Double-station exchange device

Abstract

The utility model discloses a double-station exchange device which comprises a base, a rotary table mechanism, a working table mechanism and an exchange table mechanism, a rotary table tray of the rotary table mechanism is installed on the base through a rotary table supporting mechanism, a positioning and tensioning device is arranged on the rotary table tray, and a rotary table is connected with the rotary table tray through the positioning and tensioning device; a working table tray of the working table mechanism is mounted on the base through a supporting table, and a working table is placed on the working table tray; the exchange table mechanism comprises a rotary lifting mechanism and an exchange table, the rotary lifting mechanism is installed on the base, the exchange table is arranged on the rotary lifting mechanism, and a clamping or lifting device of the workbench and the rotary table is arranged on the exchange table. The station switching of the rotary table mechanism and the working table mechanism is completed by utilizing the liftable and rotatable exchange table mechanism, and the rotary table mechanism adopts a liftable and rotatable structure to meet the functional requirements of the rotary table mechanism, so that the problems of single function of double stations, incapability of meeting the processing requirements and the like are solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of double-station processing devices, and more specifically, relates to a double-station exchange device. Background Technique

[0002] In the processing of certain workpieces, continuous processing and manufacturing of multiple processes are often required. To improve efficiency, double-station devices are now provided for some of the processing processes for efficient processing. For example, between the loading station and the processing station, a rotating station is used to quickly convert the workpieces between them, thereby effectively improving the processing efficiency.

[0003] For example, in the double-stage exchange system of the silicon wafer stage of the lithography machine in CN201110082729.4, the system includes a base, a silicon wafer stage operating at the preprocessing station, and a silicon wafer stage operating at the exposure station. A rotating motor is installed below the base. After the two silicon wafer stages complete the preprocessing and exposure movements, the silicon wafer stage is rotated to complete the exchange of the silicon wafer stage positions, and the base remains fixed during the exchange. Although this patent uses the rotation of the base to perform the exchange between the preprocessing station and the exposure station, improving the processing efficiency. However, the stations of this patent are fixed and do not have versatility, and cannot meet the functional requirements of some stations, such as functions like rotation, lifting, and fixing. Therefore, it is necessary to design the double-station with multiple functions to meet different processing requirements. Summary of the Utility Model

[0004] The utility model provides a double-station exchange device to overcome the problems of the existing double-station with single function and inability to meet processing requirements.

[0005] The utility model is realized through the following technical solutions:

[0006] A double-station exchange device includes a base, a turntable mechanism, a workbench mechanism, and an exchange table mechanism. The turntable mechanism includes a turntable support mechanism, a turntable tray, a positioning and tensioning device, and a turntable. The turntable support mechanism is installed on the base, the turntable tray is provided on the turntable support mechanism, the positioning and tensioning device is provided on the turntable tray, and the turntable is connected to the positioning and tensioning device; the workbench mechanism includes a placement table, a workbench tray, and a workbench. The placement table is installed on the base, the workbench tray is provided on the placement table, and the workbench is placed on the workbench tray; the exchange table mechanism includes a rotary lifting mechanism and an exchange table. The rotary lifting mechanism is installed on the base, the exchange table is arranged on the rotary lifting mechanism, and a clamping or lifting device for the workbench and the turntable is provided on the exchange table. The utility model performs the conversion between the turntable and the workbench through the exchange table mechanism, and can realize the functions of lifting and rotating the turntable. During processing, it can also be fixed through the tensioning device, which ensures the processing stability of the station.

[0007] Further, the turntable support mechanism includes a support base, a turntable shaft, a driving mechanism, and an oil cylinder lifting mechanism. The turntable shaft is installed in the support base through bearings. The driving mechanism is connected to the turntable shaft, and the oil cylinder lifting mechanism is installed at the center of the turntable shaft. The driving mechanism drives the turntable shaft to rotate through a worm and worm gear, and the oil cylinder lifting mechanism realizes the rotation and lifting functions of the state support mechanism through a rotary joint connection.

[0008] Further, the positioning and tensioning device includes a lower positioning seat 1, a claw, a piston, and a sleeve. The sleeve is installed in the lower positioning seat 1. The piston is connected to the claw and placed in the sleeve. The piston and the sleeve cooperate to form an oil chamber 1 and an oil chamber 2. When the oil chamber 1 is supplied with oil and the oil chamber 2 discharges oil, the piston drives the claw to move downward, pulling the claw into the sleeve. The claw pulls the pull stud downward, causing the upper positioning seat and the lower positioning seat to fit together. When the oil chamber 2 is supplied with oil and the oil chamber 1 discharges oil, the piston moves upward and the claw releases. When the oil cylinder of the exchange table rises, the lower positioning seat and the upper positioning seat can be separated, and after the oil cylinder rises in place, it can rotate to switch the worktable.

[0009] Further, an upper positioning seat 1 matching the lower positioning seat 1 is provided at the bottom of the turntable, and a pull stud is provided in the upper positioning seat 1.

[0010] Further, the claw is provided with a plurality of claw petals, and a spring is provided between the claw petals. The claw petals are in an open state under the action of the spring. When the claw is pulled downward, the claw petals contract radially, and the inner hook part of the claw petals fixes the pull stud. When the claw rises, the claw petals open under the action of the spring, releasing the pull stud.

[0011] Further, a positioning device 1 is also provided between the worktable and the worktable tray. The positioning device 1 includes a lower positioning seat 2 on the worktable tray, and an upper positioning seat 2 provided at the bottom of the worktable and matching the lower positioning seat 2 for positioning.

[0012] Further, a positioning device 2 is also provided between the worktable, the turntable, and the exchange table. The positioning device 2 includes a positioning pin and a positioning pin hole, which facilitate the positioning and stability of the worktable and the turntable on the exchange table and prevent displacement.

[0013] Further, the rotary lifting mechanism includes a rotary mechanism and a lifting mechanism. The lifting mechanism is installed on the base, and the rotary structure is installed on the lifting mechanism.

[0014] Further, the lifting mechanism is also provided with linear guide rails to improve the off-axis load-bearing capacity of the lifting mechanism.

[0015] Further, a workpiece pressing device is also provided on the double-station exchange device.

[0016] Further, the pressing device includes a bracket, a driving cylinder, a long swing rod, a pressing rod and a workpiece pressing block. The driving cylinder is mounted on the bracket through a first support, the long swing rod is mounted on the bracket through a second support. The output end of the driving cylinder is hinged to the long swing rod through a first swing rod, and the output end of the driving cylinder is connected to a third support on the bracket through a second swing rod. The long swing rod is connected to the pressing rod, and the workpiece pressing block is provided on the pressing rod.

[0017] Compared with the prior art, the beneficial effects are as follows:

[0018] The utility model provides a double-station exchange device, which uses a liftable and rotatable exchange table mechanism to complete the station conversion between the turntable mechanism and the workbench mechanism, and the turntable mechanism adopts a liftable and rotatable structure to meet its functional requirements. The turntable of the utility model achieves a detachable and fixed connection method through a positioning and tensioning device, realizing the exchange of processing stations and fixed processing. The structure of the utility model is simple and convenient to use, meeting the multi-functional requirements of double-station processing. Description of the Drawings

[0019] Figure 1 is a schematic structural diagram of the utility model;

[0020] Figure 2 is a schematic sectional structural diagram of the utility model;

[0021] Figure 3 is a structural diagram of the upper positioning seat at the bottom of the turntable;

[0022] Figure 4 is a structural diagram of the positioning and tensioning device;

[0023] Figure 5 is a schematic structural diagram of the pressing device;

[0024] Figure 6 is a schematic diagram of the pressing state of the pressing device structure;

[0025] Figure 7 is a schematic diagram of the loosening state of the pressing device structure.

[0026] Among them, 1 is the base, 2 is the turntable mechanism, 201 is the rotary lifting mechanism, 202 is the turntable, 3 is the turntable mechanism, 301 is the support base, 302 is the turntable shaft, 303 is the bearing, 304 is the drive mechanism, 305 is the turntable tray, 306 is the positioning and tensioning device, 3061 is the lower positioning seat 1, 3062 is the sleeve, 3063 is the claw, 3064 is the piston, 3065 is the oil chamber 1, 3066 is the oil chamber 2, 307 is the turntable, 3071 is the upper positioning seat 1, 3072 is the pull stud, 3073 is the positioning pin hole, 4 is the workbench mechanism, 401 is the placement table, 402 is the workbench tray, 403 is the positioning device, 404 is the workbench, 5 is the pressing device, 501 is the bracket, 502 is the driving cylinder, 503 is the swing rod 1, 504 is the swing rod 2, 505 is the long swing rod, 506 is the pressure rod, 507 is the pressing block. Specific embodiments

[0027] The following further explains and clarifies in combination with embodiments, but the specific embodiments do not have any form of limitation on the present utility model. Unless otherwise specified, the methods and equipment used in the embodiments are conventional methods and equipment in the art.

[0028] Embodiment 1

[0029] This embodiment provides a double-station exchange device, including a base 1, a turntable mechanism 3, a workbench mechanism 4, and an exchange table mechanism 2.

[0030] The turntable mechanism 3 includes a turntable support mechanism, a turntable tray 305, a positioning and tensioning device 306, and a turntable 307. The turntable support mechanism is installed on the base 1, the turntable tray 305 is provided on the turntable support mechanism, the positioning and tensioning device 306 is provided on the turntable tray 305, and the turntable 307 is connected to the positioning and tensioning device 306.

[0031] The workbench mechanism 4 includes a placement table 401, a workbench tray 402, and a workbench 404. The placement table 401 is installed on the base 1, the workbench tray 402 is provided on the placement table 401, and the workbench 404 is placed on the workbench tray 402.

[0032] The exchange table mechanism 2 includes a rotary lifting mechanism 201 and an exchange table 202. The rotary lifting mechanism 201 is installed on the base 1 and is located between the turntable 307 support structure and the placement table 401. The exchange table 202 is provided on the rotary lifting mechanism 201, and the exchange table 202 is provided with a clamping or lifting device for the workbench 404 and the turntable 307.

[0033] Embodiment 2

[0034] This embodiment provides a double-station exchange device, including a base 1, a turntable mechanism 3, a workbench mechanism 4, and an exchange table mechanism 2.

[0035] The turntable mechanism 3 includes a turntable support mechanism, a turntable tray 305, a positioning and tensioning device 306, and a turntable 307. The turntable support mechanism is installed on the base 1. The turntable support mechanism includes a support base 301, a turntable shaft 302, a driving mechanism 304, and an oil cylinder lifting mechanism. The support base 301 is fixed on the base 1. The turntable shaft 302 is installed in the support base 301 through a bearing 303. The driving mechanism 304 is connected to the turntable shaft 302 through a worm and worm gear. The oil cylinder lifting mechanism is connected through a rotary joint and arranged at the center of the turntable shaft to realize the rotation and lifting functions of the turntable support mechanism. A turntable tray 305 is provided on the turntable shaft 302. A positioning and tensioning device 306 is provided on the turntable tray 305. The turntable 307 is connected to the positioning and tensioning device 306.

[0036] The workbench mechanism 4 includes a placement table 401, a workbench tray 402, and a workbench 404. The placement table 401 is installed on the base 1. A workbench tray 402 is provided on the placement table 401. The workbench 404 is placed on the workbench tray 402.

[0037] The exchange table mechanism 2 includes a rotary lifting mechanism 201 and an exchange table 202. The rotary lifting mechanism 201 is installed between the support structure of the turntable 307 and the placement table 401. The rotary lifting mechanism 201 includes a lifting structure and a rotary structure. The lifting structure is installed on the base 1. A linear guide rail is provided on the side of the lifting mechanism to improve the off-load bearing capacity of the lifting mechanism. The rotary structure is installed on the lifting structure. The exchange table 202 is arranged on the rotary structure. A clamping or lifting device for the workbench 404 and the turntable 307 is provided on the exchange table 202. A positioning pin is provided on the lifting device of the exchange table 202. Positioning pin holes 3073 are provided on the workbench 404 and the turntable 307 to facilitate the placement positioning and position stability of the workbench 404 and the turntable 307.

[0038] Embodiment 3

[0039] This embodiment provides a double-station exchange device, including a base 1, a turntable mechanism 3, a workbench mechanism 4, and an exchange table mechanism 2.

[0040] The turntable mechanism 3 includes a turntable support mechanism, a turntable tray 305, a positioning and tensioning device 306, and a turntable 307. The turntable support mechanism is installed on the base 1. The turntable support mechanism includes a support base 301, a turntable shaft 302, a drive mechanism 304, and an oil cylinder lifting mechanism. The support base 301 is fixed on the base 1. The turntable shaft 302 is installed in the support base 301 through a bearing 303. The drive mechanism 304 is connected to the turntable shaft 302 through a worm and worm gear. The oil cylinder lifting mechanism is connected through a rotary joint and arranged at the center of the turntable shaft to realize the rotation and lifting functions of the turntable support mechanism. A turntable tray 305 is provided on the turntable shaft 302. A positioning and tensioning device 306 is provided on the turntable tray 305. The turntable 307 is connected to the positioning and tensioning device 306.

[0041] The positioning and tensioning device 306 includes a lower positioning seat 1 3061, a claw 3063, a piston 3064, and a sleeve 3062. A plurality of lower positioning seats 1 3061 are installed on the turntable tray 305. The sleeve 3062 is installed in the lower positioning seat 1 3061. The piston 3064 is connected to the claw 3063 and is placed in the sleeve 3062. The piston 3064 and the sleeve 3062 cooperate to form an oil chamber 1 3065 and an oil chamber 2 3066. The claw 3063 is provided with a plurality of claw petals, and a spring is provided between the claw petals. The claw petals are in an open state under the action of the spring. A upper positioning seat 1 3071 matching the lower positioning seat 1 3061 is provided at the bottom of the turntable 307, and a pull stud 3072 is provided in the upper mounting seat 1. The oil chamber 1 3065 and the oil chamber 2 3066 are connected to an external hydraulic station through a rotary joint. When the oil chamber 1 3065 is supplied with oil and the oil chamber 2 3066 discharges oil, the piston 3064 drives the claw 3063 to move downward, pulling the claw petals of the claw 3063 into the sleeve 3062. The claw petals contract radially, and the inner hook part of the claw petals pulls the pull stud 3072 downward, causing the upper positioning seat 1 3071 and the lower positioning seat 1 3061 to fit together. When the oil chamber 2 3066 is supplied with oil and the oil chamber 1 3065 discharges oil, the piston 3064 moves upward, and the claw petals of the claw 3063 open. When the oil cylinder of the exchange workbench 404 rises, the lower positioning seat and the upper positioning seat can be separated, and after the oil cylinder rises in place, it can rotate to switch the workbench 404.

[0042] The workbench mechanism 4 includes a placement table 401, a workbench tray 402, and a workbench 404. The placement table 401 is installed on the base 1. A workbench tray 402 is provided on the placement table 401. A lower positioning seat 2 is provided on the workbench tray 402. An upper positioning seat 2 matching the lower positioning seat 2 is provided at the bottom of the workbench 404. The workbench 404 is placed on the workbench tray 402 through the matching positioning of the upper positioning seat 2 and the lower positioning seat 2.

[0043] The switching table mechanism 2 includes a rotary lifting mechanism 201 and a switching table 202. The rotary lifting mechanism 201 is installed between the turntable 307 support structure and the placement table 401. The rotary lifting mechanism 201 includes a lifting structure and a rotary structure. The lifting structure is installed on the base 1, and a linear guide rail is provided on the side of the lifting mechanism to improve the off-load bearing capacity of the lifting mechanism. The rotary structure is installed on the lifting structure, and the switching table 202 is arranged on the rotary structure. The switching table 202 is provided with a clamping or lifting device for the workbench 404 and the turntable 307, and the switching table 202 is provided with a positioning pin on the lifting device. The workbench 404 and the turntable 307 are provided with positioning pin holes 3073 to facilitate the placement positioning and position stability of the workbench 404 and the turntable 307.

[0044] Embodiment 4

[0045] This embodiment provides a double-station switching device, such as Figures 1-2 , including a base 1, a turntable mechanism 3, a workbench mechanism 4, and a switching table mechanism 2.

[0046] The turntable mechanism 3 includes a turntable support mechanism, a turntable tray 305, a positioning and tensioning device 306, and a turntable 307. The turntable support mechanism is installed on the base 1. The turntable support mechanism includes a support seat 301, a turntable shaft 302,, a driving mechanism 304, and an oil cylinder lifting mechanism. The support seat 301 is fixed on the base 1. The turntable shaft 302 is installed in the support seat 301 through a bearing 303. The driving mechanism 304 is connected to the turntable shaft 302 through a worm and gear. The oil cylinder lifting mechanism is connected through a rotary joint and arranged at the center of the turntable shaft to realize the rotation and lifting functions of the turntable support mechanism. The turntable shaft 302 is provided with a turntable tray 305, and the turntable tray 305 is provided with a positioning and tensioning device 306. The turntable 307 is connected to the positioning and tensioning device 306.

[0047] Such as Figures 3-4, the positioning and tensioning device 306 includes a lower positioning base 1 3061, a claw 3063, a piston 3064 and a sleeve 3062. A plurality of lower positioning bases 1 3061 are installed on the turntable tray 305. The sleeve 3062 is installed in the lower positioning base 1 3061. The piston 3064 is connected to the claw 3063 and is placed in the sleeve 3062. The piston 3064 and the sleeve 3062 cooperate to form an oil chamber 1 3065 and an oil chamber 2 3066. The claw 3063 is provided with a plurality of claw petals, and a spring is provided between the claw petals. The claw petals are in an open state under the action of the spring. A upper positioning base 1 3071 matching the lower positioning base 1 3061 is provided at the bottom of the turntable 307, and a pull stud 3072 is provided in the upper mounting base 1. The oil chamber 1 3065 and the oil chamber 2 3066 are connected to an external hydraulic station through a rotary joint. When the oil chamber 1 3065 is supplied with oil and the oil chamber 2 3066 discharges oil, the piston 3064 drives the claw 3063 to move downward, pulling the claw petals of the claw 3063 into the sleeve 3062. The claw petals contract radially, and the inner hook part of the claw petals pulls the pull stud 3072 downward, so that the upper positioning base 1 3071 and the lower positioning base 1 3061 are fitted together. When the oil chamber 2 3066 is supplied with oil and the oil chamber 1 3065 discharges oil, the piston 3064 moves upward, and the claw petals of the claw 3063 open. When the oil cylinder of the exchange table 404 rises, the lower positioning base and the upper positioning base can be separated. After the oil cylinder rises to the position, it can be rotated to switch the worktable 404.

[0048] The worktable mechanism 4 includes a placement table 401, a worktable tray 402 and a worktable 404. The placement table 401 is installed on the base 1. The placement table 401 is provided with a worktable tray 402 and is positioned by a positioning device 403. The worktable tray 402 is provided with a lower positioning base 2, and the bottom of the worktable 404 is provided with an upper positioning base 2 matching the lower positioning base 2. The worktable 404 is placed on the worktable tray 402 through the matching positioning of the upper positioning base 2 and the lower positioning base 2.

[0049] The exchange table mechanism 2 includes a rotary lifting mechanism 201 and an exchange table 202. The rotary lifting mechanism 201 is installed between the turntable 307 support structure and the placement table 401. The rotary lifting mechanism 201 includes a lifting structure and a rotary structure. The lifting structure is installed on the base 1, and a linear guide rail is provided on the side of the lifting mechanism to improve the off-load bearing capacity of the lifting mechanism. The rotary structure is installed on the lifting structure, and the exchange table 202 is arranged on the rotary structure. The exchange table 202 is provided with a clamping or lifting device for the worktable 404 and the turntable 307, and the exchange table 202 is provided with a positioning pin on the lifting device. The worktable 404 and the turntable 307 are provided with positioning pin holes 3073 to facilitate the placement positioning and position stability of the worktable 404 and the turntable 307.

[0050] As Figures 5-7, a pressing device 5 is further provided on the switchboard mechanism 2. The pressing device 5 includes a bracket 501, a driving cylinder 502, a long swing rod 505, a pressing rod 506 and a workpiece pressing block 507. The bracket 501 is arranged on the rotary lifting mechanism 201. The driving cylinder 502 is installed on the bracket 501 through a first support. The long swing rod 505 is installed on the bracket 501 through hinged connection with a second support. The output end of the driving cylinder 502 is hinged to the long swing rod 505 through a first swing rod 503, and the output end of the driving cylinder 502 is hinged to a third support on the bracket 501 through a second swing rod 504. The long swing rod 505 is connected to the pressing rod 506, and the workpiece pressing block 507 is arranged on the pressing rod 506.

[0051] Obviously, the above-mentioned embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made on the basis of the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A double-station exchange device, characterized in that: It includes a base, a turntable mechanism, a workbench mechanism and an exchange table mechanism. The turntable mechanism includes a turntable support mechanism, a turntable tray, a positioning and tightening device and a turntable. The turntable support mechanism is installed on the base, the turntable support mechanism is provided with a turntable tray, the turntable tray is provided with a positioning and tightening device, and the turntable is connected to the positioning and tightening device; the workbench mechanism includes a supporting platform, a workbench tray and a workbench. The supporting platform is installed on the base, the supporting platform is provided with a workbench tray, and the workbench is placed on the workbench tray; the exchange table mechanism includes a rotating lifting mechanism and an exchange table. The rotating lifting mechanism is installed on the base, the exchange table is arranged on the rotating lifting mechanism, and the exchange table is provided with a clamping or lifting device for the workbench and the turntable.

2. The double-station exchange device according to claim 1, characterized in that: The turntable support mechanism includes a support seat, a turntable shaft, a driving mechanism and a cylinder lifting mechanism. The turntable shaft is installed in the support seat through a bearing, the driving mechanism is connected to the turntable shaft, and the cylinder lifting mechanism is installed at the center of the turntable shaft.

3. The double-station exchange device according to claim 1, characterized in that: The positioning and tightening device comprises a lower positioning seat 1, a pulling claw, a piston and a sleeve. The sleeve is installed in the lower positioning seat 1, the piston is connected to the pulling claw and is placed in the sleeve, and the piston and the sleeve cooperate to form an oil chamber 1 and an oil chamber 2.

4. The double-station exchange device according to claim 3, characterized in that: The pulling claw is provided with a plurality of claw petals, and a spring is arranged between the claw petals.

5. The double-station exchange device according to claim 1, characterized in that: An upper positioning seat 1 matching with a lower positioning seat 1 is arranged at the bottom of the turntable, and a pull nail is arranged in the upper positioning seat 1.

6. The double-station exchange device according to claim 1, characterized in that: A positioning device 1 is also provided between the workbench and the workbench tray. The positioning device 1 includes a lower positioning seat 2 on the workbench tray and an upper positioning seat 2 arranged at the bottom of the workbench and matched with the lower positioning seat 2 for positioning.

7. The double-station exchange device according to claim 1, characterized in that: A second positioning device is also provided between the workbench, the turntable and the exchange table, and the second positioning device comprises a positioning pin and a positioning pin hole.

8. The double-station exchange device according to claim 1, characterized in that: The rotary lifting mechanism comprises a rotary mechanism and a lifting mechanism. The lifting mechanism is installed on a base, and the rotary structure is installed on the lifting mechanism.

9. The double-station exchange device according to claim 1, characterized in that: The double-station exchange device is also provided with a workpiece clamping device.

10. The double-station exchange device according to claim 9, characterized in that: The clamping device includes a bracket, a driving cylinder, a long rocker arm, a pressure rod and a workpiece pressure block. The driving cylinder is installed on the bracket through a support one, and the long rocker arm is installed on the bracket through a support two. The output end of the driving cylinder is hinged to the long rocker arm through a rocker arm one, and the output end of the driving cylinder is connected to a support three on the bracket through a rocker arm two, the long rocker arm is connected to the pressure rod, and a workpiece pressure block is provided on the pressure rod.

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