Fixing device for square target material spraying
By designing a spray fixing device for square targets, using a ring frame structure and a variety of movable parts, the problems of difficulty in disassembly and insufficient applicability of existing devices are solved, and convenient fixation and all-round spraying of targets are achieved.
Patent Information
- Application Number
- CN202420655381.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-01
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-04-01
AI Technical Summary
Existing target spraying devices have difficulties in disassembly and adaptation to spraying equipment of multiple sizes.
A spray fixing device for square targets is designed, adopting a ring frame structure, with rotating tooth rings, pneumatic suction cups, relative movable clamp seats and retractable top seats installed inside, realizing all-round spraying of target materials and a variety of fixed installation methods.
The device can be easily installed and disassembled, suitable for spraying equipment of various sizes, and through the combination of pneumatic suction cups and clamp seats, the target material can be stably fixed and all-round sprayed.
Smart Images
Figure CN223042929U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of square target processing, in particular to a spraying and fixing device for square targets. Background Art
[0002] A target is a sputtering source that forms various functional thin films on a substrate by magnetron sputtering, multi-arc ion plating or other types of coating systems under appropriate process conditions. Simply put, a target is a target material bombarded by high-speed energetic particles. In addition, by replacing different targets (such as aluminum, copper, stainless steel, titanium, nickel targets, etc.), different film systems (such as super-hard, wear-resistant, anti-corrosion alloy films, etc.) can be obtained.
[0003] Most of the existing target spraying devices directly use fixtures to fix the target at a specified position and use fasteners such as bolts to fix the fixture at the spraying position. However, a large number of bolts or fasteners are not easy to disassemble and cannot be applied to spraying equipment of many sizes. Based on this, this application proposes a spraying and fixing device for square targets to solve the above problems. Summary of the Utility Model
[0004] The purpose of the utility model is to overcome the shortcomings of the prior art and provide a spraying and fixing device for square targets.
[0005] The purpose of the utility model is realized by the following technical solutions: A spraying and fixing device for square targets includes a ring frame. A rotating gear ring is rotatably installed inside the ring frame. A mounting plate is installed inside the rotating gear ring. A plurality of mounting holes are formed on the top surface of the mounting plate. Pneumatic suction cups are installed below the interiors of the plurality of mounting holes. Fixed seats are installed on both sides outside the ring frame. Clamping seats capable of relatively reciprocating motion are installed on both sides inside the two fixed seats. The outer ends of the four clamping seats are all installed with top seats capable of reciprocating motion. Anti-slip pads are installed on the outer sides of the four top seats.
[0006] Optionally, mounting frames are installed on the top surfaces of the two fixed seats. Motors are installed on the top surfaces of the two mounting frames. Output shafts of the two motors are both installed with gears, which are all meshed with the teeth on the outside of the rotating gear ring.
[0007] Optionally, first threaded rods are rotatably installed inside the two fixed seats. The two first threaded rods respectively penetrate through the two clamping seats and are in threaded cooperation with each other.
[0008] Optionally, the four fixing seats are all L-shaped, threaded holes are provided on the outside of the bends of the four fixing seats, second threaded rods are threadedly installed inside the four threaded holes, top plates are installed at the outer ends of the four top seats, and rotating seats are installed on the outside of the four top plates. One ends of the outside of the four second threaded rods are respectively rotationally matched with the four rotating seats. Limiting grooves are provided on the outside of the four fixing seats, and the four top seats are respectively slidably installed inside the four limiting grooves.
[0009] Optionally, clamping grooves are provided on the outside of the four top plates, and the four anti-slip pads are respectively clamped with the four clamping grooves.
[0010] The utility model has the following advantages:
[0011] The fixing device for square target spraying uses a ring frame as the main body of the device. A rotating toothed ring is rotatably installed inside the ring frame, a mounting plate is installed inside the rotating toothed ring, and a plurality of pneumatic suction cups are installed below the mounting plate. The target is adsorbed below the pneumatic suction cups. By rotating the rotating toothed ring, the direction of the target can be adjusted, so that the target can be sprayed in all directions at the spraying equipment with a fixed position, and the adsorbed target is convenient for taking and placing.
[0012] Among them, fixing seats are installed on both sides of the outside of the ring frame, and clamping seats that can move relatively back and forth are installed on both sides inside the fixing seats. By adjusting the two groups of clamping seats, the whole device can be fixedly clamped at a specified position. Telescopic top seats are installed on the outside of the four clamping seats. The top seats are integrally L-shaped. The existence of the top seats can adjust the length of the clamping position. Moreover, anti-slip pads are installed on the outside of the top seats. By adjusting the top seats, the whole device can be propped against the inner wall of the closed space by the top seats, so that the whole device has a variety of fixed installation methods, can be applied to a variety of occasions, and is also convenient for installing and disassembling the whole device. Description of the Drawings
[0013] Figure 1 is the overall structural schematic diagram of the utility model;
[0014] Figure 2 is the overall structural schematic diagram of the ring frame in the utility model;
[0015] Figure 3 is the overall structural schematic diagram of the rotating toothed ring in the utility model;
[0016] Figure 4 is the first perspective structural schematic diagram of the top seat in the utility model;
[0017] Figure 5 is the second perspective structural schematic diagram of the top seat in the utility model;
[0018] Figure 6This is a schematic diagram of the overall structure of the clamping seat in the present utility model.
[0019] In the figure: 1 - ring frame, 2 - rotating toothed ring, 3 - pneumatic suction cup, 4 - clamping seat, 5 - top seat, 6 - anti-slip pad, 7 - gear, 8 - first threaded rod, 9 - motor, 10 - second threaded rod, 11 - fixed seat, 12 - mounting bracket, 13 - mounting plate, 14 - mounting hole, 15 - top plate, 16 - rotating seat, 17 - clamping groove, 18 - limiting groove, 19 - threaded hole. Specific embodiments
[0020] The following further describes the present utility model in conjunction with the accompanying drawings, but the protection scope of the present utility model is not limited to the following.
[0021] As Figures 1 to 6 shown, a spraying and fixing device for a square target includes a ring frame 1. A rotating toothed ring 2 is rotatably installed inside the ring frame 1. A mounting plate 13 is installed inside the rotating toothed ring 2. A plurality of mounting holes 14 are formed in the top surface of the mounting plate 13. Pneumatic suction cups 3 are installed below the interiors of the plurality of mounting holes 14. Fixed seats 11 are installed on both sides outside the ring frame 1. Clamping seats 4 capable of reciprocating relative movement are installed on both sides inside the two fixed seats 11. Outer ends of the four clamping seats 4 are all installed with top seats 5 capable of reciprocating movement. Anti-slip pads 6 are installed on the outer sides of the four top seats 5.
[0022] As an alternative technical solution of the present utility model, mounting brackets 12 are installed on the top surfaces of the two fixed seats 11. Motors 9 are installed on the top surfaces of the two mounting brackets 12. Output ends of the two motors 9 are all installed with gears 7, which are all meshed with the teeth outside the rotating toothed ring 2. This facilitates the installation of the motors 9 and enables the rotation of the rotating toothed ring 2 to be driven by the rotation of the gears 7.
[0023] As an alternative technical solution of the present utility model, first threaded rods 8 are rotatably installed inside the two fixed seats 11. The two first threaded rods 8 respectively penetrate through the two clamping seats 4 and are in threaded cooperation with each other, making the size of the clamping seats 4 adapt to the size inside the fixed seats 11, playing a role in limiting, so that the clamping seats 4 can only move reciprocally. Moreover, the thread rotation directions of the holes on one group of clamping seats 4 are opposite to achieve the relative reciprocating movement of one group of clamping seats 4.
[0024] As an alternative technical solution of the present utility model, the four fixing seats 11 are all L-shaped. Threaded holes 19 are opened on the outer sides of the bent portions of the four fixing seats 11. Second threaded rods 10 are threadedly installed inside the four threaded holes 19. The outer ends of the four top seats 5 are all provided with top plates 15. Rotating seats 16 are installed on the outer sides of the four top plates 15. One ends of the outer sides of the four second threaded rods 10 are respectively rotationally matched with the four rotating seats 16. Limiting grooves 18 are opened on the outer sides of the four fixing seats 11. The four top seats 5 are respectively slidably installed inside the four limiting grooves 18, which can closely combine the clamping seats 4 and the top seats 5 and can realize the reciprocating movement of the top seats 5.
[0025] As an alternative technical solution of the present utility model, clamping grooves 17 are opened on the outer sides of the four top plates 15. The four anti-slip pads 6 are respectively clamped with the four clamping grooves 17, which is convenient for installing the anti-slip pads 6. Moreover, the anti-slip pads 6 can be made of rubber or latex materials to increase the friction between them and the top-mounted positions and prevent the whole device from sliding down.
[0026] In summary, the features, assembly methods, usage processes, and functions achieved by the various components in the present utility model are as follows: The ring frame 1 serves as the main body of the device. A rotating toothed ring 2 is rotatably installed inside the ring frame 1. An installation plate 13 is installed inside the rotating toothed ring 2. A plurality of pneumatic suction cups 3 are installed below the installation plate 13 to adsorb the target material below the pneumatic suction cups 3. By rotating the rotating toothed ring 2, the direction of the target material can be adjusted, enabling all-round spraying of the target material at a spraying device with a fixed position. Moreover, the adsorbed target material is convenient for taking and placing. Fixed seats 11 are installed on both sides of the outside of the ring frame 1. Clamping seats 4 that can move reciprocally relative to each other are installed on both sides inside the fixed seats 11. By adjusting the two groups of clamping seats 4, the whole device can be fixedly clamped at a specified position. Telescopic top seats 5 are installed on the outer sides of the four clamping seats 4. The top seats 5 are integrally L-shaped. The presence of the top seats 5 can adjust the length of the clamping position. Moreover, an anti-slip pad 6 is installed on the outer side of the top seat 5. By adjusting the top seat 5, the whole device can be propped against the inner wall of a closed space by the top seat 5, enabling the whole device to have multiple fixed installation methods, being applicable to various occasions, and also facilitating the installation and disassembly of the whole device.
[0027] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirits of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.
Claims
1. A square target material spray fixing device, characterized in that: The invention comprises a ring frame (1), a rotating gear ring (2) is rotatably mounted inside the ring frame (1), a mounting plate (13) is mounted inside the rotating gear ring (2), a plurality of mounting holes (14) are opened on the top surface of the mounting plate (13), a pneumatic suction cup (3) is mounted below the plurality of mounting holes (14), fixed seats (11) are mounted on both sides of the outside of the ring frame (1), clamping seats (4) that can reciprocate relative to each other are mounted on both sides of the inside of the two fixed seats (11), top seats (5) that can reciprocate relative to each other are mounted on the outer ends of the four clamping seats (4), and anti-slip pads (6) are mounted on the outer sides of the four top seats (5).
2. A square target material spraying fixing device according to claim 1, characterized in that: The top surfaces of the two fixing seats (11) are both mounted with mounting frames (12), the top surfaces of the two mounting frames (12) are both mounted with motors (9), and the output ends of the two motors (9) are both mounted with gears (7) which mesh with the teeth on the outside of the rotating gear ring (2).
3. The square target material spraying fixing device according to claim 1, characterized in that: A first threaded rod (8) is rotatably mounted inside the two fixing seats (11), and the two first threaded rods (8) respectively penetrate the two clamping seats (4), and the two are threadably matched.
4. The square target material spraying fixing device according to claim 1, characterized in that: The four fixed seats (11) are all L-shaped, the outsides of the four fixed seats (11) are all provided with threaded holes (19) at the bending parts, the insides of the four threaded holes (19) are all threadedly installed with second threaded rods (10), the outer ends of the four top seats (5) are all provided with top plates (15), the outer sides of the four top plates (15) are all provided with rotating seats (16), one end of the outer sides of the four second threaded rods (10) are respectively rotatably matched with the four rotating seats (16), the outer sides of the four fixed seats (11) are all provided with limiting grooves (18), and the four top seats (5) are respectively slidably installed inside the four limiting grooves (18).
5. The square target material spraying fixing device according to claim 4, characterized in that: The outer sides of the four top plates (15) are each provided with a clamping groove (17), and the four anti-slip pads (6) are respectively clamped with the four clamping grooves (17).