plate 322 and the furnace cover 32. In this way, during the rotation of the furnace cover 32, the second guiding columns 337 can guide the mounting plate 322 and the furnace cover 32 to move along a predetermined path, preventing them from deviating from the correct position or shifting, which helps to maintain the stability and accuracy of the rotation of the furnace cover 32.

[0137] In a specific embodiment, the external heat source and the internal heat source are an integral whole, that is, the electric heating wire is directly wound on the inner and outer furnace tubes to directly heat the sealed cavity.

[0138] As Figure 7 shown, in a preferred embodiment, both the external heat source 71 and the internal heat source 72 are arranged in a ring shape and are arranged along the height direction of the inner and outer furnace tubes. Specifically, they can be divided into multiple independent heating sections along the height direction of the furnace tubes, and the boat support base can also correspondingly hang the carriers in layers along the height direction, so as to achieve layered corresponding heating and improve the overall heating efficiency.

[0139] Alternatively, the external heat source and the internal heat source are divided into multiple independent heating sections, and the multiple heating sections are arranged at intervals around the inner furnace tube and the outer furnace tube.

[0140] The internal and external heat sources can specifically adopt methods such as resistance wire heating furnace tubes, infrared heating, and electromagnetic induction heating.

[0141] In a further embodiment, as Figure 7 shown, a heat dissipation device 73 is provided around the external heat source 71 and the internal heat source 72 to quickly and stably adjust the temperature of the reaction furnace tube. The heat dissipation device can be independent or integrated with the heating device. The heat dissipation device can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any method that can achieve automatic control is included within this range. The heat dissipation device 73 can adopt an air-cooled structure or a water-cooled structure. However, it is not limited to the above structures, and any mechanism with a heat exchange and heat dissipation function is included within this range.

[0142] Specifically, Figure 6 Water-cooled connectors 74 are provided at the end face positions of the inner and outer furnace tubes 11, the upper furnace cover, and the lower furnace door 3 for supplying water to the heat dissipation devices provided inside them.

[0143] As shown in the figure, a water slip ring is provided at the position where the bottom of the furnace tube is located inside the bottom bracket for supplying water to the water-cooled pipeline (not shown in the figure).

[0144] In a specific embodiment, the inner and outer furnace tubes are specifically quartz tubes or silicon nitride tubes. The furnace tube proposed by the present utility model adopts a through-type design for the inner furnace tube, which can be hoisted from the top or inserted and installed upward from the bottom to diversify the installation method of the inner furnace tube.

[0145] The carrier inside the furnace tube is placed on a rotatable boat support base, so that the carrier can adjust its position and angle inside the furnace, making the gas field and thermal field inside the sealed chamber uniform when reaction gas is introduced or there is a temperature difference during heating, and improving the overall process yield.

[0146] The lower furnace door and the upper furnace cover are designed as outwardly convex drum surfaces, which have better pressure-bearing capacity and are not easily deformed.

[0147] The bottom is sealed by a magnetohydrodynamic sealing assembly, which can place the driving components of the boat support base outside, and at the same time ensure that the sealed chamber through which the reaction gas passes remains sealed.

[0148] And the lower furnace door is provided with multiple small furnace doors. When loading and unloading the carrier, a single small furnace door can be opened to avoid heat loss in the furnace and affect the processing efficiency.

[0149] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or their combinations.

[0150] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be understood that, for the sake of convenience in description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific values should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0151] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by orientation terms such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc., are usually based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Without contrary statements, these orientation terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present utility model; the orientation terms "inner, outer" refer to the inside and outside relative to the contour of each component itself.

[0152] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "upper...", etc., can be used here to describe the spatial positional relationships of one device or feature to other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the drawings of the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned as "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0153] In addition, it should be noted that the use of words such as "first", "second", etc. to limit components is only for the convenience of differentiating the corresponding components. Without additional statements, the above words have no special meanings, and thus should not be construed as limiting the protection scope of the present utility model.

[0154] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A furnace tube, characterized in that: It includes an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door and a rotating device; The upper furnace cover is installed at the upper end of the outer furnace tube, the inner furnace tube is installed in the outer furnace tube, the upper end of the inner furnace tube is hoisted on the upper furnace cover, the lower end of the inner furnace tube is open and a support table is arranged at the opening, so that the inner furnace tube can be inserted upward from the bottom of the outer furnace tube into the outer furnace tube for installation; The lower furnace door is installed at the lower ends of the outer furnace tube and the inner furnace tube. A center hole is provided in the middle of the lower furnace door for passing a support base of the inner furnace tube. An axially penetrating magnetic fluid sealing component is sealed and installed between the lower furnace door and the lower end of the inner furnace tube. The upper and lower ends of the accommodating space between the inner furnace tube and the outer furnace tube are sealed to form a closed chamber. A heating source for heating the closed chamber is provided on the inner furnace tube and the outer furnace tube. A plurality of carrier placement positions with adjustable positions and angles are provided on the rotating device corresponding to the closed chamber. The transmission component of the rotating device that drives the carrier to rotate in the closed chamber is connected to the transmission shaft of the magnetic fluid sealing component.

2. The furnace tube according to claim 1, characterized in that The upper end of the inner furnace tube is open, and a circle of supporting flange is arranged on the inner wall, and the supporting flange is hoisted and connected with the upper furnace cover.

3. The furnace tube according to claim 1, characterized in that The upper end of the inner furnace tube is closed and protrudes upwardly into a hemispherical top cover, the outer wall of the top cover is upwardly provided with an annular connecting seat, the inner wall of the connecting seat is provided with a circle of supporting flanges, and the supporting flanges are hoisted and connected to the upper furnace cover.

4. The furnace tube according to claim 1, characterized in that The lower end surface of the inner furnace tube is flush with the lower end surface of the outer furnace tube, or the lower end surface of the inner furnace tube exceeds the lower end surface of the outer furnace tube, or the lower end surface of the outer furnace tube exceeds the lower end surface of the inner furnace tube.

5. The furnace tube according to claim 1, characterized in that The inner wall at the opening at the lower end of the inner furnace tube protrudes a circle of annular steps or is provided with a supporting flange to form the supporting table surface.

6. The furnace tube according to claim 1, characterized in that A hanging seat is connected between the upper end of the inner furnace tube and the upper furnace cover.

7. The furnace tube according to claim 1, characterized in that An outer sealing flange is provided on the outer wall of the upper end of the outer furnace tube; the upper furnace cover covers the upper end surfaces of the outer furnace tube and the inner furnace tube, and its outer edge is sealedly connected to the outer sealing flange; the outer edge of the lower furnace door is sealedly connected to the step at the lower end of the outer furnace tube, and the inner edge is sealedly connected to the magnetic fluid sealing assembly.

8. The furnace tube according to claim 1, characterized in that The outer end surfaces of the upper furnace cover and the lower furnace door away from the accommodating space protrude outward to form a spherical protrusion. A cavity is arranged inside the upper furnace cover, and a plurality of reinforcing ribs connected between the upper and lower inner walls of the cavity are arranged in the cavity.

9. The furnace tube according to claim 1, characterized in that The rotating device includes: a boat support base arranged in the closed chamber of the furnace tube and having a plurality of carrier placement positions, the boat support base being connected to the transmission shaft of the magnetic fluid sealing assembly; and a rotating power source located outside the closed chamber and connected to the transmission shaft to drive the boat support base to rotate.

10. The furnace tube according to claim 9, characterized in that The boat support base comprises: A rotating base, the rotating base is located at the bottom of the closed chamber and connected to the transmission shaft; A hanging plate is vertically arranged on the rotating base, and a plurality of carrier placement positions for hanging the carrier are provided on the hanging plate.

11. The furnace tube according to claim 9, characterized in that The boat support base comprises: A rotating base, the rotating base having a plurality of carrier placement positions for the carrier boat to pass through or be placed thereon, and connected to the transmission shaft; A plurality of pairs of bearing members, each pair of bearing members is located at two side edges of a carrier placement position and is foldably arranged on a rotating base; When the carrier is switched to a folded state, the carrier can pass upward from the bottom through a carrier placement position corresponding to the carrier; when the carrier is switched to an unfolded state, the carrier can be placed on the carrier.

12. The furnace tube according to claim 1, characterized in that The magnetic fluid sealing component is annular, and a corresponding center hole is also provided in the middle, and is divided into an inner ring part, an outer ring part, and an annular transmission shaft located between the inner ring part and the outer ring part; the inner ring part is sealedly connected to the support base at the bottom of the inner furnace tube, the outer ring part is sealedly connected to the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

13. The furnace tube according to claim 1, characterized in that The lower furnace door is provided with a plurality of furnace openings penetrating the lower furnace door, the size and shape of the furnace openings match the size and shape of the side surfaces of the carrier, each of the furnace openings is provided with a corresponding furnace cover, and the furnace cover is connected to a driving structure, and the driving structure is used to drive the furnace cover to open or close relative to the furnace opening.

14. The furnace tube according to claim 1, characterized in that An inner heating source is provided on the inner side of the inner furnace tube, an outer heating source is provided on the outer side of the outer furnace tube, the inner heating source is divided into a plurality of independent heating sections, and heat dissipation devices are provided correspondingly around the outer heating source and the inner heating source.

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