Auxiliary cover and pickling device

Abstract

The utility model provides an auxiliary cover and a pickling device. The auxiliary cover comprises an auxiliary cover body, a first clamping part and a second clamping part, wherein the first clamping part and the second clamping part are arranged on one surface of the auxiliary cover body; when the auxiliary cover is used for a pickling tank, the first clamping part and the second clamping part clamp a first side wall of the pickling tank, and at least parts of the two ends of the auxiliary cover body are erected on two second side walls of the pickling tank respectively. The auxiliary cover can be stably clamped on the side wall of the pickling tank through the first clamping part and the second clamping part, the pickling tank body is prevented from being damaged, meanwhile, the width of the auxiliary cover is adjusted, and it is guaranteed that opening and closing of the main cover are not affected while the pickling tank is covered.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing equipment, and more specifically, to an auxiliary cover and an acid pickling device. Background Art

[0002] Semiconductor technology has advanced by leaps and bounds. Cleaning (Bench) machines are widely used in semiconductor cleaning processes and play an irreplaceable role in aspects such as the removal of oxide layers or nitride layers, pre-cleaning (Pre-clean), or the stripping of photoresist (PR strip). Generally, each acid pickling tank of the cleaning machine is equipped with a lid, which aims to protect the heat of the liquid medicine in the tank from excessive loss (temperature reduction), and at the same time ensure that the liquid medicine in the tank does not volatilize excessively, thereby ensuring the consistency of the liquid medicine concentration and the product quality. Each lid is opened and closed by a cylinder. When the wafer is placed into the tank, the lid is in the open state. During the wafer processing process, the lid is in the closed state. The auxiliary cover is overlapped on the outer tank wall of the tank through two screws to inhibit the temperature loss and the volatilization of the liquid medicine in the outer tank. The screws (made of PVDF material) on the lid expand and deform under the high temperature of the phosphoric acid liquid medicine. During the opening and closing actions of the lid, the lid and the auxiliary cover are squeezed, causing the screws on the auxiliary cover to press against the outer wall of the tank, resulting in damage to the outer wall of the tank.

[0003] The tank for high-pressure cleaning (HP BATH) is made of quartz, and the liquid medicine in the tank is phosphoric acid, which will slowly etch the quartz. On this basis, the probability of the tank body cracking is increased. Through the inspection and analysis of the damaged quartz tank, it is found that there are traces of indentation at the position where the screw of the auxiliary cover is fixed and the corresponding quartz tank wall, and the indentation position is consistent with the cracking position. Therefore, it is necessary to design an auxiliary cover to avoid damage to the quartz tank and reduce the probability of the tank body cracking.

[0004] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of the present utility model, and therefore may include information that does not constitute the prior art known to those skilled in the art. Summary of the Utility Model

[0005] Aiming at the problems in the prior art, the purpose of the present utility model is to provide an auxiliary cover and an acid pickling device. The auxiliary cover can be stably clamped on the side wall of the acid pickling tank through the first clamping part and the second clamping part, ensuring that the acid pickling tank is covered without affecting the opening and closing of the main cover, and reducing the volatilization of the liquid medicine in the acid pickling tank, thereby ensuring the stability of the liquid medicine and the acid pickling process.

[0006] The first aspect of the present utility model provides an auxiliary cover, including an auxiliary cover body, a first clamping part and a second clamping part arranged on one surface of the auxiliary cover body;

[0007] When the auxiliary cover is used in a pickling tank, the first clamping part and the second clamping part clamp a first side wall of the pickling tank, and at least part of both ends of the auxiliary cover body are respectively placed on two second side walls of the pickling tank.

[0008] According to the first aspect of the present utility model, both ends of the first clamping part respectively abut against two second side walls of the pickling tank.

[0009] According to the first aspect of the present utility model, the first clamping part includes two opposing abutting ends.

[0010] According to the first aspect of the present utility model, countersunk holes are respectively arranged at both ends of the first clamping part, and countersunk screws are arranged in the countersunk holes;

[0011] When the countersunk screws rotate in the countersunk holes, the distance between the heads of the two countersunk screws changes.

[0012] According to the first aspect of the present utility model, the auxiliary cover is made of polytetrafluoroethylene.

[0013] The second aspect of the present utility model provides a pickling device, including at least one pickling tank and a plurality of the auxiliary covers;

[0014] One of the auxiliary covers is respectively arranged on two first side walls of one pickling tank.

[0015] According to the second aspect of the present utility model, the pickling device further includes two main covers and two rotating shafts;

[0016] The rotating shafts are arranged along the extending direction of the second side walls of the pickling tank;

[0017] One side of each main cover is connected to one of the rotating shafts, and the other side of the main cover can rotate around the rotating shaft.

[0018] According to the second aspect of the present utility model, concave parts are respectively arranged at both ends of the other surface of the auxiliary cover body;

[0019] Both ends of the rotating shafts are respectively arranged above the concave parts of the two auxiliary cover bodies.

[0020] According to the second aspect of the present utility model, the cross-section of the concave part is an arc shape adapted to both ends of the rotating shaft.

[0021] The auxiliary cover of the present utility model can be stably clamped on the side wall of the pickling tank through the first clamping part and the second clamping part, avoiding damage to the pickling tank body, and at the same time adjusting the width of the auxiliary cover to ensure that the pickling tank is covered without affecting the opening and closing of the main cover. Description of the Drawings

[0022] The accompanying drawings herein are incorporated into and constitute a part of this specification, showing embodiments consistent with the present application, and are used together with the specification to explain the principles of the present application. By reading the detailed description of the non-limiting embodiments with reference to the following drawings, other features, objectives, and advantages of the present utility model will become more apparent. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings. In addition, the drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus repeated descriptions thereof will be omitted. Some of the block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically independent entities.

[0023] Figure 1 It is a schematic structural diagram of an auxiliary cover according to an embodiment of the present utility model;

[0024] Figure 2 It is a side view of an auxiliary cover according to an embodiment of the present utility model; and

[0025] Figure 3 It is a schematic structural diagram when the main cover of a pickling tank of a pickling device according to an embodiment of the present utility model is closed. Detailed implementation manners

[0026] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0027] In the description of this specification, the representation of reference terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics represented in connection with the embodiment or example are included in at least one embodiment or example of this specification. Moreover, the specific features, structures, materials, or characteristics represented can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples represented in this specification and the features of different embodiments or examples.

[0028] Throughout the specification, when a device is said to be "connected" to another device, this includes not only the case of "direct connection", but also the case of "indirect connection" where other elements are placed in between. Relative space terms such as "front", "rear", "upper", "lower", etc. may be used to more easily explain the relationship of one device relative to another device illustrated in the drawings. Such terms refer to not only the meaning indicated in the drawings, but also other meanings or operations of the device in use. For example, if the device in the drawing is flipped, a device that was previously described as "under" another device is then described as "above" another device. Therefore, the exemplary term "under" includes both above and below. The device may be rotated 90° or other angles, and the relative space terms are also interpreted accordingly.

[0029] Although in some instances the terms first, second, etc. are used herein to denote various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first interface and a second interface, etc. are indicated. Furthermore, as used herein, the singular forms "a", "an", and "the" are intended to also include the plural forms, unless the context indicates otherwise. It should be further understood that the terms "comprising", "including" indicate the presence of the stated features, steps, operations, elements, components, items, kinds, and / or groups, but do not preclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or meaning any one or any combination. Thus, "A, B, or C" or "A, B, and / or C" means "any one of the following: A; B; C; A and B; A and C; B and C; A, B, and C". An exception to this definition occurs only when the combination of elements, functions, steps, or operations are inherently mutually exclusive in some manner.

[0030] Although not fully defined, including technical terms and scientific terms used herein, all terms have the same meaning as generally understood by those skilled in the technical field to which this specification pertains. Terms defined in commonly used dictionaries are additionally interpreted as having a meaning consistent with the relevant technical literature and the content currently presented. As long as they are not defined, they should not be over-interpreted as ideal or overly formulaic meanings.

[0031] The main cover of the pickling tank of the pickling device has an opening and closing function. Due to space limitations, when the existing main cover is closed, it cannot cover both ends of the pickling tank, resulting in the volatilization of the liquid medicine in the pickling tank and the change of the liquid medicine concentration, thus affecting the stability of this process. In view of the above technical problems, the present utility model provides an auxiliary cover and a pickling device. The auxiliary cover includes an auxiliary cover body, a first clamping portion and a second clamping portion provided on one surface of the auxiliary cover body; when the auxiliary cover is used for a pickling tank, the first clamping portion and the second clamping portion clamp a first side wall of the pickling tank, and at least part of both ends of the auxiliary cover body are respectively erected on two second side walls of the pickling tank. The auxiliary cover of the present utility model can be firmly clamped on the side wall of the pickling tank through the first clamping portion and the second clamping portion, avoiding damage to the pickling tank body, and at the same time adjusting the width of the auxiliary cover to ensure that the pickling tank is covered without affecting the opening and closing of the main cover.

[0032] The following further elaborates on the structure of the auxiliary cover and the pickling device of the present utility model in conjunction with the accompanying drawings and specific embodiments. It can be understood that each specific embodiment does not limit the protection scope of the present utility model.

[0033] The auxiliary cover of the present utility model includes an auxiliary cover body, a first clamping portion and a second clamping portion provided on one surface of the auxiliary cover body; when the auxiliary cover is used for a pickling tank, the first clamping portion and the second clamping portion clamp a first side wall of the pickling tank, that is, the first clamping portion and the second clamping portion can be flat plates disposed on the auxiliary cover body. The side wall of the first clamping portion facing the second clamping portion and the side wall of the second clamping portion facing the first clamping portion are arranged in parallel, and the distance between the two side walls should be adapted to the thickness of the first side wall of the pickling tank. At the same time, at least part of both ends of the auxiliary cover body are respectively erected on two second side walls of the pickling tank. The pickling tank is usually quadrilateral. If the two relatively arranged side walls are defined as the first side walls, then the two relatively arranged side walls in the other direction are the second side walls.

[0034] When the auxiliary cover is used for a pickling tank, the first clamping portion is inside the pickling tank. Further, in order to improve the stability of the auxiliary cover when it is erected on the side wall of the pickling tank, both ends of the first clamping portion respectively abut against the two second side walls of the pickling tank, that is, the first clamping portion and the two second side walls are in a tight fit. Since the liquid medicine in the pickling tank usually includes some strong acid solutions, such as hydrofluoric acid, nitric acid, sulfuric acid, etc., the auxiliary cover can be processed from polytetrafluoroethylene (PTFE).

[0035] In one embodiment, both the first clamping portion and the second clamping portion can be an integral part. In some other embodiments, the first clamping portion and the second clamping portion can include a plurality of discrete parts. Figure 1 and Figure 2FIG. 0 is respectively a schematic structural view and a side view of the auxiliary cover 1 according to an embodiment of the present utility model. Among them, the first clamping portion 12 and the second clamping portion 13 are oppositely arranged in the width direction of the auxiliary cover body 11, and the distance between the two can be determined according to the thickness of the side wall of the pickling tank to be erected. Neither the first clamping portion nor the second clamping portion is an integral part. The first clamping portion 12 includes two abutting ends oppositely arranged along the extending direction of the auxiliary cover body 11. The length of the auxiliary cover body 11 is greater than the extending length of the first side wall of the pickling tank to be arranged. The distance between the distal ends of the two abutting ends is equivalent to the extending length of the first side wall. The positions of the multiple discrete portions of the second clamping portion 13 are not limited. The width of the auxiliary cover body 11 is not limited herein according to the dimensions of the pickling tank and its main cover in the extending direction of the second side wall.

[0036] Further, counterbore holes 121 may be respectively provided at both ends of the first clamping portion 12. A countersunk screw (not shown in the figure) is arranged in the counterbore hole 121. The head of the countersunk screw may be a flat surface, and a screwing groove such as a slotted, cross-shaped, internal hexagonal, plum-shaped, pentagonal shape, etc. may be provided on the flat surface, and a tool can be used to rotate the countersunk screw. By rotating the countersunk screw in the counterbore hole 121, the position of the head of the countersunk screw can be adjusted, so as to adjust the distance between the heads of the countersunk screws at both ends. Through the countersunk screws at both ends, the two ends of the first clamping portion can better abut against the side walls on both sides of the auxiliary cover. The auxiliary cover of the present utility model forms a clamping groove through the first clamping portion and the second clamping portion and is clamped on the side wall of the pickling tank. Without screw fixation, damage to the tank body during assembly with the pickling tank can be avoided.

[0037] In some embodiments, recesses 111 are respectively provided at both ends of the other surface of the auxiliary cover body 11. The function of the recesses 111 will be described below.

[0038] The present utility model also provides a pickling device, which includes at least one pickling tank 9 and a plurality of the auxiliary covers 1. Figure 3 FIG. 11 is a schematic structural view when the main cover of a pickling tank of the pickling device according to an embodiment of the present utility model is closed. It can be seen that an auxiliary cover 1 is erected on each of the two first side walls A of the pickling tank 9. The auxiliary cover body 11 is erected on the second side wall B. The second clamping portion is on the inner side of the first side wall A of the pickling tank and abuts against the inner side of the second side wall B at both ends. The second clamping portion 13 is on the outer side of the first side wall A of the pickling tank. In this embodiment, the pickling device further includes two main covers 2 and two rotating shafts 3; the rotating shafts 3 are arranged along the extending direction of the second side wall B of the pickling tank 9. One side of each main cover 2 is connected to a rotating shaft, and the rotation of the rotating shaft drives the other side of the main cover 2 to rotate around the rotating shaft 3, so as to realize the closing and opening of the two main covers on the pickling tank. Since the main cover structure is not the inventive point of this application, the structure of the main cover will not be described in detail herein.

[0039] In this embodiment, recesses 111 are respectively provided at both ends of the other surface of the auxiliary cover body 11, and both ends of the rotating shaft 3 are respectively disposed above the recesses 111 of the two auxiliary cover bodies 11. At this time, the cross-section of the recess 111 is an arc shape adapted to both ends of the rotating shaft 3.

[0040] The auxiliary cover of the present utility model well covers the pickling tank that cannot be covered due to the opening and closing of the main cover, thereby reducing the evaporation of the liquid medicine in the pickling tank of the pickling equipment and the heat exchange of the liquid medicine, maintaining the constancy of the liquid medicine concentration and temperature, and improving the stability of the pickling process.

[0041] It should be noted that in the technical solutions of the auxiliary cover and the chemical mechanical polishing equipment of the present utility model, each functional module and module unit included therein can correspond to a specific hardware circuit in the integrated circuit structure. Therefore, it only involves the improvement of the specific hardware circuit. The hardware part is not merely a carrier for executing control software or computer programs. Therefore, solving the corresponding technical problems and obtaining the corresponding technical effects do not involve the application of any control software or computer programs. That is to say, the present utility model can solve the technical problems to be solved and obtain the corresponding technical effects only by using the improvements in the hardware circuit structure involved in these modules and units, without the need to assist with specific control software or computer programs to achieve the corresponding functions.

[0042] The above content is a further detailed description of the present utility model in combination with specific preferred embodiments, and it cannot be determined that the specific implementation of the present utility model is only limited to these descriptions. For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present application is defined by the appended claims rather than the above descriptions. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. An auxiliary cover, characterized in that: It includes an auxiliary cover body, a first clamping portion and a second clamping portion arranged on a surface of the auxiliary cover body; When the auxiliary cover is used in a pickling tank, the first clamping portion and the second clamping portion clamp a first side wall of the pickling tank, and at least parts of both ends of the auxiliary cover body are respectively mounted on two second side walls of the pickling tank.

2. The auxiliary cover according to claim 1, characterized in that: Two ends of the first clamping portion respectively abut against two second side walls of the pickling tank.

3. The auxiliary cover according to claim 1, characterized in that: The first clamping portion includes two opposing ends that are arranged oppositely.

4. The auxiliary cover according to claim 1, characterized in that: The two ends of the first clamping portion are respectively provided with countersunk holes, and countersunk screws are arranged in the countersunk holes; When the countersunk screw is rotated in the countersunk hole, the distance between the heads of the two countersunk screws changes.

5. The auxiliary cover according to claim 1, characterized in that: The auxiliary cover is made of polytetrafluoroethylene.

6. A pickling device, characterized in that: comprising at least one pickling tank and a plurality of auxiliary covers as claimed in any one of claims 1 to 5; The two first side walls of the pickling tank are respectively provided with an auxiliary cover.

7. The pickling device according to claim 6, characterized in that: The pickling device also includes two main covers and two rotating shafts; The rotating shaft is arranged along the extension direction of the second side wall of the pickling tank; One side of each main cover is connected to a rotating shaft, and the other side of the main cover can rotate around the rotating shaft.

8. The pickling device according to claim 7, characterized in that: The two ends of the other surface of the auxiliary cover body are respectively provided with recessed parts; Both ends of the rotating shaft are respectively arranged above the concave portions of the two auxiliary cover bodies.

9. The pickling device according to claim 8, characterized in that: The cross section of the recess is an arc shape matching with the two ends of the rotating shaft.

Images