Device for adaptively adjusting planeness of carrier plate

Abstract

The utility model relates to the technical field of carrier plate testing, in particular to a device for adaptively adjusting the planeness of a carrier plate, which comprises a bottom plate. The bottom plate is provided with a driving motor; a first screw rod is arranged at the output end of the driving motor; the two ends of the first screw are sleeved with a first nut and a second nut respectively. The first nut and the second nut are respectively connected with a first push-pull seat and a second push-pull seat; each of the first push-pull seat and the second push-pull seat is provided with a lower clamping plate and an upper clamping plate; the first push-and-pull base and the second push-and-pull base are each provided with a clamping driving assembly. The clamping driving assembly drives the upper clamping plate and the lower clamping plate to clamp, so that the carrier plate is fixed between the first push-pull seat and the second push-pull seat, the driving motor drives the first screw to rotate, the first push-pull seat and the second push-pull seat are far away from each other, and the flexible carrier plate is stretched and leveled; and after leveling is completed, testing is carried out through external testing equipment, so that the accuracy of carrier plate measurement can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of carrier board testing, and particularly relates to a device for adaptively adjusting the flatness of a carrier board. Background Art

[0002] In the process of semiconductor manufacturing, electrically testing chips on a flexible carrier board is an important step. These flexible carrier boards are usually made of bendable materials, have good flexibility and are thin and light, and are suitable for various complex packaging structures. However, during the testing process, due to the physical properties of the flexible carrier board, such as small thickness and weak rigidity, etc., it is easy to warp and deform when placed on the test bench, resulting in inaccurate test results. Content of the Utility Model

[0003] The purpose of the utility model is to provide a device for adaptively adjusting the flatness of a carrier board aiming at the above deficiencies in the prior art.

[0004] The purpose of the utility model is achieved through the following technical solutions: A device for adaptively adjusting the flatness of a carrier board, comprising a bottom plate; a driving motor is provided on the bottom plate; a first screw rod is provided at the output end of the driving motor; opposite external threads are provided at both ends of the first screw rod; a first nut and a second nut are respectively sleeved at both ends of the first screw rod; the first nut and the second nut are respectively connected with a first push-pull seat and a second push-pull seat;

[0005] Both the first push-pull seat and the second push-pull seat are provided with a lower clamping plate and an upper clamping plate; both the first push-pull seat and the second push-pull seat are provided with a clamping driving assembly; the clamping driving assembly is used to drive the upper clamping plate and the lower clamping plate to clamp.

[0006] The utility model is further provided that the first screw rod is provided on one side of the bottom plate; a second screw rod is rotatably provided on the other side of the bottom plate; opposite external threads are provided at both ends of the second screw rod; a third nut and a fourth nut are respectively sleeved at both ends of the second screw rod;

[0007] Both sides of the first push-pull seat are respectively connected with the first nut and the third nut; both sides of the second push-pull seat are respectively connected with the second nut and the fourth nut;

[0008] A linkage mechanism is provided between the first screw rod and the second screw rod.

[0009] The utility model is further provided that a first slide rail and a second slide rail are provided on one side of the bottom plate; the first nut and the second nut are respectively slidably provided on the first slide rail and the second slide rail.

[0010] The present utility model is further configured such that a third slide rail and a fourth slide rail are provided on the other side of the bottom plate; the third nut and the fourth nut are respectively slidably disposed on the third slide rail and the fourth slide rail.

[0011] The present utility model is further configured such that the linkage mechanism includes a first synchronous pulley provided on the first screw rod, a second synchronous pulley provided on the second screw rod, and a synchronous belt provided between the first synchronous pulley and the second synchronous pulley.

[0012] The present utility model is further configured such that the bottom plate is provided with a tensioning seat; a tensioning wheel is rotatably provided on the tensioning seat; the tensioning wheel abuts against the synchronous belt.

[0013] The present utility model is further configured such that a sliding plate is movably provided on both the first push-pull seat and the second push-pull seat; the sliding direction of the sliding plate is parallel to the length direction of the first screw rod;

[0014] The sliding plate is provided with a lifting cylinder; the output end of the lifting cylinder is connected to the upper clamping plate.

[0015] The present utility model is further configured such that a sliding cylinder is provided on both the first push-pull seat and the second push-pull seat; a connecting plate is provided at the output end of the sliding cylinder; the connecting plate is connected to the sliding plate.

[0016] The present utility model is further configured such that a limiting slide rail is provided on both the first push-pull seat and the second push-pull seat; the sliding plate is slidably disposed on the limiting slide rail; the limiting slide rail is arranged parallel to the first screw rod.

[0017] The present utility model is further configured such that a plurality of lifting cylinders are provided on the sliding plate along the length direction.

[0018] The beneficial effects of the present utility model: The present utility model drives the upper clamping plate and the lower clamping plate to clamp through the clamping drive assembly, so that both ends of the carrier plate are fixed between the first push-pull seat and the second push-pull seat, and then the drive motor is started to drive the first screw rod to rotate, so that the first push-pull seat and the second push-pull seat move away from each other, thereby being able to stretch and flatten the flexible carrier plate; after the flattening is completed, it is tested by an external testing device, thereby being able to effectively improve the accuracy of the measurement of the carrier plate. Description of the Drawings

[0019] The utility model is further described with reference to the accompanying drawings, but the embodiments in the drawings do not constitute any limitation to the present utility model. For those of ordinary skill in the art, other drawings can also be obtained according to the following drawings without creative efforts.

[0020] Figure 1 is a schematic structural diagram of the present utility model;

[0021] Figure 2It is a schematic structural diagram of the first push-pull seat of the present utility model;

[0022] Figure 3 It is a schematic structural diagram of another perspective of the first push-pull seat of the present utility model;

[0023] Wherein: 1. Base plate; 11. First slide rail; 12. Second slide rail; 13. Third slide rail; 14. Fourth slide rail; 2. Driving motor; 21. First synchronous pulley; 22. Second synchronous pulley; 23. Timing belt; 3. First screw; 31. First nut; 32. Second nut; 41. First push-pull seat; 42. Second push-pull seat; 51. Lower clamping plate; 52. Upper clamping plate; 6. Second screw; 61. Third nut; 62. Fourth nut; 7. Tensioning seat; 71. Tensioning pulley; 8. Slide plate; 81. Lifting cylinder; 91. Sliding cylinder; 92. Connecting plate; 93. Limit slide rail. Specific embodiments

[0024] The present utility model will be further described in conjunction with the following embodiments.

[0025] As can be seen from Figures 1 to 3 a device for adaptively adjusting the flatness of a carrier plate according to the present embodiment includes a base plate 1; a driving motor 2 is provided on the base plate 1; a first screw 3 is provided at the output end of the driving motor 2; the two ends of the first screw 3 are respectively provided with external threads with opposite helix directions; a first nut 31 and a second nut 32 are respectively sleeved on the two ends of the first screw 3; the first nut 31 and the second nut 32 are respectively connected with a first push-pull seat 41 and a second push-pull seat 42;

[0026] both the first push-pull seat 41 and the second push-pull seat 42 are provided with a lower clamping plate 51 and an upper clamping plate 52; both the first push-pull seat 41 and the second push-pull seat 42 are provided with a clamping driving assembly; the clamping driving assembly is used to drive the upper clamping plate 52 and the lower clamping plate 51 to clamp.

[0027] Specifically, before testing the flexible carrier board, the device for adaptively adjusting the flatness of the carrier board in this embodiment first places both ends of the carrier board between the lower clamping plate 51 of the first push-pull seat 41 and the lower clamping plate 51 of the second push-pull seat 42, and then drives the upper clamping plate 52 and the lower clamping plate 51 to clamp through the clamping drive assembly, so that both ends of the carrier board are fixed between the first push-pull seat 41 and the second push-pull seat 42. Then, the drive motor 2 is started, and the drive motor 2 drives the first screw rod 3 to rotate. Since the external thread directions at both ends of the first screw rod 3 are opposite, during the rotation of the first screw rod 3, the first push-pull seat 41 and the second push-pull seat 42 can move synchronously in the opposite direction. Therefore, during the process of the drive motor 2 driving the first screw rod 3 to rotate, the first push-pull seat 41 and the second push-pull seat 42 move away from each other, so that the flexible carrier board can be stretched and leveled. After leveling, it is tested by an external testing device, which can effectively improve the accuracy of the carrier board measurement.

[0028] In the device for adaptively adjusting the flatness of the carrier board in this embodiment, the first screw rod 3 is arranged on one side of the bottom plate 1; a second screw rod 6 is rotatably arranged on the other side of the bottom plate 1; external threads with opposite directions are respectively arranged at both ends of the second screw rod 6; a third nut 61 and a fourth nut 62 are respectively sleeved at both ends of the second screw rod 6;

[0029] Both sides of the first push-pull seat 41 are respectively connected to the first nut 31 and the third nut 61; both sides of the second push-pull seat 42 are respectively connected to the second nut 32 and the fourth nut 62;

[0030] A linkage mechanism is arranged between the first screw rod 3 and the second screw rod 6.

[0031] Specifically, in this embodiment, by arranging the first screw rod 3 and the second screw rod 6 to jointly drive the first push-pull seat 41 and the second push-pull seat 42 to move, the first push-pull seat 41 and the second push-pull seat 42 can always be in a parallel state, so as to ensure the flatness of the flexible carrier board. In addition, by arranging the linkage mechanism, the synchronous movement among the first nut 31, the second nut 32, the third nut 61, and the fourth nut 62 can be ensured.

[0032] In the device for adaptively adjusting the flatness of the carrier board in this embodiment, a first slide rail 11 and a second slide rail 12 are arranged on one side of the bottom plate 1; the first nut 31 and the second nut 32 are respectively slidably arranged on the first slide rail 11 and the second slide rail 12. Through the above arrangement, the movement of the first nut 31 and the second nut 32 can be guided and limited.

[0033] An apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, on the other side of the bottom plate 1, a third slide rail 13 and a fourth slide rail 14 are provided; the third nut 61 and the fourth nut 62 are respectively slidably arranged on the third slide rail 13 and the fourth slide rail 14. Through the above settings, it can play a role in guiding and limiting the movement of the third nut 61 and the fourth nut 62.

[0034] An apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, the linkage mechanism includes a first synchronous pulley 21 provided on the first screw rod 3, a second synchronous pulley 22 provided on the second screw rod 6, and a synchronous belt 23 provided between the first synchronous pulley 21 and the second synchronous pulley 22. Specifically, while the driving motor 2 drives the first screw rod 3 to rotate, the second screw rod 6 is driven to perform synchronous movement through the first synchronous pulley 21, the synchronous belt 23, and the second synchronous pulley 22.

[0035] An apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, the bottom plate 1 is provided with a tensioning seat 7; the tensioning seat 7 is rotatably provided with a tensioning wheel 71; the tensioning wheel 71 abuts against the synchronous belt 23. Specifically, by providing the tensioning wheel 71, it can ensure the synchronous movement of the first screw rod 3 and the second screw rod 6.

[0036] An apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, both the first push-pull seat 41 and the second push-pull seat 42 are movably provided with a sliding plate 8; the sliding direction of the sliding plate 8 is parallel to the length direction of the first screw rod 3; the sliding plate 8 is provided with a lifting cylinder 81; the output end of the lifting cylinder 81 is connected to the upper clamping plate 52. An apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, both the first push-pull seat 41 and the second push-pull seat 42 are provided with a sliding cylinder 91; the output end of the sliding cylinder 91 is provided with a connecting plate 92; the connecting plate 92 is connected to the sliding plate 8.

[0037] Specifically, for the apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, before placing the flexible carrier plate, first, the lifting cylinder 81 drives the upper clamping plate 52 to rise, and then the sliding cylinder 91 drives the upper clamping plate 52 to move away from the lower clamping plate 51; then the flexible carrier plate is placed between the two lower clamping plates 51; then the sliding cylinder 91 drives the upper clamping plate 52 to move towards the lower clamping plate 51 until the upper clamping plate 52 moves directly above the lower clamping plate 51, and then the lifting cylinder 81 drives the upper clamping plate 52 to descend, clamping the flexible carrier plate between the upper clamping plate 52 and the lower clamping plate 51.

[0038] An apparatus for adaptively adjusting the flatness of a carrier plate according to this embodiment, both the first push-pull seat 41 and the second push-pull seat 42 are provided with a limiting slide rail 93; the sliding plate 8 is slidably arranged on the limiting slide rail 93; the limiting slide rail 93 is arranged parallel to the first screw rod 3. Through the above settings, it can play a role in limiting and guiding the movement of the sliding plate 8.

[0039] In the device for adaptively adjusting the flatness of the carrier board according to this embodiment, a plurality of lifting cylinders 81 are arranged along the length direction of the sliding plate 8. Through the above setting, the stability of the overall structure can be enhanced.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting the protection scope of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. A device for adaptively adjusting the flatness of a carrier plate, characterized in that: It comprises a bottom plate; the bottom plate is provided with a driving motor; the output end of the driving motor is provided with a first screw; both ends of the first screw are provided with external threads with opposite rotation directions; both ends of the first screw are respectively sleeved with a first nut and a second nut; the first nut and the second nut are respectively connected to a first push-pull seat and a second push-pull seat; The first push-pull seat and the second push-pull seat are both provided with a lower clamping plate and an upper clamping plate; the first push-pull seat and the second push-pull seat are both provided with a clamping drive assembly; the clamping drive assembly is used to drive the upper clamping plate and the lower clamping plate to clamp.

2. The device for adaptively adjusting the flatness of a carrier plate according to claim 1, characterized in that: The first screw is arranged on one side of the bottom plate; the second screw is rotatably arranged on the other side of the bottom plate; both ends of the second screw are respectively provided with external threads with opposite rotation directions; and both ends of the second screw are respectively sleeved with a third nut and a fourth nut; The two sides of the first push-pull seat are respectively connected to the first nut and the third nut; the two sides of the second push-pull seat are respectively connected to the second nut and the fourth nut; A linkage mechanism is provided between the first screw and the second screw.

3. The device for adaptively adjusting the flatness of a carrier plate according to claim 2, characterized in that: A first slide rail and a second slide rail are disposed on one side of the bottom plate; the first nut and the second nut are slidably disposed on the first slide rail and the second slide rail respectively.

4. The device for adaptively adjusting the flatness of a carrier plate according to claim 2, characterized in that: A third slide rail and a fourth slide rail are disposed on the other side of the bottom plate; the third nut and the fourth nut are slidably disposed on the third slide rail and the fourth slide rail respectively.

5. The device for adaptively adjusting the flatness of a carrier plate according to claim 2, characterized in that: The linkage mechanism comprises a first synchronous wheel arranged on the first screw rod, a second synchronous wheel arranged on the second screw rod, and a synchronous belt arranged between the first synchronous wheel and the second synchronous wheel.

6. The device for adaptively adjusting the flatness of a carrier plate according to claim 5, characterized in that: The bottom plate is provided with a tensioning seat; the tensioning seat is rotatably provided with a tensioning wheel; the tensioning wheel abuts against the synchronous belt.

7. The device for adaptively adjusting the flatness of a carrier plate according to claim 1, characterized in that: The first push-pull seat and the second push-pull seat are both movably provided with a slide plate; the sliding direction of the slide plate is parallel to the length direction of the first screw rod; The slide plate is provided with a lifting cylinder; the output end of the lifting cylinder is connected to the upper clamping plate.

8. The device for adaptively adjusting the flatness of a carrier plate according to claim 7, characterized in that: The first push-pull seat and the second push-pull seat are both provided with a sliding cylinder; a connecting plate is provided at the output end of the sliding cylinder; and the connecting plate is connected to the sliding plate.

9. The device for adaptively adjusting the flatness of a carrier plate according to claim 8, characterized in that: The first push-pull seat and the second push-pull seat are both provided with a limiting slide rail; the slide plate is slidably arranged on the limiting slide rail; the limiting slide rail is arranged in parallel with the first screw rod.

10. The device for adaptively adjusting the flatness of a carrier plate according to claim 7, characterized in that: The slide plate is provided with a plurality of lifting cylinders along the length direction.

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