Pipeline for opening auxiliary chamber of single crystal furnace
By designing a sub-chamber charging and opening pipeline for a single crystal furnace and using air to replace argon for charging and opening, the problem of argon charging and opening loss in the sub-chamber production of single crystal silicon is solved, and the effect of cost reduction and convenient operation is achieved.
Patent Information
- Application Number
- CN202422081743.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-27
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-08-27
AI Technical Summary
The existing argon recovery devices have a secondary chamber argon charging loss during the single crystal silicon production process, especially in large-scale single crystal enterprises, which has a loss of 2-3%, but there is a lack of special treatment methods.
A single crystal furnace sub-chamber charging and opening pipeline is designed. Through the combination of automatic switching valve, gas filter and control module, air is used to replace argon for charging and opening, and the secondary chamber is automated.
It effectively solves the waste problem when argon is charged and opened, reduces costs, and reduces noise through gas filters, improving operation safety and convenience.
Smart Images
Figure CN223033508U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a pipeline for charging and opening a secondary chamber of a single crystal furnace. Background Technique
[0002] Solar energy is an ideal clean energy. Developing the photovoltaic industry is of great significance for adjusting the energy structure, promoting the reform of energy production and consumption patterns, and promoting the construction of ecological civilization. In recent years, with the continuous decline of the cost of photovoltaic power generation, the photovoltaic industry has a broader market space. Low-cost and high-quality monocrystalline silicon wafers are the core competitiveness of monocrystalline silicon manufacturing enterprises. To further reduce costs, the industry has taken various cost reduction measures.
[0003] Argon gas is used as production gas in monocrystalline silicon, which plays a role in protection, cooling and removing impurities. However, a very large amount of argon gas is used in the process of monocrystalline silicon production. Argon gas is a relatively scarce resource, and the price of argon gas is more expensive than other industrial gases. Therefore, how to improve the argon gas recovery rate is an important cost reduction link in monocrystalline silicon production. At present, all large argon gas recovery devices are adopted in the monocrystalline silicon industry, and the argon gas recovery rate has reached more than 95%. However, for large-scale monocrystalline silicon enterprises, the 5% argon gas loss every year is also a considerable data. This 5% argon gas loss includes un-recovered secondary chamber gas, argon gas charging and opening loss in the secondary chamber and recovery and treatment process loss. Among them, the argon gas charging and opening loss in the secondary chamber can reach about 2-3%. However, there is currently no special treatment method for this part of the loss.
[0004] Therefore, the utility model proposes a pipeline for charging and opening a secondary chamber of a single crystal furnace to solve the above problems. Content of the Utility Model
[0005] The purpose of the utility model is to provide a pipeline for charging and opening a secondary chamber of a single crystal furnace to solve the problem that for large-scale monocrystalline silicon enterprises, the existing argon gas recovery device will still lose a considerable part of argon gas, and there is currently no special solution for the loss of the argon gas charging and opening part in the secondary chamber as mentioned in the above background technique.
[0006] To achieve the above purpose, the utility model provides the following technical solutions:
[0007] A pipeline for charging and opening a secondary chamber of a single crystal furnace, comprising:
[0008] An automatic switch valve;
[0009] A gas filter, one end of the gas filter is connected to the air, and the other end is connected to the automatic switch valve;
[0010] A control module, the control module is electrically connected to the automatic switch valve;
[0011] Wherein, the automatic switch valve is in a normally closed state.
[0012] Preferably, a manual switch valve is further included, and the manual switch valve is connected to the automatic switch valve.
[0013] Preferably, the manual switch valve is a vacuum switch valve and is in a normally open state.
[0014] Preferably, one end of the manual switch valve is connected with a third interface, and the third interface is used to connect the auxiliary chamber to the pipeline for charging and opening the auxiliary chamber of the single crystal furnace.
[0015] Preferably, the automatic switch valve, the gas filter, the manual switch valve and the third interface are connected by a flange and a straight pipe.
[0016] Preferably, the automatic switch valve is a sealed ball valve.
[0017] Preferably, the control module includes a PLC controller, and the PLC controller includes five command logics for judging the switch action of the automatic switch valve, namely charging and opening when the cartridge is lifted, charging and opening when the ingot is taken out, charging and opening when the shoulder is taken, charging and opening when the crystal is taken, and charging and opening when the seed crystal is replaced.
[0018] Preferably, a pressure sensor is further included, the pressure sensor is electrically connected to the control module, and the pressure sensor is used to monitor the pressure in the auxiliary chamber.
[0019] Compared with the prior art, the beneficial effects of the present utility model are as follows: air is used to replace argon for charging and opening the auxiliary chamber, fundamentally solving the waste problem during argon charging and reducing the cost; the gas filter can not only filter the air, but also avoid strong noise caused by rapid air extraction, reduce the air negative pressure situation, and achieve the effect of noise reduction; the control module controls the automatic switch valve to automatically open when the cartridge is lifted for charging and opening, the ingot is taken out for charging and opening, the shoulder is taken for charging and opening, the crystal is taken for charging and opening, and the seed crystal is replaced for charging and opening, so that air enters the auxiliary chamber through the gas filter and the automatic switch valve, etc. After the pressure in the auxiliary chamber gradually reaches the atmospheric pressure and remains stable, the control module controls the automatic switch valve to automatically close, realizing the automation of charging and opening the auxiliary chamber, effectively avoiding misoperation; the pipeline structure is simple, the operation is convenient, and it is suitable for popularization and use. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0021] Figure 1 It is a connection schematic diagram of an embodiment of the present utility model;
[0022] Figure 2 This is a schematic structural diagram of an embodiment of the present utility model.
[0023] Reference numerals: 1, automatic switch valve; 2, gas filter; 3, control module; 4, manual switch valve; 5, pressure sensor. Detailed implementation manners
[0024] In the following text, only some exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present utility model. Therefore, the drawings and the description are considered to be exemplary in nature rather than restrictive.
[0025] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "upper", "lower", "inner", etc. are based on the orientation or positional relationships shown in the drawings, or the orientation or positional relationships when the product of the present utility model is normally placed, or the orientation or positional relationships commonly understood by those skilled in the art. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0026] In the present utility model, unless otherwise clearly specified and defined, terms such as "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be directly connected, or indirectly connected through an intermediate medium, and can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0027] The following disclosure provides many different implementation manners or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present utility model. In addition, the present utility model may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various implementation manners and / or settings discussed. In addition, the present utility model provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.
[0028] The embodiments of the present utility model will be described in detail below with reference to the drawings.
[0029] Such as Figures 1-2As shown in the figure, an embodiment of the utility model provides a pipeline for charging and opening the secondary chamber of a single crystal furnace, including:
[0030] An automatic switch valve 1;
[0031] A gas filter 2, one end of the gas filter 2 is connected to the air, and the other end is connected to the automatic switch valve 1. The gas filter 2 can not only filter the air, but also avoid strong noise caused by rapid air extraction, reduce the air negative pressure situation, and achieve the effect of noise reduction;
[0032] A control module 3, the control module 3 is electrically connected to the automatic switch valve 1;
[0033] Among them, the automatic switch valve 1 is in a normally closed state.
[0034] Specifically, the control module 3 includes a PLC controller. The PLC controller includes 5 command logics for judging the switch action of the automatic switch valve 1, namely charging and opening when the barrel is lifted, charging and opening when the crystal bar is taken, charging and opening when taking the shoulder, charging and opening when taking the crystal, and charging and opening when replacing the seed crystal. In other charging and opening situations or in case of emergency, the automatic switch operation of the automatic switch valve 1 is not performed; the automatic switch valve 1 is flexibly controlled by the PLC controller, which has high reliability and strong anti-interference ability.
[0035] It should be noted that the above-mentioned other charging and opening situations include charging and opening during furnace shutdown and charging and opening before the secondary chamber maintains pressure. The emergency situations include cooling protection and other situations, and the automatic switch operation of the automatic switch valve 1 is not performed; the air connected to the gas filter 2 can be, but is not limited to, compressed air.
[0036] During use, the PLC controller controls the automatic switch valve 1 to automatically open respectively when charging and opening when the barrel is lifted, charging and opening when the crystal bar is taken, charging and opening when taking the shoulder, charging and opening when taking the crystal, and charging and opening when replacing the seed crystal, so that air enters the secondary chamber through the gas filter 2, the automatic switch valve 1, etc. When the pressure in the secondary chamber gradually reaches the atmospheric pressure and remains stable, the control module 3 controls the automatic switch valve 1 to automatically close, realizing the automation of charging and opening the secondary chamber and effectively avoiding misoperation.
[0037] The pipeline for charging and opening the secondary chamber of the single crystal furnace uses air to replace argon for charging and opening, fundamentally solving the waste problem during argon charging and opening, and reducing the cost; moreover, the pipeline has a simple structure and convenient operation, and is suitable for popularization and use.
[0038] To facilitate the maintenance of the pipeline, a manual switch valve 4 is further included. The manual switch valve 4 is connected to the automatic switch valve 1, and the automatic switch valve 1 and the gas filter 2 can be maintained during the production state.
[0039] Specifically, the manual switch valve 4 is a vacuum switch valve and is in a normally open state to ensure that air can pass through the manual switch valve 4 without leakage under normal circumstances.
[0040] More specifically, one end of the manual switch valve 4 is connected with a third interface, and the third interface is used to connect the auxiliary chamber with the pipeline for opening the auxiliary chamber of the single crystal furnace.
[0041] Furthermore, the automatic switch valve 1, the gas filter 2, the manual switch valve 4 and the third interface are connected by flanges and straight pipes to ensure the sealing performance of the pipeline.
[0042] During use, air sequentially passes through the gas filter 2, the automatic switch valve 1, the manual switch valve 4, the third interface and related pipelines to reach the auxiliary chamber.
[0043] Furthermore, the automatic switch valve 1 is a sealed ball valve to ensure the sealed environment of the pipeline and prevent pressure leakage.
[0044] In order to monitor the pressure in the auxiliary chamber, a pressure sensor 5 is further included, and the pressure sensor 5 is electrically connected to the control module 3; the pressure sensor 5 is arranged on the auxiliary chamber to transmit the pressure magnitude information in the auxiliary chamber to the PLC controller, and the PLC determines whether to control the automatic switch valve 1 to close according to the magnitude of the pressure value.
[0045] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or perform equivalent substitution on some of the technical features. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
Claims
1. A pipeline for filling and opening a sub-chamber of a single crystal furnace, characterized in that: include: Automatic on / off valve (1); A gas filter (2), wherein one end of the gas filter (2) is connected to the air, and the other end of the gas filter (2) is connected to the automatic switch valve (1); A control module (3), the control module (3) being electrically connected to the automatic switch valve (1); Wherein, the automatic switch valve (1) is in a normally closed state.
2. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 1 is characterized in that: It also comprises a manual switch valve (4), wherein the manual switch valve (4) is connected to the automatic switch valve (1).
3. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 2 is characterized in that: The manual switch valve (4) is a vacuum switch valve and is in a normally open state.
4. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 2, characterized in that: One end of the manual switch valve (4) is connected to a third interface, and the third interface is used to connect the auxiliary chamber with the charging and opening pipeline of the auxiliary chamber of the single crystal furnace.
5. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 4, characterized in that: The automatic switch valve (1), the gas filter (2), the manual switch valve (4) and the third interface are connected via a flange and a straight pipe.
6. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 1, characterized in that: The automatic switch valve (1) is a sealed ball valve.
7. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 1, characterized in that: The control module (3) comprises a PLC controller, and the PLC controller comprises five command logics for judging whether the automatic switch valve (1) performs a switch action, namely, barrel extraction charge opening, crystal rod removal charge opening, shoulder removal charge opening, crystal removal charge opening, and seed crystal replacement charge opening.
8. The single crystal furnace auxiliary chamber charging and opening pipeline according to claim 1, characterized in that: It also comprises a pressure sensor (5), the pressure sensor (5) being electrically connected to the control module (3), and the pressure sensor (5) being used to monitor the pressure in the secondary chamber.