Probe adjusting device
By designing a probe adjustment device including a fixing seat, a probe fixing assembly, a first adjustment assembly, a second adjustment assembly and a third adjustment assembly, the problem of inaccurate adjustment of the existing probe holder is solved, and the precise adjustment of the probe to the silicon wafer distance is realized and the calculation of needle pressure is achieved, ensuring the quality of the silicon wafer and improving production efficiency.
Patent Information
- Application Number
- CN202422061659.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-23
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-08-23
Smart Images
Figure CN223038013U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of semiconductor device testing, and more particularly, to a probe adjusting device. Background Art
[0002] A silicon wafer is a basic material in semiconductor manufacturing, mainly used for manufacturing integrated circuits, microelectronic devices, solar cells, etc. After precise cutting, grinding, and polishing, the silicon wafer is transformed into a smooth wafer. Subsequently, through doping and complex technological processes, various electronic components and circuits are formed, which are widely used in fields such as computers, mobile devices, automotive electronics, and renewable energy, and are an essential part of modern electronic technology.
[0003] In the process of semiconductor manufacturing, in order to ensure the quality and performance of silicon wafers, probe testing is a key detection method. During the probe testing process, it is necessary to adjust the distance between the probe and the silicon wafer to ensure the stability of the pressure applied by the probe to the silicon wafer. However, existing probe holders use screw nuts for adjustment in the vertical direction, and this method lacks precise display of the adjusted distance, and thus the needle pressure from the probe to the silicon wafer cannot be calculated. Summary of the Utility Model
[0004] To overcome the technical problems mentioned in the above technical background, an embodiment of this application provides a probe adjusting device, which includes:
[0005] A fixed seat;
[0006] A probe fixing component for fixing the probe;
[0007] A first adjustment component located on one side of the fixed seat for adjusting the moving distance of the probe fixing component in a first direction;
[0008] A second adjustment component provided on the first adjustment component for adjusting the moving distance of the probe fixing component in a second direction;
[0009] A third adjustment component, one end of which is fixed to the probe fixing component and the third adjustment component is also connected to the second adjustment component for adjusting the moving distance of the probe fixing component in a third direction, where the first direction, the second direction, and the third direction intersect.
[0010] In a possible implementation, the first adjustment component includes a first slider and a first elastic member, and the first slider is located on one side of the fixed seat;
[0011] One side of the first slider close to the fixed seat includes a first groove for accommodating the first elastic member. Wherein, one end of the first elastic member is connected to the first slider, the other end is connected to the fixed seat, and the first elastic member expands and contracts along the first direction.
[0012] In a possible implementation manner, the fixed seat further includes a first platen, the first adjustment assembly is disposed close to the first platen, and the first platen is provided with a first through hole;
[0013] The first adjustment assembly further includes a first pushing member, and the first pushing member abuts against the first slider after passing through the first through hole.
[0014] In a possible implementation manner, the inner wall of the first through hole is provided with a thread, and the first pushing member and the first through hole are in threaded cooperation to push the first slider to move along the first direction;
[0015] The first pushing member includes a screw rod.
[0016] In a possible implementation manner, the second adjustment assembly includes a second slider and a second elastic member, and the second slider is disposed on the first slider;
[0017] One side of the second slider close to the first slider includes a second groove for accommodating the second elastic member. Wherein, one end of the second elastic member is connected to the first slider, the other end is connected to the second slider, and the second elastic member expands and contracts along the second direction.
[0018] In a possible implementation manner, the second adjustment assembly further includes a second platen and a second pushing member, and the second platen is disposed at least around part of the side wall of the second slider;
[0019] The second platen includes a second through hole, and the second pushing member abuts against the second slider through the second through hole;
[0020] Wherein, the inner wall of the second through hole is provided with a thread, and the second pushing member and the second through hole are in threaded cooperation to push the second slider to move along the second direction;
[0021] The second pushing member includes a screw rod.
[0022] In a possible implementation manner, the third adjustment assembly includes a third platen, a third slider and a third elastic member;
[0023] In the first direction, the third platen includes an opposite first side and a second side; the second slider is connected to the first side of the third platen, and the second side is connected to the third slider;
[0024] One side of the third slider close to the third platen includes a third groove for accommodating the third elastic member. Wherein, one end of the third elastic member is connected to the third slider, and the other end is connected to the third platen, and the third elastic member expands and contracts along the third direction.
[0025] In a possible implementation manner, the third adjustment assembly further includes a measuring member, and the measuring member includes a driving portion, a measuring portion, a fixing portion and a pushing portion;
[0026] Wherein, the fixing portion is located on a side of the second slider away from the second pushing member, and is used to fix the measuring member on the second slider; the measuring portion is used to measure the moving distance of the probe fixing assembly in the third direction, and the driving portion is used to adjust the moving distance of the third slider in the third direction through the pushing portion.
[0027] In a possible implementation manner, the probe fixing assembly includes a support arm and a probe arm;
[0028] The support arm includes an opposite first end and a second end. The first end of the support arm is connected to a side of the third slider away from the third platen, and the probe arm is disposed close to the second end;
[0029] The probe arm includes a third end and a fourth end. The third end of the probe arm is disposed close to the second end, and the fourth end of the probe arm is used to fix a probe.
[0030] In a possible implementation manner, the measuring member includes a micrometer, and the shape of the probe arm includes an L shape.
[0031] Based on any of the above aspects, an embodiment of the present application provides a probe adjusting device. In this way, through the above structure, the distance between the probe and the target object (such as a silicon wafer) can be adjusted. At the same time, the adjustment distance of the probe in the third direction can be directly read out, and then the needle pressure applied by the probe to the silicon wafer can be calculated to ensure that it acts on the silicon wafer just right, thereby ensuring the quality and performance of the silicon wafer and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be referred to in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.
[0033] Figure 1 Schematic diagram of a probe adjusting device provided in this embodiment;
[0034] Figure 2 The sectional view taken along the A-A cutting line shown for the fixing base and the first adjustment component provided in this embodiment; Figure 1 as shown in the sectional view taken along the A-A cutting line;
[0035] Figure 3 The sectional view taken along the B-B cutting line shown for the first adjustment component and the second adjustment component provided in this embodiment; Figure 1 as shown in the sectional view taken along the B-B cutting line;
[0036] Figure 4 The top view of the second adjustment component provided in this embodiment;
[0037] Figure 5 The sectional view taken along the A-A cutting line shown for the third platen and the third slider provided in this embodiment; Figure 1 as shown in the sectional view taken along the A-A cutting line.
[0038] Icon: 1 - Probe adjusting device, 10 - Fixing base, 20 - Probe fixing component, 30 - First adjustment component, 40 - Second adjustment component, 50 - Third adjustment component, 100 - First platen, 1001 - First through hole, 200 - Support arm, 210 - Probe arm, 300 - First slider, 310 - First elastic member, 320 - First groove, 330 - First pusher, 400 - Second slider, 410 - Second elastic member, 420 - Second groove, 430 - Second platen, 4301 - Second through hole, 440 - Second pusher, 500 - Third slider, 510 - Third platen, 520 - Third elastic member, 530 - Third groove, 540 - Measuring member, 5401 - Driving portion, 5402 - Measuring portion, 5403 - Fixing portion, 5404 - Pushing portion. Detailed implementation manners
[0039] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some but not all of the embodiments of the present application. The components of the embodiments of the present application usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.
[0040] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but merely represents the selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without making creative efforts fall within the scope of protection of the present application.
[0041] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0042] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "upper", "lower", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this application is usually placed during use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application. In addition, terms such as "first", "second", etc. are only used for distinguishing descriptions and cannot be construed as indicating or implying relative importance.
[0043] It should be noted that, without conflict, different features in the embodiments of the present application can be combined with each other.
[0044] In order to solve the technical problems mentioned in the foregoing background art, the inventor has innovatively designed the following technical solutions. The specific implementation solutions of the present application will be described in detail below with reference to the drawings.
[0045] Please refer to Figure 1 , Figure 1 which is a front view of a probe adjustment device 1 provided in this embodiment. The probe adjustment device 1 includes a fixed seat 10, a probe fixing assembly 20, a first adjustment assembly 30, a second adjustment assembly 40, and a third adjustment assembly 50.
[0046] The probe fixing assembly 20 is used to fix the probe. The first adjustment assembly 30 is located on one side of the fixed seat 10 and is used to adjust the moving distance of the probe fixing assembly 20 in the first direction (as shown by the arrow A1 in Figure 1 ). The second adjustment assembly 40 is arranged on the first adjustment assembly 30 and is used to adjust the moving distance of the probe fixing assembly 20 in the second direction (as shown by the arrow A2 in Figure 1 ).
[0047] One end of the third adjustment assembly 50 is fixed to the probe fixing assembly 20, and the third adjustment assembly 50 is also connected to the second adjustment assembly 40 and is used to adjust the moving distance of the probe fixing assembly 20 in the third direction (as shown by the arrow A3 in Figure 1 ).
[0048] Wherein, the first direction A1, the second direction A2, and the third direction A3 intersect.
[0049] It is worth noting that when the first adjustment assembly 30, the second adjustment assembly 40, and the third adjustment assembly 50 move, the fixed seat 10 remains unchanged.
[0050] Further, please refer to Figure 2 , Figure 2 which is a sectional view taken along the A-A cutting line of the fixing base 10 and the first adjustment assembly 30 provided in this embodiment. The first adjustment assembly 30 includes a first slider 300 and a first elastic member 310. The first slider 300 is located on one side of the fixing base 10.
[0051] One side of the first slider 300 close to the fixing base 10 includes a first groove 320 for accommodating the first elastic member 310. One end of the first elastic member 310 is connected to the first slider 300, and the other end is connected to the fixing base 10. The first elastic member 310 expands and contracts along the first direction A1.
[0052] In this embodiment, the first elastic member 310 includes a spring, and the first elastic member 310 connects the first slider 300 and the fixing base 10.
[0053] Further, please refer to Figure 2 again. The fixing base 10 further includes a first base plate 100. The first adjustment assembly 30 is disposed close to the first base plate 100, and the first base plate 100 is provided with a first through hole 1001.
[0054] The first adjustment assembly 30 further includes a first pushing member 330. The first pushing member 330 abuts against the first slider 300 after passing through the first through hole 1001.
[0055] In this embodiment, the first elastic member 310 connects the first slider 300 and the fixing base 10.
[0056] In the initial state, since the first elastic member 310 is in a stretched state, the first elastic member 310 generates an elastic force. This elastic force is directed towards the first base plate 100, causing the first slider 300 to have an elastic force towards the first base plate 100. Therefore, the first slider 300 and the first base plate 100 abut against each other.
[0057] Further, the inner wall of the first through hole 1001 is provided with threads. The first pushing member 330 and the first through hole 1001 are in threaded cooperation to push the first slider 300 to move along the first direction A1.
[0058] In this embodiment, the first pushing member 330 can be a screw rod.
[0059] Since the first slider 300 and the first base plate 100 abut against each other, when the first pushing member 330 rotates clockwise, the first pushing member 320 pushes the first slider 300 to move upward relative to the fixing base 10 along the first direction A1, thereby adjusting the moving distance of the probe fixing assembly 20 in the first direction A1. At this time, the first slider 300 moves away from the first base plate 100.
[0060] It should be noted that the rotation direction of the first driving member 330 is not specifically limited herein and needs to be selected according to the actual situation. Additionally, when the first slider 300 moves relative to the fixed base 10, it will drive the second adjustment assembly 40, the third adjustment assembly 50, and the probe fixing assembly 20 to move synchronously, and their moving direction is the same as that of the first slider 300.
[0061] Further, please refer to Figure 3 , Figure 3 , which is the sectional view taken along the B-B cutting line of the first adjustment assembly 30 and the second adjustment assembly 40 provided in this embodiment. The second adjustment assembly 40 includes a second slider 400 and a second elastic member 410. The second slider 400 is disposed on the first slider 300.
[0062] One side of the second slider 400 close to the first slider 300 includes a second groove 420 for accommodating the second elastic member 410. Wherein, one end of the second elastic member 410 is connected to the first slider 400, and the other end is connected to the second slider 300. The second elastic member 410 expands and contracts along the second direction A2.
[0063] In this embodiment, the second elastic member 410 includes a spring, and the second elastic member 410 connects the first slider 400 and the second slider 300.
[0064] Further, please refer to Figure 3 and Figure 4 , Figure 4 , which is the top view of the second adjustment assembly 40 provided in this embodiment. The second adjustment assembly 40 further includes a second platen 430 and a second driving member 440. The second platen 430 is disposed at least around a part of the side wall of the second slider 400.
[0065] The second platen 430 includes a second through hole 4301, and the second driving member 440 abuts against the second slider 400 through the second through hole 4301.
[0066] Wherein, the inner wall of the second through hole 4302 is provided with threads, and the second driving member 440 and the second through hole 4301 are in threaded cooperation to push the second slider 400 to move along the second direction A2.
[0067] In this embodiment, the second driving member 440 can be a screw. The second elastic member 410 connects the first slider 400 and the second slider 300.
[0068] In the initial state, since the second elastic member 410 is in a stretched state, the second elastic member 410 will generate an elastic force, and this elastic force is directed towards the second platen 430, so that there is an elastic force of the second slider 400 towards the second platen 430. Therefore, the second slider 400 and the second platen 430 abut against each other.
[0069] When the second driving member 440 rotates in the clockwise direction, the second driving member 440 pushes the second slider 400 to move relative to the first slider 300 in the second direction A2, thereby adjusting the moving distance of the probe fixing assembly 20 in the second direction A2. At this time, the second slider 400 moves away from the second platen 430.
[0070] It should be noted that the rotation direction of the second driving member 440 is not specifically limited herein and needs to be selected according to the actual situation. In addition, when the second slider 400 moves relative to the first slider 300, it will drive the third adjustment assembly 50 and the probe fixing assembly 20 to move synchronously, and their moving direction is the same as the moving direction of the second slider 400.
[0071] Further, please refer to Figure 1 and Figure 5 , Figure 5 which is a sectional view taken along the A-A cutting line of the third platen 510 and the third slider 500 provided in this embodiment. The third adjustment assembly 50 includes a third platen 500, a third slider 510, and a third elastic member 520.
[0072] In the first direction A1, the third platen 510 includes an opposite first side and a second side. The second slider 400 is connected to the first side of the third platen 510, and the second side is connected to the third slider 500.
[0073] One side of the third slider 500 close to the third platen 510 includes a third groove 530 for accommodating the third elastic member 520. Wherein, one end of the third elastic member 520 is connected to the third slider 500, and the other end is connected to the third platen 510. The third elastic member 520 expands and contracts along the third direction A3.
[0074] In this embodiment, the third elastic member 520 includes a spring, and the third elastic member 520 connects the third slider 500 and the third platen 510.
[0075] Further, please refer to Figure 1 , the third adjustment assembly 50 further includes a measuring member 540. The measuring member 540 includes a driving portion 5401, a measuring portion 5402, a fixing portion 5403, and a pushing portion 5404.
[0076] Wherein, the fixing portion 5403 is located on the side of the second slider 400 away from the second driving member 440 and is used to fix the measuring member 540 on the second slider 400. The measuring portion 5402 is used to measure the moving distance of the probe fixing assembly 20 in the third direction A3, and the driving portion 5401 is used to adjust the moving distance of the third slider 500 in the third direction A3 through the pushing portion 5404.
[0077] In this embodiment, when the driving part 5401 rotates clockwise, the pushing part 5404 moves downward, and then pushes the third slider 500 to move in the third direction A3. At this time, the measuring part 5402 can read out the moving distance of the third slider 500 in the third direction A3.
[0078] It should be noted that the rotation direction of the driving part 5401 is not specifically limited here, but it needs to be selected according to the actual situation. In addition, when the measuring part 540 pushes the third slider 500 to move, the probe fixing assembly 20 moves synchronously, and its moving direction is the same as that of the third slider 500.
[0079] Further, please refer to Figure 1 again. The probe fixing assembly 20 includes a support arm 200 and a probe arm 210.
[0080] The support arm 200 includes an opposite first end and a second end. The first end of the support arm 200 is connected to the side of the third slider 500 away from the third platen 510, and the probe arm 210 is disposed near the second end.
[0081] The probe arm 210 includes a third end and a fourth end. The third end of the probe arm 210 is disposed near the second end, and the fourth end of the probe arm 210 is used to fix the probe.
[0082] Further, the measuring part 540 includes a micrometer.
[0083] In this embodiment, the adjustment height range of the probe fixing assembly 20 in the third direction A3 is 0 - 25 mm, and the adjustment accuracy is 1 μm. In addition, the moving distance of the probe fixing assembly 20 in the third direction A3 is read by the operator according to the standard reading method of the micrometer, and its moving distance can be used to calculate the needle pressure applied by the probe to the silicon wafer, ensuring that it acts on the silicon wafer just right, thereby guaranteeing the quality and performance of the silicon wafer and improving production efficiency.
[0084] It should be noted that the type of the selected measuring part 540, as well as the adjustment height and adjustment accuracy of the measuring part 540, are not specifically limited here, but need to be selected according to the actual situation.
[0085] Further, the shape of the probe arm 210 includes an L shape, a Z shape, but is not limited thereto.
[0086] In summary, a probe adjusting device provided by the present application is described. The probe adjusting device includes a fixed seat, a probe fixing component, a first adjusting component, a second adjusting component, and a third adjusting component. The probe fixing component is used to fix the probe. The first adjusting component is used to adjust the moving distance of the probe fixing component in the first direction. The second adjusting component is used to adjust the moving distance of the probe fixing component in the second direction. The third adjusting component is used to adjust the moving distance of the probe fixing component in the third direction, where the first direction, the second direction, and the third direction intersect. Thus, with the above structure, the distance between the probe and the target object (such as a silicon wafer) can be adjusted. At the same time, the adjustment distance of the probe in the third direction can be directly read out, and then the needle pressure applied by the probe to the silicon wafer can be calculated to ensure that it acts on the silicon wafer just right, thereby ensuring the quality and performance of the silicon wafer and improving production efficiency.
[0087] The foregoing is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.
Claims
1. A probe adjustment device, characterized in that: The probe adjustment device comprises: Fixed seat; A probe fixing assembly, wherein the probe fixing assembly is used to fix the probe; A first adjustment component, located at one side of the fixing seat, used for adjusting the moving distance of the probe fixing component in a first direction; a second adjustment component, disposed on the first adjustment component, and used for adjusting the moving distance of the probe fixing component in the second direction; A third adjustment component, one end of which is fixed to the probe fixing component, and the third adjustment component is also connected to the second adjustment component, for adjusting the moving distance of the probe fixing component in a third direction, wherein the first direction, the second direction and the third direction intersect.
2. The probe adjustment device according to claim 1, characterized in that: The first adjustment assembly includes a first slider and a first elastic member, and the first slider is located on one side of the fixing seat; The first sliding block comprises a first groove for accommodating the first elastic member on one side close to the fixing seat, wherein one end of the first elastic member is connected to the first sliding block, and the other end is connected to the fixing seat, and the first elastic member is extended and retracted along the first direction.
3. The probe adjustment device according to claim 2, characterized in that: The fixing seat further comprises a first platen, the first adjustment assembly is arranged close to the first platen, and the first platen is provided with a first through hole; The first adjustment assembly further includes a first pushing member, and the first pushing member abuts against the first sliding block after passing through the first through hole.
4. The probe adjustment device according to claim 3, characterized in that: The inner wall of the first through hole is provided with a thread, and the first pushing member and the first through hole cooperate with each other through the thread to push the first sliding block to move along the first direction; The first pushing member includes a screw.
5. The probe adjustment device according to claim 4, characterized in that: The second adjustment assembly includes a second slider and a second elastic member, and the second slider is arranged on the first slider; The second slider comprises a second groove for accommodating the second elastic member on one side close to the first slider, wherein one end of the second elastic member is connected to the first slider and the other end is connected to the second slider, and the second elastic member is extended and retracted along the second direction.
6. The probe adjustment device according to claim 5, characterized in that: The second adjustment assembly further includes a second platform and a second pusher, wherein the second platform is disposed at least around a portion of the side wall of the second sliding block; The second platform includes a second through hole, and the second pusher abuts against the second slider via the second through hole; Wherein, the inner wall of the second through hole is provided with a thread, and the second pushing member and the second through hole cooperate with each other through the thread to push the second sliding block to move along the second direction; The second pushing member includes a screw rod.
7. The probe adjustment device according to claim 6, characterized in that: The third adjustment assembly includes a third platform, a third slider and a third elastic member; In the first direction, the third platform includes a first side and a second side opposite to each other; the second slider is connected to the first side of the third platform, and the second side is connected to the third slider; The side of the third slider close to the third platform includes a third groove for accommodating the third elastic member, wherein one end of the third elastic member is connected to the third slider, and the other end is connected to the third platform, and the third elastic member expands and contracts along the third direction.
8. The probe adjustment device according to claim 7, characterized in that: The third adjustment assembly further includes a measuring member, which includes a driving portion, a measuring portion, a fixing portion and a pushing portion; Among them, the fixing portion is located on a side of the second slider away from the second pushing member, and is used to fix the measuring member on the second slider; the measuring portion is used to measure the moving distance of the probe fixing assembly in the third direction, and the driving portion is used to adjust the moving distance of the third slider in the third direction through the pushing portion.
9. The probe adjustment device according to claim 8, characterized in that: The probe fixing assembly comprises a support arm and a probe arm; The support arm comprises a first end and a second end opposite to each other, the first end of the support arm is connected to a side of the third slider away from the third platform, and the probe arm is arranged close to the second end; The probe arm includes a third end and a fourth end. The third end of the probe arm is arranged close to the second end, and the fourth end of the probe arm is used to fix the probe.
10. The probe adjustment device according to claim 9, characterized in that: The measuring member includes a micrometer, and the shape of the probe arm includes an L-shape.