Dry pump signal connector and CVD film forming equipment signal connector
By designing a dry pump signal connector, the problem of automatic cooling of CVD film forming equipment during dry pump replacement or maintenance is solved, and the effect of improving work efficiency and production capacity is achieved.
Patent Information
- Application Number
- CN202421830222.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-07-30
AI Technical Summary
During semiconductor integrated circuit manufacturing, CVD film forming equipment automatically cools down during dry pump replacement or maintenance, resulting in increased production efficiency and cost.
A dry pump signal connector is designed. By wrapping the lead wires in the connector housing and connecting both ends to the connector head, it is used to connect with the signal connector of the CVD film forming equipment to ensure signal feedback, thereby avoiding the equipment's automatic cooling.
It effectively avoids automatic cooling of CVD film forming equipment during dry pump replacement or maintenance, improves working efficiency and production capacity, and reduces unnecessary machine testing time and cost.
Smart Images
Figure CN223039163U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor integrated circuit manufacturing, in particular to a dry pump signal connector and a signal connector for a CVD film forming device. Background Art
[0002] In the technical field of semiconductor integrated circuit manufacturing, the CVD film forming process is a very important part. Specifically, it is a process of introducing a gaseous reactant or a vapor of a liquid reactant containing the elements constituting the thin film and other gases required for the reaction into the reaction chamber, and generating a thin film by a chemical reaction on the surface of the substrate. This process usually needs to be realized in a high-temperature vacuum environment. Therefore, in this process, the CVD film forming device needs to cooperate with a dry pump to evacuate the air in the chamber through the dry pump. Both the CVD film forming device and the dry pump have a signal connector, and the CVD film forming device and the dry pump are connected through their respective signal connectors. The CVD film forming device continuously sends signals to the dry pump through the signal connector. When the operator leaves the site or there is no operator on site, if the dry pump malfunctions or shuts down and the signal is interrupted, the CVD film forming device automatically cools down to prevent the CVD film forming device operating at a high temperature from malfunctioning, thereby ensuring the safety of the site.
[0003] However, in on-site work, the dry pump often needs to be replaced or maintained. During this period, even if the staff is on site, the CVD film forming device will not be able to receive signals due to the shutdown or maintenance of the dry pump, which will cause the CVD film forming device to automatically cool down. The replacement or maintenance of the dry pump often takes 1 - 2 hours to complete. During this process, the operating temperature of the CVD film forming device will drop from the required high temperature of 400 - 600 degrees Celsius to less than 200 degrees Celsius. It takes a lot of time cost to reconnect the dry pump signal and heat up and test the machine again, reducing production efficiency.
[0004] Therefore, this application proposes a dry pump signal connector. By wrapping the lead wire inside the connector housing and connecting both ends of the lead wire to the head of the connector housing, one end of the lead wire is used to connect to the signal output port of the signal connector of the CVD film forming device, and the other end is connected to the signal input port of the signal connector of the CVD film forming device. The dry pump signal connector is used to connect to the signal connector of the CVD film forming device when on-site technicians replace the dry pump, and feedback the signal output by the CVD film forming device to the CVD film forming device, thereby preventing the CVD film forming device from automatically cooling down during the replacement or maintenance of the dry pump, and then improving work efficiency and production capacity. Summary of the Utility Model
[0005] To achieve the above objectives, the present utility model is realized through the following technical solutions: On the one hand, the present utility model provides a dry pump signal connector, comprising: a connector housing and a lead wire;
[0006] The connector housing includes a contact head. A first connection hole and a second connection hole are provided at the first end of the contact head. Both ends of the lead wire are disposed within the connector housing, and both ends of the lead wire are respectively connected to the first connection hole and the second connection hole; the first end of the contact head has a plurality of contact grooves.
[0007] Preferably, the lead wire is hermetically disposed within the connector housing.
[0008] Preferably, there is a passage inside the connector housing. The lead wire extends along the passage, and the outer wall of the passage wraps around the lead wire.
[0009] Preferably, an opening is provided on the opposite side of the connector housing to the contact head. A part of the lead wire is located outside the connector housing, and both ends of the lead wire pass through the opening and are respectively connected to the first connection hole and the second connection hole.
[0010] Preferably, the dry pump signal connector further includes a fixing member, and the part of the lead wire located outside the connector housing passes through the fixing member.
[0011] Preferably, the connector housing is made of a high-temperature resistant insulating material, and the high-temperature resistant insulating material is polyether ether ketone or silicone rubber.
[0012] Preferably, the outer peripheral surface of the connector housing has a grip.
[0013] Preferably, a circular groove is provided at the first end of the contact head, and the first connection hole, the second connection hole, and the plurality of contact grooves are all provided within the circular groove.
[0014] On the other hand, the present utility model proposes a CVD film forming equipment signal connector for cooperating with the dry pump signal connector. The first end of the CVD film forming equipment signal connector has a first connection contact and a second connection contact. The first connection contact is used to connect with the first connection hole, and the second connection contact is used to connect with the second connection hole; the first end of the CVD film forming equipment signal connector also has a plurality of contacts adapted to the contact grooves.
[0015] Preferably, when a circular groove is provided at the first end of the contact head, a circular protrusion is provided at the first end of the CVD film forming equipment signal connector, and the circular protrusion is adapted to the circular groove; the first connection contact, the second connection contact, and the plurality of contacts are all provided within the circular protrusion.
[0016] In the present utility model, a dry pump signal connector is provided, which includes a connector housing and a lead wire; the dry pump signal connector is used to connect with the signal connector of the CVD film forming equipment. The connector housing wraps the lead wire. One end of the lead wire is connected to the signal output port of the CVD film forming equipment signal connector, and the other end is connected to the signal input port of the CVD film forming equipment signal connector. Through the cooperative setting of the above components, during the replacement of the dry pump, the CVD film forming equipment signal connector is directly connected to the dry pump signal connector, and the CVD film forming equipment no longer receives abnormal signals from the dry pump, preventing automatic cooling due to the replacement of the dry pump, thereby avoiding unnecessary machine testing time and further improving work efficiency and production capacity. Description of the Drawings
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0018] Figures 1 to 2 It is a schematic structural diagram of a dry pump signal connector proposed by the present utility model;
[0019] Among them, the reference numerals are:
[0020] 1 - connector housing; 2 - lead wire; 3 - first connection hole; 4 - second connection hole; 5 - contact groove; 6 - contact; 7 - fixing member. Detailed Embodiments
[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the protection scope of the present utility model.
[0022] As used in the present utility model, the singular forms "a", "an" and "the" include plural referents, the term "or" is generally used in the sense of including "and / or", the term "several" is generally used in the sense of including "at least one", the term "at least two" is generally used in the sense of including "two or more", in addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third" may explicitly or implicitly include one or at least two of such features. The term "proximal end" is usually the end close to the operator, the term "distal end" is usually the end close to the patient, "one end" and "the other end" as well as "proximal end" and "distal end" usually refer to two corresponding parts, which include not only the endpoints. The terms "mounted", "connected", "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and may be the communication inside two elements or the interaction relationship between two elements. In addition, as used in the present utility model, one element being disposed on another element generally only means that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements may be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate element, and cannot be construed as indicating or implying the spatial position relationship between the two elements, that is, one element may be inside, outside, above, below or on one side of the other element, etc. in any orientation, unless otherwise expressly stated in the content. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0023] Please refer to Figure 1As shown in the figure, a schematic structural diagram of a dry pump signal connector provided in the present utility model includes a connector housing 1 and a lead wire 2; the connector housing 1 is generally conical in shape. In other alternative embodiments, the connector housing 1 can be cylindrical, or the connector housing 1 can also be a cube. Since it is impossible to list all cases in this application, the shape of the connector housing 1 is not overly limited herein; the lead wire 2 is used to transmit the signal of the CVD film-forming equipment signal connector; the material of the lead wire 2 is CP wire or CU wire, which are all prior arts and not overly limited herein; the connector housing 1 includes a contact head 6, the contact head 6 is cylindrical in shape, and the contact head 6 is used to connect and fix the CVD film-forming equipment signal connector to prevent the connection between the contact head 6 and the CVD film-forming equipment signal connector from loosening and affecting the normal transmission of its signal; in other alternative embodiments, the contact head 6 can also be a cube or a triangular prism to be applicable to different types of CVD film-forming equipment signal connectors, which is not overly limited herein; a first connection hole 3 and a second connection hole 4 are provided at the first end of the contact head 6, the first connection hole 3 is used to receive the signal of the CVD film-forming equipment signal connector, and the second connection hole 4 is used to transmit the signal of the dry pump signal head to the CVD film-forming equipment signal connector; both ends of the lead wire 2 are disposed inside the connector housing 1, and both ends of the lead wire are respectively connected to the first connection hole 3 and the second connection hole 4, so that the signal of the dry pump signal head can be transmitted to the CVD film-forming equipment signal connector; a plurality of contact point grooves 5 are provided at the first end of the contact head 6, and the contact point grooves 5 are used to connect with the CVD film-forming equipment signal connector; in other alternative embodiments, the number of the contact point grooves 5 can be more to match different types of CVD film-forming equipment signal connectors, which are all prior arts. Since it is impossible to list all cases in this application, the number of the contact point grooves 5 is not overly limited herein.
[0024] Please refer to Figure 1 As shown in the figure, the lead wire 2 is hermetically disposed inside the connector housing 1 to prevent the lead wire 2 from being interfered by a humid environment, resulting in the signal transmission of the lead wire 2 being blocked, thereby affecting the normal operation of the dry pump signal connector; in other alternative embodiments, the lead wire 2 can also be inserted into or taken out of the connector housing 1 to facilitate the replacement of different types of lead wires 2, so that the dry pump signal connector is adapted to the CVD film-forming equipment signal connectors of different signals, which are all prior arts and not overly limited herein.
[0025] Please refer to Figure 1As shown, to ensure normal signal transmission, there is a passage inside the connector housing 1, and the lead 2 extends along the passage inside the connector housing 1; to enable the dry pump signal connector to work properly, the extension distance of the lead 2 is longer than the passage inside the connector housing 1; the outer wall of the lead 2 matches the inner wall of the inner passage, and the outer wall of the passage wraps around the lead 2.
[0026] Please refer to Figure 1 As shown, an opening is provided on the opposite side of the contact head 6 of the connector housing 1, so that the lead 2 can extend into the connector housing 1; to enable the dry pump signal head to receive the signal of the CVD film forming equipment signal connector and transmit it back to the CVD film forming equipment signal connector normally, both ends of the lead 2 pass through the opening and are respectively connected to the first connection hole 3 and the second connection hole 4; a part of the lead 2 is located outside the connector housing 1.
[0027] It should be noted that there can also be two openings provided on the opposite side of the contact head 6 of the connector housing 1. When there are two openings provided on the opposite side of the contact head 6 of the connector housing 1, the leads extend into the two openings respectively, and finally are respectively connected to the first connection hole 3 and the second connection hole 4 through the passages inside the two connector housings 1. The above are all prior arts, and the present application does not make too many limitations here.
[0028] Please refer to Figure 1 As shown, the dry pump signal connector further includes a fixing member. The material of the fixing member is usually made of plastic, specifically polyethylene or polyvinyl chloride; in other alternative embodiments, the fixing member can also be made of metal material, specifically Q235 steel or 45 steel. The above are all prior arts, and the present application does not make too many limitations here; to prevent the dry pump signal connector from falling off, the part of the lead 2 located outside the connector housing 1 passes through the fixing member; in other alternative embodiments, the lead 2 can also be bonded to the fixing member. The above are all prior arts, and the present application does not make too many limitations here.
[0029] Please refer to Figure 1 As shown, to prevent electric leakage during the connection and working process between the dry pump signal connector and the CVD film forming equipment signal connector, which may affect its normal operation, the connector housing 1 is made of a high-temperature resistant insulating material, and the specific high-temperature resistant insulating material is polyether ether ketone or silicone rubber; in other alternative embodiments, the high-temperature resistant insulating material can also be polyimide or polytetrafluoroethylene. Since the present application cannot list them all here, the present application does not make too many limitations on the material of the connector housing 1 here.
[0030] Please refer to Figure 1As shown, the outer periphery of the joint housing 1 has a grip 7. The grip 7 is in a circular ring shape, and there are several protrusions on the surface of the grip, so that the operators in the art can operate and pick up the dry pump signal joint. It should be noted that the grip 7 can be integrally formed with the joint housing 1 or adhesively formed with the joint housing 1 to facilitate the replacement of the damaged grip in the later stage. In other alternative embodiments, the grip 7 can also be in a T shape or a straight rod shape to be applicable to different types of CVD film forming equipment signal joints. The above are all prior arts, and the present application does not make too many limitations here.
[0031] Please refer to Figure 2 As shown, a circular groove is provided at the first end of the contact head 6. The circular groove is used for connecting with the CVD film forming signal joint. The first connection hole 3, the second connection hole 4 and several contact point grooves 5 are provided in the circular groove. The first connection hole 3 and the second connection hole 4 are used for receiving and transmitting signals, and the several contact point grooves 5 are used for connecting with the CVD film forming equipment signal joint. It should be noted that the first connection hole 3, the second connection hole 4 and the several contact point grooves 5 are arranged uniformly in a honeycomb shape.
[0032] It also includes a CVD film forming equipment signal joint, which is used to cooperate with the dry pump signal joint. Through the connection and cooperation of the dry pump signal joint and the CVD film forming equipment signal joint, the CVD film forming equipment signal joint outputs signals to the CVD film forming equipment, thus avoiding the automatic cooling of the CVD film forming equipment during the replacement or maintenance of the dry pump, and further avoiding unnecessary losses. The first end of the CVD film forming equipment signal joint has a first connection contact and a second connection contact, and the first connection contact and the second connection contact are in a circular shape. The first connection contact is used for connecting with the first connection hole 3, so that the signals in the CVD film forming equipment signal joint can be smoothly transmitted to the dry pump signal joint. The second connection contact is used for connecting with the second connection hole 4, so that the signals received by the dry pump signal joint can be smoothly transmitted back to the CVD film forming equipment signal joint after being processed. The first end of the CVD film forming equipment signal joint also has several contacts adapted to the contact point grooves 5, so that the dry pump signal joint is connected with the CVD film forming equipment signal joint.
[0033] Please refer to Figure 2As shown, a circular groove 6 is provided at the first end of the contact head 6, and a circular protrusion is provided at the first end of the CVD film forming equipment signal connector. The circular groove 6 provided at the first end of the contact head 6 is adapted to the circular protrusion at the first end of the CVD film forming equipment signal connector, so that the signal is transmitted normally. The first connection contact, the second connection contact, and the several contacts are all arranged within the circular protrusion, and the first connection contact, the second connection contact, and the several contacts are arranged in a honeycomb shape evenly.
[0034] It should be noted that the first end of the contact head 6 can also be provided as a circular protrusion. When the first end of the contact head 6 is provided as a circular protrusion, the first end of the CVD film forming equipment signal connector is a circular groove. The circular protrusion at the first end of the contact head 6 is adapted to the circular groove at the first end of the CVD film forming equipment signal connector, so that the signal is transmitted normally. The above are all prior arts, and the present application does not make too many limitations here.
[0035] In summary, in the present utility model, by wrapping the lead 2 within the connector housing 1 and making both ends of the lead 2 connected to the head of the connector housing 1, one end of the lead 2 is used to connect to the signal output port of the CVD film forming equipment signal connector, and the other end is connected to the signal input port of the CVD film forming equipment signal connector. The dry pump signal connector is used to connect to the signal connector of the CVD film forming equipment when on-site technicians replace the dry pump, and feedback the signal output by the CVD film forming equipment to the CVD film forming equipment, thereby preventing the CVD film forming equipment from automatically cooling down during the replacement or maintenance of the dry pump, and thus improving the working efficiency and production capacity.
[0036] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.
Claims
1. A dry pump signal connector, characterized in that: include: connector housing and leads; The connector shell includes a contact head, a first end of the contact head is provided with a first connection hole and a second connection hole, both ends of the lead wire are arranged in the connector shell, and both ends of the lead wire are respectively connected to the first connection hole and the second connection hole; the first end of the contact head has a plurality of contact grooves.
2. A dry pump signal connector according to claim 1, characterized in that: The lead seal is built into the connector housing.
3. A dry pump signal connector according to claim 2, characterized in that: The connector housing has a passage inside, the lead wire extends along the passage, and the outer wall of the passage wraps around the lead wire.
4. A dry pump signal connector according to claim 1, characterized in that: An opening is provided on the surface of the joint housing opposite to the contact head, a part of the lead wire is located outside the joint housing, and two ends of the lead wire pass through the opening and are respectively connected to the first connection hole and the second connection hole.
5. A dry pump signal connector according to claim 4, characterized in that: The dry pump signal connector further includes a fixing member, through which a portion of the lead wire located outside the connector housing passes.
6. A dry pump signal connector according to claim 1, characterized in that: The joint shell is made of a high temperature resistant insulating material, and the high temperature resistant insulating material is polyetheretherketone or silicone rubber.
7. A dry pump signal connector according to claim 1, characterized in that: The outer peripheral surface of the joint housing is provided with a grip.
8. A dry pump signal connector according to claim 1, characterized in that: The first end of the contact head is provided with an annular groove, and the first connection hole, the second connection hole and the plurality of contact grooves are all provided in the annular groove.
9. A CVD film forming equipment signal connector, used to cooperate with the dry pump signal connector according to any one of claims 1 to 8, characterized in that: The first end of the CVD film forming equipment signal connector has a first connecting contact and a second connecting contact, the first connecting contact is used to connect to the first connecting hole, and the second connecting contact is used to connect to the second connecting hole; the first end of the CVD film forming equipment signal connector also has a plurality of contacts for adapting to the contact groove.
10. A CVD film forming equipment signal connector according to claim 9, characterized in that: When the first end of the contact head is provided with an annular groove, the first end of the CVD film forming equipment signal connector is provided with an annular protrusion, and the annular protrusion is adapted to the annular groove; the first connecting contact, the second connecting contact and the plurality of contacts are all provided in the annular protrusion.